WO2008090794A1 - 液体吐出ヘッド用ノズルプレート及び液体吐出ヘッド用ノズルプレートの製造方法 - Google Patents

液体吐出ヘッド用ノズルプレート及び液体吐出ヘッド用ノズルプレートの製造方法 Download PDF

Info

Publication number
WO2008090794A1
WO2008090794A1 PCT/JP2008/050503 JP2008050503W WO2008090794A1 WO 2008090794 A1 WO2008090794 A1 WO 2008090794A1 JP 2008050503 W JP2008050503 W JP 2008050503W WO 2008090794 A1 WO2008090794 A1 WO 2008090794A1
Authority
WO
WIPO (PCT)
Prior art keywords
nozzle plate
discharge head
liquid discharge
hole
substrate
Prior art date
Application number
PCT/JP2008/050503
Other languages
English (en)
French (fr)
Inventor
Tomoko Miyaura
Isao Doi
Original Assignee
Konica Minolta Holdings, Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Konica Minolta Holdings, Inc. filed Critical Konica Minolta Holdings, Inc.
Publication of WO2008090794A1 publication Critical patent/WO2008090794A1/ja

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/162—Manufacturing of the nozzle plates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14475—Structure thereof only for on-demand ink jet heads characterised by nozzle shapes or number of orifices per chamber

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)

Abstract

　効率よく良好に液滴を吐出することができる液体吐出ヘッド用ノズルプレートを提供する。 貫通孔を有するＳｉ基板を含み、前記貫通孔の前記Ｓｉ基板の一方の面側の開口を液滴吐出口とする液体吐出ヘッド用ノズルプレートにおいて、前記貫通孔は、前記Ｓｉ基板の前記一方の面からエッチングと側壁保護膜の形成とを交互に繰り返す異方性エッチング方法により形成され、側壁に凹部と凸部からなる凹凸形状のスカロップを有し、前記スカロップの前記凹部の底から前記凸部の頂までの高さが、前記一方の面から前記孔の深さ方向に進むに従って低くなっている
PCT/JP2008/050503 2007-01-23 2008-01-17 液体吐出ヘッド用ノズルプレート及び液体吐出ヘッド用ノズルプレートの製造方法 WO2008090794A1 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007012503 2007-01-23
JP2007-012503 2007-01-23

Publications (1)

Publication Number Publication Date
WO2008090794A1 true WO2008090794A1 (ja) 2008-07-31

Family

ID=39644370

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/050503 WO2008090794A1 (ja) 2007-01-23 2008-01-17 液体吐出ヘッド用ノズルプレート及び液体吐出ヘッド用ノズルプレートの製造方法

Country Status (1)

Country Link
WO (1) WO2008090794A1 (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012018956A (ja) * 2010-07-06 2012-01-26 Canon Inc 配線基板の製造方法
EP2879879A4 (en) * 2012-07-31 2017-03-15 Ricoh Company, Ltd. Nozzle plate, method of manufacturing nozzle plate, inkjet head, and inkjet printing apparatus
JP2018051833A (ja) * 2016-09-27 2018-04-05 ローム株式会社 ノズル基板、インクジェットプリントヘッドおよびノズル基板の製造方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006130868A (ja) * 2004-11-09 2006-05-25 Canon Inc インクジェット記録ヘッド及びその製造方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006130868A (ja) * 2004-11-09 2006-05-25 Canon Inc インクジェット記録ヘッド及びその製造方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012018956A (ja) * 2010-07-06 2012-01-26 Canon Inc 配線基板の製造方法
EP2879879A4 (en) * 2012-07-31 2017-03-15 Ricoh Company, Ltd. Nozzle plate, method of manufacturing nozzle plate, inkjet head, and inkjet printing apparatus
JP2018051833A (ja) * 2016-09-27 2018-04-05 ローム株式会社 ノズル基板、インクジェットプリントヘッドおよびノズル基板の製造方法

Similar Documents

Publication Publication Date Title
WO2008155986A1 (ja) 液体吐出ヘッド用ノズルプレートの製造方法、液体吐出ヘッド用ノズルプレート及び液体吐出ヘッド
EP2207050A3 (en) Optical element and method for making the same, master and method for making the same, and display apparatus
TWI265100B (en) Liquid discharge head manufacturing method, and liquid discharge head obtained using this method
WO2011107795A3 (en) Bubbles generation device and method
WO2009102855A3 (en) Plastic detention chamber for stormwater runoff and related system and methods
WO2005120834A3 (en) Fluid dispensing and drop-on-demand dispensing for nano-scale manufacturing
WO2008090794A1 (ja) 液体吐出ヘッド用ノズルプレート及び液体吐出ヘッド用ノズルプレートの製造方法
WO2009017982A3 (en) Methods for device fabrication using pitch reduction and associated structures
WO2011005389A3 (en) Methods of utilizing block copolymer to form patterns
WO2009085564A3 (en) Etch with high etch rate resist mask
EP1598120A3 (en) Devices and methods for forming a film, manufacturing a color filter and manufacturing a display device
WO2008152300A3 (fr) Procede d'obtention d'un substrat texture pour panneau photovoltaïque
EP2202076A3 (en) Liquid discharge head and method of manufacturing the liquid discharge head
WO2010011515A3 (en) Medical devices having inorganic barrier coatings
WO2006044832A3 (en) Device for tissue engineering
WO2009155067A3 (en) Method for forming fine pitch structures
WO2007103249A3 (en) Methods of forming thermoelectric devices using islands of thermoelectric material and related structures
WO2007121120A3 (en) Fluid droplet ejection devices and methods
WO2007083237A8 (en) Integration of self-aligned trenches in-between metal lines
WO2010110987A3 (en) Methods of forming patterns on substrates
WO2009066184A3 (en) High frequency piezocomposite and methods for manufacturing same
WO2009126352A3 (en) Novel micropores and methods of making and using thereof
WO2010115653A3 (en) Superalloy component and method of improving the same
TW200606025A (en) Method for fabricating a fluid ejection device
WO2008137738A3 (en) Method of forming group iv semiconductor junctions using laser processing

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 08703358

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 08703358

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: JP