KR101690893B1 - 노즐 플레이트, 노즐 플레이트의 제조 방법, 잉크젯 헤드, 및 잉크젯 인쇄 장치 - Google Patents

노즐 플레이트, 노즐 플레이트의 제조 방법, 잉크젯 헤드, 및 잉크젯 인쇄 장치 Download PDF

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Publication number
KR101690893B1
KR101690893B1 KR1020157002266A KR20157002266A KR101690893B1 KR 101690893 B1 KR101690893 B1 KR 101690893B1 KR 1020157002266 A KR1020157002266 A KR 1020157002266A KR 20157002266 A KR20157002266 A KR 20157002266A KR 101690893 B1 KR101690893 B1 KR 101690893B1
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South Korea
Prior art keywords
nozzle
nozzle plate
discharge port
substrate
ink
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Expired - Fee Related
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KR1020157002266A
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English (en)
Korean (ko)
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KR20150033704A (ko
Inventor
나오유키 우에다
유키 나카무라
유키코 아베
신지 마츠모토
유지 소네
미키코 다카다
료이치 사오토메
Original Assignee
가부시키가이샤 리코
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Publication of KR101690893B1 publication Critical patent/KR101690893B1/ko
Expired - Fee Related legal-status Critical Current
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/162—Manufacturing of the nozzle plates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/1433—Structure of nozzle plates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23P—METAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
    • B23P15/00—Making specific metal objects by operations not covered by a single other subclass or a group in this subclass
    • B23P15/16—Making specific metal objects by operations not covered by a single other subclass or a group in this subclass plates with holes of very small diameter, e.g. for spinning or burner nozzles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B41J2/1634—Manufacturing processes machining laser machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/11—Embodiments of or processes related to ink-jet heads characterised by specific geometrical characteristics
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49401—Fluid pattern dispersing device making, e.g., ink jet

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Engineering (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Coating Apparatus (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
  • Nozzles (AREA)
KR1020157002266A 2012-07-31 2013-07-19 노즐 플레이트, 노즐 플레이트의 제조 방법, 잉크젯 헤드, 및 잉크젯 인쇄 장치 Expired - Fee Related KR101690893B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JPJP-P-2012-170502 2012-07-31
JP2012170502A JP6048794B2 (ja) 2012-07-31 2012-07-31 ノズルプレート、ノズルプレートの製造方法、インクジェットヘッド及びインクジェット印刷装置
PCT/JP2013/070255 WO2014021200A1 (en) 2012-07-31 2013-07-19 Nozzle plate, method of manufacturing nozzle plate, inkjet head, and inkjet printing apparatus

Publications (2)

Publication Number Publication Date
KR20150033704A KR20150033704A (ko) 2015-04-01
KR101690893B1 true KR101690893B1 (ko) 2016-12-28

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020157002266A Expired - Fee Related KR101690893B1 (ko) 2012-07-31 2013-07-19 노즐 플레이트, 노즐 플레이트의 제조 방법, 잉크젯 헤드, 및 잉크젯 인쇄 장치

Country Status (8)

Country Link
US (1) US9481173B2 (enExample)
EP (1) EP2879879B1 (enExample)
JP (1) JP6048794B2 (enExample)
KR (1) KR101690893B1 (enExample)
CN (1) CN104507686B (enExample)
IN (1) IN2014KN02996A (enExample)
TW (1) TWI592312B (enExample)
WO (1) WO2014021200A1 (enExample)

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KR20170021770A (ko) * 2014-06-25 2017-02-28 인텔 코포레이션 집적 수동 소자들을 형성하기 위한 기법들
EP3000602B1 (en) * 2014-09-26 2020-07-22 Agfa Nv High viscosity jetting method
JP6575102B2 (ja) 2015-03-27 2019-09-18 株式会社リコー 液滴吐出装置
CH711295B1 (fr) * 2015-07-06 2019-11-29 Cartier Int Ag Procédé de fixation par assemblage anodique.
US10115828B2 (en) 2015-07-30 2018-10-30 Ricoh Company, Ltd. Field-effect transistor, display element, image display device, and system
US10600916B2 (en) 2015-12-08 2020-03-24 Ricoh Company, Ltd. Field-effect transistor, display element, image display device, and system
JP6607013B2 (ja) 2015-12-08 2019-11-20 株式会社リコー 電界効果型トランジスタ、表示素子、画像表示装置、及びシステム
JP6701835B2 (ja) 2016-03-11 2020-05-27 株式会社リコー 電界効果型トランジスタ、表示素子、画像表示装置、及びシステム
CN105750848B (zh) * 2016-05-18 2017-10-17 昆山精诚得精密五金模具有限公司 相贯面带微细孔的金属喷嘴套的加工方法
US12399150B2 (en) 2019-05-02 2025-08-26 The Board Of Trustees Of The University Of Illinois Atomic-to-nanoscale matter emission / flow regulation device
KR102474000B1 (ko) * 2022-03-07 2022-12-05 주식회사피에스디이 나노 임프린팅을 위한 디스펜서 및 그 제조 방법
JP2023167238A (ja) * 2022-05-11 2023-11-24 日本発條株式会社 マルチノズルと、マルチノズルを用いた流動体の塗布方法
KR20240017222A (ko) * 2022-07-28 2024-02-07 삼성디스플레이 주식회사 잉크젯 헤드 및 이를 포함하는 잉크젯 프린팅 장치
KR20250043629A (ko) * 2023-09-21 2025-03-31 삼성디스플레이 주식회사 표시 장치의 제조 장치

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JP2007335460A (ja) * 2006-06-12 2007-12-27 Canon Inc デバイスパターン形成方法、デバイスパターン、およびデバイスパターン形成装置

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JP2007335460A (ja) * 2006-06-12 2007-12-27 Canon Inc デバイスパターン形成方法、デバイスパターン、およびデバイスパターン形成装置

Also Published As

Publication number Publication date
WO2014021200A1 (en) 2014-02-06
EP2879879A4 (en) 2017-03-15
CN104507686B (zh) 2017-03-15
KR20150033704A (ko) 2015-04-01
TWI592312B (zh) 2017-07-21
EP2879879A1 (en) 2015-06-10
US9481173B2 (en) 2016-11-01
TW201408498A (zh) 2014-03-01
EP2879879B1 (en) 2024-01-17
JP6048794B2 (ja) 2016-12-21
IN2014KN02996A (enExample) 2015-05-08
US20150158300A1 (en) 2015-06-11
JP2014028351A (ja) 2014-02-13
CN104507686A (zh) 2015-04-08

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