CN104471672B - 气体混合设备 - Google Patents

气体混合设备 Download PDF

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Publication number
CN104471672B
CN104471672B CN201380036866.1A CN201380036866A CN104471672B CN 104471672 B CN104471672 B CN 104471672B CN 201380036866 A CN201380036866 A CN 201380036866A CN 104471672 B CN104471672 B CN 104471672B
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China
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vessel
gas
container
coupled
inlet
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Chinese (zh)
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CN104471672A (zh
Inventor
卡尔蒂克·萨哈
卡利安吉特·戈什
斯科特·麦克莱兰
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Applied Materials Inc
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Applied Materials Inc
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
    • B01F23/10—Mixing gases with gases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
    • B01F23/10—Mixing gases with gases
    • B01F23/19—Mixing systems, i.e. flow charts or diagrams; Arrangements, e.g. comprising controlling means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F25/00—Flow mixers; Mixers for falling materials, e.g. solid particles
    • B01F25/10—Mixing by creating a vortex flow, e.g. by tangential introduction of flow components
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F25/00—Flow mixers; Mixers for falling materials, e.g. solid particles
    • B01F25/10—Mixing by creating a vortex flow, e.g. by tangential introduction of flow components
    • B01F25/103—Mixing by creating a vortex flow, e.g. by tangential introduction of flow components with additional mixing means other than vortex mixers, e.g. the vortex chamber being positioned in another mixing chamber
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F25/00—Flow mixers; Mixers for falling materials, e.g. solid particles
    • B01F25/40—Static mixers
    • B01F25/42—Static mixers in which the mixing is affected by moving the components jointly in changing directions, e.g. in tubes provided with baffles or obstructions
    • B01F25/43—Mixing tubes, e.g. wherein the material is moved in a radial or partly reversed direction
    • B01F25/431—Straight mixing tubes with baffles or obstructions that do not cause substantial pressure drop; Baffles therefor
    • B01F25/4315—Straight mixing tubes with baffles or obstructions that do not cause substantial pressure drop; Baffles therefor the baffles being deformed flat pieces of material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F25/00—Flow mixers; Mixers for falling materials, e.g. solid particles
    • B01F25/40—Static mixers
    • B01F25/42—Static mixers in which the mixing is affected by moving the components jointly in changing directions, e.g. in tubes provided with baffles or obstructions
    • B01F25/43—Mixing tubes, e.g. wherein the material is moved in a radial or partly reversed direction
    • B01F25/431—Straight mixing tubes with baffles or obstructions that do not cause substantial pressure drop; Baffles therefor
    • B01F25/4316—Straight mixing tubes with baffles or obstructions that do not cause substantial pressure drop; Baffles therefor the baffles being flat pieces of material, e.g. intermeshing, fixed to the wall or fixed on a central rod
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F25/00—Flow mixers; Mixers for falling materials, e.g. solid particles
    • B01F25/40—Static mixers
    • B01F25/42—Static mixers in which the mixing is affected by moving the components jointly in changing directions, e.g. in tubes provided with baffles or obstructions
    • B01F25/43—Mixing tubes, e.g. wherein the material is moved in a radial or partly reversed direction
    • B01F25/431—Straight mixing tubes with baffles or obstructions that do not cause substantial pressure drop; Baffles therefor
    • B01F25/43197—Straight mixing tubes with baffles or obstructions that do not cause substantial pressure drop; Baffles therefor characterised by the mounting of the baffles or obstructions
    • B01F25/431971—Mounted on the wall
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/3244—Gas supply means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/3244—Gas supply means
    • H01J37/32449—Gas control, e.g. control of the gas flow

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Dispersion Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
CN201380036866.1A 2012-07-12 2013-07-01 气体混合设备 Active CN104471672B (zh)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201261670654P 2012-07-12 2012-07-12
US61/670,654 2012-07-12
US13/918,033 2013-06-14
US13/918,033 US10232324B2 (en) 2012-07-12 2013-06-14 Gas mixing apparatus
PCT/US2013/048855 WO2014011423A1 (en) 2012-07-12 2013-07-01 Gas mixing apparatus

Publications (2)

Publication Number Publication Date
CN104471672A CN104471672A (zh) 2015-03-25
CN104471672B true CN104471672B (zh) 2020-01-17

Family

ID=49912928

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201380036866.1A Active CN104471672B (zh) 2012-07-12 2013-07-01 气体混合设备

Country Status (6)

Country Link
US (1) US10232324B2 (enExample)
JP (1) JP6227642B2 (enExample)
KR (1) KR102125764B1 (enExample)
CN (1) CN104471672B (enExample)
TW (1) TWI611458B (enExample)
WO (1) WO2014011423A1 (enExample)

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DE102014106523A1 (de) * 2014-05-09 2015-11-12 Aixtron Se Vorrichtung und Verfahren zum Versorgen einer CVD- oder PVD-Beschichtungseinrichtung mit einem Prozessgasgemisch
KR20160147482A (ko) * 2015-06-15 2016-12-23 삼성전자주식회사 가스 혼합부를 갖는 반도체 소자 제조 설비
CN108138321B (zh) * 2015-10-06 2020-03-20 株式会社爱发科 混合器、真空处理装置
CN105546348A (zh) * 2015-12-09 2016-05-04 无锡拓能自动化科技有限公司 应用于气体灌装站的高效混合气体灌装管道
CN105546349A (zh) * 2015-12-09 2016-05-04 无锡拓能自动化科技有限公司 应用于气体灌装站的气体灌装管道
US10256075B2 (en) * 2016-01-22 2019-04-09 Applied Materials, Inc. Gas splitting by time average injection into different zones by fast gas valves
JP6419745B2 (ja) * 2016-03-15 2018-11-07 株式会社東芝 ミキサ構造、流体通路装置、および処理装置
US11164737B2 (en) * 2017-08-30 2021-11-02 Applied Materials, Inc. Integrated epitaxy and preclean system
CN107413218B (zh) * 2017-09-11 2020-11-24 张家口新金石科技发展有限公司 二氧化碳和氧气气体混合装置及混合气体助燃污染气体零排放系统
HUE060591T2 (hu) * 2018-09-20 2023-03-28 Noram Eng And Constructors Ltd Fluid keverõ készülék
CN109609929A (zh) * 2018-11-20 2019-04-12 沈阳拓荆科技有限公司 混气结构及反应设备
CN118841306A (zh) * 2018-12-20 2024-10-25 应用材料公司 用于供应改良的气流至处理腔室的处理空间的方法和设备
TWI738301B (zh) * 2019-04-24 2021-09-01 美商應用材料股份有限公司 具有旋轉葉片與氣體注入之用於在固定腔室中塗覆粒子的反應器
CN110237734A (zh) * 2019-06-10 2019-09-17 中国石油大学(北京) 气体混合器及废气处理装置
CN112928008B (zh) * 2019-12-06 2023-03-24 中微半导体设备(上海)股份有限公司 气体供应系统及其气体输送方法、等离子体处理装置
KR102781656B1 (ko) * 2020-04-06 2025-03-13 램 리써치 코포레이션 가스 주입기들을 위한 세라믹 애디티브 제작 (additive manufacturing) 기법들
CN113430502B (zh) * 2021-06-18 2022-07-22 北京北方华创微电子装备有限公司 半导体工艺设备及其混合进气装置
KR20230016923A (ko) * 2021-07-27 2023-02-03 삼성전자주식회사 증착 장치
TW202440463A (zh) * 2023-01-20 2024-10-16 丹麥商托普索公司 藍氨的製造方法
US12491681B2 (en) * 2023-05-19 2025-12-09 Ut-Battelle, Llc Static mixing nozzles for long fiber and resin mixing and dispersing in polymer additive manufacturing

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Also Published As

Publication number Publication date
KR102125764B1 (ko) 2020-06-23
TW201407660A (zh) 2014-02-16
WO2014011423A1 (en) 2014-01-16
US20140014270A1 (en) 2014-01-16
JP6227642B2 (ja) 2017-11-08
JP2015528060A (ja) 2015-09-24
TWI611458B (zh) 2018-01-11
KR20150036567A (ko) 2015-04-07
US10232324B2 (en) 2019-03-19
CN104471672A (zh) 2015-03-25

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