KR102125764B1 - 가스 혼합 장치 - Google Patents

가스 혼합 장치 Download PDF

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Publication number
KR102125764B1
KR102125764B1 KR1020157003744A KR20157003744A KR102125764B1 KR 102125764 B1 KR102125764 B1 KR 102125764B1 KR 1020157003744 A KR1020157003744 A KR 1020157003744A KR 20157003744 A KR20157003744 A KR 20157003744A KR 102125764 B1 KR102125764 B1 KR 102125764B1
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South Korea
Prior art keywords
container
gas
mixing device
gas mixing
coupled
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KR1020157003744A
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Korean (ko)
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KR20150036567A (ko
Inventor
카틱 샤
칼얀지트 고쉬
스코트 맥클레랜드
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어플라이드 머티어리얼스, 인코포레이티드
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    • B01F3/026—
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/3244—Gas supply means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
    • B01F23/10—Mixing gases with gases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
    • B01F23/10—Mixing gases with gases
    • B01F23/19—Mixing systems, i.e. flow charts or diagrams; Arrangements, e.g. comprising controlling means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F25/00—Flow mixers; Mixers for falling materials, e.g. solid particles
    • B01F25/10—Mixing by creating a vortex flow, e.g. by tangential introduction of flow components
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F25/00—Flow mixers; Mixers for falling materials, e.g. solid particles
    • B01F25/10—Mixing by creating a vortex flow, e.g. by tangential introduction of flow components
    • B01F25/103—Mixing by creating a vortex flow, e.g. by tangential introduction of flow components with additional mixing means other than vortex mixers, e.g. the vortex chamber being positioned in another mixing chamber
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F25/00—Flow mixers; Mixers for falling materials, e.g. solid particles
    • B01F25/40—Static mixers
    • B01F25/42—Static mixers in which the mixing is affected by moving the components jointly in changing directions, e.g. in tubes provided with baffles or obstructions
    • B01F25/43—Mixing tubes, e.g. wherein the material is moved in a radial or partly reversed direction
    • B01F25/431—Straight mixing tubes with baffles or obstructions that do not cause substantial pressure drop; Baffles therefor
    • B01F25/4315—Straight mixing tubes with baffles or obstructions that do not cause substantial pressure drop; Baffles therefor the baffles being deformed flat pieces of material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F25/00—Flow mixers; Mixers for falling materials, e.g. solid particles
    • B01F25/40—Static mixers
    • B01F25/42—Static mixers in which the mixing is affected by moving the components jointly in changing directions, e.g. in tubes provided with baffles or obstructions
    • B01F25/43—Mixing tubes, e.g. wherein the material is moved in a radial or partly reversed direction
    • B01F25/431—Straight mixing tubes with baffles or obstructions that do not cause substantial pressure drop; Baffles therefor
    • B01F25/4316—Straight mixing tubes with baffles or obstructions that do not cause substantial pressure drop; Baffles therefor the baffles being flat pieces of material, e.g. intermeshing, fixed to the wall or fixed on a central rod
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F25/00—Flow mixers; Mixers for falling materials, e.g. solid particles
    • B01F25/40—Static mixers
    • B01F25/42—Static mixers in which the mixing is affected by moving the components jointly in changing directions, e.g. in tubes provided with baffles or obstructions
    • B01F25/43—Mixing tubes, e.g. wherein the material is moved in a radial or partly reversed direction
    • B01F25/431—Straight mixing tubes with baffles or obstructions that do not cause substantial pressure drop; Baffles therefor
    • B01F25/43197—Straight mixing tubes with baffles or obstructions that do not cause substantial pressure drop; Baffles therefor characterised by the mounting of the baffles or obstructions
    • B01F25/431971—Mounted on the wall
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/3244—Gas supply means
    • H01J37/32449—Gas control, e.g. control of the gas flow

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Dispersion Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
KR1020157003744A 2012-07-12 2013-07-01 가스 혼합 장치 Active KR102125764B1 (ko)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201261670654P 2012-07-12 2012-07-12
US61/670,654 2012-07-12
US13/918,033 US10232324B2 (en) 2012-07-12 2013-06-14 Gas mixing apparatus
US13/918,033 2013-06-14
PCT/US2013/048855 WO2014011423A1 (en) 2012-07-12 2013-07-01 Gas mixing apparatus

Publications (2)

Publication Number Publication Date
KR20150036567A KR20150036567A (ko) 2015-04-07
KR102125764B1 true KR102125764B1 (ko) 2020-06-23

Family

ID=49912928

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020157003744A Active KR102125764B1 (ko) 2012-07-12 2013-07-01 가스 혼합 장치

Country Status (6)

Country Link
US (1) US10232324B2 (enExample)
JP (1) JP6227642B2 (enExample)
KR (1) KR102125764B1 (enExample)
CN (1) CN104471672B (enExample)
TW (1) TWI611458B (enExample)
WO (1) WO2014011423A1 (enExample)

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DE102014106523A1 (de) * 2014-05-09 2015-11-12 Aixtron Se Vorrichtung und Verfahren zum Versorgen einer CVD- oder PVD-Beschichtungseinrichtung mit einem Prozessgasgemisch
KR20160147482A (ko) * 2015-06-15 2016-12-23 삼성전자주식회사 가스 혼합부를 갖는 반도체 소자 제조 설비
CN108138321B (zh) * 2015-10-06 2020-03-20 株式会社爱发科 混合器、真空处理装置
CN105546349A (zh) * 2015-12-09 2016-05-04 无锡拓能自动化科技有限公司 应用于气体灌装站的气体灌装管道
CN105546348A (zh) * 2015-12-09 2016-05-04 无锡拓能自动化科技有限公司 应用于气体灌装站的高效混合气体灌装管道
US10256075B2 (en) * 2016-01-22 2019-04-09 Applied Materials, Inc. Gas splitting by time average injection into different zones by fast gas valves
JP6419745B2 (ja) * 2016-03-15 2018-11-07 株式会社東芝 ミキサ構造、流体通路装置、および処理装置
US11164737B2 (en) * 2017-08-30 2021-11-02 Applied Materials, Inc. Integrated epitaxy and preclean system
CN107413218B (zh) * 2017-09-11 2020-11-24 张家口新金石科技发展有限公司 二氧化碳和氧气气体混合装置及混合气体助燃污染气体零排放系统
KR102608001B1 (ko) * 2018-09-20 2023-12-01 노람 엔지니어링 앤드 콘스트럭터스 엘티디. 유체 혼합 장치
CN109609929A (zh) * 2018-11-20 2019-04-12 沈阳拓荆科技有限公司 混气结构及反应设备
JP2022515081A (ja) * 2018-12-20 2022-02-17 アプライド マテリアルズ インコーポレイテッド 処理チャンバの処理空間に改善されたガス流を供給するための方法および装置
TWI738301B (zh) 2019-04-24 2021-09-01 美商應用材料股份有限公司 具有旋轉葉片與氣體注入之用於在固定腔室中塗覆粒子的反應器
CN110237734A (zh) * 2019-06-10 2019-09-17 中国石油大学(北京) 气体混合器及废气处理装置
CN112928008B (zh) * 2019-12-06 2023-03-24 中微半导体设备(上海)股份有限公司 气体供应系统及其气体输送方法、等离子体处理装置
WO2021206950A1 (en) * 2020-04-06 2021-10-14 Lam Research Corporation Ceramic additive manufacturing techniques for gas injectors
CN113430502B (zh) * 2021-06-18 2022-07-22 北京北方华创微电子装备有限公司 半导体工艺设备及其混合进气装置
KR20230016923A (ko) * 2021-07-27 2023-02-03 삼성전자주식회사 증착 장치
KR20250137133A (ko) * 2023-01-20 2025-09-17 토프쉐 에이/에스 블루 암모니아의 생산 방법
US20240383196A1 (en) * 2023-05-19 2024-11-21 Ut-Battelle, Llc Highly aligned fiber nozzle for additive manufacturing applications

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JP2009521783A (ja) * 2005-12-23 2009-06-04 エム ケー エス インストルメンツ インコーポレーテッド 気体を下流にて解離する方法及び装置

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JP2009521783A (ja) * 2005-12-23 2009-06-04 エム ケー エス インストルメンツ インコーポレーテッド 気体を下流にて解離する方法及び装置
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Also Published As

Publication number Publication date
WO2014011423A1 (en) 2014-01-16
US20140014270A1 (en) 2014-01-16
JP6227642B2 (ja) 2017-11-08
TW201407660A (zh) 2014-02-16
US10232324B2 (en) 2019-03-19
CN104471672A (zh) 2015-03-25
KR20150036567A (ko) 2015-04-07
CN104471672B (zh) 2020-01-17
JP2015528060A (ja) 2015-09-24
TWI611458B (zh) 2018-01-11

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