JP2015528060A - ガス混合装置 - Google Patents
ガス混合装置 Download PDFInfo
- Publication number
- JP2015528060A JP2015528060A JP2015521651A JP2015521651A JP2015528060A JP 2015528060 A JP2015528060 A JP 2015528060A JP 2015521651 A JP2015521651 A JP 2015521651A JP 2015521651 A JP2015521651 A JP 2015521651A JP 2015528060 A JP2015528060 A JP 2015528060A
- Authority
- JP
- Japan
- Prior art keywords
- container
- gas
- mixing device
- coupled
- gas mixing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007789 gas Substances 0.000 claims abstract description 171
- 238000000034 method Methods 0.000 claims abstract description 77
- 239000000758 substrate Substances 0.000 claims description 16
- 239000000203 mixture Substances 0.000 claims description 14
- 238000002347 injection Methods 0.000 claims description 7
- 239000007924 injection Substances 0.000 claims description 7
- 239000006185 dispersion Substances 0.000 claims 1
- 150000002500 ions Chemical class 0.000 description 8
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 6
- 230000004907 flux Effects 0.000 description 5
- 230000015654 memory Effects 0.000 description 5
- 238000007654 immersion Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 235000011194 food seasoning agent Nutrition 0.000 description 2
- 238000002513 implantation Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000001186 cumulative effect Effects 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
- B01F23/10—Mixing gases with gases
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
- B01F23/10—Mixing gases with gases
- B01F23/19—Mixing systems, i.e. flow charts or diagrams; Arrangements, e.g. comprising controlling means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F25/00—Flow mixers; Mixers for falling materials, e.g. solid particles
- B01F25/10—Mixing by creating a vortex flow, e.g. by tangential introduction of flow components
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F25/00—Flow mixers; Mixers for falling materials, e.g. solid particles
- B01F25/10—Mixing by creating a vortex flow, e.g. by tangential introduction of flow components
- B01F25/103—Mixing by creating a vortex flow, e.g. by tangential introduction of flow components with additional mixing means other than vortex mixers, e.g. the vortex chamber being positioned in another mixing chamber
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F25/00—Flow mixers; Mixers for falling materials, e.g. solid particles
- B01F25/40—Static mixers
- B01F25/42—Static mixers in which the mixing is affected by moving the components jointly in changing directions, e.g. in tubes provided with baffles or obstructions
- B01F25/43—Mixing tubes, e.g. wherein the material is moved in a radial or partly reversed direction
- B01F25/431—Straight mixing tubes with baffles or obstructions that do not cause substantial pressure drop; Baffles therefor
- B01F25/4315—Straight mixing tubes with baffles or obstructions that do not cause substantial pressure drop; Baffles therefor the baffles being deformed flat pieces of material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F25/00—Flow mixers; Mixers for falling materials, e.g. solid particles
- B01F25/40—Static mixers
- B01F25/42—Static mixers in which the mixing is affected by moving the components jointly in changing directions, e.g. in tubes provided with baffles or obstructions
- B01F25/43—Mixing tubes, e.g. wherein the material is moved in a radial or partly reversed direction
- B01F25/431—Straight mixing tubes with baffles or obstructions that do not cause substantial pressure drop; Baffles therefor
- B01F25/4316—Straight mixing tubes with baffles or obstructions that do not cause substantial pressure drop; Baffles therefor the baffles being flat pieces of material, e.g. intermeshing, fixed to the wall or fixed on a central rod
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F25/00—Flow mixers; Mixers for falling materials, e.g. solid particles
- B01F25/40—Static mixers
- B01F25/42—Static mixers in which the mixing is affected by moving the components jointly in changing directions, e.g. in tubes provided with baffles or obstructions
- B01F25/43—Mixing tubes, e.g. wherein the material is moved in a radial or partly reversed direction
- B01F25/431—Straight mixing tubes with baffles or obstructions that do not cause substantial pressure drop; Baffles therefor
- B01F25/43197—Straight mixing tubes with baffles or obstructions that do not cause substantial pressure drop; Baffles therefor characterised by the mounting of the baffles or obstructions
- B01F25/431971—Mounted on the wall
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/3244—Gas supply means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/3244—Gas supply means
- H01J37/32449—Gas control, e.g. control of the gas flow
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Dispersion Chemistry (AREA)
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
Description
Claims (14)
- ガス混合装置であって:
内部容積を画定する容器であって、閉じられた上部および底部と、上部および底部を貫く容器の中心軸に対して円形の断面を有する側壁とを有する容器と;
前記容器の内部容積に複数のプロセスガスを供給するため、前記容器の上部近傍で前記容器に結合される複数の第1の注入口であって、前記複数の第1の注入口を通る複数のプロセスガスの流路が前記容器の側壁に対して実質的に接線方向になるように配置される複数の第1の注入口と;
前記複数のプロセスガスが前記容器の内部容積から取り除かれることを可能にするため、前記容器の底部近傍で前記容器に結合される排出口と
を含むガス混合装置。 - 前記複数の第1の注入口にそれぞれ結合される複数のガス源をさらに備える、請求項1に記載のガス混合装置。
- 前記複数のガス源の少なくとも1つがプラズマ状態にあるガスを供給するように構成される、請求項2に記載のガス混合装置。
- 前記容器に第2のプロセスガスを供給するように前記容器の上部に結合される第2の注入口であって、第2の注入口を通る前記第2のプロセスガスの流路が前記容器の上部に対して実質的に垂直になるよう配置される第2の注入口
をさらに備える、請求項1に記載のガス混合装置。 - 前記第2の注入口に結合される第2のガス源をさらに備える、請求項4に記載のガス混合装置。
- 前記容器の底部はボウル形であって、内部容積から離れて延在するボウルを有し、前記排出口は底部に結合される、請求項1から5のいずれか一項に記載のガス混合装置。
- 前記容器は円錐形を有し、前記容器の上部近傍の前記容器の直径は、前記容器の底部近傍の前記容器の直径よりも大きい、請求項1から5のいずれか一項に記載のガス混合装置。
- 前記容器内に配置される複数のバッフルをさらに含む、請求項1から5のいずれか一項に記載のガス混合装置。
- 前記複数のバッフルは、実質的に平面でかつ前記容器の上部に対して平行であり、前記複数のバッフルの各バッフルは、前記容器の側壁から前記容器の中心軸に向かって延在する、請求項8に記載のガス混合装置。
- 前記複数のバッフルは、前記容器の上部に対して実質的に垂直であり、前記複数のバッフルの各バッフルは、前記容器の壁から前記容器の中心軸に向かって延在する、請求項8に記載のガス混合装置。
- 前記容器の底部近傍で前記容器に結合される複数の排出口と;
各々が複数の第3のガス排出口を有する複数のガスリングであって、前記容器は前記複数の排出口を介して前記複数のガスリングに流体的に結合される複数のガスリングと
をさらに備える、請求項1から5のいずれか一項に記載のガス混合装置。 - 前記複数のガスリングは、中央注入ポート、前記中央注入ポートの周囲に配置される内側ガスリング、および前記内側ガスリングの周囲に配置される外側ガスリングを備える、請求項11に記載のガス混合装置。
- 前記複数のガス排出口は、処理チャンバ内に配置される下方マニホルドに流体的に結合され、前記下方マニホルドは、前記処理チャンバの内部容積に前記複数のプロセスガスを供給するため、複数のガス分散孔を有する、請求項11に記載のガス混合装置。
- 処理容積を有する処理チャンバと;
前記処理容積内に配置される基板支持体と;
前記処理チャンバの前記処理容積にプロセスガスの混合物を供給するために前記処理チャンバに結合されたガス混合装置であって、請求項1から13のいずれか一項に記載のガス混合装置と
を備える、基板を処理するための装置。
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201261670654P | 2012-07-12 | 2012-07-12 | |
US61/670,654 | 2012-07-12 | ||
US13/918,033 US10232324B2 (en) | 2012-07-12 | 2013-06-14 | Gas mixing apparatus |
US13/918,033 | 2013-06-14 | ||
PCT/US2013/048855 WO2014011423A1 (en) | 2012-07-12 | 2013-07-01 | Gas mixing apparatus |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2015528060A true JP2015528060A (ja) | 2015-09-24 |
JP2015528060A5 JP2015528060A5 (ja) | 2016-08-18 |
JP6227642B2 JP6227642B2 (ja) | 2017-11-08 |
Family
ID=49912928
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2015521651A Active JP6227642B2 (ja) | 2012-07-12 | 2013-07-01 | ガス混合装置 |
Country Status (6)
Country | Link |
---|---|
US (1) | US10232324B2 (ja) |
JP (1) | JP6227642B2 (ja) |
KR (1) | KR102125764B1 (ja) |
CN (1) | CN104471672B (ja) |
TW (1) | TWI611458B (ja) |
WO (1) | WO2014011423A1 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105546348A (zh) * | 2015-12-09 | 2016-05-04 | 无锡拓能自动化科技有限公司 | 应用于气体灌装站的高效混合气体灌装管道 |
JP2020532142A (ja) * | 2017-08-30 | 2020-11-05 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | 一体化されたエピタキシと予洗浄システム |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102014106523A1 (de) * | 2014-05-09 | 2015-11-12 | Aixtron Se | Vorrichtung und Verfahren zum Versorgen einer CVD- oder PVD-Beschichtungseinrichtung mit einem Prozessgasgemisch |
KR20160147482A (ko) * | 2015-06-15 | 2016-12-23 | 삼성전자주식회사 | 가스 혼합부를 갖는 반도체 소자 제조 설비 |
WO2017061498A1 (ja) * | 2015-10-06 | 2017-04-13 | 株式会社アルバック | 混合器、真空処理装置 |
CN105546349A (zh) * | 2015-12-09 | 2016-05-04 | 无锡拓能自动化科技有限公司 | 应用于气体灌装站的气体灌装管道 |
US10256075B2 (en) * | 2016-01-22 | 2019-04-09 | Applied Materials, Inc. | Gas splitting by time average injection into different zones by fast gas valves |
JP6419745B2 (ja) * | 2016-03-15 | 2018-11-07 | 株式会社東芝 | ミキサ構造、流体通路装置、および処理装置 |
CN107413218B (zh) * | 2017-09-11 | 2020-11-24 | 张家口新金石科技发展有限公司 | 二氧化碳和氧气气体混合装置及混合气体助燃污染气体零排放系统 |
CN109609929A (zh) * | 2018-11-20 | 2019-04-12 | 沈阳拓荆科技有限公司 | 混气结构及反应设备 |
KR102610827B1 (ko) * | 2018-12-20 | 2023-12-07 | 어플라이드 머티어리얼스, 인코포레이티드 | 개선된 가스 유동을 처리 챔버의 처리 용적에 공급하기 위한 방법 및 장치 |
TWI765795B (zh) * | 2019-04-24 | 2022-05-21 | 美商應用材料股份有限公司 | 具有旋轉葉片與氣體注入之用於在固定腔室中塗覆粒子的反應器 |
CN110237734A (zh) * | 2019-06-10 | 2019-09-17 | 中国石油大学(北京) | 气体混合器及废气处理装置 |
CN112928008B (zh) * | 2019-12-06 | 2023-03-24 | 中微半导体设备(上海)股份有限公司 | 气体供应系统及其气体输送方法、等离子体处理装置 |
Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02161724A (ja) * | 1988-12-14 | 1990-06-21 | Sony Corp | 低温成膜装置 |
JPH0480366A (ja) * | 1990-07-20 | 1992-03-13 | Nippon Sanso Kk | 有機金属気相成長装置 |
JPH0610138A (ja) * | 1991-07-01 | 1994-01-18 | Kokusai Chodendo Sangyo Gijutsu Kenkyu Center | Mocvd法による酸化物超電導体の製造方法 |
JPH07211643A (ja) * | 1994-01-20 | 1995-08-11 | Hitachi Electron Eng Co Ltd | Cvd装置の反応ガス混合器 |
JP2003239072A (ja) * | 2002-02-14 | 2003-08-27 | Ulvac Japan Ltd | 成膜装置 |
JP2004323894A (ja) * | 2003-04-23 | 2004-11-18 | Sekisui Chem Co Ltd | ガス供給安定化器、気相成長装置および気相成長方法 |
JP2007335755A (ja) * | 2006-06-16 | 2007-12-27 | Matsushita Electric Ind Co Ltd | 基板処理装置および基板処理方法 |
JP2008277773A (ja) * | 2007-03-21 | 2008-11-13 | Applied Materials Inc | ガス流拡散器 |
JP2009521783A (ja) * | 2005-12-23 | 2009-06-04 | エム ケー エス インストルメンツ インコーポレーテッド | 気体を下流にて解離する方法及び装置 |
WO2010079766A1 (ja) * | 2009-01-09 | 2010-07-15 | 株式会社アルバック | プラズマ処理装置 |
WO2010123877A2 (en) * | 2009-04-21 | 2010-10-28 | Applied Materials, Inc. | Cvd apparatus for improved film thickness non-uniformity and particle performance |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4520757A (en) * | 1982-10-27 | 1985-06-04 | Energy Conversion Devices, Inc. | Process gas introduction, confinement and evacuation system for glow discharge deposition apparatus |
US5523063A (en) * | 1992-12-02 | 1996-06-04 | Applied Materials, Inc. | Apparatus for the turbulent mixing of gases |
KR100296494B1 (ko) | 1999-03-31 | 2001-07-03 | 윤영환 | 수소산소 혼합가스 발생장치 |
US7780789B2 (en) * | 2001-10-26 | 2010-08-24 | Applied Materials, Inc. | Vortex chamber lids for atomic layer deposition |
JP2003133300A (ja) | 2001-10-26 | 2003-05-09 | Tokyo Electron Ltd | 成膜装置及び成膜方法 |
US7017514B1 (en) * | 2001-12-03 | 2006-03-28 | Novellus Systems, Inc. | Method and apparatus for plasma optimization in water processing |
EP1988188B9 (en) | 2001-12-03 | 2012-05-02 | Ulvac, Inc. | Apparatus and method for producing films |
US6684719B2 (en) * | 2002-05-03 | 2004-02-03 | Caterpillar Inc | Method and apparatus for mixing gases |
US20050252449A1 (en) * | 2004-05-12 | 2005-11-17 | Nguyen Son T | Control of gas flow and delivery to suppress the formation of particles in an MOCVD/ALD system |
US20060042754A1 (en) * | 2004-07-30 | 2006-03-02 | Tokyo Electron Limited | Plasma etching apparatus |
US20080206987A1 (en) * | 2007-01-29 | 2008-08-28 | Gelatos Avgerinos V | Process for tungsten nitride deposition by a temperature controlled lid assembly |
US8512509B2 (en) * | 2007-12-19 | 2013-08-20 | Applied Materials, Inc. | Plasma reactor gas distribution plate with radially distributed path splitting manifold |
US20110203560A1 (en) | 2010-02-23 | 2011-08-25 | Wallace William K | Fuel conditioning vacuum module |
WO2013049692A1 (en) * | 2011-09-30 | 2013-04-04 | Hyclone Laboratories, Inc. | Container with film sparger |
-
2013
- 2013-06-14 US US13/918,033 patent/US10232324B2/en not_active Expired - Fee Related
- 2013-06-18 TW TW102121573A patent/TWI611458B/zh active
- 2013-07-01 WO PCT/US2013/048855 patent/WO2014011423A1/en active Application Filing
- 2013-07-01 CN CN201380036866.1A patent/CN104471672B/zh active Active
- 2013-07-01 KR KR1020157003744A patent/KR102125764B1/ko active IP Right Grant
- 2013-07-01 JP JP2015521651A patent/JP6227642B2/ja active Active
Patent Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02161724A (ja) * | 1988-12-14 | 1990-06-21 | Sony Corp | 低温成膜装置 |
JPH0480366A (ja) * | 1990-07-20 | 1992-03-13 | Nippon Sanso Kk | 有機金属気相成長装置 |
JPH0610138A (ja) * | 1991-07-01 | 1994-01-18 | Kokusai Chodendo Sangyo Gijutsu Kenkyu Center | Mocvd法による酸化物超電導体の製造方法 |
JPH07211643A (ja) * | 1994-01-20 | 1995-08-11 | Hitachi Electron Eng Co Ltd | Cvd装置の反応ガス混合器 |
JP2003239072A (ja) * | 2002-02-14 | 2003-08-27 | Ulvac Japan Ltd | 成膜装置 |
JP2004323894A (ja) * | 2003-04-23 | 2004-11-18 | Sekisui Chem Co Ltd | ガス供給安定化器、気相成長装置および気相成長方法 |
JP2009521783A (ja) * | 2005-12-23 | 2009-06-04 | エム ケー エス インストルメンツ インコーポレーテッド | 気体を下流にて解離する方法及び装置 |
JP2007335755A (ja) * | 2006-06-16 | 2007-12-27 | Matsushita Electric Ind Co Ltd | 基板処理装置および基板処理方法 |
JP2008277773A (ja) * | 2007-03-21 | 2008-11-13 | Applied Materials Inc | ガス流拡散器 |
WO2010079766A1 (ja) * | 2009-01-09 | 2010-07-15 | 株式会社アルバック | プラズマ処理装置 |
WO2010123877A2 (en) * | 2009-04-21 | 2010-10-28 | Applied Materials, Inc. | Cvd apparatus for improved film thickness non-uniformity and particle performance |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105546348A (zh) * | 2015-12-09 | 2016-05-04 | 无锡拓能自动化科技有限公司 | 应用于气体灌装站的高效混合气体灌装管道 |
JP2020532142A (ja) * | 2017-08-30 | 2020-11-05 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | 一体化されたエピタキシと予洗浄システム |
JP7029522B2 (ja) | 2017-08-30 | 2022-03-03 | アプライド マテリアルズ インコーポレイテッド | 一体化されたエピタキシと予洗浄システム |
Also Published As
Publication number | Publication date |
---|---|
KR20150036567A (ko) | 2015-04-07 |
CN104471672B (zh) | 2020-01-17 |
JP6227642B2 (ja) | 2017-11-08 |
CN104471672A (zh) | 2015-03-25 |
KR102125764B1 (ko) | 2020-06-23 |
TW201407660A (zh) | 2014-02-16 |
TWI611458B (zh) | 2018-01-11 |
WO2014011423A1 (en) | 2014-01-16 |
US10232324B2 (en) | 2019-03-19 |
US20140014270A1 (en) | 2014-01-16 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6227642B2 (ja) | ガス混合装置 | |
TWI645443B (zh) | Plasma processing device and plasma processing method | |
KR101266890B1 (ko) | 플라즈마 처리 장치 및 플라즈마 처리 방법 | |
US9240307B2 (en) | Plasma processing apparatus | |
JP2011096689A (ja) | プラズマ処理装置 | |
KR101358779B1 (ko) | 멀티 코어 플라즈마 발생 플레이트를 구비한 플라즈마반응기 | |
JP2005302875A (ja) | プラズマ処理方法及びプラズマ処理装置 | |
KR101496841B1 (ko) | 혼합형 플라즈마 반응기 | |
US9263237B2 (en) | Plasma processing apparatus and method thereof | |
JP2016534522A (ja) | 誘導結合プラズマ(icp)リアクタの電力堆積制御 | |
TW201234452A (en) | Apparatus for plasma treatment and method for plasma treatment | |
TW201311059A (zh) | 在基材處理系統中用於控制電源分配的方法及裝置 | |
KR20190035589A (ko) | 플라즈마 처리 방법 및 플라즈마 처리 장치 | |
JP2024012609A (ja) | 基板支持器及びプラズマ処理装置 | |
US10734205B2 (en) | Cleaning method and plasma processing apparatus | |
TWI521594B (zh) | 電漿處理方法及電漿處理裝置 | |
JP2021515964A (ja) | 半導体プロセス及び機器向けの磁気誘導プラズマ源 | |
TW201631622A (zh) | 使用分布型非同心狀多區域電漿源的處理腔室、電漿產生方法及電漿處理系統 | |
JP2020202198A (ja) | 静電チャック、支持台及びプラズマ処理装置 | |
JPH11283926A (ja) | プラズマ処理装置 | |
TWI575556B (zh) | Electrolyte processing device | |
JP2012164766A (ja) | エッチング装置 | |
US20210366718A1 (en) | Etching method and plasma processing apparatus | |
US11915850B2 (en) | Two channel cosine-theta coil assembly | |
JP5174848B2 (ja) | プラズマ処理方法及びプラズマ処理装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20160628 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20160628 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20170512 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20170523 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20170818 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20170912 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20171011 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6227642 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |