CN104302962B - 流体运送系统和方法 - Google Patents

流体运送系统和方法 Download PDF

Info

Publication number
CN104302962B
CN104302962B CN201380021263.4A CN201380021263A CN104302962B CN 104302962 B CN104302962 B CN 104302962B CN 201380021263 A CN201380021263 A CN 201380021263A CN 104302962 B CN104302962 B CN 104302962B
Authority
CN
China
Prior art keywords
fluid
tank
pressure
container
bulk
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201380021263.4A
Other languages
English (en)
Chinese (zh)
Other versions
CN104302962A (zh
Inventor
乔丹·霍奇斯
理查德·D·奇兹姆
米切尔·W·麦克费龙
唐纳德·D·韦尔
格伦·M·汤姆
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Entegris Inc
Original Assignee
Advanced Technology Materials Inc
Entegris Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advanced Technology Materials Inc, Entegris Inc filed Critical Advanced Technology Materials Inc
Publication of CN104302962A publication Critical patent/CN104302962A/zh
Application granted granted Critical
Publication of CN104302962B publication Critical patent/CN104302962B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C9/00—Methods or apparatus for discharging liquefied or solidified gases from vessels not under pressure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B67—OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
    • B67D—DISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISE PROVIDED FOR
    • B67D7/00—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B67—OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
    • B67D—DISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISE PROVIDED FOR
    • B67D7/00—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes
    • B67D7/02—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B67—OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
    • B67D—DISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISE PROVIDED FOR
    • B67D7/00—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes
    • B67D7/02—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants
    • B67D7/0238—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants utilising compressed air or other gas acting directly or indirectly on liquids in storage containers
    • B67D7/0244—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants utilising compressed air or other gas acting directly or indirectly on liquids in storage containers by using elastic expandable bags
    • B67D7/025—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants utilising compressed air or other gas acting directly or indirectly on liquids in storage containers by using elastic expandable bags specially adapted for transferring liquids of high purity
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B67—OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
    • B67D—DISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISE PROVIDED FOR
    • B67D7/00—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes
    • B67D7/02—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants
    • B67D7/0238—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants utilising compressed air or other gas acting directly or indirectly on liquids in storage containers
    • B67D7/0266—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants utilising compressed air or other gas acting directly or indirectly on liquids in storage containers by gas acting directly on the liquid
    • B67D7/0272—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants utilising compressed air or other gas acting directly or indirectly on liquids in storage containers by gas acting directly on the liquid specially adapted for transferring liquids of high purity
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B67—OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
    • B67D—DISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISE PROVIDED FOR
    • B67D7/00—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes
    • B67D7/02—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants
    • B67D7/0277—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants using negative pressure
    • B67D7/0283—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants using negative pressure specially adapted for transferring liquids of high purity
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C7/00—Methods or apparatus for discharging liquefied, solidified, or compressed gases from pressure vessels, not covered by another subclass

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Filling Or Discharging Of Gas Storage Vessels (AREA)
  • Loading And Unloading Of Fuel Tanks Or Ships (AREA)
CN201380021263.4A 2012-02-24 2013-02-22 流体运送系统和方法 Active CN104302962B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201261602898P 2012-02-24 2012-02-24
US61/602,898 2012-02-24
PCT/US2013/027301 WO2013126685A1 (en) 2012-02-24 2013-02-22 Fluid delivery system and method

Publications (2)

Publication Number Publication Date
CN104302962A CN104302962A (zh) 2015-01-21
CN104302962B true CN104302962B (zh) 2017-05-31

Family

ID=49006230

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201380021263.4A Active CN104302962B (zh) 2012-02-24 2013-02-22 流体运送系统和方法

Country Status (8)

Country Link
US (2) US9695985B2 (enExample)
EP (1) EP2817555B1 (enExample)
JP (1) JP6397766B2 (enExample)
KR (1) KR20140130704A (enExample)
CN (1) CN104302962B (enExample)
SG (2) SG11201405141TA (enExample)
TW (1) TWI596057B (enExample)
WO (1) WO2013126685A1 (enExample)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6397766B2 (ja) 2012-02-24 2018-09-26 インテグリス・インコーポレーテッド 流体を配送するシステムおよび方法
JP6222118B2 (ja) * 2015-01-09 2017-11-01 東京エレクトロン株式会社 処理液濾過装置、薬液供給装置及び処理液濾過方法並びに記憶媒体
KR101672121B1 (ko) * 2015-03-02 2016-11-02 군산대학교산학협력단 선박용 배기가스 정화장치의 액적균일도 측정장치
US10363543B2 (en) * 2016-04-19 2019-07-30 General Electric Company Gas driven fluid transport
FR3053262A1 (fr) * 2016-07-04 2018-01-05 Adrien Plecis Systeme de preparation d’une composition personnalisee par pression
WO2020069609A1 (en) * 2018-10-01 2020-04-09 Gervais Thomas System and method of fluid delivery
CN109506125A (zh) * 2018-12-11 2019-03-22 中国寰球工程有限公司 掺混料仓单元集中布置并采用集成压缩机站输送的系统
US11772234B2 (en) 2019-10-25 2023-10-03 Applied Materials, Inc. Small batch polishing fluid delivery for CMP
TWI809498B (zh) * 2020-09-18 2023-07-21 美商慧盛材料美國責任有限公司 材料供應系統及使從氣體供應和分配系統分配的氣體的壓力變化實質上降低之方法
KR200496101Y1 (ko) * 2020-12-07 2022-11-01 주식회사 한국가스기술공사 팽창압력을 이용한 액체공급장치
TWI765584B (zh) * 2021-02-25 2022-05-21 江德明 液體傳輸設備

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5562132A (en) * 1993-04-28 1996-10-08 Advanced Delivery & Chemical Systems, Inc. Bulk containers for high purity chemical delivery systems
US5935305A (en) * 1994-10-13 1999-08-10 Advanced Technology Materials, Inc. Storage and delivery system for gaseous compounds
CN101672424A (zh) * 2004-09-03 2010-03-17 尼特西绅有限公司 用于输送低温流体的系统和方法
CN102084114A (zh) * 2008-05-08 2011-06-01 海威气体系统公司 气体发动机的气体供应系统

Family Cites Families (43)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1172131B (it) * 1981-12-04 1987-06-18 Colgate Palmolive Spa Dispositivo selettore dosatore ed erogatore di liquidi in particolare liquidi trattamento per lavatrichi industriali
JPH04102600A (ja) * 1990-08-16 1992-04-03 Toshiba Corp 液体移送装置
US5417346A (en) * 1990-09-17 1995-05-23 Applied Chemical Solutions Process and apparatus for electronic control of the transfer and delivery of high purity chemicals
US5370269A (en) * 1990-09-17 1994-12-06 Applied Chemical Solutions Process and apparatus for precise volumetric diluting/mixing of chemicals
US5148945B1 (en) * 1990-09-17 1996-07-02 Applied Chemical Solutions Apparatus and method for the transfer and delivery of high purity chemicals
JPH05294396A (ja) * 1992-04-10 1993-11-09 Shizuoka Mitsubishi Fuso Jidosha Hanbai Kk 廃油集中処理装置
US5964254A (en) * 1997-07-11 1999-10-12 Advanced Delivery & Chemical Systems, Ltd. Delivery system and manifold
US6557593B2 (en) * 1993-04-28 2003-05-06 Advanced Technology Materials, Inc. Refillable ampule and method re same
JPH08337296A (ja) * 1995-06-09 1996-12-24 Dainippon Screen Mfg Co Ltd 薬液供給装置
US5832948A (en) * 1996-12-20 1998-11-10 Chemand Corp. Liquid transfer system
US6047774A (en) 1997-06-09 2000-04-11 Phillips Petroleum Company System for drilling and completing multilateral wells
US6192919B1 (en) * 1998-06-26 2001-02-27 Advanced Delivery & Chemical Systems, Ltd. Chemical delivery and containment system employing mobile shipping crate
US20030010792A1 (en) 1998-12-30 2003-01-16 Randy Forshey Chemical mix and delivery systems and methods thereof
WO2000039021A1 (en) 1998-12-30 2000-07-06 Semco Corporation Chemical delivery systems and methods of delivery
JP2000352375A (ja) * 1999-06-10 2000-12-19 Taisei Corp 流体の圧送方法
BR0015575A (pt) 1999-11-10 2003-07-22 Scholle Corp Recipiente dobravel para dosagem de lìquidos e método
US7735721B1 (en) 1999-11-30 2010-06-15 Diebold Self-Service Systems Division Of Diebold, Incorporated Method of evaluating checks deposited into a cash dispensing automated banking machine
JP4794730B2 (ja) * 2000-11-13 2011-10-19 凸版印刷株式会社 液体容器
CN100429070C (zh) 2001-02-21 2008-10-29 蒂利亚国际公司 用于制备在真空包装中使用的具有空气通道的膜片的方法
US6984278B2 (en) 2002-01-08 2006-01-10 Cti Industries, Corporation Method for texturing a film
US20030185690A1 (en) * 2002-03-28 2003-10-02 Mindi Xu Systems and methods for transferring and delivering a liquid chemical from a source to an end use station
US6698619B2 (en) * 2002-05-03 2004-03-02 Advanced Technology Materials, Inc. Returnable and reusable, bag-in-drum fluid storage and dispensing container system
US7067616B2 (en) 2003-06-26 2006-06-27 Advanced Technology Materials, Inc. Polytetrafluoroethylene treatment
US7172096B2 (en) * 2004-11-15 2007-02-06 Advanced Technology Materials, Inc. Liquid dispensing system
KR101211458B1 (ko) 2005-04-25 2012-12-13 어드밴스드 테크놀러지 머티리얼즈, 인코포레이티드 다층 라미네이트 및 분배 패키지와 저장 및 분배 방법
KR20110017462A (ko) * 2005-06-06 2011-02-21 어드밴스드 테크놀러지 머티리얼즈, 인코포레이티드 유체 저장 및 분배 시스템과 프로세스
US20070007879A1 (en) * 2005-07-11 2007-01-11 Bergman Thomas J Jr Low vapor pressure gas delivery system and apparatus
JP5049342B2 (ja) 2006-06-02 2012-10-17 アドバンスド テクノロジー マテリアルズ，インコーポレイテッド バリヤー・フルオロポリマー・フィルムをベースとするライナーおよびそれを含むパッケージング
US8336734B2 (en) 2006-06-13 2012-12-25 Advanced Technology Materials, Inc. Liquid dispensing systems encompassing gas removal
US20100025430A1 (en) 2007-01-30 2010-02-04 Advanced Technology Materials, Inc. Prevention of liner choke-off in liner-based pressure dispensation system
JP5094353B2 (ja) * 2007-12-06 2012-12-12 日東電工株式会社 処理液の減圧搬送方法及び減圧搬送装置
CN101970208A (zh) 2007-12-07 2011-02-09 先进技术材料股份有限公司 用于外包装容器的吹塑衬里及其制造方法
US20100059528A1 (en) * 2008-09-11 2010-03-11 C. En. Limited Apparatus for gas storage
WO2011006146A2 (en) 2009-07-09 2011-01-13 Advanced Technology Materials, Inc. Substantially rigid collapsible liner and flexible gusseted or non-gusseted liners and methods of manufacturing the same and methods for limiting choke-off in liners
WO2011046802A2 (en) 2009-10-14 2011-04-21 Advanced Technology Materials, Inc. Material storage and dispensing system and method with degassing assembly
BR112013008859A2 (pt) 2010-10-11 2019-09-24 Advanced Tech Materials Inc sistema com base em revestimento, revestimento, e, métodos para dispensar os conteúdos de um sistema com base em revestimento, e para distribuir um material a um processo
TW201238853A (en) 2010-11-23 2012-10-01 Advanced Tech Materials Liner-based dispensing systems
WO2012071370A2 (en) 2010-11-23 2012-05-31 Advanced Technology Materials, Inc. Liner-based dispenser
SG191080A1 (en) 2010-12-10 2013-07-31 Advanced Tech Materials Generally cylindrically-shaped liner for use in pressure dispense systems and methods of manufacturing the same
EP2681124A4 (en) 2011-03-01 2015-05-27 Advanced Tech Materials NESTED BLASHED INNER CLADDING AND PACKAGING AND MANUFACTURING METHOD THEREFOR
WO2013028746A2 (en) 2011-08-22 2013-02-28 Advanced Technology Materials, Inc. Substantially rigid collapsible container with fold pattern
KR20190062600A (ko) 2011-12-21 2019-06-05 어드밴스드 테크놀러지 머티리얼즈, 인코포레이티드 라이너에 기초한 운송 및 공급 시스템들
JP6397766B2 (ja) 2012-02-24 2018-09-26 インテグリス・インコーポレーテッド 流体を配送するシステムおよび方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5562132A (en) * 1993-04-28 1996-10-08 Advanced Delivery & Chemical Systems, Inc. Bulk containers for high purity chemical delivery systems
US5935305A (en) * 1994-10-13 1999-08-10 Advanced Technology Materials, Inc. Storage and delivery system for gaseous compounds
CN101672424A (zh) * 2004-09-03 2010-03-17 尼特西绅有限公司 用于输送低温流体的系统和方法
CN102084114A (zh) * 2008-05-08 2011-06-01 海威气体系统公司 气体发动机的气体供应系统

Also Published As

Publication number Publication date
US9695985B2 (en) 2017-07-04
CN104302962A (zh) 2015-01-21
KR20140130704A (ko) 2014-11-11
TWI596057B (zh) 2017-08-21
WO2013126685A1 (en) 2013-08-29
SG11201405141TA (en) 2014-09-26
JP2015510477A (ja) 2015-04-09
EP2817555A1 (en) 2014-12-31
JP6397766B2 (ja) 2018-09-26
US20170292653A1 (en) 2017-10-12
EP2817555B1 (en) 2019-04-03
TW201343532A (zh) 2013-11-01
SG10201510813PA (en) 2016-01-28
US20150013834A1 (en) 2015-01-15
US10495259B2 (en) 2019-12-03
EP2817555A4 (en) 2016-05-04

Similar Documents

Publication Publication Date Title
CN104302962B (zh) 流体运送系统和方法
JP6354015B2 (ja) ライナーをベースとする分配容器のためのコネクタ
US8336734B2 (en) Liquid dispensing systems encompassing gas removal
KR102018405B1 (ko) 라이너에 기초한 운송 및 공급 시스템들
US9802749B2 (en) Liner-based liquid storage and dispensing systems with empty detection capability
KR20120014895A (ko) 라이너 베이스의 저장 시스템, 라이너 및 반도체 공정에 고순도 재료를 공급하는 방법
KR20140092916A (ko) 라이너-기반 배송 및 분배 컨테이너를 위한 마개/커넥터 및 라이너-기반 배송 및 분배 컨테이너 충전 방법
TW201317164A (zh) 用於物質的實質上無菌儲存、運送及配給的基於襯缸之運送及配給容器
WO2012135266A2 (en) Storage, transportation, and/or dispense packaging
WO2015066448A1 (en) Apparatus and method for direct contact pressure dispensing using floating liquid extraction element
KR20140058293A (ko) 라이너에 기초한 저장 및 분배 시스템용 라이너 리테이너

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C41 Transfer of patent application or patent right or utility model
TA01 Transfer of patent application right

Effective date of registration: 20161202

Address after: Massachusetts, USA

Applicant after: Entergris Co.

Address before: American Connecticut

Applicant before: Advanced Tech Materials

GR01 Patent grant
GR01 Patent grant