TWI596057B - 流體輸送系統及方法 - Google Patents
流體輸送系統及方法 Download PDFInfo
- Publication number
- TWI596057B TWI596057B TW102106429A TW102106429A TWI596057B TW I596057 B TWI596057 B TW I596057B TW 102106429 A TW102106429 A TW 102106429A TW 102106429 A TW102106429 A TW 102106429A TW I596057 B TWI596057 B TW I596057B
- Authority
- TW
- Taiwan
- Prior art keywords
- fluid
- metal
- container
- pressure
- transfer
- Prior art date
Links
- 239000012530 fluid Substances 0.000 title claims description 211
- 238000000034 method Methods 0.000 title claims description 163
- 239000002184 metal Substances 0.000 claims description 214
- 229910052751 metal Inorganic materials 0.000 claims description 214
- 230000008569 process Effects 0.000 claims description 104
- 238000012546 transfer Methods 0.000 claims description 104
- 239000004065 semiconductor Substances 0.000 claims description 30
- 229910001220 stainless steel Inorganic materials 0.000 claims description 29
- 239000010935 stainless steel Substances 0.000 claims description 29
- 238000004519 manufacturing process Methods 0.000 claims description 24
- 238000009826 distribution Methods 0.000 claims description 20
- 230000008859 change Effects 0.000 claims description 14
- 230000000694 effects Effects 0.000 claims description 10
- 238000011143 downstream manufacturing Methods 0.000 claims description 9
- 238000010276 construction Methods 0.000 claims description 8
- 229920003023 plastic Polymers 0.000 claims description 6
- 239000004033 plastic Substances 0.000 claims description 6
- 239000011521 glass Substances 0.000 claims description 5
- 230000004044 response Effects 0.000 claims description 5
- 230000001105 regulatory effect Effects 0.000 claims description 2
- 239000007789 gas Substances 0.000 description 86
- 239000000126 substance Substances 0.000 description 59
- 239000000463 material Substances 0.000 description 37
- 238000003860 storage Methods 0.000 description 17
- 239000007788 liquid Substances 0.000 description 16
- -1 polyethylene terephthalate Polymers 0.000 description 12
- 238000004806 packaging method and process Methods 0.000 description 8
- 238000004140 cleaning Methods 0.000 description 7
- 238000012545 processing Methods 0.000 description 6
- 230000015572 biosynthetic process Effects 0.000 description 5
- 239000000203 mixture Substances 0.000 description 5
- 239000002904 solvent Substances 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 239000004698 Polyethylene Substances 0.000 description 4
- 239000004743 Polypropylene Substances 0.000 description 4
- 230000008901 benefit Effects 0.000 description 4
- 230000001276 controlling effect Effects 0.000 description 4
- 229920001903 high density polyethylene Polymers 0.000 description 4
- 239000004700 high-density polyethylene Substances 0.000 description 4
- 229920001684 low density polyethylene Polymers 0.000 description 4
- 239000004702 low-density polyethylene Substances 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 229920001179 medium density polyethylene Polymers 0.000 description 4
- 239000004701 medium-density polyethylene Substances 0.000 description 4
- 229920000573 polyethylene Polymers 0.000 description 4
- 239000005020 polyethylene terephthalate Substances 0.000 description 4
- 229920000139 polyethylene terephthalate Polymers 0.000 description 4
- 229920001155 polypropylene Polymers 0.000 description 4
- 238000012423 maintenance Methods 0.000 description 3
- 238000007726 management method Methods 0.000 description 3
- 238000012544 monitoring process Methods 0.000 description 3
- 239000002002 slurry Substances 0.000 description 3
- 239000004812 Fluorinated ethylene propylene Substances 0.000 description 2
- 229920010126 Linear Low Density Polyethylene (LLDPE) Polymers 0.000 description 2
- 229920001774 Perfluoroether Polymers 0.000 description 2
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 2
- 239000002253 acid Substances 0.000 description 2
- 150000007513 acids Chemical class 0.000 description 2
- 239000006117 anti-reflective coating Substances 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 239000002585 base Substances 0.000 description 2
- 239000003153 chemical reaction reagent Substances 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 239000008162 cooking oil Substances 0.000 description 2
- 230000001351 cycling effect Effects 0.000 description 2
- 230000007812 deficiency Effects 0.000 description 2
- 238000007872 degassing Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 239000002019 doping agent Substances 0.000 description 2
- 239000003814 drug Substances 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 229920002313 fluoropolymer Polymers 0.000 description 2
- 239000004811 fluoropolymer Substances 0.000 description 2
- 238000009472 formulation Methods 0.000 description 2
- 230000036541 health Effects 0.000 description 2
- 239000001307 helium Substances 0.000 description 2
- 229910052734 helium Inorganic materials 0.000 description 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 2
- 239000011344 liquid material Substances 0.000 description 2
- 239000000314 lubricant Substances 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 125000002524 organometallic group Chemical group 0.000 description 2
- 239000003973 paint Substances 0.000 description 2
- 229920009441 perflouroethylene propylene Polymers 0.000 description 2
- 239000000575 pesticide Substances 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 229920002493 poly(chlorotrifluoroethylene) Polymers 0.000 description 2
- 239000005023 polychlorotrifluoroethylene (PCTFE) polymer Substances 0.000 description 2
- 239000011112 polyethylene naphthalate Substances 0.000 description 2
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 2
- 239000004810 polytetrafluoroethylene Substances 0.000 description 2
- 230000002285 radioactive effect Effects 0.000 description 2
- 230000008439 repair process Effects 0.000 description 2
- 235000014214 soft drink Nutrition 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- 102100023698 C-C motif chemokine 17 Human genes 0.000 description 1
- XMWRBQBLMFGWIX-UHFFFAOYSA-N C60 fullerene Chemical class C12=C3C(C4=C56)=C7C8=C5C5=C9C%10=C6C6=C4C1=C1C4=C6C6=C%10C%10=C9C9=C%11C5=C8C5=C8C7=C3C3=C7C2=C1C1=C2C4=C6C4=C%10C6=C9C9=C%11C5=C5C8=C3C3=C7C1=C1C2=C4C6=C2C9=C5C3=C12 XMWRBQBLMFGWIX-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229920000219 Ethylene vinyl alcohol Polymers 0.000 description 1
- 101000978362 Homo sapiens C-C motif chemokine 17 Proteins 0.000 description 1
- HBBGRARXTFLTSG-UHFFFAOYSA-N Lithium ion Chemical compound [Li+] HBBGRARXTFLTSG-UHFFFAOYSA-N 0.000 description 1
- 239000004677 Nylon Substances 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 230000033228 biological regulation Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000013043 chemical agent Substances 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 235000013409 condiments Nutrition 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 239000002537 cosmetic Substances 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 239000003599 detergent Substances 0.000 description 1
- 230000001627 detrimental effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 239000003792 electrolyte Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- HQQADJVZYDDRJT-UHFFFAOYSA-N ethene;prop-1-ene Chemical group C=C.CC=C HQQADJVZYDDRJT-UHFFFAOYSA-N 0.000 description 1
- 239000003337 fertilizer Substances 0.000 description 1
- 238000005429 filling process Methods 0.000 description 1
- 235000013305 food Nutrition 0.000 description 1
- 229910003472 fullerene Inorganic materials 0.000 description 1
- 239000000499 gel Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 239000000383 hazardous chemical Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 239000002917 insecticide Substances 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 150000002576 ketones Chemical class 0.000 description 1
- 229910001416 lithium ion Inorganic materials 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002086 nanomaterial Substances 0.000 description 1
- 239000002105 nanoparticle Substances 0.000 description 1
- 229920005615 natural polymer Polymers 0.000 description 1
- 229920001778 nylon Polymers 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 230000002572 peristaltic effect Effects 0.000 description 1
- 239000003208 petroleum Substances 0.000 description 1
- 229920000768 polyamine Polymers 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 229920000098 polyolefin Polymers 0.000 description 1
- 229920002635 polyurethane Polymers 0.000 description 1
- 239000004814 polyurethane Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000004064 recycling Methods 0.000 description 1
- 238000009419 refurbishment Methods 0.000 description 1
- 238000012958 reprocessing Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 238000009738 saturating Methods 0.000 description 1
- 239000000565 sealant Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 229920001059 synthetic polymer Polymers 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C9/00—Methods or apparatus for discharging liquefied or solidified gases from vessels not under pressure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B67—OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
- B67D—DISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISE PROVIDED FOR
- B67D7/00—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B67—OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
- B67D—DISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISE PROVIDED FOR
- B67D7/00—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes
- B67D7/02—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B67—OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
- B67D—DISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISE PROVIDED FOR
- B67D7/00—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes
- B67D7/02—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants
- B67D7/0238—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants utilising compressed air or other gas acting directly or indirectly on liquids in storage containers
- B67D7/0244—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants utilising compressed air or other gas acting directly or indirectly on liquids in storage containers by using elastic expandable bags
- B67D7/025—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants utilising compressed air or other gas acting directly or indirectly on liquids in storage containers by using elastic expandable bags specially adapted for transferring liquids of high purity
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B67—OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
- B67D—DISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISE PROVIDED FOR
- B67D7/00—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes
- B67D7/02—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants
- B67D7/0238—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants utilising compressed air or other gas acting directly or indirectly on liquids in storage containers
- B67D7/0266—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants utilising compressed air or other gas acting directly or indirectly on liquids in storage containers by gas acting directly on the liquid
- B67D7/0272—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants utilising compressed air or other gas acting directly or indirectly on liquids in storage containers by gas acting directly on the liquid specially adapted for transferring liquids of high purity
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B67—OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
- B67D—DISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISE PROVIDED FOR
- B67D7/00—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes
- B67D7/02—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants
- B67D7/0277—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants using negative pressure
- B67D7/0283—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants using negative pressure specially adapted for transferring liquids of high purity
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C7/00—Methods or apparatus for discharging liquefied, solidified, or compressed gases from pressure vessels, not covered by another subclass
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Filling Or Discharging Of Gas Storage Vessels (AREA)
- Loading And Unloading Of Fuel Tanks Or Ships (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201261602898P | 2012-02-24 | 2012-02-24 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201343532A TW201343532A (zh) | 2013-11-01 |
| TWI596057B true TWI596057B (zh) | 2017-08-21 |
Family
ID=49006230
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW102106429A TWI596057B (zh) | 2012-02-24 | 2013-02-23 | 流體輸送系統及方法 |
Country Status (8)
| Country | Link |
|---|---|
| US (2) | US9695985B2 (enExample) |
| EP (1) | EP2817555B1 (enExample) |
| JP (1) | JP6397766B2 (enExample) |
| KR (1) | KR20140130704A (enExample) |
| CN (1) | CN104302962B (enExample) |
| SG (2) | SG11201405141TA (enExample) |
| TW (1) | TWI596057B (enExample) |
| WO (1) | WO2013126685A1 (enExample) |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SG11201405141TA (en) | 2012-02-24 | 2014-09-26 | Advanced Tech Materials | Fluid delivery system and method |
| JP6222118B2 (ja) * | 2015-01-09 | 2017-11-01 | 東京エレクトロン株式会社 | 処理液濾過装置、薬液供給装置及び処理液濾過方法並びに記憶媒体 |
| KR101672121B1 (ko) * | 2015-03-02 | 2016-11-02 | 군산대학교산학협력단 | 선박용 배기가스 정화장치의 액적균일도 측정장치 |
| US10363543B2 (en) * | 2016-04-19 | 2019-07-30 | General Electric Company | Gas driven fluid transport |
| FR3053262A1 (fr) * | 2016-07-04 | 2018-01-05 | Adrien Plecis | Systeme de preparation d’une composition personnalisee par pression |
| WO2020069609A1 (en) | 2018-10-01 | 2020-04-09 | Gervais Thomas | System and method of fluid delivery |
| CN109506125A (zh) * | 2018-12-11 | 2019-03-22 | 中国寰球工程有限公司 | 掺混料仓单元集中布置并采用集成压缩机站输送的系统 |
| US11772234B2 (en) | 2019-10-25 | 2023-10-03 | Applied Materials, Inc. | Small batch polishing fluid delivery for CMP |
| TWI809498B (zh) * | 2020-09-18 | 2023-07-21 | 美商慧盛材料美國責任有限公司 | 材料供應系統及使從氣體供應和分配系統分配的氣體的壓力變化實質上降低之方法 |
| KR200496101Y1 (ko) * | 2020-12-07 | 2022-11-01 | 주식회사 한국가스기술공사 | 팽창압력을 이용한 액체공급장치 |
| TWI765584B (zh) * | 2021-02-25 | 2022-05-21 | 江德明 | 液體傳輸設備 |
| KR102903937B1 (ko) * | 2023-04-17 | 2025-12-24 | 주식회사 제이시스메디칼 | 피부 관리 장치용 냉각 시스템 |
| DE102024107217A1 (de) * | 2024-03-13 | 2025-09-18 | Pink Gmbh Thermosysteme | Befüllvorrichtung zum Befüllen eines Bubblers, Befüllsystem und damit ausgerüstete Löt- oder Sinteranlage, sowie Verfahren zum Betreiben der Befüllvorrichtung |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20070007879A1 (en) * | 2005-07-11 | 2007-01-11 | Bergman Thomas J Jr | Low vapor pressure gas delivery system and apparatus |
| US20100059528A1 (en) * | 2008-09-11 | 2010-03-11 | C. En. Limited | Apparatus for gas storage |
| US20100112815A1 (en) * | 2005-06-06 | 2010-05-06 | Advanced Technology Materials, Inc. | Fluid storage and dispensing systems and processes |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| IT1172131B (it) * | 1981-12-04 | 1987-06-18 | Colgate Palmolive Spa | Dispositivo selettore dosatore ed erogatore di liquidi in particolare liquidi trattamento per lavatrichi industriali |
| JPH04102600A (ja) | 1990-08-16 | 1992-04-03 | Toshiba Corp | 液体移送装置 |
| US5370269A (en) | 1990-09-17 | 1994-12-06 | Applied Chemical Solutions | Process and apparatus for precise volumetric diluting/mixing of chemicals |
| US5417346A (en) * | 1990-09-17 | 1995-05-23 | Applied Chemical Solutions | Process and apparatus for electronic control of the transfer and delivery of high purity chemicals |
| US5148945B1 (en) * | 1990-09-17 | 1996-07-02 | Applied Chemical Solutions | Apparatus and method for the transfer and delivery of high purity chemicals |
| JPH05294396A (ja) | 1992-04-10 | 1993-11-09 | Shizuoka Mitsubishi Fuso Jidosha Hanbai Kk | 廃油集中処理装置 |
| US5607002A (en) * | 1993-04-28 | 1997-03-04 | Advanced Delivery & Chemical Systems, Inc. | Chemical refill system for high purity chemicals |
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| US5964254A (en) * | 1997-07-11 | 1999-10-12 | Advanced Delivery & Chemical Systems, Ltd. | Delivery system and manifold |
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| JPH08337296A (ja) | 1995-06-09 | 1996-12-24 | Dainippon Screen Mfg Co Ltd | 薬液供給装置 |
| US5832948A (en) | 1996-12-20 | 1998-11-10 | Chemand Corp. | Liquid transfer system |
| BR9714732A (pt) | 1997-06-09 | 2000-07-25 | Phillips Petroleum Co | Sistema para a perfuração e conclusão de poços multilaterais |
| US6192919B1 (en) | 1998-06-26 | 2001-02-27 | Advanced Delivery & Chemical Systems, Ltd. | Chemical delivery and containment system employing mobile shipping crate |
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- 2013-02-22 CN CN201380021263.4A patent/CN104302962B/zh active Active
- 2013-02-22 KR KR1020147025812A patent/KR20140130704A/ko not_active Withdrawn
- 2013-02-22 JP JP2014558860A patent/JP6397766B2/ja active Active
- 2013-02-23 TW TW102106429A patent/TWI596057B/zh active
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2017
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Also Published As
| Publication number | Publication date |
|---|---|
| WO2013126685A1 (en) | 2013-08-29 |
| JP2015510477A (ja) | 2015-04-09 |
| KR20140130704A (ko) | 2014-11-11 |
| SG10201510813PA (en) | 2016-01-28 |
| EP2817555B1 (en) | 2019-04-03 |
| EP2817555A1 (en) | 2014-12-31 |
| US9695985B2 (en) | 2017-07-04 |
| SG11201405141TA (en) | 2014-09-26 |
| JP6397766B2 (ja) | 2018-09-26 |
| US10495259B2 (en) | 2019-12-03 |
| CN104302962A (zh) | 2015-01-21 |
| US20150013834A1 (en) | 2015-01-15 |
| CN104302962B (zh) | 2017-05-31 |
| TW201343532A (zh) | 2013-11-01 |
| US20170292653A1 (en) | 2017-10-12 |
| EP2817555A4 (en) | 2016-05-04 |
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