SG11201405141TA - Fluid delivery system and method - Google Patents

Fluid delivery system and method

Info

Publication number
SG11201405141TA
SG11201405141TA SG11201405141TA SG11201405141TA SG11201405141TA SG 11201405141T A SG11201405141T A SG 11201405141TA SG 11201405141T A SG11201405141T A SG 11201405141TA SG 11201405141T A SG11201405141T A SG 11201405141TA SG 11201405141T A SG11201405141T A SG 11201405141TA
Authority
SG
Singapore
Prior art keywords
delivery system
fluid delivery
fluid
delivery
Prior art date
Application number
SG11201405141TA
Other languages
English (en)
Inventor
Jordan Hodges
Richard D Chism
Mitchell W Mcferon
Donald D Ware
Glenn M Tom
Original Assignee
Advanced Tech Materials
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advanced Tech Materials filed Critical Advanced Tech Materials
Publication of SG11201405141TA publication Critical patent/SG11201405141TA/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C9/00—Methods or apparatus for discharging liquefied or solidified gases from vessels not under pressure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B67—OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
    • B67D—DISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISE PROVIDED FOR
    • B67D7/00—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B67—OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
    • B67D—DISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISE PROVIDED FOR
    • B67D7/00—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes
    • B67D7/02—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B67—OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
    • B67D—DISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISE PROVIDED FOR
    • B67D7/00—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes
    • B67D7/02—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants
    • B67D7/0238—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants utilising compressed air or other gas acting directly or indirectly on liquids in storage containers
    • B67D7/0244—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants utilising compressed air or other gas acting directly or indirectly on liquids in storage containers by using elastic expandable bags
    • B67D7/025—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants utilising compressed air or other gas acting directly or indirectly on liquids in storage containers by using elastic expandable bags specially adapted for transferring liquids of high purity
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B67—OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
    • B67D—DISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISE PROVIDED FOR
    • B67D7/00—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes
    • B67D7/02—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants
    • B67D7/0238—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants utilising compressed air or other gas acting directly or indirectly on liquids in storage containers
    • B67D7/0266—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants utilising compressed air or other gas acting directly or indirectly on liquids in storage containers by gas acting directly on the liquid
    • B67D7/0272—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants utilising compressed air or other gas acting directly or indirectly on liquids in storage containers by gas acting directly on the liquid specially adapted for transferring liquids of high purity
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B67—OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
    • B67D—DISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISE PROVIDED FOR
    • B67D7/00—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes
    • B67D7/02—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants
    • B67D7/0277—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants using negative pressure
    • B67D7/0283—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants using negative pressure specially adapted for transferring liquids of high purity
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C7/00—Methods or apparatus for discharging liquefied, solidified, or compressed gases from pressure vessels, not covered by another subclass

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Filling Or Discharging Of Gas Storage Vessels (AREA)
  • Loading And Unloading Of Fuel Tanks Or Ships (AREA)
SG11201405141TA 2012-02-24 2013-02-22 Fluid delivery system and method SG11201405141TA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201261602898P 2012-02-24 2012-02-24
PCT/US2013/027301 WO2013126685A1 (en) 2012-02-24 2013-02-22 Fluid delivery system and method

Publications (1)

Publication Number Publication Date
SG11201405141TA true SG11201405141TA (en) 2014-09-26

Family

ID=49006230

Family Applications (2)

Application Number Title Priority Date Filing Date
SG11201405141TA SG11201405141TA (en) 2012-02-24 2013-02-22 Fluid delivery system and method
SG10201510813PA SG10201510813PA (en) 2012-02-24 2013-02-22 Fluid Delivery System And Method

Family Applications After (1)

Application Number Title Priority Date Filing Date
SG10201510813PA SG10201510813PA (en) 2012-02-24 2013-02-22 Fluid Delivery System And Method

Country Status (8)

Country Link
US (2) US9695985B2 (enExample)
EP (1) EP2817555B1 (enExample)
JP (1) JP6397766B2 (enExample)
KR (1) KR20140130704A (enExample)
CN (1) CN104302962B (enExample)
SG (2) SG11201405141TA (enExample)
TW (1) TWI596057B (enExample)
WO (1) WO2013126685A1 (enExample)

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JP6397766B2 (ja) 2012-02-24 2018-09-26 インテグリス・インコーポレーテッド 流体を配送するシステムおよび方法
JP6222118B2 (ja) * 2015-01-09 2017-11-01 東京エレクトロン株式会社 処理液濾過装置、薬液供給装置及び処理液濾過方法並びに記憶媒体
KR101672121B1 (ko) * 2015-03-02 2016-11-02 군산대학교산학협력단 선박용 배기가스 정화장치의 액적균일도 측정장치
US10363543B2 (en) * 2016-04-19 2019-07-30 General Electric Company Gas driven fluid transport
FR3053262A1 (fr) * 2016-07-04 2018-01-05 Adrien Plecis Systeme de preparation d’une composition personnalisee par pression
WO2020069609A1 (en) * 2018-10-01 2020-04-09 Gervais Thomas System and method of fluid delivery
CN109506125A (zh) * 2018-12-11 2019-03-22 中国寰球工程有限公司 掺混料仓单元集中布置并采用集成压缩机站输送的系统
US11772234B2 (en) 2019-10-25 2023-10-03 Applied Materials, Inc. Small batch polishing fluid delivery for CMP
TWI809498B (zh) * 2020-09-18 2023-07-21 美商慧盛材料美國責任有限公司 材料供應系統及使從氣體供應和分配系統分配的氣體的壓力變化實質上降低之方法
KR200496101Y1 (ko) * 2020-12-07 2022-11-01 주식회사 한국가스기술공사 팽창압력을 이용한 액체공급장치
TWI765584B (zh) * 2021-02-25 2022-05-21 江德明 液體傳輸設備

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JP6397766B2 (ja) 2012-02-24 2018-09-26 インテグリス・インコーポレーテッド 流体を配送するシステムおよび方法

Also Published As

Publication number Publication date
US9695985B2 (en) 2017-07-04
CN104302962A (zh) 2015-01-21
KR20140130704A (ko) 2014-11-11
TWI596057B (zh) 2017-08-21
WO2013126685A1 (en) 2013-08-29
JP2015510477A (ja) 2015-04-09
EP2817555A1 (en) 2014-12-31
JP6397766B2 (ja) 2018-09-26
US20170292653A1 (en) 2017-10-12
EP2817555B1 (en) 2019-04-03
TW201343532A (zh) 2013-11-01
SG10201510813PA (en) 2016-01-28
US20150013834A1 (en) 2015-01-15
US10495259B2 (en) 2019-12-03
CN104302962B (zh) 2017-05-31
EP2817555A4 (en) 2016-05-04

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