KR20140130704A - 유체 전달 시스템 및 방법 - Google Patents

유체 전달 시스템 및 방법 Download PDF

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Publication number
KR20140130704A
KR20140130704A KR1020147025812A KR20147025812A KR20140130704A KR 20140130704 A KR20140130704 A KR 20140130704A KR 1020147025812 A KR1020147025812 A KR 1020147025812A KR 20147025812 A KR20147025812 A KR 20147025812A KR 20140130704 A KR20140130704 A KR 20140130704A
Authority
KR
South Korea
Prior art keywords
fluid
canister
pressure
tote
reservoir
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
KR1020147025812A
Other languages
English (en)
Korean (ko)
Inventor
조던 호지스
리처드 디 치즘
미첼 더블유 맥페론
도널드 디 웨어
글렌 엠 톰
Original Assignee
어드밴스드 테크놀러지 머티리얼즈, 인코포레이티드
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 어드밴스드 테크놀러지 머티리얼즈, 인코포레이티드 filed Critical 어드밴스드 테크놀러지 머티리얼즈, 인코포레이티드
Publication of KR20140130704A publication Critical patent/KR20140130704A/ko
Withdrawn legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C9/00—Methods or apparatus for discharging liquefied or solidified gases from vessels not under pressure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B67—OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
    • B67D—DISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISE PROVIDED FOR
    • B67D7/00—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B67—OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
    • B67D—DISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISE PROVIDED FOR
    • B67D7/00—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes
    • B67D7/02—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B67—OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
    • B67D—DISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISE PROVIDED FOR
    • B67D7/00—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes
    • B67D7/02—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants
    • B67D7/0238—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants utilising compressed air or other gas acting directly or indirectly on liquids in storage containers
    • B67D7/0244—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants utilising compressed air or other gas acting directly or indirectly on liquids in storage containers by using elastic expandable bags
    • B67D7/025—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants utilising compressed air or other gas acting directly or indirectly on liquids in storage containers by using elastic expandable bags specially adapted for transferring liquids of high purity
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B67—OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
    • B67D—DISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISE PROVIDED FOR
    • B67D7/00—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes
    • B67D7/02—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants
    • B67D7/0238—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants utilising compressed air or other gas acting directly or indirectly on liquids in storage containers
    • B67D7/0266—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants utilising compressed air or other gas acting directly or indirectly on liquids in storage containers by gas acting directly on the liquid
    • B67D7/0272—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants utilising compressed air or other gas acting directly or indirectly on liquids in storage containers by gas acting directly on the liquid specially adapted for transferring liquids of high purity
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B67—OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
    • B67D—DISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISE PROVIDED FOR
    • B67D7/00—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes
    • B67D7/02—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants
    • B67D7/0277—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants using negative pressure
    • B67D7/0283—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants using negative pressure specially adapted for transferring liquids of high purity
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C7/00—Methods or apparatus for discharging liquefied, solidified, or compressed gases from pressure vessels, not covered by another subclass

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Filling Or Discharging Of Gas Storage Vessels (AREA)
  • Loading And Unloading Of Fuel Tanks Or Ships (AREA)
KR1020147025812A 2012-02-24 2013-02-22 유체 전달 시스템 및 방법 Withdrawn KR20140130704A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201261602898P 2012-02-24 2012-02-24
US61/602,898 2012-02-24
PCT/US2013/027301 WO2013126685A1 (en) 2012-02-24 2013-02-22 Fluid delivery system and method

Publications (1)

Publication Number Publication Date
KR20140130704A true KR20140130704A (ko) 2014-11-11

Family

ID=49006230

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020147025812A Withdrawn KR20140130704A (ko) 2012-02-24 2013-02-22 유체 전달 시스템 및 방법

Country Status (8)

Country Link
US (2) US9695985B2 (enExample)
EP (1) EP2817555B1 (enExample)
JP (1) JP6397766B2 (enExample)
KR (1) KR20140130704A (enExample)
CN (1) CN104302962B (enExample)
SG (2) SG11201405141TA (enExample)
TW (1) TWI596057B (enExample)
WO (1) WO2013126685A1 (enExample)

Cited By (1)

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Publication number Priority date Publication date Assignee Title
KR20160106283A (ko) * 2015-03-02 2016-09-12 군산대학교산학협력단 선박용 배기가스 정화장치의 액적균일도 측정장치

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SG11201405141TA (en) 2012-02-24 2014-09-26 Advanced Tech Materials Fluid delivery system and method
JP6222118B2 (ja) * 2015-01-09 2017-11-01 東京エレクトロン株式会社 処理液濾過装置、薬液供給装置及び処理液濾過方法並びに記憶媒体
US10363543B2 (en) * 2016-04-19 2019-07-30 General Electric Company Gas driven fluid transport
FR3053262A1 (fr) * 2016-07-04 2018-01-05 Adrien Plecis Systeme de preparation d’une composition personnalisee par pression
WO2020069609A1 (en) 2018-10-01 2020-04-09 Gervais Thomas System and method of fluid delivery
CN109506125A (zh) * 2018-12-11 2019-03-22 中国寰球工程有限公司 掺混料仓单元集中布置并采用集成压缩机站输送的系统
US11772234B2 (en) 2019-10-25 2023-10-03 Applied Materials, Inc. Small batch polishing fluid delivery for CMP
TWI809498B (zh) * 2020-09-18 2023-07-21 美商慧盛材料美國責任有限公司 材料供應系統及使從氣體供應和分配系統分配的氣體的壓力變化實質上降低之方法
KR200496101Y1 (ko) * 2020-12-07 2022-11-01 주식회사 한국가스기술공사 팽창압력을 이용한 액체공급장치
TWI765584B (zh) * 2021-02-25 2022-05-21 江德明 液體傳輸設備
KR102903937B1 (ko) * 2023-04-17 2025-12-24 주식회사 제이시스메디칼 피부 관리 장치용 냉각 시스템
DE102024107217A1 (de) * 2024-03-13 2025-09-18 Pink Gmbh Thermosysteme Befüllvorrichtung zum Befüllen eines Bubblers, Befüllsystem und damit ausgerüstete Löt- oder Sinteranlage, sowie Verfahren zum Betreiben der Befüllvorrichtung

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20160106283A (ko) * 2015-03-02 2016-09-12 군산대학교산학협력단 선박용 배기가스 정화장치의 액적균일도 측정장치

Also Published As

Publication number Publication date
WO2013126685A1 (en) 2013-08-29
JP2015510477A (ja) 2015-04-09
SG10201510813PA (en) 2016-01-28
EP2817555B1 (en) 2019-04-03
EP2817555A1 (en) 2014-12-31
US9695985B2 (en) 2017-07-04
SG11201405141TA (en) 2014-09-26
JP6397766B2 (ja) 2018-09-26
US10495259B2 (en) 2019-12-03
CN104302962A (zh) 2015-01-21
US20150013834A1 (en) 2015-01-15
TWI596057B (zh) 2017-08-21
CN104302962B (zh) 2017-05-31
TW201343532A (zh) 2013-11-01
US20170292653A1 (en) 2017-10-12
EP2817555A4 (en) 2016-05-04

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