CN103959818B - 具有压电、导电及介电隔膜的微型扬声器 - Google Patents

具有压电、导电及介电隔膜的微型扬声器 Download PDF

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Publication number
CN103959818B
CN103959818B CN201280058708.1A CN201280058708A CN103959818B CN 103959818 B CN103959818 B CN 103959818B CN 201280058708 A CN201280058708 A CN 201280058708A CN 103959818 B CN103959818 B CN 103959818B
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Prior art keywords
microspeaker
layer
glass
substrate
electromechanical
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Chinese (zh)
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CN103959818A (zh
Inventor
菲利普·贾森·斯蒂法诺
戴维·威廉·伯恩斯
拉温德拉·V·社诺伊
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Nujira Ltd
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Nujira Ltd
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    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04RLOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R17/00Piezoelectric transducers; Electrostrictive transducers
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F1/00Details not covered by groups G06F3/00 - G06F13/00 and G06F21/00
    • G06F1/16Constructional details or arrangements
    • G06F1/1613Constructional details or arrangements for portable computers
    • G06F1/1626Constructional details or arrangements for portable computers with a single-body enclosure integrating a flat display, e.g. Personal Digital Assistants [PDAs]
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F1/00Details not covered by groups G06F3/00 - G06F13/00 and G06F21/00
    • G06F1/16Constructional details or arrangements
    • G06F1/1613Constructional details or arrangements for portable computers
    • G06F1/1633Constructional details or arrangements of portable computers not specific to the type of enclosures covered by groups G06F1/1615 - G06F1/1626
    • G06F1/1637Details related to the display arrangement, including those related to the mounting of the display in the housing
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04RLOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R31/00Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/01Manufacture or treatment
    • H10N30/07Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/40Piezoelectric or electrostrictive devices with electrical input and electrical output, e.g. functioning as transformers
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04RLOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R2201/00Details of transducers, loudspeakers or microphones covered by H04R1/00 but not provided for in any of its subgroups
    • H04R2201/003Mems transducers or their use
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04RLOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R2201/00Details of transducers, loudspeakers or microphones covered by H04R1/00 but not provided for in any of its subgroups
    • H04R2201/40Details of arrangements for obtaining desired directional characteristic by combining a number of identical transducers covered by H04R1/40 but not provided for in any of its subgroups
    • H04R2201/4012D or 3D arrays of transducers
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04RLOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R2499/00Aspects covered by H04R or H04S not otherwise provided for in their subgroups
    • H04R2499/10General applications
    • H04R2499/15Transducers incorporated in visual displaying devices, e.g. televisions, computer displays, laptops
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/42Piezoelectric device making

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Theoretical Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • Human Computer Interaction (AREA)
  • General Engineering & Computer Science (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Optics & Photonics (AREA)
  • Power Engineering (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
  • Piezo-Electric Transducers For Audible Bands (AREA)
  • Control Of Indicators Other Than Cathode Ray Tubes (AREA)
CN201280058708.1A 2011-11-29 2012-11-28 具有压电、导电及介电隔膜的微型扬声器 Active CN103959818B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US13/306,397 US8811636B2 (en) 2011-11-29 2011-11-29 Microspeaker with piezoelectric, metal and dielectric membrane
US13/306,397 2011-11-29
PCT/US2012/066875 WO2013082169A1 (en) 2011-11-29 2012-11-28 Microspeaker with piezoelectric, conductive and dielectric membrane

Publications (2)

Publication Number Publication Date
CN103959818A CN103959818A (zh) 2014-07-30
CN103959818B true CN103959818B (zh) 2018-12-14

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CN201280058708.1A Active CN103959818B (zh) 2011-11-29 2012-11-28 具有压电、导电及介电隔膜的微型扬声器

Country Status (9)

Country Link
US (3) US8811636B2 (enExample)
EP (1) EP2786595B1 (enExample)
JP (1) JP6099663B2 (enExample)
KR (1) KR101885180B1 (enExample)
CN (1) CN103959818B (enExample)
ES (1) ES2652036T3 (enExample)
HU (1) HUE037612T2 (enExample)
IN (1) IN2014CN03799A (enExample)
WO (1) WO2013082169A1 (enExample)

Families Citing this family (86)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2208367B1 (en) 2007-10-12 2017-09-27 Earlens Corporation Multifunction system and method for integrated hearing and communiction with noise cancellation and feedback management
DK2301261T3 (en) 2008-06-17 2019-04-23 Earlens Corp Optical electromechanical hearing aids with separate power supply and signal components
WO2010033932A1 (en) 2008-09-22 2010-03-25 Earlens Corporation Transducer devices and methods for hearing
WO2012088187A2 (en) 2010-12-20 2012-06-28 SoundBeam LLC Anatomically customized ear canal hearing apparatus
US8811636B2 (en) 2011-11-29 2014-08-19 Qualcomm Mems Technologies, Inc. Microspeaker with piezoelectric, metal and dielectric membrane
US9384639B2 (en) * 2012-07-05 2016-07-05 Michael Joseph White Rigid fixture for coupling one or more transducers to the upper back of the human body
US9619064B2 (en) * 2012-10-26 2017-04-11 Corning Incorporated Structure with integrated acoustics function
US9207750B2 (en) 2012-12-14 2015-12-08 Intel Corporation Apparatus and method for reducing leakage power of a circuit
US9173024B2 (en) * 2013-01-31 2015-10-27 Invensense, Inc. Noise mitigating microphone system
CN104349251B (zh) * 2013-07-29 2018-07-10 奇鋐科技股份有限公司 扬声器结构
US9510103B2 (en) * 2013-09-09 2016-11-29 Audio Pixels Ltd. Microelectromechanical apparatus for generating a physical effect
US9941472B2 (en) 2014-03-10 2018-04-10 International Business Machines Corporation Piezoelectronic device with novel force amplification
US9796578B2 (en) 2014-03-10 2017-10-24 Apple Inc. Microelectromechanical systems devices with improved reliability
TWI527471B (zh) * 2014-03-14 2016-03-21 財團法人工業技術研究院 壓電電聲換能器
US10034103B2 (en) 2014-03-18 2018-07-24 Earlens Corporation High fidelity and reduced feedback contact hearing apparatus and methods
US9251884B2 (en) 2014-03-24 2016-02-02 International Business Machines Corporation Non-volatile, piezoelectronic memory based on piezoresistive strain produced by piezoelectric remanence
US20150346478A1 (en) * 2014-05-30 2015-12-03 Qualcomm Mems Technologies, Inc. Protection of Thin Film Transistors in a Display Element Array from Visible and Ultraviolet Light
DK3169396T3 (da) 2014-07-14 2021-06-28 Earlens Corp Glidende forspænding og peak-begrænsning for optiske høreapparater
CN104969572B (zh) * 2014-08-26 2019-01-18 歌尔股份有限公司 Pcb扬声器以及用于在pcb基板上微加工扬声器振膜的方法
US9293687B1 (en) * 2014-10-31 2016-03-22 International Business Machines Corporation Passivation and alignment of piezoelectronic transistor piezoresistor
US9924276B2 (en) 2014-11-26 2018-03-20 Earlens Corporation Adjustable venting for hearing instruments
US10567883B2 (en) 2015-07-22 2020-02-18 Audio Pixels Ltd. Piezo-electric actuators
JP2018520612A (ja) 2015-07-22 2018-07-26 オーディオ ピクセルズ エルティーディー.Audio Pixels Ltd. Dsrスピーカ素子及びその製造方法
US9553960B1 (en) * 2015-09-04 2017-01-24 Intel Corporation Loudspeaker with laminate panel for mobile computing platforms
DE102015116707A1 (de) * 2015-10-01 2017-04-06 USound GmbH Flexible MEMS-Leiterplatteneinheit sowie Schallwandleranordnung
EP3355801B1 (en) 2015-10-02 2021-05-19 Earlens Corporation Drug delivery customized ear canal apparatus
US11128957B2 (en) 2015-10-21 2021-09-21 Goertek Inc. Micro-speaker, speaker device and electronic apparatus
US10492010B2 (en) 2015-12-30 2019-11-26 Earlens Corporations Damping in contact hearing systems
US10306381B2 (en) 2015-12-30 2019-05-28 Earlens Corporation Charging protocol for rechargable hearing systems
US11350226B2 (en) 2015-12-30 2022-05-31 Earlens Corporation Charging protocol for rechargeable hearing systems
US9887847B2 (en) * 2016-02-03 2018-02-06 International Business Machines Corporation Secure crypto module including conductor on glass security layer
TWI638419B (zh) * 2016-04-18 2018-10-11 村田製作所股份有限公司 一種掃描鏡設備與其製造方法
JP6412900B2 (ja) * 2016-06-23 2018-10-24 株式会社東芝 高周波半導体用パッケージ
CN107920313A (zh) * 2016-08-27 2018-04-17 深圳市诺维创科技有限公司 一种微型压电超声换能器及其制作方法
CN109565623B (zh) * 2016-09-01 2021-05-11 松下知识产权经营株式会社 扬声器装置和搭载有该扬声器装置的移动体装置
JP6265578B1 (ja) * 2016-09-07 2018-01-24 株式会社アルバック デバイス及びデバイスの製造方法並びにアレイ型の超音波プローブの製造方法
WO2018048794A1 (en) 2016-09-09 2018-03-15 Earlens Corporation Contact hearing systems, apparatus and methods
KR102583487B1 (ko) * 2016-10-17 2023-09-27 엘지전자 주식회사 오디오 출력 장치
WO2018093733A1 (en) 2016-11-15 2018-05-24 Earlens Corporation Improved impression procedure
US11039814B2 (en) 2016-12-04 2021-06-22 Exo Imaging, Inc. Imaging devices having piezoelectric transducers
CN106647003B (zh) * 2017-01-18 2020-04-21 京东方科技集团股份有限公司 一种显示装置及显示方法
US10498001B2 (en) 2017-08-21 2019-12-03 Texas Instruments Incorporated Launch structures for a hermetically sealed cavity
US10775422B2 (en) * 2017-09-05 2020-09-15 Texas Instruments Incorporated Molecular spectroscopy cell with resonant cavity
US10589986B2 (en) 2017-09-06 2020-03-17 Texas Instruments Incorporated Packaging a sealed cavity in an electronic device
US10551265B2 (en) 2017-09-07 2020-02-04 Texas Instruments Incorporated Pressure sensing using quantum molecular rotational state transitions
US10131115B1 (en) 2017-09-07 2018-11-20 Texas Instruments Incorporated Hermetically sealed molecular spectroscopy cell with dual wafer bonding
US10444102B2 (en) 2017-09-07 2019-10-15 Texas Instruments Incorporated Pressure measurement based on electromagnetic signal output of a cavity
US10549986B2 (en) 2017-09-07 2020-02-04 Texas Instruments Incorporated Hermetically sealed molecular spectroscopy cell
US10424523B2 (en) 2017-09-07 2019-09-24 Texas Instruments Incorporated Hermetically sealed molecular spectroscopy cell with buried ground plane
US10544039B2 (en) 2017-09-08 2020-01-28 Texas Instruments Incorporated Methods for depositing a measured amount of a species in a sealed cavity
CN107634155B (zh) * 2017-09-22 2019-02-22 京东方科技集团股份有限公司 Oled显示基板的封装方法、封装结构及显示装置
CN107716258B (zh) * 2017-11-23 2019-08-06 哈尔滨工业大学 振幅调控均匀场环阵超声换能器
WO2019173470A1 (en) 2018-03-07 2019-09-12 Earlens Corporation Contact hearing device and retention structure materials
WO2019199680A1 (en) 2018-04-09 2019-10-17 Earlens Corporation Dynamic filter
US10648852B2 (en) 2018-04-11 2020-05-12 Exo Imaging Inc. Imaging devices having piezoelectric transceivers
US10656007B2 (en) 2018-04-11 2020-05-19 Exo Imaging Inc. Asymmetrical ultrasound transducer array
WO2019226547A1 (en) 2018-05-21 2019-11-28 Exo Imaging, Inc. Ultrasonic transducers with q spoiling
CN112805843B (zh) 2018-08-01 2024-06-14 艾科索成像公司 用于集成具有混合触点的超声换能器的系统和方法
US10771891B2 (en) * 2018-08-19 2020-09-08 xMEMS Labs, Inc. Method for manufacturing air pulse generating element
US11239408B2 (en) * 2018-09-04 2022-02-01 Kathirgamasundaram Sooriakumar Acoustic transducer and related fabrication and packaging techniques
TWI684367B (zh) * 2018-09-14 2020-02-01 美律實業股份有限公司 揚聲器以及其微機電致動器
US11971477B2 (en) * 2018-09-25 2024-04-30 Exo Imaging, Inc. Imaging devices with selectively alterable characteristics
EP3637487A1 (en) * 2018-10-09 2020-04-15 Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO Shear piezoelectric transducer
CA3124116A1 (en) 2018-12-27 2020-07-02 Exo Imaging, Inc. Methods to maintain image quality in ultrasound imaging at reduced cost, size, and power
DE102019101325A1 (de) * 2019-01-17 2020-07-23 USound GmbH Herstellungsverfahren für mehrere MEMS-Schallwandler
CN111698595A (zh) * 2019-03-15 2020-09-22 华一声学股份有限公司 多音频耳机
CN111698594A (zh) * 2019-03-15 2020-09-22 华一声学股份有限公司 复合式耳机
JP2023511802A (ja) 2019-09-12 2023-03-23 エコー イメージング,インク. 端部溝、仮想ピボット、および非拘束状態の境界を介する、mut結合効率および帯域幅の増加
WO2021052951A1 (en) 2019-09-16 2021-03-25 Apollo Tyres Global R&D B.V. Method for chemically adhering a diene rubber to a piezoelectric polymer
US11043197B1 (en) * 2020-01-31 2021-06-22 xMEMS Labs, Inc. Air pulse generating element and sound producing device with virtual valve
CN111107476B (zh) * 2020-02-22 2021-04-20 瑞声科技(新加坡)有限公司 微型扬声器
KR102707729B1 (ko) 2020-03-05 2024-09-20 엑소 이미징, 인크. 프로그래밍 가능한 해부 및 흐름 이미징을 가지는 초음파 이미징 장치
WO2021251159A1 (ja) * 2020-06-11 2021-12-16 株式会社村田製作所 圧電デバイス
CN111725384B (zh) * 2020-06-29 2023-07-04 京东方科技集团股份有限公司 压电传感器及其制造方法、检测装置
CN111711900B (zh) * 2020-07-09 2021-12-10 京东方科技集团股份有限公司 显示面板及其制造方法、显示装置
EP3937512A1 (en) 2020-07-10 2022-01-12 Infineon Technologies AG Method and structure for sensors on glass
US11951512B2 (en) 2021-03-31 2024-04-09 Exo Imaging, Inc. Imaging devices having piezoelectric transceivers with harmonic characteristics
US11819881B2 (en) 2021-03-31 2023-11-21 Exo Imaging, Inc. Imaging devices having piezoelectric transceivers with harmonic characteristics
WO2022217402A1 (zh) * 2021-04-12 2022-10-20 诺思(天津)微系统有限责任公司 Mems扬声器及其制造方法以及电子设备
US12486159B2 (en) 2021-06-30 2025-12-02 Exo Imaging, Inc. Micro-machined ultrasound transducers with insulation layer and methods of manufacture
US11843915B2 (en) * 2021-08-20 2023-12-12 Massachusetts Institute Of Technology Active piezoelectric sheet with piezoelectric microstructures
CN113938803B (zh) * 2021-09-28 2025-05-23 瑞声开泰科技(武汉)有限公司 扬声器及其制备方法
CN113794967A (zh) * 2021-10-28 2021-12-14 业成科技(成都)有限公司 扬声器及电子装置
NO20211478A1 (en) * 2021-12-08 2023-04-11 Nordicneurolab As Audio System for MRI
US12325625B2 (en) * 2022-06-13 2025-06-10 Vibrant Microsystems Inc. Integrated MEMS electrostatic micro-speaker device and method
CN116320959A (zh) * 2023-03-14 2023-06-23 武汉敏声新技术有限公司 微扬声器的制备方法以及微扬声器

Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020125793A1 (en) * 1999-07-07 2002-09-12 Samsung Electro-Mechanics Co. Multilayered piezoelectric/electrostrictive ceramic actuator
US20020130589A1 (en) * 2001-01-29 2002-09-19 Hiroshi Hamada Piezoelectric vibrator, piezoelectric vibration apparatus for using the same and manufacturing method therefor
US20020163086A1 (en) * 2001-01-17 2002-11-07 Yoshihiko Toyoda Semiconductor device and manufacturing method thereof
US20030048914A1 (en) * 2001-09-12 2003-03-13 Seung-Hwan Yi Micromachined piezoelectric microspeaker and fabricating method thereof
US20030059069A1 (en) * 2000-01-27 2003-03-27 New Transducers Limited Loudspeaker
JP2008199266A (ja) * 2007-02-13 2008-08-28 Murata Mfg Co Ltd 電気音響変換器
US20080212807A1 (en) * 2005-06-08 2008-09-04 General Mems Corporation Micromachined Acoustic Transducers
JP2009260723A (ja) * 2008-04-17 2009-11-05 Asahi Kasei Electronics Co Ltd トランスデューサ
CN101754077A (zh) * 2008-12-19 2010-06-23 三星电子株式会社 压电声换能器及其制造方法
US20110064250A1 (en) * 2009-09-16 2011-03-17 Samsung Electronics Co., Ltd. Piezoelectric micro speaker including annular ring-shaped vibrating membranes and method of manufacturing the piezoelectric micro speaker
US20110085684A1 (en) * 2009-10-12 2011-04-14 Samsung Electronics Co., Ltd. Piezoelectric micro speaker

Family Cites Families (104)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1514818A1 (de) 1951-01-28 1969-05-08 Telefunken Patent Festkoerperschaltung,bestehend aus einem Halbleiterkoerper mit eingebrachten aktiven Bauelementen und einer Isolierschicht mit aufgebrachten passiven Bauelementen und Leitungsbahnen
US3343256A (en) 1964-12-28 1967-09-26 Ibm Methods of making thru-connections in semiconductor wafers
US3372070A (en) 1965-07-30 1968-03-05 Bell Telephone Labor Inc Fabrication of semiconductor integrated devices with a pn junction running through the wafer
US3648131A (en) 1969-11-07 1972-03-07 Ibm Hourglass-shaped conductive connection through semiconductor structures
US3849679A (en) * 1970-02-12 1974-11-19 Dynamics Corp Massa Div Electroacoustic transducer with controlled beam pattern
US4283649A (en) * 1978-09-21 1981-08-11 Murata Manufacturing Co., Ltd. Piezoelectric ultrasonic transducer with resonator laminate
US4258468A (en) 1978-12-14 1981-03-31 Western Electric Company, Inc. Forming vias through multilayer circuit boards
JPS5642499A (en) * 1979-05-15 1981-04-20 Nippon Ceramic Kk Ultrasonic-wave transducer
JPS57166800A (en) * 1981-04-07 1982-10-14 Nippon Soken Inc Ultrasonic wave transmitter and receiver
US4458170A (en) * 1981-12-08 1984-07-03 Matsushita Electric Industrial Co., Ltd. Ultrasonic transmitter-receiver
US4475014A (en) * 1982-09-13 1984-10-02 Harman-Motive Inc. Acoustical transducer
US4461930A (en) * 1982-09-23 1984-07-24 Pioneer Speaker Components, Inc. Acoustic transducer with honeycomb diaphragm
US4445978A (en) 1983-03-09 1984-05-01 Rca Corporation Method for fabricating via connectors through semiconductor wafers
FR2565033B1 (fr) 1984-05-22 1987-06-05 Labo Electronique Physique Dispositif de transduction ultrasonore a reseau d'elements transducteurs piezoelectriques
US4754440A (en) * 1985-12-27 1988-06-28 Aisin Seiki Kabushikikaisha Ultrasonic transducer
US4850227A (en) 1987-12-22 1989-07-25 Delco Electronics Corporation Pressure sensor and method of fabrication thereof
US5166097A (en) 1990-11-26 1992-11-24 The Boeing Company Silicon wafers containing conductive feedthroughs
US5295395A (en) 1991-02-07 1994-03-22 Hocker G Benjamin Diaphragm-based-sensors
US5422190A (en) 1993-01-22 1995-06-06 Ferro Corporation Via fill paste and method of using the same containing specific amounts of silver, gold and refractory oxides
US5569958A (en) 1994-05-26 1996-10-29 Cts Corporation Electrically conductive, hermetic vias and their use in high temperature chip packages
US5511428A (en) 1994-06-10 1996-04-30 Massachusetts Institute Of Technology Backside contact of sensor microstructures
US5841099A (en) 1994-07-18 1998-11-24 Electro Scientific Industries, Inc. Method employing UV laser pulses of varied energy density to form depthwise self-limiting blind vias in multilayered targets
JPH08265816A (ja) * 1995-03-24 1996-10-11 Sony Corp 文字の編集装置およびページャー
US5798302A (en) 1996-02-28 1998-08-25 Micron Technology, Inc. Low friction polish-stop stratum for endpointing chemical-mechanical planarization processing of semiconductor wafers
DE69714909T2 (de) 1996-05-27 2003-04-30 Ngk Insulators, Ltd. Piezoelektrisches Element des Dünnschichttyps
US6114240A (en) 1997-12-18 2000-09-05 Micron Technology, Inc. Method for fabricating semiconductor components using focused laser beam
JP3860336B2 (ja) 1998-04-28 2006-12-20 日本特殊陶業株式会社 ガラスセラミック複合体
US6280641B1 (en) 1998-06-02 2001-08-28 Mitsubishi Gas Chemical Company, Inc. Printed wiring board having highly reliably via hole and process for forming via hole
US6076726A (en) 1998-07-01 2000-06-20 International Business Machines Corporation Pad-on-via assembly technique
JP2000124764A (ja) 1998-10-20 2000-04-28 Ngk Spark Plug Co Ltd 周波数濾波器に用いられる短冊状圧電共振子
US6351996B1 (en) 1998-11-12 2002-03-05 Maxim Integrated Products, Inc. Hermetic packaging for semiconductor pressure sensors
US6346742B1 (en) 1998-11-12 2002-02-12 Maxim Integrated Products, Inc. Chip-scale packaged pressure sensor
US7208725B2 (en) 1998-11-25 2007-04-24 Rohm And Haas Electronic Materials Llc Optoelectronic component with encapsulant
US6229190B1 (en) 1998-12-18 2001-05-08 Maxim Integrated Products, Inc. Compensated semiconductor pressure sensor
US6255728B1 (en) 1999-01-15 2001-07-03 Maxim Integrated Products, Inc. Rigid encapsulation package for semiconductor devices
JP2000217195A (ja) * 1999-01-22 2000-08-04 Aiphone Co Ltd スピ―カ
US6268660B1 (en) 1999-03-05 2001-07-31 International Business Machines Corporation Silicon packaging with through wafer interconnects
US6221769B1 (en) 1999-03-05 2001-04-24 International Business Machines Corporation Method for integrated circuit power and electrical connections via through-wafer interconnects
WO2001008128A1 (en) 1999-07-22 2001-02-01 Seiko Epson Corporation Electro-optical device, method of manufacture thereof, and electronic device
WO2001022776A1 (en) 1999-09-21 2001-03-29 University Of Hawaii Method of forming parylene-diaphragm piezoelectric acoustic transducers
US6400009B1 (en) 1999-10-15 2002-06-04 Lucent Technologies Inc. Hermatic firewall for MEMS packaging in flip-chip bonded geometry
KR100413789B1 (ko) 1999-11-01 2003-12-31 삼성전자주식회사 고진공 패키징 마이크로자이로스코프 및 그 제조방법
US6147397A (en) 1999-12-28 2000-11-14 Maxim Integrated Products Stress isolated integrated circuit and method for making
US6423905B1 (en) 2000-05-01 2002-07-23 International Business Machines Corporation Printed wiring board with improved plated through hole fatigue life
TW535465B (en) 2000-05-15 2003-06-01 Hitachi Aic Inc Electronic component device and method of manufacturing the same
BE1013592A3 (nl) 2000-07-11 2002-04-02 Sonitron Nv Transducent.
JP4363801B2 (ja) * 2000-08-29 2009-11-11 富士彦 小林 圧電スピーカ
US6589594B1 (en) 2000-08-31 2003-07-08 Micron Technology, Inc. Method for filling a wafer through-via with a conductive material
US8103024B2 (en) * 2000-09-20 2012-01-24 Harman Becker Automotive Systems Gmbh Door with structural components configured to radiate acoustic energy
US6977224B2 (en) 2000-12-28 2005-12-20 Intel Corporation Method of electroless introduction of interconnect structures
US6429527B1 (en) 2001-01-17 2002-08-06 International Business Corporation Method and article for filling apertures in a high performance electronic substrate
US7435613B2 (en) 2001-02-12 2008-10-14 Agere Systems Inc. Methods of fabricating a membrane with improved mechanical integrity
US6912078B2 (en) 2001-03-16 2005-06-28 Corning Incorporated Electrostatically actuated micro-electro-mechanical devices and method of manufacture
US6910268B2 (en) 2001-03-27 2005-06-28 Formfactor, Inc. Method for fabricating an IC interconnect system including an in-street integrated circuit wafer via
US20020196952A1 (en) * 2001-06-25 2002-12-26 Merry Electronics Co., Ltd. Piezoelectric transceiver
TWI224382B (en) 2001-07-12 2004-11-21 Hitachi Ltd Wiring glass substrate and manufacturing method thereof, conductive paste and semiconductor module used for the same, and conductor forming method
US6559530B2 (en) 2001-09-19 2003-05-06 Raytheon Company Method of integrating MEMS device with low-resistivity silicon substrates
JP3998984B2 (ja) 2002-01-18 2007-10-31 富士通株式会社 回路基板及びその製造方法
JP2003226551A (ja) 2002-02-05 2003-08-12 Nippon Sheet Glass Co Ltd 微細孔を有するガラス板およびその製造方法
FI114825B (fi) 2002-02-13 2004-12-31 Vti Technologies Oy Menetelmä kapasitiivisen anturin lämpötilariippuvuuden pienentämiseksi sekä kapasitiivinen anturirakenne
US7029829B2 (en) 2002-04-18 2006-04-18 The Regents Of The University Of Michigan Low temperature method for forming a microcavity on a substrate and article having same
US7217588B2 (en) 2005-01-05 2007-05-15 Sharp Laboratories Of America, Inc. Integrated MEMS packaging
JP3925414B2 (ja) 2002-04-26 2007-06-06 株式会社村田製作所 圧電型電気音響変換器
US6953985B2 (en) 2002-06-12 2005-10-11 Freescale Semiconductor, Inc. Wafer level MEMS packaging
US6829937B2 (en) 2002-06-17 2004-12-14 Vti Holding Oy Monolithic silicon acceleration sensor
US6964882B2 (en) 2002-09-27 2005-11-15 Analog Devices, Inc. Fabricating complex micro-electromechanical systems using a flip bonding technique
SG111972A1 (en) 2002-10-17 2005-06-29 Agency Science Tech & Res Wafer-level package for micro-electro-mechanical systems
US7098117B2 (en) 2002-10-18 2006-08-29 The Regents Of The University Of Michigan Method of fabricating a package with substantially vertical feedthroughs for micromachined or MEMS devices
BE1015150A3 (nl) * 2002-10-21 2004-10-05 Sonitron Nv Verbeterde transducent
KR100444588B1 (ko) 2002-11-12 2004-08-16 삼성전자주식회사 글래스 웨이퍼의 비아홀 형성방법
JP4133429B2 (ja) 2003-02-24 2008-08-13 浜松ホトニクス株式会社 半導体装置
US6836020B2 (en) 2003-01-22 2004-12-28 The Board Of Trustees Of The Leland Stanford Junior University Electrical through wafer interconnects
US6888233B2 (en) 2003-03-10 2005-05-03 Honeywell International Inc. Systems for buried electrical feedthroughs in a glass-silicon MEMS process
US6777263B1 (en) 2003-08-21 2004-08-17 Agilent Technologies, Inc. Film deposition to enhance sealing yield of microcap wafer-level package with vias
US7275424B2 (en) 2003-09-08 2007-10-02 Analog Devices, Inc. Wafer level capped sensor
KR100565799B1 (ko) 2003-12-22 2006-03-29 삼성전자주식회사 일체화된 FBAR 및 Isolation부를 사용하여제조된 듀플렉서 및 그 제조 방법
KR100622372B1 (ko) 2004-06-01 2006-09-19 삼성전자주식회사 복수개의 구성유닛을 포함하는 자이로센서 및 그 제조방법
EP1783832A4 (en) 2004-07-06 2008-07-09 Tokyo Electron Ltd INTERPOSER AND METHOD FOR PRODUCING AN INTERPOSER
US7184202B2 (en) 2004-09-27 2007-02-27 Idc, Llc Method and system for packaging a MEMS device
US7668415B2 (en) * 2004-09-27 2010-02-23 Qualcomm Mems Technologies, Inc. Method and device for providing electronic circuitry on a backplate
US7791434B2 (en) 2004-12-22 2010-09-07 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Acoustic resonator performance enhancement using selective metal etch and having a trench in the piezoelectric
KR100661350B1 (ko) 2004-12-27 2006-12-27 삼성전자주식회사 Mems 소자 패키지 및 그 제조방법
JP2006270770A (ja) 2005-03-25 2006-10-05 Sanyo Electric Co Ltd 薄膜バルク波素子および高周波デバイス
FI119299B (fi) 2005-06-17 2008-09-30 Vti Technologies Oy Menetelmä kapasitiivisen kiihtyvyysanturin valmistamiseksi ja kapasitiivinen kiihtyvyysanturi
JP4435049B2 (ja) 2005-08-08 2010-03-17 株式会社東芝 薄膜圧電共振器及びその製造方法
JP2007181087A (ja) 2005-12-28 2007-07-12 Toshiba Corp 薄膜圧電共振器およびフィルタ回路
JP5021216B2 (ja) 2006-02-22 2012-09-05 イビデン株式会社 プリント配線板およびその製造方法
JP2007335977A (ja) 2006-06-12 2007-12-27 Toshiba Corp 電子素子
US20080006850A1 (en) 2006-07-10 2008-01-10 Innovative Micro Technology System and method for forming through wafer vias using reverse pulse plating
US7736946B2 (en) 2007-02-07 2010-06-15 Honeywell International Inc. System and method for sealing a MEMS device
US7569421B2 (en) 2007-05-04 2009-08-04 Stats Chippac, Ltd. Through-hole via on saw streets
KR100931575B1 (ko) 2007-12-07 2009-12-14 한국전자통신연구원 Mems를 이용한 압전 소자 마이크로 스피커 및 그 제조방법
KR100931578B1 (ko) 2007-12-18 2009-12-14 한국전자통신연구원 압전 소자 마이크로폰, 스피커, 마이크로폰-스피커 일체형장치 및 그 제조방법
US7591185B1 (en) 2008-04-23 2009-09-22 Medtronic, Inc. Pressure sensor configurations for implantable medical electrical leads
US7697281B2 (en) * 2008-09-05 2010-04-13 Apple Inc. Handheld computing device
US20100068453A1 (en) 2008-09-18 2010-03-18 Hirofumi Imai Method for producing processed glass substrate
KR101562339B1 (ko) * 2008-09-25 2015-10-22 삼성전자 주식회사 압전형 마이크로 스피커 및 그 제조 방법
US8280080B2 (en) * 2009-04-28 2012-10-02 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Microcap acoustic transducer device
KR101654379B1 (ko) * 2009-05-25 2016-09-05 파나소닉 아이피 매니지먼트 가부시키가이샤 압전형 음향 변환기
US8322225B2 (en) 2009-07-10 2012-12-04 Honeywell International Inc. Sensor package assembly having an unconstrained sense die
US8659611B2 (en) 2010-03-17 2014-02-25 Qualcomm Mems Technologies, Inc. System and method for frame buffer storage and retrieval in alternating orientations
US8492957B2 (en) * 2010-03-23 2013-07-23 Kohji Toda Apparatus for generating electric energy
CN106269451B (zh) * 2011-02-15 2020-02-21 富士胶卷迪马蒂克斯股份有限公司 使用微圆顶阵列的压电式换能器
US8811636B2 (en) 2011-11-29 2014-08-19 Qualcomm Mems Technologies, Inc. Microspeaker with piezoelectric, metal and dielectric membrane

Patent Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020125793A1 (en) * 1999-07-07 2002-09-12 Samsung Electro-Mechanics Co. Multilayered piezoelectric/electrostrictive ceramic actuator
US20030059069A1 (en) * 2000-01-27 2003-03-27 New Transducers Limited Loudspeaker
US20020163086A1 (en) * 2001-01-17 2002-11-07 Yoshihiko Toyoda Semiconductor device and manufacturing method thereof
US20020130589A1 (en) * 2001-01-29 2002-09-19 Hiroshi Hamada Piezoelectric vibrator, piezoelectric vibration apparatus for using the same and manufacturing method therefor
US20030048914A1 (en) * 2001-09-12 2003-03-13 Seung-Hwan Yi Micromachined piezoelectric microspeaker and fabricating method thereof
US20080212807A1 (en) * 2005-06-08 2008-09-04 General Mems Corporation Micromachined Acoustic Transducers
JP2008199266A (ja) * 2007-02-13 2008-08-28 Murata Mfg Co Ltd 電気音響変換器
JP2009260723A (ja) * 2008-04-17 2009-11-05 Asahi Kasei Electronics Co Ltd トランスデューサ
CN101754077A (zh) * 2008-12-19 2010-06-23 三星电子株式会社 压电声换能器及其制造方法
US20110064250A1 (en) * 2009-09-16 2011-03-17 Samsung Electronics Co., Ltd. Piezoelectric micro speaker including annular ring-shaped vibrating membranes and method of manufacturing the piezoelectric micro speaker
US20110085684A1 (en) * 2009-10-12 2011-04-14 Samsung Electronics Co., Ltd. Piezoelectric micro speaker

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