CN103832074B - 半导体装置、液体排出头、液体排出盒和液体排出设备 - Google Patents
半导体装置、液体排出头、液体排出盒和液体排出设备 Download PDFInfo
- Publication number
- CN103832074B CN103832074B CN201310573912.3A CN201310573912A CN103832074B CN 103832074 B CN103832074 B CN 103832074B CN 201310573912 A CN201310573912 A CN 201310573912A CN 103832074 B CN103832074 B CN 103832074B
- Authority
- CN
- China
- Prior art keywords
- conductive patterns
- semiconductor device
- conductive pattern
- conductive
- bonding pad
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract description 76
- 239000007788 liquid Substances 0.000 title claims abstract description 48
- 238000007599 discharging Methods 0.000 claims description 2
- 238000007639 printing Methods 0.000 description 19
- 230000000052 comparative effect Effects 0.000 description 9
- 238000007641 inkjet printing Methods 0.000 description 8
- 238000010586 diagram Methods 0.000 description 7
- 239000000758 substrate Substances 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- 238000004140 cleaning Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 230000004048 modification Effects 0.000 description 4
- 238000012986 modification Methods 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 3
- 238000000059 patterning Methods 0.000 description 3
- 239000006096 absorbing agent Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000011084 recovery Methods 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/015—Ink jet characterised by the jet generation process
- B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
- B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
- B41J2/04501—Control methods or devices therefor, e.g. driver circuits, control circuits
- B41J2/04506—Control methods or devices therefor, e.g. driver circuits, control circuits aiming at correcting manufacturing tolerances
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/015—Ink jet characterised by the jet generation process
- B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
- B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
- B41J2/04501—Control methods or devices therefor, e.g. driver circuits, control circuits
- B41J2/0458—Control methods or devices therefor, e.g. driver circuits, control circuits controlling heads based on heating elements forming bubbles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14016—Structure of bubble jet print heads
- B41J2/14072—Electrical connections, e.g. details on electrodes, connecting the chip to the outside...
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/10—Bump connectors ; Manufacturing methods related thereto
- H01L24/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L24/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L24/81—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
- Semiconductor Integrated Circuits (AREA)
- Physics & Mathematics (AREA)
- Geometry (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012-254627 | 2012-11-20 | ||
| JP2012254627A JP6077836B2 (ja) | 2012-11-20 | 2012-11-20 | 半導体装置、液体吐出ヘッド、液体吐出カートリッジ及び液体吐出装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103832074A CN103832074A (zh) | 2014-06-04 |
| CN103832074B true CN103832074B (zh) | 2015-06-03 |
Family
ID=50727532
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310573912.3A Expired - Fee Related CN103832074B (zh) | 2012-11-20 | 2013-11-15 | 半导体装置、液体排出头、液体排出盒和液体排出设备 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US9302478B2 (enExample) |
| JP (1) | JP6077836B2 (enExample) |
| CN (1) | CN103832074B (enExample) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9358567B2 (en) | 2014-06-20 | 2016-06-07 | Stmicroelectronics, Inc. | Microfluidic system with single drive signal for multiple nozzles |
| US9248648B2 (en) | 2014-06-20 | 2016-02-02 | Stmicroelectronics S.R.L. | Microfluidic die with multiple heaters in a chamber |
| JP2016221902A (ja) | 2015-06-02 | 2016-12-28 | キヤノン株式会社 | 半導体装置、液体吐出ヘッド、液体吐出カートリッジ及び液体吐出装置 |
| JP6664261B2 (ja) | 2016-04-07 | 2020-03-13 | キヤノン株式会社 | 半導体装置及び液体吐出ヘッド用基板 |
| JP6948167B2 (ja) * | 2017-06-15 | 2021-10-13 | キヤノン株式会社 | 半導体装置、液体吐出ヘッド及び液体吐出装置 |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1535826A (zh) * | 2003-04-10 | 2004-10-13 | 佳能株式会社 | 记录头用基板、记录头和记录装置 |
| CN1613648A (zh) * | 2003-11-06 | 2005-05-11 | 佳能株式会社 | 记录头用基板、记录头、头墨盒、记录头的驱动方法和记录装置 |
| JP2007250649A (ja) * | 2006-03-14 | 2007-09-27 | Canon Inc | 記録素子駆動回路および記録素子駆動回路のレイアウト方法 |
| CN101092076A (zh) * | 2006-06-23 | 2007-12-26 | 佳能株式会社 | 用于记录头的器件衬底、记录头和包括记录头的记录设备 |
| CN101117047A (zh) * | 2003-12-18 | 2008-02-06 | 佳能株式会社 | 记录头的元件基体和具有该元件基体的记录头 |
| CN102259492A (zh) * | 2010-05-28 | 2011-11-30 | 佳能株式会社 | 半导体器件、液体排出头、液体排出盒和液体排出装置 |
| CN102307732A (zh) * | 2009-02-06 | 2012-01-04 | 佳能株式会社 | 液体喷射头和喷墨打印装置 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5762043U (enExample) * | 1980-09-30 | 1982-04-13 | ||
| JPS63183863A (ja) * | 1987-01-26 | 1988-07-29 | Nec Corp | サ−マルヘツド |
| JPH0834133A (ja) * | 1994-07-22 | 1996-02-06 | Rohm Co Ltd | サーマルヘッドおよびこれを用いたプリンタ |
| JP4537159B2 (ja) | 2003-09-08 | 2010-09-01 | キヤノン株式会社 | 液体吐出ヘッド用半導体装置、液体吐出へッド及び液体吐出装置 |
| JP4537166B2 (ja) * | 2004-10-06 | 2010-09-01 | キヤノン株式会社 | 液体吐出ヘッド |
| JP2011254801A (ja) | 2010-06-10 | 2011-12-22 | Akuto Kk | 鳥類忌避追い払い装置 |
-
2012
- 2012-11-20 JP JP2012254627A patent/JP6077836B2/ja not_active Expired - Fee Related
-
2013
- 2013-10-30 US US14/067,029 patent/US9302478B2/en not_active Expired - Fee Related
- 2013-11-15 CN CN201310573912.3A patent/CN103832074B/zh not_active Expired - Fee Related
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1535826A (zh) * | 2003-04-10 | 2004-10-13 | 佳能株式会社 | 记录头用基板、记录头和记录装置 |
| CN1613648A (zh) * | 2003-11-06 | 2005-05-11 | 佳能株式会社 | 记录头用基板、记录头、头墨盒、记录头的驱动方法和记录装置 |
| CN101117047A (zh) * | 2003-12-18 | 2008-02-06 | 佳能株式会社 | 记录头的元件基体和具有该元件基体的记录头 |
| JP2007250649A (ja) * | 2006-03-14 | 2007-09-27 | Canon Inc | 記録素子駆動回路および記録素子駆動回路のレイアウト方法 |
| CN101092076A (zh) * | 2006-06-23 | 2007-12-26 | 佳能株式会社 | 用于记录头的器件衬底、记录头和包括记录头的记录设备 |
| CN102307732A (zh) * | 2009-02-06 | 2012-01-04 | 佳能株式会社 | 液体喷射头和喷墨打印装置 |
| CN102259492A (zh) * | 2010-05-28 | 2011-11-30 | 佳能株式会社 | 半导体器件、液体排出头、液体排出盒和液体排出装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| US20140139590A1 (en) | 2014-05-22 |
| JP6077836B2 (ja) | 2017-02-08 |
| US9302478B2 (en) | 2016-04-05 |
| CN103832074A (zh) | 2014-06-04 |
| JP2014100856A (ja) | 2014-06-05 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150603 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |