CN103633067B - 基于tsv立体集成工艺的十字环形对准标记 - Google Patents
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CN104952848B (zh) * | 2014-03-31 | 2018-05-25 | 中芯国际集成电路制造(上海)有限公司 | 用于硅通孔制作的对准结构及硅通孔的制作方法 |
SG10201408768XA (en) | 2014-12-29 | 2016-07-28 | Globalfoundries Sg Pte Ltd | Device without zero mark layer |
CN105404098B (zh) * | 2015-12-04 | 2017-12-05 | 广州兴森快捷电路科技有限公司 | 一种ldi曝光机对位精度检测方法 |
CN106054543B (zh) * | 2016-08-17 | 2018-09-04 | 京东方科技集团股份有限公司 | 对位方法及对位系统 |
CN106200278B (zh) * | 2016-09-18 | 2017-09-12 | 中国科学院上海光学精密机械研究所 | 基于无掩膜光刻机极坐标下刻写大范围任意图形的方法 |
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US5231471A (en) * | 1986-03-25 | 1993-07-27 | Canon Kabushiki Kaisha | Alignment and exposure apparatus |
CN102386168A (zh) * | 2010-09-02 | 2012-03-21 | 台湾积体电路制造股份有限公司 | 具有基板通孔(tsv)的基板中的对准标记 |
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JPH09304916A (ja) * | 1996-05-20 | 1997-11-28 | Sony Corp | アライメントマーク及び/又は合わせずれ測定マークの形成方法 |
JP2004014758A (ja) * | 2002-06-06 | 2004-01-15 | Nikon Corp | アライメント装置 |
JP5609513B2 (ja) * | 2010-10-05 | 2014-10-22 | 株式会社ニコン | 露光装置、露光方法、及びデバイス製造方法 |
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US5231471A (en) * | 1986-03-25 | 1993-07-27 | Canon Kabushiki Kaisha | Alignment and exposure apparatus |
CN102386168A (zh) * | 2010-09-02 | 2012-03-21 | 台湾积体电路制造股份有限公司 | 具有基板通孔(tsv)的基板中的对准标记 |
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Address after: No. 28 Gaoxin Road, Xi'an City, Shaanxi Province, 710000 Patentee after: 771 Research Institute of the Ninth Research Institute of China Aerospace Science and Technology Corporation Co.,Ltd. Address before: No. 28 Gaoxin Road, Xi'an City, Shaanxi Province, 710000 Patentee before: NO.771 INSTITUTE OF NO.9 RESEARCH INSTITUTE, CHINA AEROSPACE SCIENCE AND TECHNOLOGY Corp. |
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Effective date of registration: 20230613 Address after: Room 628, 1st Floor, Zone C, Building 24, Science and Technology Innovation Park, Gangwan 1, Jintang Road, Tangjiawan Town, High tech Zone, Zhuhai City, Guangdong Province, 519080 (centralized office area) Patentee after: Zhuhai Tiancheng Advanced Semiconductor Technology Co.,Ltd. Address before: No. 28 Gaoxin Road, Xi'an City, Shaanxi Province, 710000 Patentee before: 771 Research Institute of the Ninth Research Institute of China Aerospace Science and Technology Corporation Co.,Ltd. |