CN103201824B - 由固体材料制备化合物或其中间体以及使用该化合物和中间体的设备和方法 - Google Patents

由固体材料制备化合物或其中间体以及使用该化合物和中间体的设备和方法 Download PDF

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Publication number
CN103201824B
CN103201824B CN201180052929.3A CN201180052929A CN103201824B CN 103201824 B CN103201824 B CN 103201824B CN 201180052929 A CN201180052929 A CN 201180052929A CN 103201824 B CN103201824 B CN 103201824B
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reaction
boron
zone
temperature
reaction chamber
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Chinese (zh)
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CN103201824A (zh
Inventor
O·比尔
E·E·琼斯
C·派迪
J·D·斯威尼
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Entegris Inc
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Advanced Technology Materials Inc
Entegris Inc
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J8/00—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes
    • B01J8/02—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes with stationary particles, e.g. in fixed beds
    • B01J8/0285—Heating or cooling the reactor
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P30/00—Ion implantation into wafers, substrates or parts of devices
    • H10P30/20—Ion implantation into wafers, substrates or parts of devices into semiconductor materials, e.g. for doping
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J8/00—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes
    • B01J8/02—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes with stationary particles, e.g. in fixed beds
    • B01J8/04—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes with stationary particles, e.g. in fixed beds the fluid passing successively through two or more beds
    • B01J8/0446—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes with stationary particles, e.g. in fixed beds the fluid passing successively through two or more beds the flow within the beds being predominantly vertical
    • B01J8/0461—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes with stationary particles, e.g. in fixed beds the fluid passing successively through two or more beds the flow within the beds being predominantly vertical in two or more cylindrical annular shaped beds
    • B01J8/0465—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes with stationary particles, e.g. in fixed beds the fluid passing successively through two or more beds the flow within the beds being predominantly vertical in two or more cylindrical annular shaped beds the beds being concentric
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B35/00—Boron; Compounds thereof
    • C01B35/06—Boron halogen compounds
    • C01B35/061—Halides
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2208/00—Processes carried out in the presence of solid particles; Reactors therefor
    • B01J2208/00008—Controlling the process
    • B01J2208/00017—Controlling the temperature
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2208/00—Processes carried out in the presence of solid particles; Reactors therefor
    • B01J2208/00008—Controlling the process
    • B01J2208/00017—Controlling the temperature
    • B01J2208/00389—Controlling the temperature using electric heating or cooling elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2208/00—Processes carried out in the presence of solid particles; Reactors therefor
    • B01J2208/00008—Controlling the process
    • B01J2208/00017—Controlling the temperature
    • B01J2208/00433—Controlling the temperature using electromagnetic heating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2208/00—Processes carried out in the presence of solid particles; Reactors therefor
    • B01J2208/00008—Controlling the process
    • B01J2208/00539—Pressure

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Inorganic Chemistry (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Devices And Processes Conducted In The Presence Of Fluids And Solid Particles (AREA)
CN201180052929.3A 2010-08-30 2011-08-28 由固体材料制备化合物或其中间体以及使用该化合物和中间体的设备和方法 Active CN103201824B (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201610643193.1A CN106237934B (zh) 2010-08-30 2011-08-28 由固体材料制备化合物或其中间体以及使用该化合物和中间体的设备和方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US37837510P 2010-08-30 2010-08-30
US61/378,375 2010-08-30
PCT/US2011/049473 WO2012030679A2 (en) 2010-08-30 2011-08-28 Apparatus and method for preparation of compounds or intermediates thereof from a solid material, and using such compounds and intermediates

Related Child Applications (1)

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CN103201824A CN103201824A (zh) 2013-07-10
CN103201824B true CN103201824B (zh) 2016-09-07

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CN201610643193.1A Active CN106237934B (zh) 2010-08-30 2011-08-28 由固体材料制备化合物或其中间体以及使用该化合物和中间体的设备和方法

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US (2) US9205392B2 (https=)
EP (1) EP2612349A4 (https=)
JP (2) JP5908476B2 (https=)
KR (1) KR101902022B1 (https=)
CN (2) CN103201824B (https=)
TW (2) TWI538020B (https=)
WO (1) WO2012030679A2 (https=)

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SG2014011944A (en) * 2005-08-30 2014-08-28 Advanced Tech Materials Boron ion implantation using alternative fluorinated boron precursors, and formation of large boron hydrides for implantation
US8598022B2 (en) 2009-10-27 2013-12-03 Advanced Technology Materials, Inc. Isotopically-enriched boron-containing compounds, and methods of making and using same
KR101902022B1 (ko) 2010-08-30 2018-09-27 엔테그리스, 아이엔씨. 고체 물질로부터 화합물 또는 그의 중간체를 제조하기 위한 장치 및 방법, 및 이러한 화합물과 중간체를 사용하는 방법
TWI583442B (zh) * 2011-10-10 2017-05-21 恩特葛瑞斯股份有限公司 Ｂ２ｆ４之製造程序
US10744426B2 (en) 2015-12-31 2020-08-18 Crystaphase Products, Inc. Structured elements and methods of use
US10054140B2 (en) 2016-02-12 2018-08-21 Crystaphase Products, Inc. Use of treating elements to facilitate flow in vessels
CN110656024B (zh) * 2018-06-29 2024-06-04 厦门大学 微流控芯片和生化检测装置
EP4076719A1 (en) 2019-12-20 2022-10-26 Crystaphase Products Inc. Resaturation of gas into a liquid feedstream
JP2023541252A (ja) 2020-09-09 2023-09-29 クリスタフェーズ・プロダクツ・インコーポレーテッド プロセス容器進入ゾーン

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CN103201824A (zh) 2013-07-10
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CN106237934B (zh) 2019-08-27
EP2612349A2 (en) 2013-07-10
US9764298B2 (en) 2017-09-19
CN106237934A (zh) 2016-12-21
US20160107136A1 (en) 2016-04-21
US9205392B2 (en) 2015-12-08
WO2012030679A2 (en) 2012-03-08
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