CN102891257B - 光电转换装置 - Google Patents

光电转换装置 Download PDF

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Publication number
CN102891257B
CN102891257B CN201210252771.0A CN201210252771A CN102891257B CN 102891257 B CN102891257 B CN 102891257B CN 201210252771 A CN201210252771 A CN 201210252771A CN 102891257 B CN102891257 B CN 102891257B
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CN
China
Prior art keywords
semiconductor layer
silicon semiconductor
light
photoelectric conversion
silicon
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Expired - Fee Related
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CN201210252771.0A
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English (en)
Chinese (zh)
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CN102891257A (zh
Inventor
山崎舜平
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Semiconductor Energy Laboratory Co Ltd
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Semiconductor Energy Laboratory Co Ltd
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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F10/00Individual photovoltaic cells, e.g. solar cells
    • H10F10/10Individual photovoltaic cells, e.g. solar cells having potential barriers
    • H10F10/16Photovoltaic cells having only PN heterojunction potential barriers
    • H10F10/164Photovoltaic cells having only PN heterojunction potential barriers comprising heterojunctions with Group IV materials, e.g. ITO/Si or GaAs/SiGe photovoltaic cells
    • H10F10/165Photovoltaic cells having only PN heterojunction potential barriers comprising heterojunctions with Group IV materials, e.g. ITO/Si or GaAs/SiGe photovoltaic cells the heterojunctions being Group IV-IV heterojunctions, e.g. Si/Ge, SiGe/Si or Si/SiC photovoltaic cells
    • H10F10/166Photovoltaic cells having only PN heterojunction potential barriers comprising heterojunctions with Group IV materials, e.g. ITO/Si or GaAs/SiGe photovoltaic cells the heterojunctions being Group IV-IV heterojunctions, e.g. Si/Ge, SiGe/Si or Si/SiC photovoltaic cells the Group IV-IV heterojunctions being heterojunctions of crystalline and amorphous materials, e.g. silicon heterojunction [SHJ] photovoltaic cells
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F71/00Manufacture or treatment of devices covered by this subclass
    • H10F71/10Manufacture or treatment of devices covered by this subclass the devices comprising amorphous semiconductor material
    • H10F71/103Manufacture or treatment of devices covered by this subclass the devices comprising amorphous semiconductor material including only Group IV materials
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K30/00Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation
    • H10K30/10Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation comprising heterojunctions between organic semiconductors and inorganic semiconductors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K30/00Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation
    • H10K30/50Photovoltaic [PV] devices
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K85/00Organic materials used in the body or electrodes of devices covered by this subclass
    • H10K85/60Organic compounds having low molecular weight
    • H10K85/615Polycyclic condensed aromatic hydrocarbons, e.g. anthracene
    • H10K85/621Aromatic anhydride or imide compounds, e.g. perylene tetra-carboxylic dianhydride or perylene tetracarboxylic di-imide
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K85/00Organic materials used in the body or electrodes of devices covered by this subclass
    • H10K85/60Organic compounds having low molecular weight
    • H10K85/631Amine compounds having at least two aryl rest on at least one amine-nitrogen atom, e.g. triphenylamine
    • H10K85/633Amine compounds having at least two aryl rest on at least one amine-nitrogen atom, e.g. triphenylamine comprising polycyclic condensed aromatic hydrocarbons as substituents on the nitrogen atom
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K85/00Organic materials used in the body or electrodes of devices covered by this subclass
    • H10K85/60Organic compounds having low molecular weight
    • H10K85/649Aromatic compounds comprising a hetero atom
    • H10K85/657Polycyclic condensed heteroaromatic hydrocarbons
    • H10K85/6572Polycyclic condensed heteroaromatic hydrocarbons comprising only nitrogen in the heteroaromatic polycondensed ring system, e.g. phenanthroline or carbazole
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • Y02E10/547Monocrystalline silicon PV cells
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • Y02E10/549Organic PV cells
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

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  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Photovoltaic Devices (AREA)
  • Electroluminescent Light Sources (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Sustainable Energy (AREA)
CN201210252771.0A 2011-07-21 2012-07-20 光电转换装置 Expired - Fee Related CN102891257B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2011-159797 2011-07-21
JP2011159797 2011-07-21

Publications (2)

Publication Number Publication Date
CN102891257A CN102891257A (zh) 2013-01-23
CN102891257B true CN102891257B (zh) 2016-12-21

Family

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Family Applications (1)

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CN201210252771.0A Expired - Fee Related CN102891257B (zh) 2011-07-21 2012-07-20 光电转换装置

Country Status (3)

Country Link
US (1) US9159939B2 (https=)
JP (1) JP5973273B2 (https=)
CN (1) CN102891257B (https=)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013058562A (ja) 2011-09-07 2013-03-28 Semiconductor Energy Lab Co Ltd 光電変換装置
JP5927027B2 (ja) 2011-10-05 2016-05-25 株式会社半導体エネルギー研究所 光電変換装置
JP5917082B2 (ja) 2011-10-20 2016-05-11 株式会社半導体エネルギー研究所 光電変換装置の作製方法
JP6108858B2 (ja) 2012-02-17 2017-04-05 株式会社半導体エネルギー研究所 p型半導体材料および半導体装置
WO2015045263A1 (ja) * 2013-09-26 2015-04-02 パナソニックIpマネジメント株式会社 太陽電池及び太陽電池モジュール
CN106463563B (zh) * 2014-07-17 2019-05-10 索尼公司 光电转换元件及其制造方法、成像装置、光学传感器
JP6529743B2 (ja) * 2014-11-06 2019-06-12 株式会社豊田中央研究所 光電変換素子
JP7064823B2 (ja) * 2016-08-31 2022-05-11 株式会社マテリアル・コンセプト 太陽電池及びその製造方法
CN119008712A (zh) 2023-10-13 2024-11-22 浙江晶科能源有限公司 太阳能电池及光伏组件
CN119008711A (zh) 2023-10-13 2024-11-22 浙江晶科能源有限公司 太阳能电池及其制备方法、光伏组件

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1703801A (zh) * 2002-10-03 2005-11-30 株式会社藤仓 电极基板、光电变换元件、导电性玻璃基板及其制作方法以及色素增感太阳电池
CN101567397A (zh) * 2008-04-25 2009-10-28 株式会社半导体能源研究所 光电转换装置及光电转换装置的制造方法
KR100990864B1 (ko) * 2010-05-11 2010-10-29 엘지전자 주식회사 태양전지 및 그 제조 방법

Family Cites Families (42)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5213628A (en) 1990-09-20 1993-05-25 Sanyo Electric Co., Ltd. Photovoltaic device
JPH0795603B2 (ja) 1990-09-20 1995-10-11 三洋電機株式会社 光起電力装置
FR2694451B1 (fr) 1992-07-29 1994-09-30 Asulab Sa Cellule photovoltaïque.
JP3203078B2 (ja) * 1992-12-09 2001-08-27 三洋電機株式会社 光起電力素子
JP2891600B2 (ja) * 1992-12-25 1999-05-17 三洋電機株式会社 ヘテロ接合デバイスの製造方法
JPH088484A (ja) * 1994-06-22 1996-01-12 Sony Corp Ii−vi族化合物半導体から成る発光受光素子用の電極
JPH08102360A (ja) 1994-09-29 1996-04-16 Toyota Central Res & Dev Lab Inc 有機無機複合薄膜型電界発光素子
JP2824411B2 (ja) 1995-08-25 1998-11-11 株式会社豊田中央研究所 有機薄膜発光素子
JPH09181343A (ja) * 1995-12-26 1997-07-11 Kyocera Corp 光電変換装置
ES2197971T3 (es) * 1996-01-10 2004-01-16 Canon Kabushiki Kaisha Modulo de celula solar con cubierta superficial especifica con buenas caracteristicas de resistencia a humedad y transparencia.
JP3469729B2 (ja) 1996-10-31 2003-11-25 三洋電機株式会社 太陽電池素子
JPH11307259A (ja) 1998-04-23 1999-11-05 Tdk Corp 有機el素子
JP3966638B2 (ja) 1999-03-19 2007-08-29 株式会社東芝 多色色素増感透明半導体電極部材とその製造方法、多色色素増感型太陽電池、及び表示素子
JP4420486B2 (ja) 1999-04-30 2010-02-24 出光興産株式会社 有機エレクトロルミネッセンス素子およびその製造方法
JP4461656B2 (ja) 2000-12-07 2010-05-12 セイコーエプソン株式会社 光電変換素子
US7288887B2 (en) 2001-03-08 2007-10-30 Lg.Philips Lcd Co. Ltd. Devices with multiple organic-metal mixed layers
JP3933591B2 (ja) 2002-03-26 2007-06-20 淳二 城戸 有機エレクトロルミネッセント素子
US7291782B2 (en) 2002-06-22 2007-11-06 Nanosolar, Inc. Optoelectronic device and fabrication method
US7158161B2 (en) 2002-09-20 2007-01-02 Matsushita Electric Industrial Co., Ltd. Organic electroluminescence element and an exposure unit and image-forming apparatus both using the element
TWI326920B (en) * 2002-10-03 2010-07-01 Fujikura Ltd Electrode substrate, photoelectric transducer, conductive glass substrate and manufacturing method thereof, and dye-sensitized solar cell
US7605327B2 (en) * 2003-05-21 2009-10-20 Nanosolar, Inc. Photovoltaic devices fabricated from nanostructured template
JP2005026121A (ja) 2003-07-03 2005-01-27 Fujitsu Ltd 有機el素子及びその製造方法並びに有機elディスプレイ
KR20140107696A (ko) 2003-09-26 2014-09-04 가부시키가이샤 한도오따이 에네루기 켄큐쇼 발광장치
JP4476594B2 (ja) 2003-10-17 2010-06-09 淳二 城戸 有機エレクトロルミネッセント素子
JP4243237B2 (ja) 2003-11-10 2009-03-25 淳二 城戸 有機素子、有機el素子、有機太陽電池、及び、有機fet構造、並びに、有機素子の製造方法
JP4300176B2 (ja) 2003-11-13 2009-07-22 ローム株式会社 有機エレクトロルミネッセント素子
JP2005251587A (ja) 2004-03-04 2005-09-15 Tdk Corp 有機el素子
JP4925569B2 (ja) 2004-07-08 2012-04-25 ローム株式会社 有機エレクトロルミネッセント素子
JP5227497B2 (ja) * 2004-12-06 2013-07-03 株式会社半導体エネルギー研究所 光電変換素子の作製方法
US7989694B2 (en) 2004-12-06 2011-08-02 Semiconductor Energy Laboratory Co., Ltd. Photoelectric conversion element, solar battery, and photo sensor
JP4712372B2 (ja) 2004-12-16 2011-06-29 株式会社半導体エネルギー研究所 発光装置
US7626198B2 (en) 2005-03-22 2009-12-01 Semiconductor Energy Laboratory Co., Ltd. Nonlinear element, element substrate including the nonlinear element, and display device
US8659008B2 (en) 2005-07-08 2014-02-25 Semiconductor Energy Laboratory Co., Ltd. Composite material and light emitting element, light emitting device, and electronic device using the composite material
US20090139558A1 (en) 2007-11-29 2009-06-04 Shunpei Yamazaki Photoelectric conversion device and manufacturing method thereof
JP5286046B2 (ja) 2007-11-30 2013-09-11 株式会社半導体エネルギー研究所 光電変換装置の製造方法
EP2075850A3 (en) 2007-12-28 2011-08-24 Semiconductor Energy Laboratory Co, Ltd. Photoelectric conversion device and manufacturing method thereof
JP5503946B2 (ja) * 2008-11-28 2014-05-28 株式会社半導体エネルギー研究所 光電変換装置
US8546685B2 (en) * 2009-07-03 2013-10-01 Kaneka Corporation Crystalline silicon based solar cell and method for manufacturing thereof
WO2011001842A1 (en) * 2009-07-03 2011-01-06 Semiconductor Energy Laboratory Co., Ltd. Photoelectric conversion device and manufacturing method thereof
US20110041910A1 (en) 2009-08-18 2011-02-24 Semiconductor Energy Laboratory Co., Ltd. Photoelectric conversion device and manufacturing method thereof
KR101119916B1 (ko) * 2009-08-24 2012-03-13 삼성전자주식회사 그래핀 전극과 유기물/무기물 복합소재를 사용한 전자 소자 및 그 제조 방법
JP5452196B2 (ja) * 2009-12-03 2014-03-26 株式会社Tftech p型半導体の性能を持つ酸化銅(I)膜の製造方法および該膜作成用の溶液の製造方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1703801A (zh) * 2002-10-03 2005-11-30 株式会社藤仓 电极基板、光电变换元件、导电性玻璃基板及其制作方法以及色素增感太阳电池
CN101567397A (zh) * 2008-04-25 2009-10-28 株式会社半导体能源研究所 光电转换装置及光电转换装置的制造方法
KR100990864B1 (ko) * 2010-05-11 2010-10-29 엘지전자 주식회사 태양전지 및 그 제조 방법

Also Published As

Publication number Publication date
CN102891257A (zh) 2013-01-23
US9159939B2 (en) 2015-10-13
JP2013042126A (ja) 2013-02-28
US20130020568A1 (en) 2013-01-24
JP5973273B2 (ja) 2016-08-23

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