CN102812546B - 制造双面装备有芯片的晶片的方法 - Google Patents
制造双面装备有芯片的晶片的方法 Download PDFInfo
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- CN102812546B CN102812546B CN201080065914.6A CN201080065914A CN102812546B CN 102812546 B CN102812546 B CN 102812546B CN 201080065914 A CN201080065914 A CN 201080065914A CN 102812546 B CN102812546 B CN 102812546B
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- H01L25/10—Assemblies consisting of a plurality of semiconductor or other solid state devices all the devices being of a type provided for in a single subclass of subclasses H10B, H10D, H10F, H10H, H10K or H10N, e.g. assemblies of rectifier diodes the devices having separate containers
- H01L25/105—Assemblies consisting of a plurality of semiconductor or other solid state devices all the devices being of a type provided for in a single subclass of subclasses H10B, H10D, H10F, H10H, H10K or H10N, e.g. assemblies of rectifier diodes the devices having separate containers the devices being integrated devices of class H10
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01005—Boron [B]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01013—Aluminum [Al]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01033—Arsenic [As]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01052—Tellurium [Te]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01082—Lead [Pb]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/095—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00 with a principal constituent of the material being a combination of two or more materials provided in the groups H01L2924/013 - H01L2924/0715
- H01L2924/097—Glass-ceramics, e.g. devitrified glass
- H01L2924/09701—Low temperature co-fired ceramic [LTCC]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/12—Passive devices, e.g. 2 terminal devices
- H01L2924/1204—Optical Diode
- H01L2924/12042—LASER
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Pressure Welding/Diffusion-Bonding (AREA)
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| PCT/EP2010/002055 WO2011120537A1 (de) | 2010-03-31 | 2010-03-31 | Verfahren zur herstellung eines doppelseitig mit chips bestückten wafers |
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| US9827757B2 (en) | 2011-07-07 | 2017-11-28 | Brewer Science Inc. | Methods of transferring device wafers or layers between carrier substrates and other surfaces |
| CN106464130B (zh) * | 2014-04-09 | 2019-03-22 | 伊莱克特兰尼克斯公司 | 多模块dc到dc功率变换系统 |
| WO2020178080A1 (en) * | 2019-03-05 | 2020-09-10 | Evatec Ag | Method for processing fragile substrates employing temporary bonding of the substrates to carriers |
| WO2021164855A1 (de) | 2020-02-18 | 2021-08-26 | Ev Group E. Thallner Gmbh | Verfahren und vorrichtung zur übertragung von bauteilen |
| US20250153481A1 (en) | 2022-03-25 | 2025-05-15 | Ev Group E. Thallner Gmbh | Method and substrate system for the separation of carrier substrates |
| KR102788502B1 (ko) * | 2023-07-27 | 2025-04-01 | 한국기계연구원 | 효과적인 디본딩이 가능한 웨이퍼 모듈, 및 이의 본딩 및 디본딩 방법 |
| WO2025228530A1 (de) | 2024-05-02 | 2025-11-06 | Ev Group E. Thallner Gmbh | Verfahren zum temporären verbinden eines produktsubstrats und eines trägersubstrats, trägersubstrat, produktsubstrat und schichtsystem sowie deren anordnung und eine vorrichtung zum durchführen eines solchen verfahrens |
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| CN1528009A (zh) * | 2001-04-13 | 2004-09-08 | ����ԭ����ίԱ�� | 可拆除基片或可拆除结构及其生产方法 |
| US20090218560A1 (en) * | 2008-01-24 | 2009-09-03 | Brewer Science Inc. | Method for reversibly mounting a device wafer to a carrier substrate |
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2010
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- 2010-03-31 KR KR1020127023406A patent/KR20130040779A/ko not_active Ceased
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- 2010-03-31 KR KR1020167016168A patent/KR20160075845A/ko not_active Ceased
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2011
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| CN1528009A (zh) * | 2001-04-13 | 2004-09-08 | ����ԭ����ίԱ�� | 可拆除基片或可拆除结构及其生产方法 |
| CN1491439A (zh) * | 2001-11-22 | 2004-04-21 | ���ṫ˾ | 多芯片电路模块及其制造方法 |
| US20090218560A1 (en) * | 2008-01-24 | 2009-09-03 | Brewer Science Inc. | Method for reversibly mounting a device wafer to a carrier substrate |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2011120537A1 (de) | 2011-10-06 |
| US9224630B2 (en) | 2015-12-29 |
| CN102812546A (zh) | 2012-12-05 |
| JP2013524493A (ja) | 2013-06-17 |
| KR20160075845A (ko) | 2016-06-29 |
| SG183820A1 (en) | 2012-10-30 |
| KR20170042817A (ko) | 2017-04-19 |
| TWI518758B (zh) | 2016-01-21 |
| EP2553719A1 (de) | 2013-02-06 |
| KR101856429B1 (ko) | 2018-05-09 |
| TW201145370A (en) | 2011-12-16 |
| JP5763169B2 (ja) | 2015-08-12 |
| EP2553719B1 (de) | 2019-12-04 |
| US20130011997A1 (en) | 2013-01-10 |
| KR20130040779A (ko) | 2013-04-24 |
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