WO2011120537A1 - Verfahren zur herstellung eines doppelseitig mit chips bestückten wafers - Google Patents

Verfahren zur herstellung eines doppelseitig mit chips bestückten wafers Download PDF

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Publication number
WO2011120537A1
WO2011120537A1 PCT/EP2010/002055 EP2010002055W WO2011120537A1 WO 2011120537 A1 WO2011120537 A1 WO 2011120537A1 EP 2010002055 W EP2010002055 W EP 2010002055W WO 2011120537 A1 WO2011120537 A1 WO 2011120537A1
Authority
WO
WIPO (PCT)
Prior art keywords
wafer
intermediate layer
layer
adhesion
adhesion layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP2010/002055
Other languages
German (de)
English (en)
French (fr)
Inventor
Jürgen Burggraf
Markus Wimplinger
Harald Wiesbauer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
EV Group E Thallner GmbH
Original Assignee
EV Group E Thallner GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by EV Group E Thallner GmbH filed Critical EV Group E Thallner GmbH
Priority to EP10715497.3A priority Critical patent/EP2553719B1/de
Priority to KR1020177009655A priority patent/KR101856429B1/ko
Priority to SG2012063681A priority patent/SG183820A1/en
Priority to PCT/EP2010/002055 priority patent/WO2011120537A1/de
Priority to US13/635,457 priority patent/US9224630B2/en
Priority to CN201080065914.6A priority patent/CN102812546B/zh
Priority to KR1020167016168A priority patent/KR20160075845A/ko
Priority to JP2013501635A priority patent/JP5763169B2/ja
Priority to KR1020127023406A priority patent/KR20130040779A/ko
Priority to TW100106549A priority patent/TWI518758B/zh
Publication of WO2011120537A1 publication Critical patent/WO2011120537A1/de
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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    • H01L25/03—Assemblies consisting of a plurality of semiconductor or other solid state devices all the devices being of a type provided for in a single subclass of subclasses H10B, H10D, H10F, H10H, H10K or H10N, e.g. assemblies of rectifier diodes
    • H01L25/04—Assemblies consisting of a plurality of semiconductor or other solid state devices all the devices being of a type provided for in a single subclass of subclasses H10B, H10D, H10F, H10H, H10K or H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
    • H01L25/065—Assemblies consisting of a plurality of semiconductor or other solid state devices all the devices being of a type provided for in a single subclass of subclasses H10B, H10D, H10F, H10H, H10K or H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H10D89/00
    • H01L25/0652—Assemblies consisting of a plurality of semiconductor or other solid state devices all the devices being of a type provided for in a single subclass of subclasses H10B, H10D, H10F, H10H, H10K or H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H10D89/00 the devices being arranged next and on each other, i.e. mixed assemblies
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L25/00—Assemblies consisting of a plurality of semiconductor or other solid state devices
    • H01L25/03—Assemblies consisting of a plurality of semiconductor or other solid state devices all the devices being of a type provided for in a single subclass of subclasses H10B, H10D, H10F, H10H, H10K or H10N, e.g. assemblies of rectifier diodes
    • H01L25/10—Assemblies consisting of a plurality of semiconductor or other solid state devices all the devices being of a type provided for in a single subclass of subclasses H10B, H10D, H10F, H10H, H10K or H10N, e.g. assemblies of rectifier diodes the devices having separate containers
    • H01L25/105—Assemblies consisting of a plurality of semiconductor or other solid state devices all the devices being of a type provided for in a single subclass of subclasses H10B, H10D, H10F, H10H, H10K or H10N, e.g. assemblies of rectifier diodes the devices having separate containers the devices being integrated devices of class H10
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01005—Boron [B]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01013—Aluminum [Al]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01033—Arsenic [As]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01052—Tellurium [Te]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01082—Lead [Pb]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/095—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00 with a principal constituent of the material being a combination of two or more materials provided in the groups H01L2924/013 - H01L2924/0715
    • H01L2924/097—Glass-ceramics, e.g. devitrified glass
    • H01L2924/09701—Low temperature co-fired ceramic [LTCC]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10—Details of semiconductor or other solid state devices to be connected
    • H01L2924/11—Device type
    • H01L2924/12—Passive devices, e.g. 2 terminal devices
    • H01L2924/1204—Optical Diode
    • H01L2924/12042—LASER

Definitions

  • the present invention relates to a method for producing a, in particular double-sided, chip-stocked product wafer according to claim 1.
  • the further optimal utilization of the available space means that recently more and more double-sided, al so on both sides with chips or dices equipped wafers are required, with Through Silicon Vias (TSVs) electrical contacts between the front and Back of the product wafer.
  • TSVs Through Silicon Vias
  • Thinning / thinning of the product wafer is a stabilization of the large area, usually a diameter of 300 millimeters
  • Carrier wafer in the case of single-sided wafers is therefore comparatively simple, since the carrier wafer can be temporarily bonded on the side facing away from the chip-equipped side. Again, however, process steps on the front and
  • WO 2009/0945558 A2 describes a temporary bonding method for a single-sided product wafer.
  • the present invention has for its object to provide a method for producing a, in particular double-sided equipped with chips, product wafer, by which the product wafer can be handled safely and gently during the manufacturing process.
  • the basic idea of the present invention is to provide a method by means of which the two rigid carrier wafers bonded or bonded to the respective product wafer can be selectively released, thereby enabling a transfer of the product wafer from the first to the second carrier wafer, during which the product wafer is constantly stabilized. This is achieved by the
  • Adhesion change upon exposure to the bonding layer in particular by mechanical, thermal, optical and / or chemical methods have. It is essential that, due to the different properties of the two intermediate layers, one of the two intermediate layers is selective with respect to the other
  • Interlayer maintains its bond strength at least much stronger than the bond strength of the other intermediate layer.
  • the adhesion is in each case based on the effective area of the bonding layer.
  • a first method group according to the invention is characterized
  • Embodiment of the invention provides, either
  • adhesion-reducing substances or adhesion-promoting substances to the surface of the carrier wafer completely or partially treat and / or treat the surface of the product wafer in whole or in part.
  • different adhesive material of the intermediate layers different pretreatment at least one
  • an indexed change in the adhesion forces of the intermediate layers is made by certain measures.
  • the adhesion force of one of the two intermediate layers or both intermediate layers is changed in such a way that the adhesion forces of the two intermediate layers after the indexed change in the
  • Adhesive force is different. According to the invention, the following possibilities are provided:
  • Targeted local action in particular by irradiation of an intermediate layer, while the other intermediate layer is not or only partially irradiated.
  • the targeted local action is possible in another embodiment of the invention by the action of solvents on only one intermediate layer, while the other intermediate layer not or only partially with
  • Solvent is applied. Selectivity by choice of material and at least partially inert behavior of an intermediate layer to the applied
  • Interlayer has a stronger bonding force against shear forces. It is particularly preferred here, one of the two
  • the rigid carrier wafers are preferably by a high
  • the intermediate layer assigned to this carrier wafer or the adhesion layer provided in the intermediate layer by chemical, thermal, optical and / or mechanical properties of the adhesion layer or
  • Influence changed so much that you gently and the carrier wafer damage-free while the product wafer remains on the other carrier wafer.
  • the other carrier wafer stabilizes the product wafer at the same time.
  • Chips in the sense of the present invention are any structures or integrated electronic components that are usually applied to wafers.
  • Bumps or bump groups are used to connect the chips to the product wafer or the electronic connection of individual circuits of the chip with applied on the opposite side of the product wafer
  • inventive method not only a product wafer, in particular double-sided, can be equipped with chips, but the inventive method is particularly for stacks of,
  • Carrier wafer a gentle and effective and flexible process for the production of stacked product wafers is specified.
  • the processing of the product wafer may comprise one or more known processes, in particular the application of bumps and / or bump groups and / or chips to the second side and / or the
  • Redistribution Layer Product wafers for the purposes of the present invention also include so-called silicone imposers, which have only wiring layers (RDL layers) in order to later accept chips with active structures.
  • the bonding force of the first adhesion layer is smaller than that
  • Carrier wafer acting connection force or adhesive force which means a separation of the carrier wafer from the respective product wafer
  • first adhesion layer has smaller dimensions than the second adhesion layer, in particular a smaller contact surface of the
  • Adhesion layer with the first carrier wafer and the product wafer and / or a thinner layer thickness the invention can be implemented solely by choosing the geometric configuration, so that even in their chemical properties identical intermediate layers or intermediate layers can be used from the same material.
  • Adhesion layer having such different chemical properties that the first adhesion layer is at least partially dissolved by a first solvent, while the second adhesion layer is at least predominantly inert with respect to the first solvent.
  • the invention is implemented by the chemical properties of the adhesion layers or intermediate layers.
  • the selectivity of the solvents allows a targeted dissolution of defined regions, in particular edge regions, of the respective adhesion layer or intermediate layer, ie a selective reduction of the effective adhesion surface / bonding surface. It is advantageous if the ratio of the rate of dissolution A i of the first solvent relative to the first adhesion layer to the rate of dissolution A 2 of the second solvent relative to the second
  • Adhesion layer is less than 1: 3, in particular less than 1: 1 0, preferably less than 1: 20, more preferably less than 1: 100.
  • Embodiment in their thermal properties, in particular the viscosity as a function of temperature.
  • the carrier wafer to be peeled first is bonded to an intermediate layer with an adhesive which has a lower viscosity at a certain temperature than the other carrier wafer.
  • the carrier wafer to be removed is then separated by shearing non-destructive.
  • the light has two characteristic physical parameters, on the one hand the wavelength of the photons, which correlates with the energy and which is able to control especially chemical crosslinking processes and on the other hand the intensity, ie the number of photons per time and area unit, directly with the heating power related.
  • the material of the respective adhesion layer has a characteristic Frequency-dependent and thus wavelength-dependent spectrum of its dielectric properties, which can also be referred to as resonance spectrum.
  • some polymers crosslink under UV irradiation whereas infrared radiation can be used to directly heat materials and control physical properties such as viscosity.
  • a local heating of the adhesion layer can be effected, for example, by laser light, which is particularly the case in the region of the circumference of the intermediate layer
  • the intermediate layer with the lower shear strength provides less resistance to an externally applied thrust, so that the carrier wafer secured to the product wafer by this intermediate layer can be released or released in front of the opposite carrier wafer. Adhesion is predominantly effected by van der Waals forces.
  • the separation of the carrier wafer by shearing can be further optimized by combination with a temperature treatment, in particular when using thermoplastic adhesives as connecting agents, which have different viscosity characteristics as a function of the temperature.
  • a temperature treatment in particular when using thermoplastic adhesives as connecting agents, which have different viscosity characteristics as a function of the temperature.
  • the second, not or subsequently to be dissolved intermediate layer has a thickness B 2 of 1 5 to 50 ⁇ , preferably 20 to 40 ⁇ more preferably 25 to 30 ⁇ .
  • first and / or the second adhesion layer are formed annularly, in particular in the region of the circumference of the product wafer. In this way the adhesion layer of the
  • the first intermediate layer in particular within the annular adhesion layer, comprises a film with a low adhesion effect and / or the second intermediate layer a,
  • low adhesion is meant in relation to the adhesion of the adhesion layer which is especially at least twice, preferably at least three times, more preferably at least five times, ideally at least ten times stronger.
  • the relation is related to the adhesion effect in the dynamic state, ie during the separation process, but in particular additionally in relation to the static state, ie before the
  • the film according to an embodiment of the present invention may be used as a partial coating of the first and / or second intermediate layer or first and / or second adhesion layer may be provided, wherein the partial coating leads to a reduction of the adhesion effect, in particular as
  • Non-stick coating It is essential that the film reduces a part of the effective contact surface of the respective intermediate layer with the corresponding carrier wafer in the adhesion effect.
  • An inventively provided device has suitable means for performing the method described above, namely
  • Selective separating means for selectively separating the first carrier wafer from the product wafer due to the different characteristics of the first intermediate layer from the second intermediate layer.
  • For the mechanical separation for example by applying
  • FIG. 1 shows a product wafer in a first, according to the invention
  • Fig. 2 shows a product wafer in a second, inventive
  • Fig. 3 shows a product wafer in a third, inventive
  • Step, 4 shows a product wafer in a fourth, according to the invention
  • Fig. 6 shows a product wafer in a sixth, according to the invention
  • FIG. 7 shows a product wafer in a seventh, according to the invention
  • Fig. 1 a product wafer in an alternative seventh
  • product wafer 1 which is equipped with bumps 4 and 4 formed from the bumps bump groups 5.
  • the product wafer 1 is at this time relatively stable due to its thickness Hi and thus relatively stable without auxiliary means.
  • the Number of bumps 4 and their position within a bump group 5 depend on the respective chip 1 5 (also referred to as dice), which is applied to the bumps 4 in a later method step (see FIGS. 4 and 9).
  • the product wafer 1 has a first side 3 and a second side 2, the bumps 4 and bump groups 5 in the first
  • Process step according to Figure 1 are applied to the first page 3.
  • the application is done in a manner known in the art.
  • the product wafer 1 is temporarily stabilized with its first side 3 to a first one
  • the first intermediate layer 18 consists of a first adhesion layer 6 and a first film 7, the first adhesion layer 6 serving for bonding and the film 7 for embedding the bumps 4.
  • Figures 1 to 12 each show a cross section and in the case shown here
  • the product wafer 1 is formed as a circular disk with a diameter D of 300 millimeters.
  • the product wafer 1 can also be any other disk shape and another
  • the first adhesion layer 6 is shown in FIG.
  • an annular body for the first adhesion layer 6 results.
  • the ratio R [/ D is less than 1/20, preferably less than 1/30, more preferably less than 1/60, nor more preferably less than 1/120.
  • the ring width Ri is in particular less than 15 mm, preferably less than 10 mm, more preferably less than 5 mm, more preferably less than 2 mm.
  • the film 7 is arranged and is completely enclosed by the product wafer 1, the first adhesion layer 6 and the first carrier wafer 8.
  • the film 7 is according to a preferred embodiment as
  • Partial coating of the first adhesive layer 6 is provided, wherein the adhesion layer 6 in this alternative, not shown
  • Embodiment over the entire first carrier wafer 8 extends.
  • the partial coating is provided in the dimensions analogous to the film 7 shown in FIG.
  • the first intermediate layer 1 8 ' is formed from a single material and extends over the entire surface of the product wafer 1. In this case, the first intermediate layer 1 8 'in their adhesion from the
  • Adhesion so the bond strength decreases, in particular by reducing the viscosity, so that the adhesive reduced one
  • the product wafer 1 is thinned back by known methods from its original thickness Hi according to FIG. 1 to a thickness H 2 corresponding to the end product according to FIG. 1 2 smaller than 1 ⁇ , in particular smaller than 100 ⁇ , preferably smaller than 70 ⁇ more preferably less than 50 ⁇ , even more preferably less than 30 ⁇ , more preferably less than 20 ⁇ .
  • chips 1 2 are applied to the associated bumps 10 and bump groups 11, respectively
  • One of the decisive process steps according to the invention is the seventh method step shown in FIG. 7, in which the second side 2, analogously to the method step described in FIG. 2, has a second intermediate layer 1 7 which differs from the first intermediate layer 1 8 in at least one relevant property a second carrier wafer 13 is bonded.
  • the second intermediate layer 1 7 in this embodiment consists of a second adhesion layer 14, which is also from the lateral wafer periphery 19 of the product wafer 1 over a fraction of the
  • Diameter D in particular with a ring width R 2 to a maximum of one tenth of the diameter D extends.
  • the second adhesion layer 14 is formed as a circular ring having a ring width R 2 , which is greater than the ring width R i of the first adhesion layer 6.
  • the ratio R 1 / R 2 lies between 1/1 0 and 9/10, in particular between 1/5 and 4/5, preferably between 1/4 and 3/4, more preferably between 1/3 and 2/3.
  • the ratio R 2 / D is in particular less than 1/20, preferably less than 1/30, more preferably less than 1/60, more preferably less than 1 / 120.
  • the ring width R 2 is in particular less than 1 5 mm, preferably less than 10 mm, more preferably less than 5 mm, still
  • the thickness B i of the first intermediate layer 18 is greater than the thickness B 2 of the second
  • Intermediate layer 17 in particular in the ratio B j / B 2 of at least 3/2, preferably 2/1, more preferably 3/1, ideally at least 4/1.
  • Carrier wafer 8 by reducing the bonding force of the first
  • the reduction of the bond force may already be implemented or be done in an earlier process step.
  • the second carrier wafer 8 by
  • Embodiment by mechanical separation, in particular by introducing a mechanical element to a location on the peripheral edge of the intermediate layer done.
  • the mechanical element can
  • the second adhesion layer 14 for example, be a flat wedge. Due to the larger adhesion surface and the stronger bonding force of the second adhesion layer 14 compared to the first
  • Adhesion layer 6 the first carrier wafer 8 is automatically replaced. As far as remains of the film 7 or the adhesion layer 6 remain on the product wafer 2 when detaching, they can by a
  • the first carrier wafer 8 has accordingly been removed on account of the geometric configuration, that is to say because of the larger adhesion surface of the second adhesion layer 14.
  • the first intermediate layer 1 8 'different thermal property to the second
  • first, rigid carrier wafer 8 Bonding of the product wafer 1 with its first side 3 on a first, rigid carrier wafer 8 with a first intermediate layer 18 consisting of a first adhesion layer applied at least at the edge, at least partial detachment of the first adhesion layer 6,
  • first carrier wafer Separating the first carrier wafer, in particular by applying oppositely acting shear forces on the first carrier wafer 8 and the second carrier wafer 13 parallel to the product wafer 1 or by peeling off the first carrier wafer 8.
  • the first and second adhesion layers 6, 14 are preferably of the same material and over the entire area of the respective ones
  • Carrier wafer distributed wherein at the respective bonding surface / adhesion surface of the adhesion layers to j e election carrier wafer first and second part coatings of the first and second adhesion layers 6, 14 are applied to achieve a significant reduction in the adhesion force in the region of the application.
  • the first adhesion layer 1 8 is analogous to the embodiment according to FIG. 7 with a smaller ring width R 1 'than the ring width R 2' of the second one
  • Adhesion layer 1 7 is formed, so that is acted upon by a light source 29 to the first adhesion layer 1 8" and second adhesion layer 17 “, as far as it is the same material in both adhesion layers 17", 1 8 "Due to the larger ring width R2 ' the second adhesive layer 17 “is the first carrier wafer 8 in front of the second carrier wafer 1 3 detachable, especially since the light source 29 is formed with advantage relatively selective acting. It can work
  • UV light source for example, to act a UV light source.
  • Adhesion layer 1 7, 1 7 ', 1 7 " is such that at corresponding
  • Product wafer 1 and the second carrier wafer 13 acts.
  • chips 1 5 are applied to the bumps 4 and thus electrically connected to the chips 12.
  • Adhesion layer That is, analogous to that described above
  • the modification of the Nth adhesion layer / intermediate layer is carried out either directly on detachment of the Nth carrier wafer or before detachment of the Nth carrier wafer, in particular before bonding of the N + 1 th carrier wafer.
  • the area filled by the film 7 may be filled with gas or evacuated.
  • FIGS. 1 to 9 The embodiment shown in FIGS. 1 to 9 is described in FIG.

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Pressure Welding/Diffusion-Bonding (AREA)
PCT/EP2010/002055 2010-03-31 2010-03-31 Verfahren zur herstellung eines doppelseitig mit chips bestückten wafers Ceased WO2011120537A1 (de)

Priority Applications (10)

Application Number Priority Date Filing Date Title
EP10715497.3A EP2553719B1 (de) 2010-03-31 2010-03-31 Verfahren zur herstellung eines mit chips bestückten wafers mit hilfe von zwei selektiv abtrennbaren trägerwafern mit ringförmigen adhäsionsschichten mit unterschiedlichen ringbreiten
KR1020177009655A KR101856429B1 (ko) 2010-03-31 2010-03-31 양면에 칩이 장착되는 웨이퍼를 제작하기 위한 방법
SG2012063681A SG183820A1 (en) 2010-03-31 2010-03-31 Method for producing a wafer provided with chips
PCT/EP2010/002055 WO2011120537A1 (de) 2010-03-31 2010-03-31 Verfahren zur herstellung eines doppelseitig mit chips bestückten wafers
US13/635,457 US9224630B2 (en) 2010-03-31 2010-03-31 Method for producing a wafer provided with chips
CN201080065914.6A CN102812546B (zh) 2010-03-31 2010-03-31 制造双面装备有芯片的晶片的方法
KR1020167016168A KR20160075845A (ko) 2010-03-31 2010-03-31 양면에 칩이 장착되는 웨이퍼를 제작하기 위한 방법
JP2013501635A JP5763169B2 (ja) 2010-03-31 2010-03-31 二面上にチップを備えたウェハを製造するための方法
KR1020127023406A KR20130040779A (ko) 2010-03-31 2010-03-31 양면에 칩이 장착되는 웨이퍼를 제작하기 위한 방법
TW100106549A TWI518758B (zh) 2010-03-31 2011-02-25 製造設置晶片之晶圓的方法

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PCT/EP2010/002055 WO2011120537A1 (de) 2010-03-31 2010-03-31 Verfahren zur herstellung eines doppelseitig mit chips bestückten wafers

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CN (1) CN102812546B (enExample)
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