CN1026133C - 微波等离子体化学气相沉积装置 - Google Patents

微波等离子体化学气相沉积装置 Download PDF

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Publication number
CN1026133C
CN1026133C CN89108774.5A CN89108774A CN1026133C CN 1026133 C CN1026133 C CN 1026133C CN 89108774 A CN89108774 A CN 89108774A CN 1026133 C CN1026133 C CN 1026133C
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CN
China
Prior art keywords
film
chamber
etching
window
microwave
Prior art date
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Expired - Fee Related
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CN89108774.5A
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English (en)
Chinese (zh)
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CN1043348A (zh
Inventor
松山深照
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Canon Inc
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Canon Inc
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Application filed by Canon Inc filed Critical Canon Inc
Publication of CN1043348A publication Critical patent/CN1043348A/zh
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Publication of CN1026133C publication Critical patent/CN1026133C/zh
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Expired - Fee Related legal-status Critical Current

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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/511—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using microwave discharges
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/54—Apparatus specially adapted for continuous coating

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Chemical Vapour Deposition (AREA)
CN89108774.5A 1988-11-24 1989-11-24 微波等离子体化学气相沉积装置 Expired - Fee Related CN1026133C (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP88-294740 1988-11-24
JP63294740A JPH02141578A (ja) 1988-11-24 1988-11-24 堆積膜形成装置
JP294740/88 1988-11-24

Publications (2)

Publication Number Publication Date
CN1043348A CN1043348A (zh) 1990-06-27
CN1026133C true CN1026133C (zh) 1994-10-05

Family

ID=17811694

Family Applications (1)

Application Number Title Priority Date Filing Date
CN89108774.5A Expired - Fee Related CN1026133C (zh) 1988-11-24 1989-11-24 微波等离子体化学气相沉积装置

Country Status (5)

Country Link
US (1) US4995341A (enExample)
JP (1) JPH02141578A (enExample)
CN (1) CN1026133C (enExample)
DE (1) DE3938830A1 (enExample)
FR (1) FR2639474B1 (enExample)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5114770A (en) * 1989-06-28 1992-05-19 Canon Kabushiki Kaisha Method for continuously forming functional deposited films with a large area by a microwave plasma cvd method
DE69030140T2 (de) * 1989-06-28 1997-09-04 Canon Kk Verfahren und Anordnung zur kontinuierlichen Bildung einer durch Mikrowellen-Plasma-CVD niedergeschlagenen grossflächigen Dünnschicht
US5130170A (en) * 1989-06-28 1992-07-14 Canon Kabushiki Kaisha Microwave pcvd method for continuously forming a large area functional deposited film using a curved moving substrate web with microwave energy with a directivity in one direction perpendicular to the direction of microwave propagation
US5236511A (en) * 1990-03-16 1993-08-17 Schott Glaswerke Plasma CVD process for coating a dome-shaped substrate
US5443645A (en) * 1990-05-19 1995-08-22 Canon Kabushiki Kaisha Microwave plasma CVD apparatus comprising coaxially aligned multiple gas pipe gas feed structure
JP2714247B2 (ja) * 1990-10-29 1998-02-16 キヤノン株式会社 マイクロ波プラズマｃｖｄ法による大面積の機能性堆積膜を連続的に形成する方法及び装置
JP2824808B2 (ja) * 1990-11-16 1998-11-18 キヤノン株式会社 マイクロ波プラズマｃｖｄ法による大面積の機能性堆積膜を連続的に形成する装置
US5629054A (en) * 1990-11-20 1997-05-13 Canon Kabushiki Kaisha Method for continuously forming a functional deposit film of large area by micro-wave plasma CVD method
JP2810532B2 (ja) * 1990-11-29 1998-10-15 キヤノン株式会社 堆積膜形成方法及び堆積膜形成装置
JPH04329881A (ja) * 1991-05-01 1992-11-18 Canon Inc マイクロ波プラズマｃｖｄ法による堆積膜形成装置
US5919310A (en) * 1991-10-07 1999-07-06 Canon Kabushiki Kaisha Continuously film-forming apparatus provided with improved gas gate means
US5204272A (en) * 1991-12-13 1993-04-20 United Solar Systems Corporation Semiconductor device and microwave process for its manufacture
EP0595159B1 (de) * 1992-10-26 1997-12-29 Schott Glaswerke Verfahren und Vorrichtung zur Beschichtung der Innenfläche stark gewölbter im wesentlichen kalottenförmiger Substrate mittels CVD
US5366585A (en) * 1993-01-28 1994-11-22 Applied Materials, Inc. Method and apparatus for protection of conductive surfaces in a plasma processing reactor
US6835523B1 (en) 1993-05-09 2004-12-28 Semiconductor Energy Laboratory Co., Ltd. Apparatus for fabricating coating and method of fabricating the coating
US6171674B1 (en) 1993-07-20 2001-01-09 Semiconductor Energy Laboratory Co., Ltd. Hard carbon coating for magnetic recording medium
JP3659512B2 (ja) * 1993-12-20 2005-06-15 キヤノン株式会社 光起電力素子及びその形成方法及びその形成装置
US6096389A (en) * 1995-09-14 2000-08-01 Canon Kabushiki Kaisha Method and apparatus for forming a deposited film using a microwave CVD process
DE19601436A1 (de) * 1996-01-17 1997-07-24 Siegfried Dr Ing Straemke Verfahren und Vorrichtung zur Oberflächenbehandlung von Werkstücken
DE19701696C2 (de) * 1997-01-20 1999-02-18 Fraunhofer Ges Forschung Vorrichtung und Verfahren zur Beschichtung eines Substrates mittels eines chemischen Gasphasenabscheideverfahrens
DE102004045046B4 (de) * 2004-09-15 2007-01-04 Schott Ag Verfahren und Vorrichtung zum Aufbringen einer elektrisch leitfähigen transparenten Beschichtung auf ein Substrat
CN106166763A (zh) * 2008-07-14 2016-11-30 艾利丹尼森公司 切割涂胶标签的装置和方法
US20100196591A1 (en) * 2009-02-05 2010-08-05 Applied Materials, Inc. Modular pvd system for flex pv
EP2216831A1 (en) * 2009-02-05 2010-08-11 Applied Materials, Inc. Modular PVD system for flex PV
CN112723862B (zh) * 2020-12-29 2022-11-22 太原理工大学 简单低耗制备高熵氧化物陶瓷材料的方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55131175A (en) * 1979-03-30 1980-10-11 Toshiba Corp Surface treatment apparatus with microwave plasma
DE3244391A1 (de) * 1982-12-01 1984-06-07 Leybold-Heraeus GmbH, 5000 Köln Vorrichtung zur beschichtung von substraten durch plasmapolymerisation
JPS6052014A (ja) * 1983-08-31 1985-03-23 Mitsubishi Electric Corp 半導体製造装置
JPS60128265A (ja) * 1983-12-14 1985-07-09 Nec Corp 気相薄膜形成装置
EP0151754B1 (en) * 1984-02-14 1991-12-18 Energy Conversion Devices, Inc. An improved method of making a photoconductive member
US4715927A (en) * 1984-02-14 1987-12-29 Energy Conversion Devices, Inc. Improved method of making a photoconductive member
US4566403A (en) * 1985-01-30 1986-01-28 Sovonics Solar Systems Apparatus for microwave glow discharge deposition
JPS62104438U (enExample) * 1985-12-23 1987-07-03
JP2791770B2 (ja) * 1986-09-09 1998-08-27 キヤノン株式会社 マイクロ波プラズマｃｖｄ法による機能性堆積膜の形成装置
JPH0676664B2 (ja) * 1986-12-09 1994-09-28 キヤノン株式会社 マイクロ波プラズマｃｖｄ法による機能性堆積膜の形成装置
JPH01198478A (ja) * 1988-02-01 1989-08-10 Canon Inc マイクロ波プラズマｃｖｄ装置

Also Published As

Publication number Publication date
FR2639474B1 (fr) 1994-02-11
DE3938830C2 (enExample) 1991-05-02
FR2639474A1 (fr) 1990-05-25
DE3938830A1 (de) 1990-05-31
JPH02141578A (ja) 1990-05-30
US4995341A (en) 1991-02-26
CN1043348A (zh) 1990-06-27

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C15 Extension of patent right duration from 15 to 20 years for appl. with date before 31.12.1992 and still valid on 11.12.2001 (patent law change 1993)
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C19 Lapse of patent right due to non-payment of the annual fee
CF01 Termination of patent right due to non-payment of annual fee