CN102449853A - 滑环触点同轴连接器 - Google Patents
滑环触点同轴连接器 Download PDFInfo
- Publication number
- CN102449853A CN102449853A CN2010800243592A CN201080024359A CN102449853A CN 102449853 A CN102449853 A CN 102449853A CN 2010800243592 A CN2010800243592 A CN 2010800243592A CN 201080024359 A CN201080024359 A CN 201080024359A CN 102449853 A CN102449853 A CN 102449853A
- Authority
- CN
- China
- Prior art keywords
- connector
- slip ring
- coaxial connector
- combines
- compression
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004020 conductor Substances 0.000 claims abstract description 38
- 230000006835 compression Effects 0.000 claims abstract description 23
- 238000007906 compression Methods 0.000 claims abstract description 23
- 238000003780 insertion Methods 0.000 claims description 3
- 230000037431 insertion Effects 0.000 claims description 3
- 230000008878 coupling Effects 0.000 abstract 7
- 238000010168 coupling process Methods 0.000 abstract 7
- 238000005859 coupling reaction Methods 0.000 abstract 7
- 238000012856 packing Methods 0.000 description 10
- 239000007787 solid Substances 0.000 description 6
- 239000000463 material Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 239000004411 aluminium Substances 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 230000008901 benefit Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 238000005452 bending Methods 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000005482 strain hardening Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
- H01R24/00—Two-part coupling devices, or either of their cooperating parts, characterised by their overall structure
- H01R24/38—Two-part coupling devices, or either of their cooperating parts, characterised by their overall structure having concentrically or coaxially arranged contacts
- H01R24/40—Two-part coupling devices, or either of their cooperating parts, characterised by their overall structure having concentrically or coaxially arranged contacts specially adapted for high frequency
- H01R24/56—Two-part coupling devices, or either of their cooperating parts, characterised by their overall structure having concentrically or coaxially arranged contacts specially adapted for high frequency specially adapted to a specific shape of cables, e.g. corrugated cables, twisted pair cables, cables with two screens or hollow cables
- H01R24/564—Corrugated cables
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
- H01R9/00—Structural associations of a plurality of mutually-insulated electrical connecting elements, e.g. terminal strips or terminal blocks; Terminals or binding posts mounted upon a base or in a case; Bases therefor
- H01R9/03—Connectors arranged to contact a plurality of the conductors of a multiconductor cable, e.g. tapping connections
- H01R9/05—Connectors arranged to contact a plurality of the conductors of a multiconductor cable, e.g. tapping connections for coaxial cables
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
- H01R24/00—Two-part coupling devices, or either of their cooperating parts, characterised by their overall structure
- H01R24/38—Two-part coupling devices, or either of their cooperating parts, characterised by their overall structure having concentrically or coaxially arranged contacts
- H01R24/40—Two-part coupling devices, or either of their cooperating parts, characterised by their overall structure having concentrically or coaxially arranged contacts specially adapted for high frequency
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
- H01R9/00—Structural associations of a plurality of mutually-insulated electrical connecting elements, e.g. terminal strips or terminal blocks; Terminals or binding posts mounted upon a base or in a case; Bases therefor
- H01R9/03—Connectors arranged to contact a plurality of the conductors of a multiconductor cable, e.g. tapping connections
- H01R9/05—Connectors arranged to contact a plurality of the conductors of a multiconductor cable, e.g. tapping connections for coaxial cables
- H01R9/0521—Connection to outer conductor by action of a nut
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
- H01R13/00—Details of coupling devices of the kinds covered by groups H01R12/70 or H01R24/00 - H01R33/00
- H01R13/46—Bases; Cases
- H01R13/52—Dustproof, splashproof, drip-proof, waterproof, or flameproof cases
- H01R13/5205—Sealing means between cable and housing, e.g. grommet
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
- H01R13/00—Details of coupling devices of the kinds covered by groups H01R12/70 or H01R24/00 - H01R33/00
- H01R13/648—Protective earth or shield arrangements on coupling devices, e.g. anti-static shielding
- H01R13/658—High frequency shielding arrangements, e.g. against EMI [Electro-Magnetic Interference] or EMP [Electro-Magnetic Pulse]
- H01R13/6581—Shield structure
- H01R13/6582—Shield structure with resilient means for engaging mating connector
- H01R13/6583—Shield structure with resilient means for engaging mating connector with separate conductive resilient members between mating shield members
- H01R13/6584—Shield structure with resilient means for engaging mating connector with separate conductive resilient members between mating shield members formed by conductive elastomeric members, e.g. flat gaskets or O-rings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
- H01R2103/00—Two poles
Abstract
一种具有连接器本体的同轴连接器设置有连接器本体孔径。环形结合槽设置于连接器本体孔径中开口至连接器本体的电缆端。结合槽的夹持侧壁从结合槽的底部向内成角。就座于结合本体孔径内的滑环设置有夹紧表面。环形压缩本体定位于滑环和结合本体的压缩表面之间。连接器本体和结合本体经由螺纹结合在一起。滑环定尺寸为用于结合本体沿着螺纹的轴向前进以相对于压缩本体施加压缩力以将外部导体的前缘夹持于滑环和夹持侧壁之间。
Description
相关申请的交叉参考
本申请要求2009年6月5日由Nahid Islam和Al Cox申请的名称为“Coaxial Connector for Solid Outer Conductor Coaxial Cable”的美国临时专利申请序列号61/184,573的权益,该申请目前未决并且整体地通过参考结合于此。
技术领域
本发明涉及用于同轴电缆的电连接器。更具体地,本发明涉及一种同轴连接器,其具有提供夹紧和夹持外部导体机电互连的滑环触点。
背景技术
前挡块型同轴连接器,例如如在由Larry Buenz共同拥有的美国专利No.6,793,529(2004年9月21日授权,名称为“Coaxial Connector with PositiveStop Clamping Nut Attachment”,其整体地通过参考结合于此)中公开的,具有连接器本体和构造用于螺纹互连的后螺母。由于连接器本体和后螺母螺旋在一起,同轴电缆的外部导体的扩口前缘就以可靠的机电互连夹持于连接器本体和结合本体之间。为了指示正确的螺旋完成和避免由于过度张紧而对连接器和/或同轴电缆造成损伤,可在连接器本体和后本体之间应用前挡块,其中后本体和连接器本体之间的螺旋在出现期望最大张紧压缩/扭矩力的特定轴向位置处到底,明确地告知安装者,已经达到了适合的张紧量。为了允许热膨胀循环和/或连接器和/或外部导体制造尺寸中的差异,压缩元件插入在外部导体、后本体和/或连接器本体的接触内表面之间。压缩元件通常在安装之前与同轴连接器松弛地供应,这产生了对于压缩元件的损失和/或损坏危险。
在先的前挡块型同轴连接器设计通常需要外部导体的扩口以使能连接器本体、外部导体的前缘和后螺母之间的夹层夹持动作。虽然波纹外部导体同轴电缆在扩口过程期间为用户提供了适合的外部直径夹紧表面,但是平滑壁外部导体同轴电缆的平滑外径可能难以在扩口期间容易地夹紧。
当前市场趋势是用铝材同轴电缆代替传统的铜材同轴电缆以节省材料成本和降低每单位长度同轴电缆的重量。而且,与波纹外导体同轴电缆构造相比,光滑壁外部导体电缆提供了固有的材料成本和电缆重量优点。
与铜相比,铝具有较低的机械强度性质,包括冷加工性质(弯曲)。铝易于蠕变并且可由于弯曲、牵拉和/或扭曲而在极端接触压力之下在单个接触点处疲软。
与波纹电缆相比,光滑壁电缆较少柔性;然而,习惯于用波纹同轴电缆工作的用户可能不会认识到光滑壁电缆的较低弯曲能力。用户试图应用不适当的弯曲半径可能使常规同轴连接器和电缆互连受力过大。
同轴电缆和连接器产业内的竞争已经将注意力聚焦于改进电气性能以及降低制造、材料和安装成本。
因此,本发明的目标是提供一种克服这些现有技术中的缺陷的方法和装置。
附图说明
结合入本说明书并构成其一部分的附图示出了本发明的实施例,并且连同上面给出的发明概述以及下面给出的对实施例的详细描述一起,用来解释本发明的原理。为了清楚,不同实施例之间的类似元件使用相同的符号并且不同附图上显示的一些符号可以不在每个附图上具体地标识。
图1是同轴连接器的第一实施例的示意性的90°剖面侧视图。
图2是图1的第一实施例同轴连接器在同轴电缆插入并且准备好将结合本体结合至连接器本体时的示意性的90°剖面侧视图。
图3是同轴电缆互连的第一实施例同轴连接器的示意性的90°剖面侧视图。
图4是图3的特写视图。
图5是滑环的示意性的等距成角电缆端部视图。
图6是图5的示意性的90°剖面侧视图。
图7是同轴连接器的第二实施例的示意性的90°剖面等距视图。
图8是另一个滑环的示意性的剖面侧视图。
图9是图7的同轴连接器在同轴电缆互连时的示意性的剖面侧视图。
图10是图9的特写视图。
图11是同轴连接器的第三实施例的示意性的90°剖面侧视图。
图12是图11的特写视图。
图13是滑环的另一个实施例的示意性的等距视图。
图14是图13的示意性的90°剖面侧视图。
图15是替代滑环的示意性的等距视图。
图16是图15的示意性的剖面侧视图。
图17是另一个替代滑环的示意性的等距视图。
图18是图17的示意性的剖面侧视图。
图19是同轴连接器的另一个实施例的示意性的剖面侧视图。
图20是图19的特写视图。
图21是滑环的另一个实施例的示意性的等距视图,如图19中所示。
图22是图21的示意性的剖面侧视图。
具体实施方式
本领域技术人员将理解到,连接器端1和电缆端3是在这里用来使得同轴连接器的各个元件的纵向位置和/或之间的相互接触关系清楚的描述符。除了沿着同轴连接器纵轴关于相邻元件的标识位置之外,每个个别元件具有连接器端侧和电缆端侧,即各个元件面对同轴连接器5的相应连接器端部1和电缆端部3的侧面。
同轴连接器的第一实施例,如图1-6中所示,包括设置有连接器本体孔径9的连接器本体7。如图2中最好地示出,设置于连接器本体孔径3中的环形结合槽11开口至连接器本体7的电缆端3。结合槽11的夹持侧壁13从结合槽11的底部15向内成角,定尺寸为外部导体17的前缘相对于其夹持的座。设置有定尺寸为装配在同轴电缆的外部导体17上的结合本体孔径21的结合本体19可螺旋入连接器本体7的电缆端3。
定位于结合本体19的连接器端1处的滑环23定尺寸为就座于结合槽11内。如图4中最好地示出,滑环23可通过在滑环23的电缆端3处的就位于结合本体孔径21的环形保持槽29内的向外突出的结合凸肩27保持结合至结合本体19。
如图5和6中最好地示出,滑环23具有多个朝着连接器端1延伸的结合弹簧夹31,结合弹簧夹31的内径设置有夹紧表面33。夹紧表面33可形成为多个环形倒钩35,例如每个倒钩35可设置有连接器端侧的止挡表面37和电缆端侧的插入表面39,并且止挡表面37可设置为与纵向轴线垂直,插入表面39朝着连接器端部1成角。由此,外部导体17可插入越过倒钩35,向外展开结合弹簧夹31并且朝着连接器端1滑过成角的插入表面39,但是止挡表面37将咬入并且夹紧外部导体17的外径表面,如果试图朝着电缆端3移动的话。替代地,夹紧表面33例如可形成为螺旋形螺纹。
在附接有滑环23的结合本体19插入并且螺旋入连接器本体7时,结合弹簧夹31的远端的外径接合从结合槽11的底部向外成角的压缩侧壁41,压缩侧壁41的减小直径朝着夹持侧壁13和外部导体17径向向内地驱动结合弹簧夹31。由此,如图4中最好地示出,由连接器本体7为滑环23提供圆周增强,减少滑环23的结构要求并且使得同轴连接器5的外径能相应减小。而且,在结合弹簧夹31通过与压缩侧壁41的接触而径向向内地受驱时,夹紧表面33受驱进入与外部导体7的可靠接触。
压缩本体25,例如螺旋形盘簧环,可在向上突出的压缩本体凸肩43与结合本体19的压缩表面26之间就座于结合弹簧夹31的外径上。垫片57可应用于压缩本体25和压缩表面26之间以在结合本体19与连接器本体7之间螺旋期间减少弄脏。
由结合本体19的轴向前进产生以在结合弹簧夹31和夹持侧壁13之间夹持外部导体17的前缘的压缩力以及夹紧表面33相对于外部导体17的外径的径向位移可通过在结合本体19和连接器本体7之间应用面对面前挡块45(图4)来限制,一旦到达了结合本体19和连接器本体7之间的已知为产生预期最大扭矩的特定预设轴向位置,挡块45通过防止结合本体19朝着连接器本体7的进一步移动来在预定最大扭矩处停止压缩力。
连接器本体7和结合本体19之间的螺旋(图1和2)可应用为多个交错螺纹47,例如四个交错螺纹,增大螺纹节距以显著地减少将结合本体19前进至与连接器本体7相啮合的前挡块45所需的转数,而没有不可接受地降低所得到螺纹互连的强度性质。
结合凸肩27和结合本体19的保持槽29之间的轴向游隙可利用来压缩位于滑环23的电缆端3和结合本体孔径21的向内突起的垫圈凸肩51之间的垫圈49。由此,外部导体17可在未压缩状态下容易地插入穿过垫圈49并且然后在结合本体19朝着连接器本体7前进时,滑环23朝着保持槽29的电缆端3受驱,这相对于垫圈凸肩51压缩垫圈49,使垫圈49径向向内地变形为与外部导体17的外径可靠地密封接合(图4)。
本领域技术人员将理解到,前缘外部导体夹持与经由夹紧表面33的外部导体夹紧的组合可通过将来自外部导体17的前缘的应力分布于外部导体17的外径上来提供改进的互连强度和/或另外的应变释放。
本领域技术人员将理解到,具有夹紧表面33的滑环23的好处还可在其中连接器本体7螺旋入结合本体19的同轴连接器构造中实现,例如如图7-10中所示。而且,同轴电缆互连强度和稳定性可通过提供具有多个夹紧弹簧夹53的滑环23来进一步增强,所述夹紧弹簧夹53从滑环23的电缆端3延伸(图8)。结合本体孔径9的相应向内突出的楔形凸肩55接触夹紧弹簧夹53以在结合本体19在互连期间沿着螺纹47前进时将夹紧弹簧夹53的另一个内径夹紧表面33径向向内地驱动入与同轴电缆的护套59可靠地接合。
在又一替代实施例中,具有夹紧表面33的滑环23可应用于具有稳定化与护套59的互连的电缆端3夹紧弹簧夹53的常规夹持构造中,例如如图11-14中所示。类似地,图7-10中的实施例可通过将滑环23与包括实心连接器端和应用至夹紧弹簧夹53的双夹紧表面33的滑环交换来利用常规夹具构造应用,一个夹紧表面啮合外部导体17并且另一个啮合护套59,例如如图15和16中所示。
为了简化制造,各个实施例的滑环23能以c形构造提供,例如如图17和18中所示,没有结合弹簧夹31或夹紧弹簧夹53可用,c形的间隙使得在滑环23的任一端遇到相应的半径减小表面时能有限地径向向内移动。
滑环23还可形成为金属冲压轧制为环形式,例如如图19-22中所示。如图20中最好地示出,径向向内的弹力性质可通过将滑环23的一部分定尺寸为接合护套59来获得,在结合本体19朝着连接器本体7轴向地前进时,结合凸肩27由驱动入滑环23的电缆端3的垫圈49的下部径向向内偏压,由此当垫圈49在围绕结合凸肩27的保持槽29内变形时,垫圈在结合凸肩27上施加向下的偏压并且因而结合弹簧夹31的电缆端夹紧表面33相对于护套59径向向内弹性地偏压。
虽然所公开的实施例尤其适合用于平滑壁实心外部导体电缆,这些也可应用至其他实心外部导体构造,比如环形波纹实心外部导体。环形波纹实心外部导体同轴电缆通过在波纹顶点处切割端部来制备,这将同轴电缆定位为呈现供密封垫圈压靠的波纹顶点并且使得外部导体的前缘相对于滑环唇缘就座。
本领域技术人员将理解到,提供预附接至结合本体19的滑环23,在滑环23和结合本体19之间受到保护的压缩本体25,可显著降低在组装和/或不正确组装之前连接器的分开元件松散的机会。
部件表
1 | 连接器端 |
3 | 电缆端 |
5 | 同轴连接器 |
7 | 连接器本体 |
9 | 连接器本体孔径 |
11 | 结合槽 |
13 | 夹持侧壁 |
15 | 底部 |
17 | 外部导体 |
19 | 结合本体 |
21 | 结合本体孔径 |
23 | 滑环 |
25 | 压缩本体 |
26 | 压缩表面 |
27 | 结合凸肩 |
29 | 保持槽 |
31 | 结合弹簧夹 |
33 | 夹紧表面 |
35 | 倒钩 |
37 | 止挡表面 |
39 | 插入表面 |
41 | 压缩侧壁 |
43 | 压缩本体凸肩 |
45 | 前挡块 |
47 | 螺纹 |
49 | 垫圈 |
51 | 垫圈凸肩 |
53 | 夹紧弹簧夹 |
55 | 楔形凸肩 |
57 | 垫片 |
59 | 护套 |
在前述描述中已经涉及了具有已知等同的比率、整数或部件之处,那么这些等同如同分别阐述那样结合于此。
虽然本发明已经通过其实施例的描述示出,并且虽然实施例已经相当详细地描述,但是申请人不是要将所附权利要求的范围约束或以任何方式限制到这些细节。另外的优点和变型对于本领域技术人员将是很显然的。因此,本发明在其宽泛方面不限于所示和所述的特定细节、代表性的装置、方法和示例性示例。因此,在不偏离申请人的总体创造性概念的精神或范围之下可偏离这些细节。而且,将明白到,改进和/或变型可在不脱离本发明如由以下权利要求所限定的范围或精神之下做出。
Claims (20)
1.一种用来与具有外部导体的同轴电缆一起使用的同轴连接器,其包括:
设置有连接器本体孔径的连接器本体;
环形结合槽,其设置于连接器本体孔径中朝连接器本体的电缆端开口;
结合槽的夹持侧壁,从结合槽的底部向内成角;
滑环,其就座于结合本体孔径内,设置有多个朝着连接器端延伸的结合弹簧夹,结合弹簧夹的内径设置有夹紧表面;以及
环形压缩本体,其在结合本体的压缩表面与结合弹簧夹的向上突出的压缩本体凸肩之间就座于滑环的外径上;
连接器本体和结合本体经由螺纹结合在一起;
滑环定尺寸为用于使结合本体沿着螺纹轴向前进,以相对于压缩凸肩驱动压缩本体,从而对外部导体的前缘施加压缩力以相对于夹持侧壁夹持外部导体的前缘。
2.根据权利要求1的同轴连接器,还包括在夹持螺母和连接器本体之间的面对面前挡块,其在预定的最大扭矩处通过防止夹持螺母朝着连接器本体的进一步移动来停止压缩力。
3.根据权利要求1的同轴连接器,其中滑环通过在滑环的电缆端处的向外突出的结合凸肩保持于连接器本体孔径内,结合凸肩就座于结合本体的环形保持槽内。
4.根据权利要求1的同轴连接器,还包括从结合槽的底部向外成角的压缩侧壁;
结合弹簧夹通过与压缩侧壁相接触来朝着夹持侧壁径向向内地受驱。
5.根据权利要求1的同轴连接器,其中夹紧表面是多个环形倒钩。
6.根据权利要求5的同轴连接器,其中环形倒钩具有在连接器端处的止挡表面和在电缆端处的插入表面;止挡表面提供为与纵向轴线垂直,插入表面的直径朝着连接器端增大。
7.根据权利要求1的同轴连接器,其中压缩本体是螺旋形盘簧环。
8.根据权利要求1的同轴连接器,其中螺纹是多个交错螺纹。
9.根据权利要求1的同轴连接器,还包括就座于滑环的电缆端与结合本体孔径的向内突出的密封垫圈凸肩之间的密封垫圈。
10.根据权利要求1的同轴连接器,还包括从滑环的电缆端延伸的多个护套夹紧弹簧夹。
11.根据权利要求12的同轴连接器,还包括结合本体孔径的护套楔形凸肩;在结合本体沿着螺纹前进时,护套楔形凸肩径向向内地偏压护套夹紧弹簧夹。
12.一种用来与具有外部导体的同轴电缆一起使用的同轴连接器,其包括:
设置有连接器本体孔径的连接器本体;
设置有向内成角的环形夹持侧壁的连接器本体;
具有结合本体孔径的结合本体;
就座于结合本体孔径内的滑环;
滑环设置有多个轴向地突出的结合弹簧夹,结合弹簧夹的内径设置有夹紧表面;
连接器本体和结合本体经由螺纹结合在一起;
滑环定尺寸为用于使结合本体沿着螺纹轴向前进,以产生用于结合弹簧夹的压缩力,以相对于夹持侧壁夹持外部导体的前缘。
13.根据权利要求13的同轴连接器,还包括在夹持螺母和连接器本体之间的面对面前挡块,其在预定的最大扭矩处通过防止夹持螺母朝着连接器本体的进一步移动来停止压缩力。
14.根据权利要求13的同轴连接器,其中通过电缆端处的向外突出的凸肩就座于结合本体的环形保持槽内,滑环被保持于连接器本体孔径内。
15.根据权利要求14的同轴连接器,其中在轴向前进期间,向外突出的凸肩通过与弹性垫圈相接触来相对于护套向内偏压。
16.根据权利要求13的同轴连接器,还包括从夹持侧壁向外成角的压缩侧壁;
在结合本体朝着连接器本体前进时,弹簧夹通过与压缩侧壁相接触来朝着夹持侧壁径向向内地受驱。
17.根据权利要求13的同轴连接器,还包括多个从滑环的电缆端延伸的护套夹紧弹簧夹。
18.根据权利要求17的同轴连接器,还包括结合本体孔径的护套楔形凸肩;在结合本体沿着螺纹前进时,护套楔形凸肩径向向内地偏压护套夹紧弹簧夹。
19.根据权利要求13的同轴连接器,其中滑环是c形的。
20.根据权利要求13的同轴连接器,其中所述多个结合弹簧夹从滑环的连接器端延伸。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US18457309P | 2009-06-05 | 2009-06-05 | |
US61/184,573 | 2009-06-05 | ||
PCT/US2010/037521 WO2010141905A1 (en) | 2009-06-05 | 2010-06-04 | Slip ring contact coaxial connector |
Publications (1)
Publication Number | Publication Date |
---|---|
CN102449853A true CN102449853A (zh) | 2012-05-09 |
Family
ID=43298194
Family Applications (4)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2010800243569A Pending CN102576947A (zh) | 2009-06-05 | 2010-06-04 | 夹持和夹紧同轴连接器 |
CN2010800243588A Pending CN102449852A (zh) | 2009-06-05 | 2010-06-04 | 同轴连接器互连盖 |
CN2010800243592A Pending CN102449853A (zh) | 2009-06-05 | 2010-06-04 | 滑环触点同轴连接器 |
CN2010800243573A Pending CN102449851A (zh) | 2009-06-05 | 2010-06-04 | 电缆端未准备好的同轴连接器 |
Family Applications Before (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2010800243569A Pending CN102576947A (zh) | 2009-06-05 | 2010-06-04 | 夹持和夹紧同轴连接器 |
CN2010800243588A Pending CN102449852A (zh) | 2009-06-05 | 2010-06-04 | 同轴连接器互连盖 |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2010800243573A Pending CN102449851A (zh) | 2009-06-05 | 2010-06-04 | 电缆端未准备好的同轴连接器 |
Country Status (6)
Country | Link |
---|---|
US (4) | US8393919B2 (zh) |
EP (4) | EP2438653A1 (zh) |
KR (4) | KR20120030071A (zh) |
CN (4) | CN102576947A (zh) |
BR (4) | BRPI1015143A2 (zh) |
WO (4) | WO2010141890A1 (zh) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106654620A (zh) * | 2015-09-03 | 2017-05-10 | 康宁光电通信Rf有限责任公司 | 同轴电缆连接器 |
CN110061381A (zh) * | 2018-01-18 | 2019-07-26 | 株式会社藤仓 | 同轴连接器 |
Families Citing this family (321)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7114990B2 (en) | 2005-01-25 | 2006-10-03 | Corning Gilbert Incorporated | Coaxial cable connector with grounding member |
US8460031B2 (en) * | 2008-11-05 | 2013-06-11 | Andrew Llc | Coaxial connector with cable diameter adapting seal assembly and interconnection method |
US9394608B2 (en) | 2009-04-06 | 2016-07-19 | Asm America, Inc. | Semiconductor processing reactor and components thereof |
WO2010141890A1 (en) * | 2009-06-05 | 2010-12-09 | Andrew Llc | Coaxial connector interconnection cap |
US8802201B2 (en) | 2009-08-14 | 2014-08-12 | Asm America, Inc. | Systems and methods for thin-film deposition of metal oxides using excited nitrogen-oxygen species |
TWI549386B (zh) | 2010-04-13 | 2016-09-11 | 康寧吉伯特公司 | 具有防止進入及改良接地之同軸連接器 |
DE102010014981A1 (de) * | 2010-04-14 | 2011-10-20 | Pfisterer Kontaktsysteme Gmbh | Vorrichtung zum elektrischen Verbinden eines Kabels, insbesondere Steckverbindungsteil |
US8758053B2 (en) * | 2010-06-07 | 2014-06-24 | Andrew Llc | Low PIM coaxial connector |
US8888526B2 (en) * | 2010-08-10 | 2014-11-18 | Corning Gilbert, Inc. | Coaxial cable connector with radio frequency interference and grounding shield |
TWI558022B (zh) | 2010-10-27 | 2016-11-11 | 康寧吉伯特公司 | 具有耦合器和固持及釋放機制的推入固定式纜線連接器 |
US8302296B2 (en) | 2010-11-22 | 2012-11-06 | Andrew, Llc | Friction weld coaxial connector and interconnection method |
US8365404B2 (en) | 2010-11-22 | 2013-02-05 | Andrew Llc | Method for ultrasonic welding a coaxial cable to a coaxial connector |
US8887388B2 (en) | 2010-11-22 | 2014-11-18 | Andrew Llc | Method for interconnecting a coaxial connector with a solid outer conductor coaxial cable |
US8479383B2 (en) | 2010-11-22 | 2013-07-09 | Andrew Llc | Friction weld coaxial connector and interconnection method |
US8366481B2 (en) * | 2011-03-30 | 2013-02-05 | John Mezzalingua Associates, Inc. | Continuity maintaining biasing member |
EP2695251A4 (en) * | 2011-04-05 | 2014-08-27 | Belden Inc | CLOSURE AND SEAL CONNECTORS |
US9312155B2 (en) | 2011-06-06 | 2016-04-12 | Asm Japan K.K. | High-throughput semiconductor-processing apparatus equipped with multiple dual-chamber modules |
US20130012064A1 (en) * | 2011-07-07 | 2013-01-10 | John Mezzalingua Associates, Inc. | Connector for clamping a coaxial cable |
US10854498B2 (en) | 2011-07-15 | 2020-12-01 | Asm Ip Holding B.V. | Wafer-supporting device and method for producing same |
US20130023129A1 (en) | 2011-07-20 | 2013-01-24 | Asm America, Inc. | Pressure transmitter for a semiconductor processing environment |
US9190744B2 (en) | 2011-09-14 | 2015-11-17 | Corning Optical Communications Rf Llc | Coaxial cable connector with radio frequency interference and grounding shield |
US20130072057A1 (en) | 2011-09-15 | 2013-03-21 | Donald Andrew Burris | Coaxial cable connector with integral radio frequency interference and grounding shield |
US9017481B1 (en) | 2011-10-28 | 2015-04-28 | Asm America, Inc. | Process feed management for semiconductor substrate processing |
US8636541B2 (en) * | 2011-12-27 | 2014-01-28 | Perfectvision Manufacturing, Inc. | Enhanced coaxial connector continuity |
US8968025B2 (en) * | 2011-12-27 | 2015-03-03 | Glen David Shaw | Coupling continuity connector |
US9039445B2 (en) | 2011-12-27 | 2015-05-26 | Perfectvision Manufacturing, Inc. | Body circuit connector |
CN103187664A (zh) * | 2011-12-27 | 2013-07-03 | 鸿富锦精密工业(武汉)有限公司 | 具有屏蔽结构的电连接器及其制造方法 |
US9136654B2 (en) | 2012-01-05 | 2015-09-15 | Corning Gilbert, Inc. | Quick mount connector for a coaxial cable |
US9017102B2 (en) * | 2012-02-06 | 2015-04-28 | John Mezzalingua Associates, LLC | Port assembly connector for engaging a coaxial cable and an outer conductor |
US9407016B2 (en) | 2012-02-22 | 2016-08-02 | Corning Optical Communications Rf Llc | Coaxial cable connector with integral continuity contacting portion |
CN102593620B (zh) * | 2012-03-26 | 2014-11-19 | 安德鲁公司 | 快速自锁螺纹耦合接口连接器机构 |
US9464790B2 (en) * | 2012-05-08 | 2016-10-11 | Cooper Technologies Company | Systems, methods, and devices for providing rotatable light modules and hinged mount in a luminaire |
JP6439235B2 (ja) * | 2012-08-10 | 2018-12-19 | カシオ計算機株式会社 | 情報報知装置、情報報知方法及びプログラム |
US10714315B2 (en) | 2012-10-12 | 2020-07-14 | Asm Ip Holdings B.V. | Semiconductor reaction chamber showerhead |
US9287659B2 (en) | 2012-10-16 | 2016-03-15 | Corning Optical Communications Rf Llc | Coaxial cable connector with integral RFI protection |
US8986044B2 (en) * | 2012-10-26 | 2015-03-24 | Corning Gilbert Inc. | Quick mount connector for a coaxial cable |
US8876553B2 (en) * | 2012-11-08 | 2014-11-04 | Yueh-Chiung Lu | Aluminum tube coaxial cable connector |
US9425548B2 (en) | 2012-11-09 | 2016-08-23 | Commscope Technologies Llc | Resilient coaxial connector interface and method of manufacture |
US9147963B2 (en) | 2012-11-29 | 2015-09-29 | Corning Gilbert Inc. | Hardline coaxial connector with a locking ferrule |
US9153911B2 (en) | 2013-02-19 | 2015-10-06 | Corning Gilbert Inc. | Coaxial cable continuity connector |
US9172154B2 (en) | 2013-03-15 | 2015-10-27 | Corning Gilbert Inc. | Coaxial cable connector with integral RFI protection |
US10290958B2 (en) | 2013-04-29 | 2019-05-14 | Corning Optical Communications Rf Llc | Coaxial cable connector with integral RFI protection and biasing ring |
WO2014189718A1 (en) | 2013-05-20 | 2014-11-27 | Corning Optical Communications Rf Llc | Coaxial cable connector with integral rfi protection |
US9548557B2 (en) | 2013-06-26 | 2017-01-17 | Corning Optical Communications LLC | Connector assemblies and methods of manufacture |
CN103337765A (zh) * | 2013-07-16 | 2013-10-02 | 镇江中信电子有限公司 | 一种置入式密封连接器的制作方法 |
GB2516504B (en) * | 2013-07-25 | 2017-08-30 | Prysmian Cables & Systems Ltd | Conductor connectors for power cables |
CN105556753B (zh) * | 2013-08-09 | 2018-08-28 | 康宁光电通信Rf有限责任公司 | 具有可成形外导体的无支柱同轴电缆连接器 |
DE102013015574A1 (de) * | 2013-09-20 | 2015-03-26 | Phoenix Contact Gmbh & Co. Kg | Kontaktfederring und Steckverbinder |
US9048599B2 (en) | 2013-10-28 | 2015-06-02 | Corning Gilbert Inc. | Coaxial cable connector having a gripping member with a notch and disposed inside a shell |
US10683571B2 (en) | 2014-02-25 | 2020-06-16 | Asm Ip Holding B.V. | Gas supply manifold and method of supplying gases to chamber using same |
TWM480800U (zh) * | 2014-03-07 | 2014-06-21 | Chant Sincere Co Ltd | 插頭連接器 |
US10167557B2 (en) | 2014-03-18 | 2019-01-01 | Asm Ip Holding B.V. | Gas distribution system, reactor including the system, and methods of using the same |
US11015245B2 (en) | 2014-03-19 | 2021-05-25 | Asm Ip Holding B.V. | Gas-phase reactor and system having exhaust plenum and components thereof |
GB201405132D0 (en) * | 2014-03-21 | 2014-05-07 | Indian Ocean Medical Inc | Fixation apparatus |
US10858737B2 (en) | 2014-07-28 | 2020-12-08 | Asm Ip Holding B.V. | Showerhead assembly and components thereof |
US9890456B2 (en) | 2014-08-21 | 2018-02-13 | Asm Ip Holding B.V. | Method and system for in situ formation of gas-phase compounds |
WO2016040363A1 (en) * | 2014-09-08 | 2016-03-17 | Pct International, Inc. | Tool-less coaxial cable connector |
CN107078407B (zh) * | 2014-09-11 | 2019-11-22 | 康普技术有限责任公司 | 同轴线缆和连接器组件 |
US10941490B2 (en) | 2014-10-07 | 2021-03-09 | Asm Ip Holding B.V. | Multiple temperature range susceptor, assembly, reactor and system including the susceptor, and methods of using the same |
US9548572B2 (en) | 2014-11-03 | 2017-01-17 | Corning Optical Communications LLC | Coaxial cable connector having a coupler and a post with a contacting portion and a shoulder |
US9590287B2 (en) | 2015-02-20 | 2017-03-07 | Corning Optical Communications Rf Llc | Surge protected coaxial termination |
US10033122B2 (en) | 2015-02-20 | 2018-07-24 | Corning Optical Communications Rf Llc | Cable or conduit connector with jacket retention feature |
US10276355B2 (en) | 2015-03-12 | 2019-04-30 | Asm Ip Holding B.V. | Multi-zone reactor, system including the reactor, and method of using the same |
US9866035B2 (en) | 2015-03-27 | 2018-01-09 | Irobot Corporation | Rotatable coupling |
CN106159552B (zh) * | 2015-04-14 | 2020-07-28 | 康普技术有限责任公司 | 具有快速锁定和分离机构的同轴连接器 |
CN113381252A (zh) | 2015-05-01 | 2021-09-10 | 康普技术有限责任公司 | 同轴连接器和同轴连接器的组件 |
US10458018B2 (en) | 2015-06-26 | 2019-10-29 | Asm Ip Holding B.V. | Structures including metal carbide material, devices including the structures, and methods of forming same |
CN104953300A (zh) * | 2015-06-30 | 2015-09-30 | 常州易泽科通信科技有限公司 | 多配内导体射频连接器 |
US10600673B2 (en) | 2015-07-07 | 2020-03-24 | Asm Ip Holding B.V. | Magnetic susceptor to baseplate seal |
CN105552649B (zh) * | 2015-09-29 | 2018-11-13 | 中航光电科技股份有限公司 | 一种屏蔽结构及使用该屏蔽结构的连接器 |
US10211308B2 (en) | 2015-10-21 | 2019-02-19 | Asm Ip Holding B.V. | NbMC layers |
US9525220B1 (en) | 2015-11-25 | 2016-12-20 | Corning Optical Communications LLC | Coaxial cable connector |
JP6453747B2 (ja) * | 2015-12-02 | 2019-01-16 | 矢崎総業株式会社 | 弾性シール部材及びコネクタ |
US11139308B2 (en) | 2015-12-29 | 2021-10-05 | Asm Ip Holding B.V. | Atomic layer deposition of III-V compounds to form V-NAND devices |
US10529554B2 (en) | 2016-02-19 | 2020-01-07 | Asm Ip Holding B.V. | Method for forming silicon nitride film selectively on sidewalls or flat surfaces of trenches |
US10865475B2 (en) | 2016-04-21 | 2020-12-15 | Asm Ip Holding B.V. | Deposition of metal borides and silicides |
US10190213B2 (en) | 2016-04-21 | 2019-01-29 | Asm Ip Holding B.V. | Deposition of metal borides |
US10367080B2 (en) | 2016-05-02 | 2019-07-30 | Asm Ip Holding B.V. | Method of forming a germanium oxynitride film |
US10032628B2 (en) | 2016-05-02 | 2018-07-24 | Asm Ip Holding B.V. | Source/drain performance through conformal solid state doping |
CN109075477B (zh) * | 2016-05-12 | 2021-02-26 | 胡贝尔和茹纳股份公司 | 电路板同轴连接器 |
US11453943B2 (en) | 2016-05-25 | 2022-09-27 | Asm Ip Holding B.V. | Method for forming carbon-containing silicon/metal oxide or nitride film by ALD using silicon precursor and hydrocarbon precursor |
US9859151B1 (en) | 2016-07-08 | 2018-01-02 | Asm Ip Holding B.V. | Selective film deposition method to form air gaps |
US10612137B2 (en) | 2016-07-08 | 2020-04-07 | Asm Ip Holdings B.V. | Organic reactants for atomic layer deposition |
US10714385B2 (en) | 2016-07-19 | 2020-07-14 | Asm Ip Holding B.V. | Selective deposition of tungsten |
US9812320B1 (en) | 2016-07-28 | 2017-11-07 | Asm Ip Holding B.V. | Method and apparatus for filling a gap |
US9887082B1 (en) | 2016-07-28 | 2018-02-06 | Asm Ip Holding B.V. | Method and apparatus for filling a gap |
KR102532607B1 (ko) | 2016-07-28 | 2023-05-15 | 에이에스엠 아이피 홀딩 비.브이. | 기판 가공 장치 및 그 동작 방법 |
US9887477B1 (en) * | 2016-09-22 | 2018-02-06 | Ford Global Technologies, Llc | Fused-wire cable connectors for a busbar |
EP3526867B1 (en) * | 2016-10-17 | 2021-08-25 | Huber+Suhner Ag | Cable gland comprising a slip on grommet |
US10116096B1 (en) * | 2016-10-19 | 2018-10-30 | National Technology & Engineering Solutions Of Sandia, Llc | Interconnect system with friction fit backshell |
US10643826B2 (en) | 2016-10-26 | 2020-05-05 | Asm Ip Holdings B.V. | Methods for thermally calibrating reaction chambers |
US11532757B2 (en) | 2016-10-27 | 2022-12-20 | Asm Ip Holding B.V. | Deposition of charge trapping layers |
US10714350B2 (en) | 2016-11-01 | 2020-07-14 | ASM IP Holdings, B.V. | Methods for forming a transition metal niobium nitride film on a substrate by atomic layer deposition and related semiconductor device structures |
US10643904B2 (en) | 2016-11-01 | 2020-05-05 | Asm Ip Holdings B.V. | Methods for forming a semiconductor device and related semiconductor device structures |
US10229833B2 (en) | 2016-11-01 | 2019-03-12 | Asm Ip Holding B.V. | Methods for forming a transition metal nitride film on a substrate by atomic layer deposition and related semiconductor device structures |
KR102546317B1 (ko) | 2016-11-15 | 2023-06-21 | 에이에스엠 아이피 홀딩 비.브이. | 기체 공급 유닛 및 이를 포함하는 기판 처리 장치 |
KR20180068582A (ko) | 2016-12-14 | 2018-06-22 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치 |
US11447861B2 (en) | 2016-12-15 | 2022-09-20 | Asm Ip Holding B.V. | Sequential infiltration synthesis apparatus and a method of forming a patterned structure |
US11581186B2 (en) | 2016-12-15 | 2023-02-14 | Asm Ip Holding B.V. | Sequential infiltration synthesis apparatus |
KR20180070971A (ko) | 2016-12-19 | 2018-06-27 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치 |
US10269558B2 (en) | 2016-12-22 | 2019-04-23 | Asm Ip Holding B.V. | Method of forming a structure on a substrate |
US10867788B2 (en) | 2016-12-28 | 2020-12-15 | Asm Ip Holding B.V. | Method of forming a structure on a substrate |
US11390950B2 (en) | 2017-01-10 | 2022-07-19 | Asm Ip Holding B.V. | Reactor system and method to reduce residue buildup during a film deposition process |
US10655221B2 (en) | 2017-02-09 | 2020-05-19 | Asm Ip Holding B.V. | Method for depositing oxide film by thermal ALD and PEALD |
US10468261B2 (en) | 2017-02-15 | 2019-11-05 | Asm Ip Holding B.V. | Methods for forming a metallic film on a substrate by cyclical deposition and related semiconductor device structures |
US10529563B2 (en) | 2017-03-29 | 2020-01-07 | Asm Ip Holdings B.V. | Method for forming doped metal oxide films on a substrate by cyclical deposition and related semiconductor device structures |
TWM568537U (zh) * | 2017-04-18 | 2018-10-11 | 光紅建聖股份有限公司 | 同軸電纜線連接器 |
KR102457289B1 (ko) | 2017-04-25 | 2022-10-21 | 에이에스엠 아이피 홀딩 비.브이. | 박막 증착 방법 및 반도체 장치의 제조 방법 |
US10770286B2 (en) | 2017-05-08 | 2020-09-08 | Asm Ip Holdings B.V. | Methods for selectively forming a silicon nitride film on a substrate and related semiconductor device structures |
US10892156B2 (en) | 2017-05-08 | 2021-01-12 | Asm Ip Holding B.V. | Methods for forming a silicon nitride film on a substrate and related semiconductor device structures |
US11306395B2 (en) | 2017-06-28 | 2022-04-19 | Asm Ip Holding B.V. | Methods for depositing a transition metal nitride film on a substrate by atomic layer deposition and related deposition apparatus |
GB2563901B (en) * | 2017-06-29 | 2022-08-10 | Technetix Bv | Coaxial cable connector |
US10685834B2 (en) | 2017-07-05 | 2020-06-16 | Asm Ip Holdings B.V. | Methods for forming a silicon germanium tin layer and related semiconductor device structures |
KR20190009245A (ko) | 2017-07-18 | 2019-01-28 | 에이에스엠 아이피 홀딩 비.브이. | 반도체 소자 구조물 형성 방법 및 관련된 반도체 소자 구조물 |
US11374112B2 (en) | 2017-07-19 | 2022-06-28 | Asm Ip Holding B.V. | Method for depositing a group IV semiconductor and related semiconductor device structures |
US11018002B2 (en) | 2017-07-19 | 2021-05-25 | Asm Ip Holding B.V. | Method for selectively depositing a Group IV semiconductor and related semiconductor device structures |
US10541333B2 (en) | 2017-07-19 | 2020-01-21 | Asm Ip Holding B.V. | Method for depositing a group IV semiconductor and related semiconductor device structures |
US10590535B2 (en) | 2017-07-26 | 2020-03-17 | Asm Ip Holdings B.V. | Chemical treatment, deposition and/or infiltration apparatus and method for using the same |
US10692741B2 (en) | 2017-08-08 | 2020-06-23 | Asm Ip Holdings B.V. | Radiation shield |
US10770336B2 (en) | 2017-08-08 | 2020-09-08 | Asm Ip Holding B.V. | Substrate lift mechanism and reactor including same |
US10249524B2 (en) | 2017-08-09 | 2019-04-02 | Asm Ip Holding B.V. | Cassette holder assembly for a substrate cassette and holding member for use in such assembly |
US11139191B2 (en) | 2017-08-09 | 2021-10-05 | Asm Ip Holding B.V. | Storage apparatus for storing cassettes for substrates and processing apparatus equipped therewith |
US11769682B2 (en) | 2017-08-09 | 2023-09-26 | Asm Ip Holding B.V. | Storage apparatus for storing cassettes for substrates and processing apparatus equipped therewith |
USD900036S1 (en) | 2017-08-24 | 2020-10-27 | Asm Ip Holding B.V. | Heater electrical connector and adapter |
US11830730B2 (en) | 2017-08-29 | 2023-11-28 | Asm Ip Holding B.V. | Layer forming method and apparatus |
US11295980B2 (en) | 2017-08-30 | 2022-04-05 | Asm Ip Holding B.V. | Methods for depositing a molybdenum metal film over a dielectric surface of a substrate by a cyclical deposition process and related semiconductor device structures |
US11056344B2 (en) | 2017-08-30 | 2021-07-06 | Asm Ip Holding B.V. | Layer forming method |
KR102491945B1 (ko) | 2017-08-30 | 2023-01-26 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치 |
KR102630301B1 (ko) | 2017-09-21 | 2024-01-29 | 에이에스엠 아이피 홀딩 비.브이. | 침투성 재료의 순차 침투 합성 방법 처리 및 이를 이용하여 형성된 구조물 및 장치 |
US10844484B2 (en) | 2017-09-22 | 2020-11-24 | Asm Ip Holding B.V. | Apparatus for dispensing a vapor phase reactant to a reaction chamber and related methods |
US10658205B2 (en) | 2017-09-28 | 2020-05-19 | Asm Ip Holdings B.V. | Chemical dispensing apparatus and methods for dispensing a chemical to a reaction chamber |
US10403504B2 (en) | 2017-10-05 | 2019-09-03 | Asm Ip Holding B.V. | Method for selectively depositing a metallic film on a substrate |
US10319588B2 (en) | 2017-10-10 | 2019-06-11 | Asm Ip Holding B.V. | Method for depositing a metal chalcogenide on a substrate by cyclical deposition |
US10923344B2 (en) | 2017-10-30 | 2021-02-16 | Asm Ip Holding B.V. | Methods for forming a semiconductor structure and related semiconductor structures |
KR102443047B1 (ko) | 2017-11-16 | 2022-09-14 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치 방법 및 그에 의해 제조된 장치 |
US10910262B2 (en) | 2017-11-16 | 2021-02-02 | Asm Ip Holding B.V. | Method of selectively depositing a capping layer structure on a semiconductor device structure |
US10797412B2 (en) | 2017-11-21 | 2020-10-06 | Amphenol Corporation | High frequency electrical connector |
US11022879B2 (en) | 2017-11-24 | 2021-06-01 | Asm Ip Holding B.V. | Method of forming an enhanced unexposed photoresist layer |
JP7206265B2 (ja) | 2017-11-27 | 2023-01-17 | エーエスエム アイピー ホールディング ビー.ブイ. | クリーン・ミニエンバイロメントを備える装置 |
CN111316417B (zh) | 2017-11-27 | 2023-12-22 | 阿斯莫Ip控股公司 | 与批式炉偕同使用的用于储存晶圆匣的储存装置 |
US10872771B2 (en) | 2018-01-16 | 2020-12-22 | Asm Ip Holding B. V. | Method for depositing a material film on a substrate within a reaction chamber by a cyclical deposition process and related device structures |
CN111630203A (zh) | 2018-01-19 | 2020-09-04 | Asm Ip私人控股有限公司 | 通过等离子体辅助沉积来沉积间隙填充层的方法 |
TW202325889A (zh) | 2018-01-19 | 2023-07-01 | 荷蘭商Asm 智慧財產控股公司 | 沈積方法 |
USD903477S1 (en) * | 2018-01-24 | 2020-12-01 | Asm Ip Holdings B.V. | Metal clamp |
US11018047B2 (en) | 2018-01-25 | 2021-05-25 | Asm Ip Holding B.V. | Hybrid lift pin |
USD880437S1 (en) | 2018-02-01 | 2020-04-07 | Asm Ip Holding B.V. | Gas supply plate for semiconductor manufacturing apparatus |
US11081345B2 (en) | 2018-02-06 | 2021-08-03 | Asm Ip Holding B.V. | Method of post-deposition treatment for silicon oxide film |
WO2019158960A1 (en) | 2018-02-14 | 2019-08-22 | Asm Ip Holding B.V. | A method for depositing a ruthenium-containing film on a substrate by a cyclical deposition process |
US10896820B2 (en) | 2018-02-14 | 2021-01-19 | Asm Ip Holding B.V. | Method for depositing a ruthenium-containing film on a substrate by a cyclical deposition process |
US10731249B2 (en) | 2018-02-15 | 2020-08-04 | Asm Ip Holding B.V. | Method of forming a transition metal containing film on a substrate by a cyclical deposition process, a method for supplying a transition metal halide compound to a reaction chamber, and related vapor deposition apparatus |
US10658181B2 (en) | 2018-02-20 | 2020-05-19 | Asm Ip Holding B.V. | Method of spacer-defined direct patterning in semiconductor fabrication |
KR102636427B1 (ko) | 2018-02-20 | 2024-02-13 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 방법 및 장치 |
US10975470B2 (en) | 2018-02-23 | 2021-04-13 | Asm Ip Holding B.V. | Apparatus for detecting or monitoring for a chemical precursor in a high temperature environment |
US11473195B2 (en) | 2018-03-01 | 2022-10-18 | Asm Ip Holding B.V. | Semiconductor processing apparatus and a method for processing a substrate |
US11629406B2 (en) | 2018-03-09 | 2023-04-18 | Asm Ip Holding B.V. | Semiconductor processing apparatus comprising one or more pyrometers for measuring a temperature of a substrate during transfer of the substrate |
US11114283B2 (en) | 2018-03-16 | 2021-09-07 | Asm Ip Holding B.V. | Reactor, system including the reactor, and methods of manufacturing and using same |
KR102646467B1 (ko) | 2018-03-27 | 2024-03-11 | 에이에스엠 아이피 홀딩 비.브이. | 기판 상에 전극을 형성하는 방법 및 전극을 포함하는 반도체 소자 구조 |
US11230766B2 (en) | 2018-03-29 | 2022-01-25 | Asm Ip Holding B.V. | Substrate processing apparatus and method |
US11088002B2 (en) | 2018-03-29 | 2021-08-10 | Asm Ip Holding B.V. | Substrate rack and a substrate processing system and method |
KR102501472B1 (ko) | 2018-03-30 | 2023-02-20 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 방법 |
KR20190128558A (ko) | 2018-05-08 | 2019-11-18 | 에이에스엠 아이피 홀딩 비.브이. | 기판 상에 산화물 막을 주기적 증착 공정에 의해 증착하기 위한 방법 및 관련 소자 구조 |
TW202349473A (zh) | 2018-05-11 | 2023-12-16 | 荷蘭商Asm Ip私人控股有限公司 | 用於基板上形成摻雜金屬碳化物薄膜之方法及相關半導體元件結構 |
KR102596988B1 (ko) | 2018-05-28 | 2023-10-31 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 방법 및 그에 의해 제조된 장치 |
TW202013553A (zh) | 2018-06-04 | 2020-04-01 | 荷蘭商Asm 智慧財產控股公司 | 水氣降低的晶圓處置腔室 |
US11718913B2 (en) | 2018-06-04 | 2023-08-08 | Asm Ip Holding B.V. | Gas distribution system and reactor system including same |
US11286562B2 (en) | 2018-06-08 | 2022-03-29 | Asm Ip Holding B.V. | Gas-phase chemical reactor and method of using same |
KR102568797B1 (ko) | 2018-06-21 | 2023-08-21 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 시스템 |
US10797133B2 (en) | 2018-06-21 | 2020-10-06 | Asm Ip Holding B.V. | Method for depositing a phosphorus doped silicon arsenide film and related semiconductor device structures |
CN112292478A (zh) | 2018-06-27 | 2021-01-29 | Asm Ip私人控股有限公司 | 用于形成含金属的材料的循环沉积方法及包含含金属的材料的膜和结构 |
WO2020003000A1 (en) | 2018-06-27 | 2020-01-02 | Asm Ip Holding B.V. | Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing material |
US10612136B2 (en) | 2018-06-29 | 2020-04-07 | ASM IP Holding, B.V. | Temperature-controlled flange and reactor system including same |
KR20200002519A (ko) | 2018-06-29 | 2020-01-08 | 에이에스엠 아이피 홀딩 비.브이. | 박막 증착 방법 및 반도체 장치의 제조 방법 |
US10755922B2 (en) | 2018-07-03 | 2020-08-25 | Asm Ip Holding B.V. | Method for depositing silicon-free carbon-containing film as gap-fill layer by pulse plasma-assisted deposition |
US10388513B1 (en) | 2018-07-03 | 2019-08-20 | Asm Ip Holding B.V. | Method for depositing silicon-free carbon-containing film as gap-fill layer by pulse plasma-assisted deposition |
US10767789B2 (en) | 2018-07-16 | 2020-09-08 | Asm Ip Holding B.V. | Diaphragm valves, valve components, and methods for forming valve components |
USD913945S1 (en) * | 2018-08-01 | 2021-03-23 | Gigalane Co., Ltd. | Connector for signal transmission |
US11053591B2 (en) | 2018-08-06 | 2021-07-06 | Asm Ip Holding B.V. | Multi-port gas injection system and reactor system including same |
CN108777392B (zh) * | 2018-08-07 | 2021-03-16 | 江苏亨鑫科技有限公司 | 一种可快速拆装的高可靠性射频同轴连接器 |
US10883175B2 (en) | 2018-08-09 | 2021-01-05 | Asm Ip Holding B.V. | Vertical furnace for processing substrates and a liner for use therein |
US10829852B2 (en) | 2018-08-16 | 2020-11-10 | Asm Ip Holding B.V. | Gas distribution device for a wafer processing apparatus |
US11430674B2 (en) | 2018-08-22 | 2022-08-30 | Asm Ip Holding B.V. | Sensor array, apparatus for dispensing a vapor phase reactant to a reaction chamber and related methods |
US11024523B2 (en) | 2018-09-11 | 2021-06-01 | Asm Ip Holding B.V. | Substrate processing apparatus and method |
KR20200030162A (ko) | 2018-09-11 | 2020-03-20 | 에이에스엠 아이피 홀딩 비.브이. | 박막 증착 방법 |
US11049751B2 (en) | 2018-09-14 | 2021-06-29 | Asm Ip Holding B.V. | Cassette supply system to store and handle cassettes and processing apparatus equipped therewith |
CN110970344A (zh) | 2018-10-01 | 2020-04-07 | Asm Ip控股有限公司 | 衬底保持设备、包含所述设备的系统及其使用方法 |
US11232963B2 (en) | 2018-10-03 | 2022-01-25 | Asm Ip Holding B.V. | Substrate processing apparatus and method |
KR102592699B1 (ko) | 2018-10-08 | 2023-10-23 | 에이에스엠 아이피 홀딩 비.브이. | 기판 지지 유닛 및 이를 포함하는 박막 증착 장치와 기판 처리 장치 |
US10847365B2 (en) | 2018-10-11 | 2020-11-24 | Asm Ip Holding B.V. | Method of forming conformal silicon carbide film by cyclic CVD |
US10811256B2 (en) | 2018-10-16 | 2020-10-20 | Asm Ip Holding B.V. | Method for etching a carbon-containing feature |
KR102546322B1 (ko) | 2018-10-19 | 2023-06-21 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치 및 기판 처리 방법 |
KR102605121B1 (ko) | 2018-10-19 | 2023-11-23 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치 및 기판 처리 방법 |
USD948463S1 (en) | 2018-10-24 | 2022-04-12 | Asm Ip Holding B.V. | Susceptor for semiconductor substrate supporting apparatus |
US11087997B2 (en) | 2018-10-31 | 2021-08-10 | Asm Ip Holding B.V. | Substrate processing apparatus for processing substrates |
KR20200051105A (ko) | 2018-11-02 | 2020-05-13 | 에이에스엠 아이피 홀딩 비.브이. | 기판 지지 유닛 및 이를 포함하는 기판 처리 장치 |
US11572620B2 (en) | 2018-11-06 | 2023-02-07 | Asm Ip Holding B.V. | Methods for selectively depositing an amorphous silicon film on a substrate |
US11031242B2 (en) | 2018-11-07 | 2021-06-08 | Asm Ip Holding B.V. | Methods for depositing a boron doped silicon germanium film |
US10818758B2 (en) | 2018-11-16 | 2020-10-27 | Asm Ip Holding B.V. | Methods for forming a metal silicate film on a substrate in a reaction chamber and related semiconductor device structures |
US10847366B2 (en) | 2018-11-16 | 2020-11-24 | Asm Ip Holding B.V. | Methods for depositing a transition metal chalcogenide film on a substrate by a cyclical deposition process |
US11217444B2 (en) | 2018-11-30 | 2022-01-04 | Asm Ip Holding B.V. | Method for forming an ultraviolet radiation responsive metal oxide-containing film |
US20220131285A1 (en) * | 2018-11-30 | 2022-04-28 | John Mezzalingua Associates, LLC | Torque limiting clamp for helical outer conductor cables |
KR102636428B1 (ko) | 2018-12-04 | 2024-02-13 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치를 세정하는 방법 |
US11158513B2 (en) | 2018-12-13 | 2021-10-26 | Asm Ip Holding B.V. | Methods for forming a rhenium-containing film on a substrate by a cyclical deposition process and related semiconductor device structures |
TW202037745A (zh) | 2018-12-14 | 2020-10-16 | 荷蘭商Asm Ip私人控股有限公司 | 形成裝置結構之方法、其所形成之結構及施行其之系統 |
TWI819180B (zh) | 2019-01-17 | 2023-10-21 | 荷蘭商Asm 智慧財產控股公司 | 藉由循環沈積製程於基板上形成含過渡金屬膜之方法 |
KR20200091543A (ko) | 2019-01-22 | 2020-07-31 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치 |
CN111524788B (zh) | 2019-02-01 | 2023-11-24 | Asm Ip私人控股有限公司 | 氧化硅的拓扑选择性膜形成的方法 |
US11482533B2 (en) | 2019-02-20 | 2022-10-25 | Asm Ip Holding B.V. | Apparatus and methods for plug fill deposition in 3-D NAND applications |
TW202104632A (zh) | 2019-02-20 | 2021-02-01 | 荷蘭商Asm Ip私人控股有限公司 | 用來填充形成於基材表面內之凹部的循環沉積方法及設備 |
JP2020136678A (ja) | 2019-02-20 | 2020-08-31 | エーエスエム・アイピー・ホールディング・ベー・フェー | 基材表面内に形成された凹部を充填するための方法および装置 |
KR102626263B1 (ko) | 2019-02-20 | 2024-01-16 | 에이에스엠 아이피 홀딩 비.브이. | 처리 단계를 포함하는 주기적 증착 방법 및 이를 위한 장치 |
TW202100794A (zh) | 2019-02-22 | 2021-01-01 | 荷蘭商Asm Ip私人控股有限公司 | 基材處理設備及處理基材之方法 |
US11742198B2 (en) | 2019-03-08 | 2023-08-29 | Asm Ip Holding B.V. | Structure including SiOCN layer and method of forming same |
KR20200108243A (ko) | 2019-03-08 | 2020-09-17 | 에이에스엠 아이피 홀딩 비.브이. | SiOC 층을 포함한 구조체 및 이의 형성 방법 |
KR20200108242A (ko) | 2019-03-08 | 2020-09-17 | 에이에스엠 아이피 홀딩 비.브이. | 실리콘 질화물 층을 선택적으로 증착하는 방법, 및 선택적으로 증착된 실리콘 질화물 층을 포함하는 구조체 |
JP2020167398A (ja) | 2019-03-28 | 2020-10-08 | エーエスエム・アイピー・ホールディング・ベー・フェー | ドアオープナーおよびドアオープナーが提供される基材処理装置 |
KR20200116855A (ko) | 2019-04-01 | 2020-10-13 | 에이에스엠 아이피 홀딩 비.브이. | 반도체 소자를 제조하는 방법 |
KR20200123380A (ko) | 2019-04-19 | 2020-10-29 | 에이에스엠 아이피 홀딩 비.브이. | 층 형성 방법 및 장치 |
KR20200125453A (ko) | 2019-04-24 | 2020-11-04 | 에이에스엠 아이피 홀딩 비.브이. | 기상 반응기 시스템 및 이를 사용하는 방법 |
KR20200130118A (ko) | 2019-05-07 | 2020-11-18 | 에이에스엠 아이피 홀딩 비.브이. | 비정질 탄소 중합체 막을 개질하는 방법 |
KR20200130121A (ko) | 2019-05-07 | 2020-11-18 | 에이에스엠 아이피 홀딩 비.브이. | 딥 튜브가 있는 화학물질 공급원 용기 |
KR20200130652A (ko) | 2019-05-10 | 2020-11-19 | 에이에스엠 아이피 홀딩 비.브이. | 표면 상에 재료를 증착하는 방법 및 본 방법에 따라 형성된 구조 |
JP2020188255A (ja) | 2019-05-16 | 2020-11-19 | エーエスエム アイピー ホールディング ビー.ブイ. | ウェハボートハンドリング装置、縦型バッチ炉および方法 |
USD947913S1 (en) | 2019-05-17 | 2022-04-05 | Asm Ip Holding B.V. | Susceptor shaft |
USD975665S1 (en) | 2019-05-17 | 2023-01-17 | Asm Ip Holding B.V. | Susceptor shaft |
USD935572S1 (en) | 2019-05-24 | 2021-11-09 | Asm Ip Holding B.V. | Gas channel plate |
USD922229S1 (en) | 2019-06-05 | 2021-06-15 | Asm Ip Holding B.V. | Device for controlling a temperature of a gas supply unit |
KR20200141002A (ko) | 2019-06-06 | 2020-12-17 | 에이에스엠 아이피 홀딩 비.브이. | 배기 가스 분석을 포함한 기상 반응기 시스템을 사용하는 방법 |
KR20200143254A (ko) | 2019-06-11 | 2020-12-23 | 에이에스엠 아이피 홀딩 비.브이. | 개질 가스를 사용하여 전자 구조를 형성하는 방법, 상기 방법을 수행하기 위한 시스템, 및 상기 방법을 사용하여 형성되는 구조 |
USD944946S1 (en) | 2019-06-14 | 2022-03-01 | Asm Ip Holding B.V. | Shower plate |
USD931978S1 (en) | 2019-06-27 | 2021-09-28 | Asm Ip Holding B.V. | Showerhead vacuum transport |
KR20210005515A (ko) | 2019-07-03 | 2021-01-14 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치용 온도 제어 조립체 및 이를 사용하는 방법 |
JP2021015791A (ja) | 2019-07-09 | 2021-02-12 | エーエスエム アイピー ホールディング ビー.ブイ. | 同軸導波管を用いたプラズマ装置、基板処理方法 |
CN112216646A (zh) | 2019-07-10 | 2021-01-12 | Asm Ip私人控股有限公司 | 基板支撑组件及包括其的基板处理装置 |
KR20210010307A (ko) | 2019-07-16 | 2021-01-27 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치 |
KR20210010820A (ko) | 2019-07-17 | 2021-01-28 | 에이에스엠 아이피 홀딩 비.브이. | 실리콘 게르마늄 구조를 형성하는 방법 |
KR20210010816A (ko) | 2019-07-17 | 2021-01-28 | 에이에스엠 아이피 홀딩 비.브이. | 라디칼 보조 점화 플라즈마 시스템 및 방법 |
US11643724B2 (en) | 2019-07-18 | 2023-05-09 | Asm Ip Holding B.V. | Method of forming structures using a neutral beam |
TW202121506A (zh) | 2019-07-19 | 2021-06-01 | 荷蘭商Asm Ip私人控股有限公司 | 形成形貌受控的非晶碳聚合物膜之方法 |
CN112309843A (zh) | 2019-07-29 | 2021-02-02 | Asm Ip私人控股有限公司 | 实现高掺杂剂掺入的选择性沉积方法 |
CN112309899A (zh) | 2019-07-30 | 2021-02-02 | Asm Ip私人控股有限公司 | 基板处理设备 |
CN112309900A (zh) | 2019-07-30 | 2021-02-02 | Asm Ip私人控股有限公司 | 基板处理设备 |
US11587814B2 (en) | 2019-07-31 | 2023-02-21 | Asm Ip Holding B.V. | Vertical batch furnace assembly |
US11227782B2 (en) | 2019-07-31 | 2022-01-18 | Asm Ip Holding B.V. | Vertical batch furnace assembly |
US11587815B2 (en) | 2019-07-31 | 2023-02-21 | Asm Ip Holding B.V. | Vertical batch furnace assembly |
CN112323048B (zh) | 2019-08-05 | 2024-02-09 | Asm Ip私人控股有限公司 | 用于化学源容器的液位传感器 |
USD965044S1 (en) | 2019-08-19 | 2022-09-27 | Asm Ip Holding B.V. | Susceptor shaft |
USD965524S1 (en) | 2019-08-19 | 2022-10-04 | Asm Ip Holding B.V. | Susceptor support |
JP2021031769A (ja) | 2019-08-21 | 2021-03-01 | エーエスエム アイピー ホールディング ビー.ブイ. | 成膜原料混合ガス生成装置及び成膜装置 |
USD940837S1 (en) | 2019-08-22 | 2022-01-11 | Asm Ip Holding B.V. | Electrode |
USD949319S1 (en) * | 2019-08-22 | 2022-04-19 | Asm Ip Holding B.V. | Exhaust duct |
KR20210024423A (ko) | 2019-08-22 | 2021-03-05 | 에이에스엠 아이피 홀딩 비.브이. | 홀을 구비한 구조체를 형성하기 위한 방법 |
USD979506S1 (en) | 2019-08-22 | 2023-02-28 | Asm Ip Holding B.V. | Insulator |
USD930782S1 (en) | 2019-08-22 | 2021-09-14 | Asm Ip Holding B.V. | Gas distributor |
KR20210024420A (ko) | 2019-08-23 | 2021-03-05 | 에이에스엠 아이피 홀딩 비.브이. | 비스(디에틸아미노)실란을 사용하여 peald에 의해 개선된 품질을 갖는 실리콘 산화물 막을 증착하기 위한 방법 |
US11286558B2 (en) | 2019-08-23 | 2022-03-29 | Asm Ip Holding B.V. | Methods for depositing a molybdenum nitride film on a surface of a substrate by a cyclical deposition process and related semiconductor device structures including a molybdenum nitride film |
KR20210029090A (ko) | 2019-09-04 | 2021-03-15 | 에이에스엠 아이피 홀딩 비.브이. | 희생 캡핑 층을 이용한 선택적 증착 방법 |
KR20210029663A (ko) | 2019-09-05 | 2021-03-16 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치 |
US11562901B2 (en) | 2019-09-25 | 2023-01-24 | Asm Ip Holding B.V. | Substrate processing method |
CN112593212B (zh) | 2019-10-02 | 2023-12-22 | Asm Ip私人控股有限公司 | 通过循环等离子体增强沉积工艺形成拓扑选择性氧化硅膜的方法 |
TW202129060A (zh) | 2019-10-08 | 2021-08-01 | 荷蘭商Asm Ip控股公司 | 基板處理裝置、及基板處理方法 |
TW202115273A (zh) | 2019-10-10 | 2021-04-16 | 荷蘭商Asm Ip私人控股有限公司 | 形成光阻底層之方法及包括光阻底層之結構 |
KR20210045930A (ko) | 2019-10-16 | 2021-04-27 | 에이에스엠 아이피 홀딩 비.브이. | 실리콘 산화물의 토폴로지-선택적 막의 형성 방법 |
US11637014B2 (en) | 2019-10-17 | 2023-04-25 | Asm Ip Holding B.V. | Methods for selective deposition of doped semiconductor material |
KR20210047808A (ko) | 2019-10-21 | 2021-04-30 | 에이에스엠 아이피 홀딩 비.브이. | 막을 선택적으로 에칭하기 위한 장치 및 방법 |
US11646205B2 (en) | 2019-10-29 | 2023-05-09 | Asm Ip Holding B.V. | Methods of selectively forming n-type doped material on a surface, systems for selectively forming n-type doped material, and structures formed using same |
KR20210054983A (ko) | 2019-11-05 | 2021-05-14 | 에이에스엠 아이피 홀딩 비.브이. | 도핑된 반도체 층을 갖는 구조체 및 이를 형성하기 위한 방법 및 시스템 |
US11489300B2 (en) | 2020-02-20 | 2022-11-01 | Amphenol Corporation | Coupling mechanism and connector with the same |
US11509075B2 (en) * | 2019-11-12 | 2022-11-22 | Amphenol Corporation | High frequency electrical connector |
US11501968B2 (en) | 2019-11-15 | 2022-11-15 | Asm Ip Holding B.V. | Method for providing a semiconductor device with silicon filled gaps |
KR20210062561A (ko) | 2019-11-20 | 2021-05-31 | 에이에스엠 아이피 홀딩 비.브이. | 기판의 표면 상에 탄소 함유 물질을 증착하는 방법, 상기 방법을 사용하여 형성된 구조물, 및 상기 구조물을 형성하기 위한 시스템 |
EP3826114A1 (en) * | 2019-11-21 | 2021-05-26 | TE Connectivity Germany GmbH | Crimp connection and crimp method for a crimp assembly with at least one retention shoulder |
KR20210065848A (ko) | 2019-11-26 | 2021-06-04 | 에이에스엠 아이피 홀딩 비.브이. | 제1 유전체 표면과 제2 금속성 표면을 포함한 기판 상에 타겟 막을 선택적으로 형성하기 위한 방법 |
CN112951697A (zh) | 2019-11-26 | 2021-06-11 | Asm Ip私人控股有限公司 | 基板处理设备 |
CN112885692A (zh) | 2019-11-29 | 2021-06-01 | Asm Ip私人控股有限公司 | 基板处理设备 |
CN112885693A (zh) | 2019-11-29 | 2021-06-01 | Asm Ip私人控股有限公司 | 基板处理设备 |
JP2021090042A (ja) | 2019-12-02 | 2021-06-10 | エーエスエム アイピー ホールディング ビー.ブイ. | 基板処理装置、基板処理方法 |
KR20210070898A (ko) | 2019-12-04 | 2021-06-15 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치 |
KR20210078405A (ko) | 2019-12-17 | 2021-06-28 | 에이에스엠 아이피 홀딩 비.브이. | 바나듐 나이트라이드 층을 형성하는 방법 및 바나듐 나이트라이드 층을 포함하는 구조 |
US11527403B2 (en) | 2019-12-19 | 2022-12-13 | Asm Ip Holding B.V. | Methods for filling a gap feature on a substrate surface and related semiconductor structures |
KR20210095050A (ko) | 2020-01-20 | 2021-07-30 | 에이에스엠 아이피 홀딩 비.브이. | 박막 형성 방법 및 박막 표면 개질 방법 |
TW202130846A (zh) | 2020-02-03 | 2021-08-16 | 荷蘭商Asm Ip私人控股有限公司 | 形成包括釩或銦層的結構之方法 |
TW202146882A (zh) | 2020-02-04 | 2021-12-16 | 荷蘭商Asm Ip私人控股有限公司 | 驗證一物品之方法、用於驗證一物品之設備、及用於驗證一反應室之系統 |
US11776846B2 (en) | 2020-02-07 | 2023-10-03 | Asm Ip Holding B.V. | Methods for depositing gap filling fluids and related systems and devices |
TW202146715A (zh) | 2020-02-17 | 2021-12-16 | 荷蘭商Asm Ip私人控股有限公司 | 用於生長磷摻雜矽層之方法及其系統 |
US11715919B2 (en) | 2020-02-20 | 2023-08-01 | Amphenol Corporation | Coupling mechanism and connector with the same |
USD993182S1 (en) | 2020-02-20 | 2023-07-25 | Amphenol Corporation | Electrical connector |
KR20210116240A (ko) | 2020-03-11 | 2021-09-27 | 에이에스엠 아이피 홀딩 비.브이. | 조절성 접합부를 갖는 기판 핸들링 장치 |
US11876356B2 (en) | 2020-03-11 | 2024-01-16 | Asm Ip Holding B.V. | Lockout tagout assembly and system and method of using same |
KR20210124042A (ko) | 2020-04-02 | 2021-10-14 | 에이에스엠 아이피 홀딩 비.브이. | 박막 형성 방법 |
TW202146689A (zh) | 2020-04-03 | 2021-12-16 | 荷蘭商Asm Ip控股公司 | 阻障層形成方法及半導體裝置的製造方法 |
TW202145344A (zh) | 2020-04-08 | 2021-12-01 | 荷蘭商Asm Ip私人控股有限公司 | 用於選擇性蝕刻氧化矽膜之設備及方法 |
US11821078B2 (en) | 2020-04-15 | 2023-11-21 | Asm Ip Holding B.V. | Method for forming precoat film and method for forming silicon-containing film |
US11898243B2 (en) | 2020-04-24 | 2024-02-13 | Asm Ip Holding B.V. | Method of forming vanadium nitride-containing layer |
KR20210132600A (ko) | 2020-04-24 | 2021-11-04 | 에이에스엠 아이피 홀딩 비.브이. | 바나듐, 질소 및 추가 원소를 포함한 층을 증착하기 위한 방법 및 시스템 |
KR20210132605A (ko) | 2020-04-24 | 2021-11-04 | 에이에스엠 아이피 홀딩 비.브이. | 냉각 가스 공급부를 포함한 수직형 배치 퍼니스 어셈블리 |
KR20210134869A (ko) | 2020-05-01 | 2021-11-11 | 에이에스엠 아이피 홀딩 비.브이. | Foup 핸들러를 이용한 foup의 빠른 교환 |
KR20210141379A (ko) | 2020-05-13 | 2021-11-23 | 에이에스엠 아이피 홀딩 비.브이. | 반응기 시스템용 레이저 정렬 고정구 |
KR20210143653A (ko) | 2020-05-19 | 2021-11-29 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치 |
KR20210145078A (ko) | 2020-05-21 | 2021-12-01 | 에이에스엠 아이피 홀딩 비.브이. | 다수의 탄소 층을 포함한 구조체 및 이를 형성하고 사용하는 방법 |
US11532900B2 (en) | 2020-05-28 | 2022-12-20 | Corning Optical Communications Rf Llc | Coaxial cable connector assemblies having rear body retention members and methods for using the same |
TW202201602A (zh) | 2020-05-29 | 2022-01-01 | 荷蘭商Asm Ip私人控股有限公司 | 基板處理方法 |
TW202218133A (zh) | 2020-06-24 | 2022-05-01 | 荷蘭商Asm Ip私人控股有限公司 | 形成含矽層之方法 |
TW202217953A (zh) | 2020-06-30 | 2022-05-01 | 荷蘭商Asm Ip私人控股有限公司 | 基板處理方法 |
KR20220010438A (ko) | 2020-07-17 | 2022-01-25 | 에이에스엠 아이피 홀딩 비.브이. | 포토리소그래피에 사용하기 위한 구조체 및 방법 |
TW202204662A (zh) | 2020-07-20 | 2022-02-01 | 荷蘭商Asm Ip私人控股有限公司 | 用於沉積鉬層之方法及系統 |
TW202212623A (zh) | 2020-08-26 | 2022-04-01 | 荷蘭商Asm Ip私人控股有限公司 | 形成金屬氧化矽層及金屬氮氧化矽層的方法、半導體結構、及系統 |
USD990534S1 (en) | 2020-09-11 | 2023-06-27 | Asm Ip Holding B.V. | Weighted lift pin |
USD1012873S1 (en) | 2020-09-24 | 2024-01-30 | Asm Ip Holding B.V. | Electrode for semiconductor processing apparatus |
TW202229613A (zh) | 2020-10-14 | 2022-08-01 | 荷蘭商Asm Ip私人控股有限公司 | 於階梯式結構上沉積材料的方法 |
TW202217037A (zh) | 2020-10-22 | 2022-05-01 | 荷蘭商Asm Ip私人控股有限公司 | 沉積釩金屬的方法、結構、裝置及沉積總成 |
TW202223136A (zh) | 2020-10-28 | 2022-06-16 | 荷蘭商Asm Ip私人控股有限公司 | 用於在基板上形成層之方法、及半導體處理系統 |
TW202235675A (zh) | 2020-11-30 | 2022-09-16 | 荷蘭商Asm Ip私人控股有限公司 | 注入器、及基板處理設備 |
US11946137B2 (en) | 2020-12-16 | 2024-04-02 | Asm Ip Holding B.V. | Runout and wobble measurement fixtures |
TW202231903A (zh) | 2020-12-22 | 2022-08-16 | 荷蘭商Asm Ip私人控股有限公司 | 過渡金屬沉積方法、過渡金屬層、用於沉積過渡金屬於基板上的沉積總成 |
WO2022150169A1 (en) * | 2021-01-05 | 2022-07-14 | Commscope Technologies Llc | Coaxial cable and connector assemblies |
USD981973S1 (en) | 2021-05-11 | 2023-03-28 | Asm Ip Holding B.V. | Reactor wall for substrate processing apparatus |
USD980814S1 (en) | 2021-05-11 | 2023-03-14 | Asm Ip Holding B.V. | Gas distributor for substrate processing apparatus |
USD980813S1 (en) | 2021-05-11 | 2023-03-14 | Asm Ip Holding B.V. | Gas flow control plate for substrate processing apparatus |
EP4092844A1 (de) * | 2021-05-19 | 2022-11-23 | Rosenberger Hochfrequenztechnik GmbH & Co. KG | Elektrischer steckverbinder und verfahren zur montage einer elektrischen steckverbinderanordnung |
CN113758605A (zh) * | 2021-09-07 | 2021-12-07 | 湖南中车尚驱电气有限公司 | 一种转动件的温度测试装置 |
USD990441S1 (en) | 2021-09-07 | 2023-06-27 | Asm Ip Holding B.V. | Gas flow control plate |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2331610A1 (de) * | 1973-06-20 | 1975-01-16 | Spinner Georg | Kabelstecker fuer vollisolierte koaxialkabel |
CN1257330A (zh) * | 1998-12-14 | 2000-06-21 | 斯宾纳电子技术工厂有限公司 | 具有环形波纹状外导体的同轴电缆用的插接件 |
EP1501159A1 (en) * | 2003-07-23 | 2005-01-26 | Andrew Corporation | Coaxial cable connector installable with common tools |
EP1557913A1 (en) * | 2004-01-23 | 2005-07-27 | Andrew Corporation | Push-on connector interface |
Family Cites Families (52)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3764959A (en) * | 1972-07-18 | 1973-10-09 | Astrolab | Universal coaxial cable connector |
US4046451A (en) * | 1976-07-08 | 1977-09-06 | Andrew Corporation | Connector for coaxial cable with annularly corrugated outer conductor |
NO801508L (no) * | 1979-10-09 | 1981-04-10 | Automation Ind Inc | Koaksial-kontaktenhet. |
US4676577A (en) * | 1985-03-27 | 1987-06-30 | John Mezzalingua Associates, Inc. | Connector for coaxial cable |
US4698028A (en) * | 1986-09-08 | 1987-10-06 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Coaxial cable connector |
DE3708242A1 (de) * | 1987-03-13 | 1988-09-22 | Spinner Georg | Verbinder fuer eine koaxialleitung mit gewelltem aussenleiter oder einen wellrohr-hohlleiter |
US5207602A (en) * | 1989-06-09 | 1993-05-04 | Raychem Corporation | Feedthrough coaxial cable connector |
JP3104059B2 (ja) * | 1996-03-28 | 2000-10-30 | 二幸電気工業株式会社 | 同軸コネクター |
US5775934A (en) * | 1996-05-15 | 1998-07-07 | Centerpin Technology, Inc. | Coaxial cable connector |
SE9800448L (sv) * | 1998-02-17 | 1999-04-12 | Teracom Components Ab | Kontaktanordning för högfrekvenskablar |
US6332808B1 (en) * | 1999-09-22 | 2001-12-25 | Mitsubishi Cable Industries, Ltd. | Connector structure |
US6234838B1 (en) * | 1999-10-08 | 2001-05-22 | Shen-Chia Wong | Structure for a coaxial cable connector |
US6796829B1 (en) * | 2000-03-03 | 2004-09-28 | Centerpin Technology, Inc. | Electrical connector apparatus and method |
EP1148592A1 (en) * | 2000-04-17 | 2001-10-24 | Cabel-Con A/S | Connector for a coaxial cable with corrugated outer conductor |
DE10100363A1 (de) * | 2001-01-05 | 2002-08-01 | Infineon Technologies Ag | Ethernet-Anpaßvorrichtung |
US6846988B2 (en) | 2002-01-18 | 2005-01-25 | Adc Telecommunications, Inc. | Triaxial connector including cable clamp |
US7029327B2 (en) * | 2002-02-04 | 2006-04-18 | Andrew Corporation | Watertight device for connecting a transmission line connector to a signal source connector |
US6790081B2 (en) * | 2002-05-08 | 2004-09-14 | Corning Gilbert Inc. | Sealed coaxial cable connector and related method |
ATE336808T1 (de) * | 2002-06-22 | 2006-09-15 | Spinner Gmbh Elektrotech | Koaxialer steckverbinder |
US7134189B2 (en) * | 2002-09-12 | 2006-11-14 | Andrew Corporation | Coaxial cable connector and tool and method for connecting a coaxial cable |
US6882242B2 (en) * | 2003-06-19 | 2005-04-19 | Radio Frequency Systems, Inc. | Frequency selective low loss transmission line system |
US6994587B2 (en) | 2003-07-23 | 2006-02-07 | Andrew Corporation | Coaxial cable connector installable with common tools |
US6939169B2 (en) | 2003-07-28 | 2005-09-06 | Andrew Corporation | Axial compression electrical connector |
US6793529B1 (en) * | 2003-09-30 | 2004-09-21 | Andrew Corporation | Coaxial connector with positive stop clamping nut attachment |
US6926555B2 (en) * | 2003-10-09 | 2005-08-09 | Radio Frequency Systems, Inc. | Tuned radio frequency coaxial connector |
US7048578B2 (en) | 2003-10-14 | 2006-05-23 | Thomas & Betts International, Inc. | Tooless coaxial connector |
EP1810374A1 (de) * | 2004-11-08 | 2007-07-25 | Huber+Suhner Ag | Kabelstecker für ein koaxialkabel sowie verfahren zum montieren eines solchen kabelsteckers |
US7077700B2 (en) * | 2004-12-20 | 2006-07-18 | Corning Gilbert Inc. | Coaxial connector with back nut clamping ring |
US7275957B1 (en) * | 2006-03-22 | 2007-10-02 | Andrew Corporation | Axial compression electrical connector for annular corrugated coaxial cable |
US7465190B2 (en) * | 2006-06-29 | 2008-12-16 | Corning Gilbert Inc. | Coaxial connector and method |
US20080102696A1 (en) * | 2006-10-26 | 2008-05-01 | John Mezzalingua Associates, Inc. | Flexible rf seal for coax cable connector |
US7435135B2 (en) * | 2007-02-08 | 2008-10-14 | Andrew Corporation | Annular corrugated coaxial cable connector with polymeric spring finger nut |
US7819698B2 (en) * | 2007-08-22 | 2010-10-26 | Andrew Llc | Sealed inner conductor contact for coaxial cable connector |
US7448906B1 (en) * | 2007-08-22 | 2008-11-11 | Andrew Llc | Hollow inner conductor contact for coaxial cable connector |
CN101919126B (zh) * | 2007-11-21 | 2013-10-23 | 康宁吉伯股份有限公司 | 用于波纹电缆的同轴电缆连接器 |
US7513795B1 (en) * | 2007-12-17 | 2009-04-07 | Ds Engineering, Llc | Compression type coaxial cable F-connectors |
US7837502B2 (en) * | 2008-08-14 | 2010-11-23 | Andrew Llc | Multi-shot coaxial connector and method of manufacture |
US20110003507A1 (en) * | 2008-08-14 | 2011-01-06 | Andrew Llc | Multi-shot Connector Assembly and Method of Manufacture |
US7607942B1 (en) * | 2008-08-14 | 2009-10-27 | Andrew Llc | Multi-shot coaxial connector and method of manufacture |
US7798847B2 (en) * | 2008-10-07 | 2010-09-21 | Andrew Llc | Inner conductor sealing insulator for coaxial connector |
US8454383B2 (en) * | 2008-11-05 | 2013-06-04 | Andrew Llc | Self gauging insertion coupling coaxial connector |
US7635283B1 (en) * | 2008-11-24 | 2009-12-22 | Andrew Llc | Connector with retaining ring for coaxial cable and associated methods |
US7731529B1 (en) * | 2008-11-24 | 2010-06-08 | Andrew Llc | Connector including compressible ring for clamping a conductor of a coaxial cable and associated methods |
US8047870B2 (en) * | 2009-01-09 | 2011-11-01 | Corning Gilbert Inc. | Coaxial connector for corrugated cable |
US7931499B2 (en) * | 2009-01-28 | 2011-04-26 | Andrew Llc | Connector including flexible fingers and associated methods |
US7803018B1 (en) * | 2009-03-10 | 2010-09-28 | Andrew Llc | Inner conductor end contacting coaxial connector and inner conductor adapter kit |
DK2422410T3 (en) * | 2009-04-24 | 2014-03-17 | Corning Gilbert Inc | KOAKSIALFORBINDER FOR Plain CABLE with fluted SEAL |
WO2010141890A1 (en) * | 2009-06-05 | 2010-12-09 | Andrew Llc | Coaxial connector interconnection cap |
US7857661B1 (en) * | 2010-02-16 | 2010-12-28 | Andrew Llc | Coaxial cable connector having jacket gripping ferrule and associated methods |
US20110201232A1 (en) * | 2010-02-16 | 2011-08-18 | Andrew Llc | Connector for coaxial cable having rotational joint between insulator member and center contact and associated methods |
US7934954B1 (en) * | 2010-04-02 | 2011-05-03 | John Mezzalingua Associates, Inc. | Coaxial cable compression connectors |
US8288667B2 (en) * | 2010-08-11 | 2012-10-16 | Avc Industrial Corp. | Double-packing cable and flexible conduit gland |
-
2010
- 2010-06-04 WO PCT/US2010/037504 patent/WO2010141890A1/en active Application Filing
- 2010-06-04 BR BRPI1015143A patent/BRPI1015143A2/pt not_active IP Right Cessation
- 2010-06-04 EP EP10784196A patent/EP2438653A1/en not_active Withdrawn
- 2010-06-04 KR KR1020117028673A patent/KR20120030071A/ko not_active Application Discontinuation
- 2010-06-04 EP EP10784204A patent/EP2438655A1/en not_active Withdrawn
- 2010-06-04 US US13/321,612 patent/US8393919B2/en not_active Expired - Fee Related
- 2010-06-04 CN CN2010800243569A patent/CN102576947A/zh active Pending
- 2010-06-04 WO PCT/US2010/037521 patent/WO2010141905A1/en active Application Filing
- 2010-06-04 BR BRPI1015106A patent/BRPI1015106A2/pt not_active Application Discontinuation
- 2010-06-04 KR KR1020117028671A patent/KR20120030069A/ko not_active Application Discontinuation
- 2010-06-04 US US13/321,608 patent/US8545263B2/en active Active
- 2010-06-04 KR KR1020117028670A patent/KR20120026521A/ko not_active Application Discontinuation
- 2010-06-04 CN CN2010800243588A patent/CN102449852A/zh active Pending
- 2010-06-04 CN CN2010800243592A patent/CN102449853A/zh active Pending
- 2010-06-04 WO PCT/US2010/037491 patent/WO2010141880A1/en active Application Filing
- 2010-06-04 US US13/321,609 patent/US8678858B2/en active Active
- 2010-06-04 US US13/321,613 patent/US8454384B2/en not_active Expired - Fee Related
- 2010-06-04 EP EP10784190A patent/EP2438652A1/en not_active Withdrawn
- 2010-06-04 EP EP10784200A patent/EP2438654A1/en not_active Withdrawn
- 2010-06-04 CN CN2010800243573A patent/CN102449851A/zh active Pending
- 2010-06-04 KR KR1020117028672A patent/KR20120030070A/ko not_active Application Discontinuation
- 2010-06-04 BR BRPI1014737A patent/BRPI1014737A2/pt not_active Application Discontinuation
- 2010-06-04 BR BRPI1011427A patent/BRPI1011427A2/pt not_active Application Discontinuation
- 2010-06-04 WO PCT/US2010/037512 patent/WO2010141898A1/en active Application Filing
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2331610A1 (de) * | 1973-06-20 | 1975-01-16 | Spinner Georg | Kabelstecker fuer vollisolierte koaxialkabel |
CN1257330A (zh) * | 1998-12-14 | 2000-06-21 | 斯宾纳电子技术工厂有限公司 | 具有环形波纹状外导体的同轴电缆用的插接件 |
EP1501159A1 (en) * | 2003-07-23 | 2005-01-26 | Andrew Corporation | Coaxial cable connector installable with common tools |
EP1557913A1 (en) * | 2004-01-23 | 2005-07-27 | Andrew Corporation | Push-on connector interface |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106654620A (zh) * | 2015-09-03 | 2017-05-10 | 康宁光电通信Rf有限责任公司 | 同轴电缆连接器 |
TWI712226B (zh) * | 2015-09-03 | 2020-12-01 | 美商康寧光纖通信射頻有限責任公司 | 同軸電纜連接器 |
CN110061381A (zh) * | 2018-01-18 | 2019-07-26 | 株式会社藤仓 | 同轴连接器 |
CN110061381B (zh) * | 2018-01-18 | 2020-12-25 | 株式会社藤仓 | 同轴连接器 |
Also Published As
Publication number | Publication date |
---|---|
CN102449851A (zh) | 2012-05-09 |
US20120064767A1 (en) | 2012-03-15 |
EP2438655A1 (en) | 2012-04-11 |
WO2010141905A1 (en) | 2010-12-09 |
BRPI1015143A2 (pt) | 2016-10-25 |
KR20120030071A (ko) | 2012-03-27 |
US8545263B2 (en) | 2013-10-01 |
KR20120026521A (ko) | 2012-03-19 |
KR20120030069A (ko) | 2012-03-27 |
US8393919B2 (en) | 2013-03-12 |
BRPI1015106A2 (pt) | 2016-04-26 |
US20120064765A1 (en) | 2012-03-15 |
BRPI1014737A2 (pt) | 2016-04-12 |
US20120064764A1 (en) | 2012-03-15 |
WO2010141880A1 (en) | 2010-12-09 |
US8678858B2 (en) | 2014-03-25 |
US8454384B2 (en) | 2013-06-04 |
CN102449852A (zh) | 2012-05-09 |
CN102576947A (zh) | 2012-07-11 |
KR20120030070A (ko) | 2012-03-27 |
WO2010141898A1 (en) | 2010-12-09 |
BRPI1011427A2 (pt) | 2016-03-15 |
EP2438652A1 (en) | 2012-04-11 |
US20120064768A1 (en) | 2012-03-15 |
EP2438653A1 (en) | 2012-04-11 |
WO2010141890A1 (en) | 2010-12-09 |
EP2438654A1 (en) | 2012-04-11 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN102449853A (zh) | 滑环触点同轴连接器 | |
US8454383B2 (en) | Self gauging insertion coupling coaxial connector | |
US8157587B2 (en) | Connector stabilizing coupling body assembly | |
US7342175B2 (en) | Electrical connector | |
US7927135B1 (en) | Coaxial connector with a coupling body with grip fingers engaging a wedge of a stabilizing body | |
US7753727B1 (en) | Threaded crimp coaxial connector | |
CN101622762B (zh) | 用于环形波纹同轴电缆的紧凑压缩连接件 | |
US7435144B2 (en) | Electrical splice connector | |
US8758053B2 (en) | Low PIM coaxial connector | |
US7385138B2 (en) | Electrical connector with wedges and spring | |
EP2756552B1 (en) | Wave gripping core sleeve | |
AU2010313683A1 (en) | Self gauging insertion coupling coaxial connector | |
US10738836B2 (en) | Adjustable torque assembly | |
CN112840511A (zh) | 模块化导体连接器组件和连接方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20120509 |