CN102206078A - 电介体陶瓷及层叠陶瓷电容器 - Google Patents
电介体陶瓷及层叠陶瓷电容器 Download PDFInfo
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- CN102206078A CN102206078A CN2011100593145A CN201110059314A CN102206078A CN 102206078 A CN102206078 A CN 102206078A CN 2011100593145 A CN2011100593145 A CN 2011100593145A CN 201110059314 A CN201110059314 A CN 201110059314A CN 102206078 A CN102206078 A CN 102206078A
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- -1 barium titanate compound Chemical class 0.000 claims abstract description 13
- 229910052684 Cerium Inorganic materials 0.000 claims abstract description 5
- 229910052746 lanthanum Inorganic materials 0.000 claims abstract description 5
- 239000002245 particle Substances 0.000 claims description 153
- 239000000203 mixture Substances 0.000 claims description 17
- 229910052771 Terbium Inorganic materials 0.000 claims description 7
- 229910052692 Dysprosium Inorganic materials 0.000 claims description 4
- 229910052691 Erbium Inorganic materials 0.000 claims description 4
- 229910052688 Gadolinium Inorganic materials 0.000 claims description 4
- 229910052689 Holmium Inorganic materials 0.000 claims description 4
- 229910052779 Neodymium Inorganic materials 0.000 claims description 4
- 229910052777 Praseodymium Inorganic materials 0.000 claims description 4
- 229910052775 Thulium Inorganic materials 0.000 claims description 4
- 229910052720 vanadium Inorganic materials 0.000 claims description 4
- 229910052765 Lutetium Inorganic materials 0.000 claims description 3
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- 239000000243 solution Substances 0.000 abstract 2
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- 238000001035 drying Methods 0.000 description 3
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- 239000012299 nitrogen atmosphere Substances 0.000 description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- 229910010413 TiO 2 Inorganic materials 0.000 description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
- 238000002441 X-ray diffraction Methods 0.000 description 2
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- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 2
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- ZTQSAGDEMFDKMZ-UHFFFAOYSA-N Butyraldehyde Chemical compound CCCC=O ZTQSAGDEMFDKMZ-UHFFFAOYSA-N 0.000 description 1
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- 229910018054 Ni-Cu Inorganic materials 0.000 description 1
- NHNBFGGVMKEFGY-UHFFFAOYSA-N Nitrate Chemical compound [O-][N+]([O-])=O NHNBFGGVMKEFGY-UHFFFAOYSA-N 0.000 description 1
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- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 1
- 150000004703 alkoxides Chemical class 0.000 description 1
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- 229910052742 iron Inorganic materials 0.000 description 1
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- 229910052727 yttrium Inorganic materials 0.000 description 1
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Abstract
本发明提供一种即使薄层化至1μm时,也能够兼备高温负荷特性和静电电容的温度特性的电介体陶瓷及层叠陶瓷电容器。结晶结构具有不同的第一结晶粒子(1)与第二结晶粒子(2)混合而成的混晶系结构。主相粒子以钛酸钡系化合物作为主成分,含有La、Ce等特定的稀土类元素。第一结晶粒子(1)由在主相粒子中没有固溶特定的稀土类元素R的主相粒子单独区域(3)、和特定的稀土类元素R固溶于主相粒子中的表层部的稀土类元素固溶区域(4)构成。第二结晶粒子(2)具有芯/壳结构,壳部(6)的特定的稀土类元素R固溶于主相粒子中。而且,对于第一及第二结晶粒子(1、2)相对于总结晶粒子的个数比例,第一结晶粒子(1)为12~84%,第二结晶粒子(2)为16~88%。
Description
技术领域
本发明涉及一种电介体陶瓷及层叠陶瓷电容器,更详细而言,涉及一种适于小型·大容量的层叠陶瓷电容器的电介体陶瓷、及使用该电介体陶瓷而制造的层叠陶瓷电容器。
背景技术
作为层叠陶瓷电容器所使用的陶瓷材料,目前正在广泛使用具有高相对介电常数的钛酸钡系化合物。
而且,伴随近年来的电子技术的发展,层叠陶瓷电容器的小型化、大容量化正在迅速发展。
上述层叠陶瓷电容器交替层叠电介体陶瓷层和内部电极,在烧成处理而得到的陶瓷烧结体的两端部形成有外部电极。通过将上述电介体陶瓷层薄层化并层叠多个,可以实现层叠陶瓷电容器的小型化·大容量化。
另外,这种层叠陶瓷电容器要求使高温负荷特性良好、使可靠性提高,以使其即使长时间暴露于高温气氛中也不会产生异常。
因此,目前正在进行的是通过在电介体陶瓷中添加稀土类元素,使稀土类元素在主相粒子中固溶,从而提高可靠性。
但是,由于稀土类元素在主相粒子中过于固溶时,产生静电电容的温度特性显著变差等新的问题,因此,优选使稀土类元素在主相粒子中部分固溶。
因此,正在开发一种混晶系结构的电介体陶瓷,其是仅在主相粒子的表面附近使稀土类元素固溶的芯/壳结构、或者混合在主相粒子没有固溶稀土类元素的结晶粒子和稀土类元素固溶至主相粒子的内部的结晶粒子而成的。
例如,在专利文献1中,提出了一种电介体瓷器组合物,其中,含有芯/壳结构的陶瓷粒子,芯部由几乎纯粹的钛酸钡的区域构成,该壳部由以钛酸钡作为主成分的固溶体构成,该烧结体的剖面中,形成该烧结体的全陶瓷的粒子数的比例为15%以上。
在专利文献1中,通过使陶瓷粒子相对于全陶瓷粒子的粒子数的比例为15%以上,相对于烧成前的厚度约5μm、层叠数10的层叠陶瓷电容器,寿命特性良好且可以确保可靠性,并且得到良好的静电电容的温度特性。
专利文献1:日本特开2002-80276号公报(权利要求1、段落编号(0013))
发明内容
但是,近年来,要求层叠陶瓷电容器更进一步小型化,且正在要求将电介体陶瓷层的厚度薄层化至不足1μm。
但是,在专利文献1中,在烧成前的厚度为5μm左右的层叠陶瓷电容器中,虽然可以兼备高温负荷特性和静电电容的温度特性,但将电介体陶瓷层薄层化至不足1μm的情况下,存在难以兼备高温负荷特性和静电电容温度特性的问题。
而且,在如专利文献1那样的芯/壳结构中,即使使稀土类元素固溶于主相粒子中,也难以进行高精度的固溶制御。
本发明是鉴于这样的情况而完成的,其目的在于,提供一种即使薄层化至不足1μm的情况下,也能够兼备高温负荷特性和静电电容的温度特性的电介体陶瓷及使用该电介体陶瓷制造的层叠陶瓷电容器。
本发明者人等,在钛酸钡系化合物中添加稀土类元素并进行潜心研究发现,通过将电介体陶瓷的结晶结构制成稀土类元素几乎没有固溶的结晶粒子和芯/壳结构的结晶粒子的混晶系结构,且使这两种结晶粒子的个数比例为规定范围,即使将电介体陶瓷的厚度薄层化至不足1μm的情况下,也能够防兼备高温负荷特性和静电电容的温度特性。
本发明是基于这样的见解而完成的,本发明提供一种电介体陶瓷,其特征在于,主相粒子以钛酸钡系化合物作为主成分,并且,含有选自La、Ce、Pr、Nd、Gd、Tb、Dy、Ho、Er、Tm、Tb、Lu及Y中的至少1种稀土类元素R,所述电介体陶瓷具有第一结晶粒子和第二结晶粒子混合的混晶系结构,所述第一结晶粒子是所述主相粒子单独构成或在所述主相粒子中固溶微量的所述稀土类元素R而成的,所述第二结晶粒子具有由所述主相粒子构成的芯部及在所述主相粒子中固溶所述稀土类元素R并在所述芯部的周围形成的壳部,对于所述第一及第二结晶粒子相对于总结晶粒子的个数比例而言,所述第一结晶粒子为12~84%,所述第二结晶粒子为16~88%。
另外,本发明的电介体陶瓷的特征在于,对所述第一结晶粒子而言,所述稀土类元素R向所述主相粒子的固溶距离为从所述主相粒子的表面朝向内部的5nm以下(包括0。)。
另外,本发明的电介体陶瓷的特征在于,所述壳部的厚度为所述主相粒子的直径的1/8以上3/8以下。
另外,本发明的电介体陶瓷的特征在于,组成式用通式{100(Ba1-xCax)mTiO3+aRO3/2+bMgO+cMOy+dSiO2+eLiO1/2}表示,其中,M表示Mn及V中的至少任1种,y表示由M的价数唯一决定的正数,所述m、x、a、b、c、d、及e分别为0.960≤m≤1.030、0≤x≤0.20、0.2≤a≤5.0、0≤b≤2.0、0.2≤c≤1.0、0.5≤d≤4.0、0.5≤e≤6.0。
另外,本发明提供一种层叠陶瓷电容器,具备电介体陶瓷层和内部电极交替层叠并烧成的陶瓷烧结体,该陶瓷烧结体的两端部形成有外部电极,其特征在于,由所述任一项所述的电介体陶瓷形成所述电介体陶瓷层。
根据所述电介体陶瓷,主相粒子以钛酸钡系化合物作为主成分,并且,含有La、Ce等特定的稀土类元素R,且具有所述主相粒子单独构成或在所述主相粒子中固溶有微量的所述稀土类元素R而成的第一结晶粒子以及具有芯/壳结构的第二结晶粒子混合而成的混晶系结构,对于所述第一及第二结晶粒子相对于总结晶粒子的个数比例,所述第一结晶粒子为12~84%,所述第二结晶粒子为16~88%,因此,即使薄层化至不足1μm的情况下,也能够得到具有良好的高温负荷特性和良好的静电电容的温度特性的电介体陶瓷。
具体而言,可以得到即使薄层化至不足1μm的情况下,对于在150℃的高温且施加12.5V的直流电压下具有150小时以上的长寿命,并满足EIA规格的X5R特性的兼备高温负荷特性和静电电容的温度特性的电介体陶瓷。
另外,第一结晶粒子中,稀土类元素R向主相粒子的固溶距离为从主相粒子的表面至内部的5nm以下(包括0。),进而,由于壳部的厚度为所述主相粒子的直径的1/8以上3/8以下,因此,可以容易地发挥所述作用效果。
另外,组成式用通式{100(Ba1-xCax)mTiO3+aRO3/2+bMgO+cMOy+dSiO2+eLiO1/2}(其中,M表示Mn及V中的至少任1种,y表示由M的价数决定的正数。)表示,所述m、x、a、b、c、d、及e分别为0.960≤m≤1.030、0≤x≤0.20、0.2≤a≤5.0、0≤b≤2.0、0.2≤c≤1.0、0.5≤d≤4.0、0.5≤e≤6.0,因此,除钛酸钡系化合物及稀土类元素R以外,即使含有MgO、MnO、V2O5、SiO2、Li2O等添加物,也能够得到不对高温负荷特性及静电电容的温度特性造成影响的期望的电介体陶瓷。
另外,根据本发明的层叠陶瓷电容器,具备电介体陶瓷层和内部电极交替层叠并烧成得到的层叠烧结体,在该层叠烧结体的两端部形成有外部电极,在上述的层叠陶瓷电容器中,由所述的电介体陶瓷形成所述电介体陶瓷层,因此,可以得到具有高可靠性且静电电容的温度特性良好的层叠陶瓷电容器。
附图说明
图1是示意性表示本发明的电介体陶瓷的一实施方式的剖面图;
图2是第一结晶粒子的放大剖面图;
图3是第二结晶粒子的放大剖面图;
图4是表示使用所述电介体陶瓷而制造的层叠陶瓷电容器的一实施方式的剖面图。
符号说明
1第一结晶粒子
2第二结晶粒子
5芯部
6壳部
7陶瓷烧结体
8a~8f内部电极
9a、9b外部电极
12a~12g电介体陶瓷层
具体实施方式
接着,对本发明的实施方式进行详细说明。
图1是示意性表示本发明的电介体陶瓷的一个实施方式的剖面图。
该电介体陶瓷具有粒子结构不同的第一结晶粒子1和第二结晶粒子2混合而成的混晶系结构。而且,主相粒子作为主成分包含于第一结晶粒子1和第二结晶粒子2两者中。
图2是第一结晶粒子1的放大剖面图。
第一结晶粒子1在主相粒子3的表层部部分地形成有使特定的稀土类元素R固溶的稀土类元素固溶区域4。即,在主相粒子3的表层部固溶有微量的特定的稀土类元素R,由此,在主相粒子3的表层部部分地形成有稀土类元素固溶区域4。在本实施方式中,对稀土类元素固溶区域4而言,特定的稀土类元素R向主相粒子3的固溶距离H为从主相粒子3的表面朝向内部的5nm以下的微小距离。
图3是第二结晶粒子2的放大剖面图。
第二结晶粒子2由芯/壳结构构成,具有由主相粒子构成的芯部5和在主相粒子中固溶特定的稀土类元素R并形成于上述芯部5的周围的壳部6。而且,本实施方式中,壳部6的厚度T为主相粒子的直径D的1/8以上且3/8以下。
在此,主相粒子以钛酸钡系化合物作为主成分。钛酸钡系化合物具有通式ABO3所示的钙钛矿型结构,在本实施方式中,A位用Ba、B位用Ti形成的BaTiO3、Ba的一部份可以使用被Ca取代的(Ba,Ca)TiO3。虽然A位和B位的配合摩尔比A/B在化学计量上为1.000,但可配合成以不对各种特性、烧结性等造成影响的程度,根据需要使A位过剩或使B位过剩。
另外,作为特定的稀土类元素R,可以使用选自La、Ce、Pr、Nd、Gd、Tb、Dy、Ho、Er、Tm、Tb、Lu及Y中的至少1种。
而且,本实施方式中,第一及第二结晶粒子1、2相对于总结晶粒子的个数比例中,第一结晶粒子1为12~84%,第二结晶粒子2为16~88%。
下面,叙述其理由。
(1)第一结晶粒子1的个数比例
通过使电介体陶瓷为第一结晶粒子1和第二结晶粒子2的混晶系结构,即使厚度薄层化至不足1μm的情况下,也能够实现高温负荷特性和静电电容的温度特性的兼备。
但是,第一结晶粒子1相对于总结晶粒子的个数比例超过84%时,高温负荷时的寿命降低,高温负荷特性变差,可能导致可靠性降低。另一方面,第一结晶粒子1相对于总结晶粒子的个数比例不足12%时,有时静电电容的温度变化率变大,可能导致温度特性变差。
因此,使第一结晶粒子1相对于总结晶粒子的个数比例为12~84%,实现高温负荷特性和静电电容的温度特性的兼备。
(2)第二结晶结构2的个数比例
通过使电介体陶瓷为第一结晶粒子1和第二结晶粒子2的混晶系结构,即使为如上述厚度薄层化至不足1μm的情况下,也能够实现高温负荷特性和静电电容的温度特性的兼备。
但是,第二结晶粒子2相对于总结晶粒子的个数比例超过88%时,静电电容的温度变化率变大,可能招致温度特性变差。另一方面,第二结晶粒子2相对于总结晶粒子的个数比例不足16%时,有时高温负荷时的寿命降低,高温负荷特性变差,可能招致可靠性降低。
因此,使第二结晶粒子2相对于总结晶粒子的个数比例为16~88%,实现高温负荷特性和静电电容的温度特性的兼备。
这样,在本实施方式中,通过设为以上述范围含有第一结晶粒子1及第二结晶粒子2两者的混晶系结构,实现高温负荷特性和静电电容的温度特性的兼备。
另外,第一结晶粒子1和第二结晶粒子2的个数比例的控制如后所述,可以通过调整主成分粉末的结晶性及烧成温度而进行。
另外,在上述电介体陶瓷中,至少第一结晶粒子1及第二结晶粒子2相对于总结晶粒子以上述的范围的个数比例混合即可,也可以不仅仅由第一结晶粒子1及第二结晶粒子2形成。即,如果第一结晶粒子1及第二结晶粒子2相对于总结晶粒子以上述的范围的个数比例混合,则具有第一结晶粒子1及第二结晶粒子2以外的结晶结构的第三结晶粒子可以存在于电介体陶瓷中。
另外,在上述实施方式中,对第一结晶粒子1而言,微量的上述稀土类元素R固溶于上述主相粒子,但主相粒子可以单独存在,该情况下,图2的固溶距离H为0。
另外,本发明的电介体陶瓷含有至少以钛酸钡系化合物为主成分的主相粒子、和特定的稀土类元素R即可,根据需要,优选添加Mg氧化物、Mn氧化物、V氧化物、作为烧结助剂的Si氧化物、或Li氧化物。
该情况下,电介体陶瓷的组成式可以用下述通式(A)表示。
100(Ba1-xCax)mTiO3+aRO3/2+bMgO+cMOy+dSiO2+eLiO1/2 ...(A)
在此,M表示Mn及V中的至少任一种,y表示由M的价数决定的正数。
另外,m为A位和B位的配合摩尔比、x为Ca相对于Ba的取代摩尔比、a、b、c、d、及e为相对于主成分即(Ba1-xCax)mTiO3:100摩尔份的RO3/2、MgO、MOy、SiO2、LiO1/2的各摩尔份。而且,这些m、x、a、b、c、d、及e优选数学式(1)~(7)的范围。
0.960≤m≤1.030…(1)
0≤x≤0.20 …(2)
0.2≤a≤5.0 …(3)
0≤b≤2.0 …(4)
0.2≤c≤1.0 …(5)
0.5≤d≤4.0 …(6)
0.5≤e≤6.0 …(7)
即,上述通式(A)通过满足数学式(1)~(7),即使厚度薄层化至不足1μm的情况下,也能够得到兼备高温负荷特性和静电电容的温度特性的、具有可靠性的电介体陶瓷。
另外,关于通式(A)中的稀土类元素氧化物RO3/2以外的添加物、即MgO、MOy、SiO2、及LiO1/2的存在形态没有特别的形态,可以在主成分中固溶,也可以存在于结晶晶界或结晶三重点。
接着,对使用上述电介体陶瓷制造的层叠陶瓷电容器进行详细说明。
图4是示意性表示上述层叠陶瓷电容器的一个实施方式的剖面图。
该层叠陶瓷电容器在陶瓷烧结体7中埋设内部电极8a~8f,同时,在该陶瓷烧结体7的两端部形成有外部电极9a、9b,进而,在该外部电极9a、9b的表面形成有第一镀敷被膜10a、10b及第二镀敷被膜11a、11b。
即,陶瓷烧结体7通过将由本发明的电介体陶瓷形成的电介体陶瓷层12a~12g和内部电极8a~8f交替层叠并烧成而成,内部电极8a、8c、8e与外部电极9a电连接,内部电极8b、8d、8f与外部电极9b电连接。而且,在内部电极8a、8c、8e和内部电极8b、8d、8f的相对面间形成静电电容。
接着,对上述层叠陶瓷电容器的制造方法进行详细说明。
首先,作为陶瓷素原料,准备Ba化合物、Ti化合物,根据需要准备Ca化合物。而且,称量规定量的这些陶瓷素原料,将这些秤量物与PSZ(Partially Stabilized Zirconia:部分稳定化氧化锆)球等粉碎介质及纯水一起投入到球磨机中,充分地进行湿式混合粉碎,使其干燥后,在950~1150℃的温度下进行规定时间的预烧,制作由钛酸钡系化合物构成的主成分粉末。
接着,分析主成分粉末的结晶性,将主成分粉末区分成结晶性高的主成分粉末和结晶性低的主成分粉末,然后,混合两者并称量规定量。
准备R化合物、根据需要准备Mg化合物、Mn化合物、V化合物、Li化合物、Si化合物等,称量规定量。将这些秤量物与PSZ球及纯水一起投入到球磨机中,充分地进行湿式混合粉碎,使其干燥制作陶瓷原料粉末。
接着,将上述陶瓷原料粉末与有机粘合剂(有機バインダ)及有机溶剂、粉碎介质一起投入到球磨机中进行湿式混合,制作陶瓷浆料,使用刮板法(リツプ法、RIP法)等成型加工陶瓷浆料,以烧成后的厚度成为不足1μm的方式制作陶瓷生片。
接着,使用内部电极用导电性浆膏在陶瓷生片上实施丝网印刷,在上述陶瓷生片的表面形成规定图案的导电膜。
另外,作为在内部电极用导电性浆膏中含有的导电性材料,没有特别的限定,但从低成本化的观点考虑,优选使用以Ni、Cu或以它们的合金为主成分的卑金属材料。
接着,将形成有导电膜的陶瓷生片在规定方向层叠多张,用未形成导电膜的的陶瓷生片夹持、压装,切断为规定尺寸而制作陶瓷层叠体。然后,在氮气氛下,在300~500℃的温度下进行脱粘合剂处理,进而,在由氧分压控制为10-9~10-12Mpa的H2-N2-H2O气体构成的还原性气氛下,在规定温度下进行2小时烧成处理。由此,共烧结导电膜和陶瓷生片,形成埋设有内部电极8a~8f的陶瓷烧结体7。
另外,例如,在烧成处理中,主成分粉末中结晶性高的主成分粉末由于特定的稀土类元素R等添加物成分难以固溶,因此,成为第一结晶粒子1。另外,对于结晶性低的主成分粉末而言,因为特定的稀土类元素R等添加物成分容易固溶,从而成为芯/壳结构的第二结晶粒子2。
另外,第一结晶粒子1及第二结晶粒子2相对于总结晶粒子的个数比例可以通过调整烧成温度进行控制,例如,通过在最高温度990℃~1025℃的范围下进行烧成,可以使上述个数比例为上述的本发明范围内。
由此,电介体陶瓷层12a~12g形成粒子结构不同的第一结晶粒子1和第二结晶粒子2的混晶系结构。
接着,在陶瓷烧结体7的两端面涂布外部电极用导电性浆膏,在600℃~800℃的温度下进行烧结处理,形成外部电极9a、9b。
另外,关于在外部电极用导电性浆膏中含有的导电性材料也没有特别的限定,从低成本化的观点考虑,优选使用以Ag及Cu、或它们合金为主成分的材料。
另外,作为外部电极9a、9b的形成方法,也可以在陶瓷层叠体的两端面涂布外部电极用导电性浆膏后,与陶瓷层叠体一起实施烧成处理。
而且,在最后实施电解镀敷并在外部电极9a、9b的表面形成由Ni、Cu、Ni-Cu合金等构成的第一镀敷被膜10a、10b,进而,在该第一镀敷被膜10a、10b上形成由焊锡及锡等构成的第二镀敷被膜11a、11b,由此制造层叠陶瓷电容器。
另外,本发明并不限定于上述实施方式。例如,在上述实施方式中,没有言及特定的稀土类元素R、Mg、Mn、V、Si及Li以外的添加物成分,从电特性等各种特性及提高可靠性的观点考虑,也优选根据需要含有Al2O3、CuO等作为添加物。
另外,也可以根据碳酸盐及氧化物、硝酸盐、氢氧化物、有机酸盐、醇盐、配位化合物等、合成反応的形态适当选择选择钡化合物、钛化合物等陶瓷素原料。
另外,在上述的层叠陶瓷电容器的制造过程中,Al、Fe、Co等有可能作为杂质混入且存在于结晶粒子内或结晶晶界中,但不影响电容器的电特性。
另外,在层叠陶瓷电容器的烧成处理中,内部电极成分可能扩散至结晶粒子或结晶晶界中,该情况下也不影响电容器的电特性。
接着,对本发明的实施例进行具体说明。
实施例1
(试样的制作)
称量规定量的BaCO3、TiO2作为陶瓷素原料,将这些秤量物与PSZ球及纯水一起投入到球磨机中,充分地进行湿式混合粉碎,使其干燥后,在1050℃的温度下进行约2小时的预烧,由此,得到由Ba1.007TiO3构成的主成分粉末。
接着,用X射线衍射装置(XRD)分析主成分粉末的结晶性。而且,将主成分粉末区分成结晶性高的主成分粉末和结晶性低的主成分粉末,将两者混合并称量规定量。
准备DyO3/2作为特定的稀土类元素R及准备MgO、MnO、V2O5、SiO2作为其它的添加成分。而且,相对于主成分100摩尔份,以成为DyO3/2:1摩尔份、MgO:0.7摩尔份、MnO:0.3摩尔份、VO5/2:2摩尔份、SiO2:1.5摩尔份的方式,分别称量添加物粉末。将PSZ球及纯水一起投入到球磨机中,充分地进行湿式混合粉碎,使其干燥得到陶瓷原料粉末。
接着,将上述陶瓷原料粉末与乙醇、聚乙烯醇丁缩醛系粘合剂、及PSZ球一起投入到球磨机中进行湿式混合,由此,制作陶瓷浆料。接着,将陶瓷浆料过滤除去极微粒及粗大粒,然后,使用刮板法成型加工为片状,以烧成后的电介体陶瓷层的厚度成为0.9μm的方式制作陶瓷生片。
接着,准备含有Ni粉末的内部电极用导电性浆膏。而且,使用该内部电极用导电性浆膏在陶瓷生片上实施丝网印刷,在上述陶瓷生片的表面形成规定图案的导电膜。
接着,层叠规定张数的形成有导电膜的陶瓷生片,用没有形成导电膜的陶瓷生片夹持、压装,切断为规定尺寸,制作陶瓷层叠体。而且,在氮气氛下,在300℃的温度下进行脱粘合剂处理,进而,在由氧分压控制为10-10Mpa的H2-N2-H2O气体构成的还原性气氛下,在最高温度980℃~1040℃下进行2小时烧成处理。由此,共烧结导电膜和陶瓷生片,制作埋设有内部电极的陶瓷烧结体。另外,在该烧成处理中,主成分粉末中结晶性高的主成分粉末成为第一结晶粒子,结晶性低的主成分粉末成为第二结晶粒子。
接着,准备在Cu粉末中添加有B2O3-Li2O-SiO2-BaO系玻璃粉的外部电极用导电性浆膏。而且,将外部电极用导电性浆膏涂布于陶瓷烧结体的两端面,在氮气氛下,在800℃下进行烧结处理,形成外部电极,制作试样编号1~6的试样。
这样得到的试样的外形尺寸长度为2.0mm、宽度为1.2mm、厚度为1.0mm,电介体陶瓷层的厚度为0.9μm。另外,电介体陶瓷层的有效层数为100,每一层的对向电极面积1.4mm2。
(试样的评价)
对试样编号1~6的各试样分别求得第一结晶粒子和第二结晶粒子相对于总结晶粒子的个数比例。
即,将结晶粒子的分析个数设为100个,使用2nm的探针,利用TEM-EDX(能量分散型X射线分光法)进行组成分析。具体而言,关于各结晶粒子,从结晶晶界开始以2nm的间隔分析5点,进而,从其分析点开始以15nm为间隔分析5点。确认是否在各分析点检测出DyO3/2,进而,对于各结晶粒子判断有无第一结晶粒子及第二结晶粒子。
在此,判断距DyO3/2的主相粒子的固溶距离从主相粒子的表面朝向内部为5nm以下的结晶粒子为第一结晶粒子,粒子结构具有芯/壳结构,且判断壳部的厚度T为主相粒子的直径D的1/8以上3/8以下的结晶粒子为第二结晶粒子。
接着,对试样编号1~6的各试样测定相对介电常数、静电电容的温度变化率、及平均寿命。
在此,对相对介电常数而言,使用自动电桥式测定器,在温度25℃、频率1kHz、等效电压0.5Vrms的条件下测定静电电容,由试样尺寸求得相对介电常数。
另外,静电电容的温度变化率以在25℃下的静电电容为基准,测定-55℃~+85℃的静电电容的变化率。而且,根据其最大值评价静电电容的温度特性。另外,以25℃的静电电容为基准,在-55℃~+85℃的范围下的静电电容的变化率如果为±15%以内,则可满足EIA规格的X5R特性。
另外,对试样编号1~6的各试样进行加速可靠性实验,评价高温负荷特性。即,在150℃的高温下施加12.5V的直流电压,测定绝缘电阻的实效变化,绝缘电阻变为105Ω以下时判断为故障,算出平均寿命并评价高温负荷特性。
表1表示试样编号1~6的烧成温度、第一结晶粒子及第二结晶粒子相对于总结晶粒子的各个数比例、相对介电常数、静电电容的温度变化率及平均寿命的测定结果。另外,静电电容的温度变化率表示最大值。
表1
*为本发明范围外
由试样编号1~6表明,通过烧成温度可以控制第一结晶粒子及第二结晶粒子相对于总结晶粒子的各个数比例。
即,试样编号5,由于烧成温度高至1040℃,因此,过度地促进DyO3/2相对于主相粒子的固溶,因此,第一结晶粒子不存在,第二结晶粒子相对于总结晶粒子的个数比例多至92%。其结果可知,在该试样编号5中,静电电容的温度变化率成为-17%且不在±15%的范围内,不能满足EIA规格的X5R特性。
另外,试样编号6由于烧成温度低至980℃,因此,难以促进DyO3/2相对于主相粒子的固溶,因此,第一结晶粒子相对于总结晶粒子的个数比例多至88%,第二结晶粒子相对于总结晶粒子的个数比例少至12%。其结果可知,在该试样编号6中,平均寿命短至120小时,高温负荷特性变差,不能确保充分的可靠性。
与之相对,试样编号1~4由于在990~1025℃适度的温度下烧成,因此,第一结晶粒子相对于总结晶粒子的个数比例为12~84%、第二结晶粒子相对于总结晶粒子的个数比例为16~88%,在本发明范围内。而且,其结果可知,在试样编号1~4中,静电电容的温度变化率变为-10%~-14%,变为±15%的范围内,满足EIA规格的X5R特性。另外,平均寿命也为150~220小时的长寿命,高温负荷特性良好,可以得到高可靠性。
实施例2
准备BaCO3、TiO2及CaCO3作为陶瓷素原料,通过与实施例1同样的方法、序得到由(Ba1-xCax)mTiO3(m为0.960~1.030、x为0~0.20)构成的主成分粉末。
接着,作为添加物成分,准备稀土类元素氧化物RO3/2(R为La、Ce、Pr、Nd、Sm、Eu、Gd、Tb、Dy、Ho、Er、Tm、Yb、Lu、Y)、及MgO、MnO、VO5/2、SiO2、LiO1/2。
而且,以成为表2所示那样的摩尔比的方式,称量主成分粉末及添加物成分,通过与实施例1同样的方法得到陶瓷原料粉末。
使用这些陶瓷原料粉末,通过与实施例1同样的方法、顺序,以烧成后的电介体陶瓷层的厚度成为0.8μm的方式,制作陶瓷生片,进而,在烧成温度1025℃下进行烧成处理,制作试样编号11~27的试样。
接着,关于试样编号11~27的各试样,通过与实施例1同样的方法、顺序求得第一结晶粒子及第二结晶粒子相对于总结晶粒子的个数比例,确认在本发明范围内。
接着,关于试样编号11~27的各试样,通过与实施例1同样的方法、顺序,测定相对介电常数、静电电容的温度变化率、及平均寿命。
表2表示试样编号11~27的各试样的组成成分、及测定结果。
表2
如该表2可知,在通式{100(Ba1-xCax)mTiO3+aRO3/2+bMgO+cMOy+dSiO2+eLiO1/2}中,在满足0.960≤m≤1.030、0≤x≤0.20、0.2≤a≤5.0、0≤b≤2.0、0.2≤c≤1.0、0.5≤d≤4.0、及0.5≤e≤6.0的范围内,即使将电介体陶瓷层薄层化至0.8μm,静电电容的温度变化率也变为-11~-14%,在±15%以内,且得到平均寿命也为150小时以上的良好的结果。即,确认了即使含有规定量的MgO、MOy、SiO2、LiO1/2等添加物,也不对兼备静电电容的温度特性与高温负荷特性造成影响。
工业上的可利用性
即使将电介体陶瓷的厚度薄层化至不足1μm,也能够得到兼备高温负荷特性和静电电容的温度特性的层叠陶瓷电容器。
Claims (5)
1.一种电介体陶瓷,其特征在于,
主相粒子以钛酸钡系化合物作为主成分,并且,含有选自La、Ce、Pr、Nd、Gd、Tb、Dy、Ho、Er、Tm、Tb、Lu及Y中的至少1种稀土类元素R,
具有第一结晶粒子和第二结晶粒子混合存在的混晶系结构,所述第一结晶粒子是所述主相粒子单独构成或在所述主相粒子中固溶微量的所述稀土类元素R而成的,所述第二结晶粒子具有由所述主相粒子构成的芯部及在所述主相粒子中固溶所述稀土类元素R并在所述芯部的周围形成的壳部,
对于所述第一及第二结晶粒子相对于总结晶粒子的个数比例而言,所述第一结晶粒子为12~84%,所述第二结晶粒子为16~88%。
2.如权利要求1所述的电介体陶瓷,其特征在于,对所述第一结晶粒子而言,所述稀土类元素R向所述主相粒子的固溶距离为从所述主相粒子的表面朝向内部的5nm以下,且包括0。
3.如权利要求1或2所述的电介体陶瓷,其特征在于,所述壳部的厚度为所述主相粒子的直径的1/8以上且3/8以下。
4.如权利要求1~3中任一项所述的电介体陶瓷,其特征在于,组成式用通式{100(Ba1-xCax)mTiO3+aRO3/2+bMgO+cMOy+dSiO2+eLiO1/2}表示,其中,M表示Mn及V中的至少任1种,y表示由M的价数唯一决定的正数,所述m、x、a、b、c、d、及e分别为0.960≤m≤1.030、0≤x≤0.20、0.2≤a≤5.0、0≤b≤2.0、0.2≤c≤1.0、0.5≤d≤4.0、0.5≤e≤6.0。
5.一种层叠陶瓷电容器,具备电介体陶瓷层和内部电极交替层叠并烧成的陶瓷烧结体,该陶瓷烧结体的两端部形成有外部电极,其特征在于,用权利要求1~4中任一项所述的电介体陶瓷形成所述电介体陶瓷层。
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