CN102138227A - 半导体装置 - Google Patents

半导体装置 Download PDF

Info

Publication number
CN102138227A
CN102138227A CN2009801334030A CN200980133403A CN102138227A CN 102138227 A CN102138227 A CN 102138227A CN 2009801334030 A CN2009801334030 A CN 2009801334030A CN 200980133403 A CN200980133403 A CN 200980133403A CN 102138227 A CN102138227 A CN 102138227A
Authority
CN
China
Prior art keywords
layer
semiconductor device
quantum well
composition
aforementioned
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN2009801334030A
Other languages
English (en)
Chinese (zh)
Inventor
名古肇
橘浩一
斋藤真司
原田佳幸
布上真也
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Publication of CN102138227A publication Critical patent/CN102138227A/zh
Pending legal-status Critical Current

Links

Images

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10HINORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80Constructional details
    • H10H20/81Bodies
    • H10H20/822Materials of the light-emitting regions
    • H10H20/824Materials of the light-emitting regions comprising only Group III-V materials, e.g. GaP
    • H10H20/825Materials of the light-emitting regions comprising only Group III-V materials, e.g. GaP containing nitrogen, e.g. GaN
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10HINORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80Constructional details
    • H10H20/81Bodies
    • H10H20/811Bodies having quantum effect structures or superlattices, e.g. tunnel junctions
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10HINORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80Constructional details
    • H10H20/81Bodies
    • H10H20/811Bodies having quantum effect structures or superlattices, e.g. tunnel junctions
    • H10H20/812Bodies having quantum effect structures or superlattices, e.g. tunnel junctions within the light-emitting regions, e.g. having quantum confinement structures

Landscapes

  • Led Devices (AREA)
CN2009801334030A 2008-08-29 2009-08-31 半导体装置 Pending CN102138227A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2008221471 2008-08-29
JP221471/2008 2008-08-29
PCT/JP2009/065195 WO2010024436A1 (ja) 2008-08-29 2009-08-31 半導体装置

Publications (1)

Publication Number Publication Date
CN102138227A true CN102138227A (zh) 2011-07-27

Family

ID=41721595

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2009801334030A Pending CN102138227A (zh) 2008-08-29 2009-08-31 半导体装置

Country Status (6)

Country Link
US (1) US20100187497A1 (enExample)
EP (1) EP2325899A4 (enExample)
JP (2) JP2010080955A (enExample)
KR (1) KR20110034689A (enExample)
CN (1) CN102138227A (enExample)
WO (1) WO2010024436A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107207960A (zh) * 2015-02-02 2017-09-26 斯坦雷电气株式会社 量子点的制造方法和量子点

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011027417A1 (ja) 2009-09-01 2011-03-10 株式会社 東芝 半導体発光素子
JP4940317B2 (ja) * 2010-02-25 2012-05-30 株式会社東芝 半導体発光素子及びその製造方法
JP5325171B2 (ja) * 2010-07-08 2013-10-23 株式会社東芝 半導体発光素子
US9142413B2 (en) * 2010-11-08 2015-09-22 Georgia Tech Research Corporation Methods for growing a non-phase separated group-III nitride semiconductor alloy
US20130082274A1 (en) * 2011-09-29 2013-04-04 Bridgelux, Inc. Light emitting devices having dislocation density maintaining buffer layers
KR101262726B1 (ko) * 2011-12-30 2013-05-09 일진엘이디(주) 탄소 도핑된 p형 질화물층을 포함하는 질화물계 발광소자 제조 방법
EP2820678B1 (en) * 2012-02-28 2019-05-08 Lumileds Holding B.V. Integration of gallium nitride leds with aluminum gallium nitride/gallium nitride devices on silicon substrates for ac leds
TWI593135B (zh) 2013-03-15 2017-07-21 索泰克公司 具有含氮化銦鎵之主動區域之半導體結構,形成此等半導體結構之方法,以及應用此等半導體結構形成之發光元件
TWI648872B (zh) 2013-03-15 2019-01-21 法商梭意泰科公司 具有包含InGaN之作用區域之半導體結構、形成此等半導體結構之方法及由此等半導體結構所形成之發光裝置
FR3003397B1 (fr) * 2013-03-15 2016-07-22 Soitec Silicon On Insulator Structures semi-conductrices dotées de régions actives comprenant de l'INGAN
JP2016517627A (ja) * 2013-03-15 2016-06-16 ソイテックSoitec InGaNを含んでいる活性領域を有している半導体構造、このような半導体構造を形成する方法、及びこのような半導体構造から形成された発光デバイス
JP5606595B2 (ja) * 2013-06-28 2014-10-15 株式会社東芝 半導体発光素子の製造方法
FR3012676A1 (fr) 2013-10-25 2015-05-01 Commissariat Energie Atomique Diode electroluminescente a puits quantiques separes par des couches barrieres d'ingan a compositions d'indium variables
JP6281469B2 (ja) * 2014-11-03 2018-02-21 豊田合成株式会社 発光素子の製造方法
US9985168B1 (en) 2014-11-18 2018-05-29 Cree, Inc. Group III nitride based LED structures including multiple quantum wells with barrier-well unit interface layers
JP6764230B2 (ja) * 2015-02-06 2020-09-30 スタンレー電気株式会社 半導体ナノ粒子の製造方法
JP6764231B2 (ja) * 2015-02-06 2020-09-30 スタンレー電気株式会社 半導体ナノ粒子の製造方法、および、半導体ナノ粒子
JP6128138B2 (ja) * 2015-02-10 2017-05-17 ウシオ電機株式会社 半導体発光素子
DE102016116425A1 (de) 2016-09-02 2018-03-08 Osram Opto Semiconductors Gmbh Optoelektronisches Bauelement
US11393948B2 (en) 2018-08-31 2022-07-19 Creeled, Inc. Group III nitride LED structures with improved electrical performance
JP6891865B2 (ja) 2018-10-25 2021-06-18 日亜化学工業株式会社 発光素子
US11404473B2 (en) 2019-12-23 2022-08-02 Lumileds Llc III-nitride multi-wavelength LED arrays
US11923398B2 (en) 2019-12-23 2024-03-05 Lumileds Llc III-nitride multi-wavelength LED arrays
WO2021226121A1 (en) 2020-05-04 2021-11-11 Raxium, Inc. Light emitting diodes with aluminum-containing layers integrated therein and associated methods
US11631786B2 (en) * 2020-11-12 2023-04-18 Lumileds Llc III-nitride multi-wavelength LED arrays with etch stop layer
CN115458649B (zh) * 2022-10-21 2025-05-02 江西兆驰半导体有限公司 发光二极管外延片及其制备方法、发光二极管

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1084132A (ja) * 1996-09-08 1998-03-31 Toyoda Gosei Co Ltd 半導体発光素子
JPH10270756A (ja) * 1997-03-27 1998-10-09 Sanyo Electric Co Ltd 窒化ガリウム系化合物半導体装置

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5684309A (en) * 1996-07-11 1997-11-04 North Carolina State University Stacked quantum well aluminum indium gallium nitride light emitting diodes
JPH1065271A (ja) * 1996-08-13 1998-03-06 Toshiba Corp 窒化ガリウム系半導体光発光素子
JP3519990B2 (ja) * 1998-12-09 2004-04-19 三洋電機株式会社 発光素子及びその製造方法
JP4032636B2 (ja) * 1999-12-13 2008-01-16 日亜化学工業株式会社 発光素子
JP4724901B2 (ja) 2000-07-21 2011-07-13 パナソニック株式会社 窒化物半導体の製造方法
JP4161603B2 (ja) * 2001-03-28 2008-10-08 日亜化学工業株式会社 窒化物半導体素子
MY129352A (en) * 2001-03-28 2007-03-30 Nichia Corp Nitride semiconductor device
EP1536486A4 (en) * 2002-07-16 2006-11-08 Nitride Semiconductors Co Ltd COMPOSITE SEMICONDUCTOR ELEMENT ON GALLIUM NITRID BASE
JP2004200347A (ja) * 2002-12-18 2004-07-15 Sumitomo Electric Ind Ltd 高放熱性能を持つ発光ダイオード
US20040161006A1 (en) * 2003-02-18 2004-08-19 Ying-Lan Chang Method and apparatus for improving wavelength stability for InGaAsN devices
JP4412918B2 (ja) * 2003-05-28 2010-02-10 シャープ株式会社 窒化物半導体発光素子及びその製造方法
JP2004015072A (ja) * 2003-09-26 2004-01-15 Nichia Chem Ind Ltd 窒化物半導体発光素子
JP4389723B2 (ja) * 2004-02-17 2009-12-24 住友電気工業株式会社 半導体素子を形成する方法
CN100349306C (zh) * 2004-08-27 2007-11-14 中国科学院半导体研究所 蓝光、黄光量子阱堆叠结构白光发光二极管及制作方法
JP2007088270A (ja) * 2005-09-22 2007-04-05 Matsushita Electric Works Ltd 半導体発光素子およびそれを用いる照明装置ならびに半導体発光素子の製造方法
JP2007214221A (ja) * 2006-02-08 2007-08-23 Sharp Corp 窒化物半導体レーザ素子
KR100753518B1 (ko) * 2006-05-23 2007-08-31 엘지전자 주식회사 질화물계 발광 소자

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1084132A (ja) * 1996-09-08 1998-03-31 Toyoda Gosei Co Ltd 半導体発光素子
JPH10270756A (ja) * 1997-03-27 1998-10-09 Sanyo Electric Co Ltd 窒化ガリウム系化合物半導体装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107207960A (zh) * 2015-02-02 2017-09-26 斯坦雷电气株式会社 量子点的制造方法和量子点
CN107207960B (zh) * 2015-02-02 2021-05-25 斯坦雷电气株式会社 量子点的制造方法和量子点

Also Published As

Publication number Publication date
EP2325899A4 (en) 2015-04-29
EP2325899A1 (en) 2011-05-25
US20100187497A1 (en) 2010-07-29
JP2010080955A (ja) 2010-04-08
KR20110034689A (ko) 2011-04-05
JP5634368B2 (ja) 2014-12-03
WO2010024436A1 (ja) 2010-03-04
JP2011258994A (ja) 2011-12-22

Similar Documents

Publication Publication Date Title
JP5634368B2 (ja) 半導体装置
CN101689586B (zh) 氮化物半导体发光元件和氮化物半导体的制造方法
US8513694B2 (en) Nitride semiconductor device and manufacturing method of the device
KR101399250B1 (ko) 질소 화합물 반도체 발광 소자 및 그 제조 방법
CN101188264B (zh) 氮化物半导体发光器件
US9755107B2 (en) Group III nitride semiconductor light-emitting device
US8716048B2 (en) Light emitting device and method for manufacturing the same
US8445938B2 (en) Nitride semi-conductive light emitting device
TW201011952A (en) Group iii nitride based semiconductor light emitting element and epitaxial wafer
CN111293198B (zh) 氮化铝系发光二极管结构及其制作方法
WO2015146069A1 (ja) 発光ダイオード素子
CN105514232B (zh) 一种发光二极管外延片、发光二极管及外延片的制作方法
CN111341892A (zh) 一种led外延结构及其制作方法、led芯片
JP5048236B2 (ja) 半導体発光素子、および半導体発光素子を作製する方法
CN105917478A (zh) 半导体发光元件
CN108365060B (zh) GaN基LED的外延结构及其生长方法
TW201607076A (zh) Led元件
US9564552B2 (en) Method for producing group III nitride semiconductor light-emitting device
JPH10290047A (ja) 窒化物半導体素子
JP6482388B2 (ja) 窒化物半導体発光素子
US9595633B2 (en) Method for producing light-emitting device and method for producing group III nitride semiconductor
JP2014160806A (ja) Led素子
JP2002151798A (ja) 窒化物半導体素子
US9508895B2 (en) Group III nitride semiconductor light-emitting device and production method therefor
JP2011223043A (ja) 半導体発光素子、および半導体発光素子を作製する方法

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C12 Rejection of a patent application after its publication
RJ01 Rejection of invention patent application after publication

Application publication date: 20110727