CN102132397B - 具有隔离沟槽衬垫的半导体器件及相关制造方法 - Google Patents

具有隔离沟槽衬垫的半导体器件及相关制造方法 Download PDF

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Publication number
CN102132397B
CN102132397B CN200980134161.7A CN200980134161A CN102132397B CN 102132397 B CN102132397 B CN 102132397B CN 200980134161 A CN200980134161 A CN 200980134161A CN 102132397 B CN102132397 B CN 102132397B
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China
Prior art keywords
liner
layer
gate
trench
semiconductor
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CN200980134161.7A
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Chinese (zh)
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CN102132397A (zh
Inventor
理查德·凯特
乔治·克卢特
迈克尔·哈格罗夫
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Chengdu Haiguang Integrated Circuit Design Co Ltd
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Advanced Micro Devices Inc
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
    • H01L21/76224—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using trench refilling with dielectric materials
    • H01L21/76232—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using trench refilling with dielectric materials of trenches having a shape other than rectangular or V-shape, e.g. rounded corners, oblique or rounded trench walls
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
    • H01L21/7624—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology
    • H01L21/76264—SOI together with lateral isolation, e.g. using local oxidation of silicon, or dielectric or polycristalline material refilled trench or air gap isolation regions, e.g. completely isolated semiconductor islands
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
    • H01L21/76829—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing characterised by the formation of thin functional dielectric layers, e.g. dielectric etch-stop, barrier, capping or liner layers
    • H01L21/76831—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing characterised by the formation of thin functional dielectric layers, e.g. dielectric etch-stop, barrier, capping or liner layers in via holes or trenches, e.g. non-conductive sidewall liners
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
    • H01L21/76841—Barrier, adhesion or liner layers

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Element Separation (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
  • Insulated Gate Type Field-Effect Transistor (AREA)
  • Thin Film Transistor (AREA)
CN200980134161.7A 2008-08-27 2009-08-10 具有隔离沟槽衬垫的半导体器件及相关制造方法 Active CN102132397B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US12/199,616 US7998832B2 (en) 2008-08-27 2008-08-27 Semiconductor device with isolation trench liner, and related fabrication methods
US12/199,616 2008-08-27
PCT/US2009/053271 WO2010025024A1 (en) 2008-08-27 2009-08-10 Semiconductor device with isolation trench liner, and related fabrication methods

Publications (2)

Publication Number Publication Date
CN102132397A CN102132397A (zh) 2011-07-20
CN102132397B true CN102132397B (zh) 2016-06-29

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CN200980134161.7A Active CN102132397B (zh) 2008-08-27 2009-08-10 具有隔离沟槽衬垫的半导体器件及相关制造方法

Country Status (6)

Country Link
US (3) US7998832B2 (enExample)
EP (1) EP2324496B1 (enExample)
JP (1) JP5619003B2 (enExample)
KR (2) KR101810111B1 (enExample)
CN (1) CN102132397B (enExample)
WO (1) WO2010025024A1 (enExample)

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JP2010199156A (ja) * 2009-02-23 2010-09-09 Panasonic Corp 半導体装置及びその製造方法
US20110014726A1 (en) * 2009-07-20 2011-01-20 Taiwan Semiconductor Manufacturing Company, Ltd. Method of forming shallow trench isolation structure
US8716095B2 (en) * 2010-06-03 2014-05-06 Institute of Microelectronics, Chinese Academy of Sciences Manufacturing method of gate stack and semiconductor device
US8680644B2 (en) * 2011-04-11 2014-03-25 International Business Machines Coroporation Semiconductor device and method for making same
US8530312B2 (en) 2011-08-08 2013-09-10 Micron Technology, Inc. Vertical devices and methods of forming
FR2981793A1 (fr) * 2011-10-25 2013-04-26 St Microelectronics Crolles 2 Procede de fabrication de transistors a grille isolee
US8564074B2 (en) * 2011-11-29 2013-10-22 International Business Machines Corporation Self-limiting oxygen seal for high-K dielectric and design structure
US9536993B2 (en) * 2012-03-23 2017-01-03 Japan Science And Technology Agency Thin film transistor and method for manufacturing thin film transistor
US20130341762A1 (en) * 2012-06-20 2013-12-26 Macronix International Co., Ltd. Semiconductor hole structure
US8673738B2 (en) 2012-06-25 2014-03-18 International Business Machines Corporation Shallow trench isolation structures
JP6033594B2 (ja) * 2012-07-18 2016-11-30 国立大学法人北陸先端科学技術大学院大学 薄膜トランジスタ及び薄膜トランジスタの製造方法
KR20140059107A (ko) * 2012-11-07 2014-05-15 주식회사 유피케미칼 실리콘 질화물 박막 제조 방법
US8900952B2 (en) 2013-03-11 2014-12-02 International Business Machines Corporation Gate stack including a high-k gate dielectric that is optimized for low voltage applications
US20140315371A1 (en) * 2013-04-17 2014-10-23 International Business Machines Corporation Methods of forming isolation regions for bulk finfet semiconductor devices
US9679917B2 (en) 2014-12-23 2017-06-13 International Business Machines Corporation Semiconductor structures with deep trench capacitor and methods of manufacture
US9991124B2 (en) * 2015-01-20 2018-06-05 Taiwan Semiconductor Manufacturing Company Ltd. Metal gate and manufacturing method thereof
KR102271239B1 (ko) 2015-03-23 2021-06-29 삼성전자주식회사 반도체 장치 및 이의 제조 방법
US9865703B2 (en) 2015-12-31 2018-01-09 International Business Machines Corporation High-K layer chamfering to prevent oxygen ingress in replacement metal gate (RMG) process
DE102018107908B4 (de) * 2017-07-28 2023-01-05 Taiwan Semiconductor Manufacturing Co., Ltd. Verfahren zum Bilden eines integrierten Schaltkreises mit einer Versiegelungsschicht zum Bilden einer Speicherzellenstruktur in Logik- oder BCD-Technologie sowie ein integrierter Schaltkreis mit einer Dummy-Struktur an einer Grenze einer Vorrichtungsregion
US10504912B2 (en) * 2017-07-28 2019-12-10 Taiwan Semiconductor Manufacturing Co., Ltd. Seal method to integrate non-volatile memory (NVM) into logic or bipolar CMOS DMOS (BCD) technology
CN110707086B (zh) * 2018-10-09 2022-02-18 联华电子股份有限公司 半导体元件
TW202209688A (zh) * 2020-06-05 2022-03-01 日商Ｆｌｏｓｆｉａ股份有限公司 半導體裝置
KR20220085482A (ko) 2020-12-15 2022-06-22 삼성전자주식회사 반도체 소자
CN117156850A (zh) * 2022-05-18 2023-12-01 联华电子股份有限公司 半导体元件及其制作方法

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CN1239323A (zh) * 1998-06-16 1999-12-22 三星电子株式会社 形成半导体器件槽隔离的方法
US20070032039A1 (en) * 2005-08-03 2007-02-08 Ming-Te Chen Sti process for eliminating silicon nitride liner induced defects
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US20070293045A1 (en) * 2006-06-16 2007-12-20 Samsung Electronics Co., Ltd Semiconductor device and method for fabricating the same

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KR100672754B1 (ko) * 2004-05-10 2007-01-22 주식회사 하이닉스반도체 트렌치형 소자분리막을 구비한 반도체 소자의 제조 방법
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CN1239323A (zh) * 1998-06-16 1999-12-22 三星电子株式会社 形成半导体器件槽隔离的方法
CN1938831A (zh) * 2004-04-01 2007-03-28 微米技术有限公司 形成沟道隔离区的方法
US20070032039A1 (en) * 2005-08-03 2007-02-08 Ming-Te Chen Sti process for eliminating silicon nitride liner induced defects
US20070293045A1 (en) * 2006-06-16 2007-12-20 Samsung Electronics Co., Ltd Semiconductor device and method for fabricating the same

Also Published As

Publication number Publication date
WO2010025024A1 (en) 2010-03-04
KR20110102868A (ko) 2011-09-19
US20100052094A1 (en) 2010-03-04
US20120223399A1 (en) 2012-09-06
JP2012501542A (ja) 2012-01-19
JP5619003B2 (ja) 2014-11-05
KR20170013403A (ko) 2017-02-06
US8716828B2 (en) 2014-05-06
EP2324496A1 (en) 2011-05-25
KR101701360B1 (ko) 2017-02-01
US7998832B2 (en) 2011-08-16
KR101810111B1 (ko) 2017-12-18
CN102132397A (zh) 2011-07-20
EP2324496B1 (en) 2018-10-10
US8217472B2 (en) 2012-07-10
US20110260263A1 (en) 2011-10-27

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Effective date of registration: 20170308

Address after: No. 11, E5, block 22-31, Tianfu Software Park, No. 2, Tianfu Avenue, Chengdu hi tech Zone, Sichuan, China, No. 1366

Patentee after: Chengdu Blx Ic Design Corp

Address before: American California

Patentee before: Advanced Micro Devices Inc.