CN101375388B - 金属线之间的自对准沟槽的集成 - Google Patents
金属线之间的自对准沟槽的集成 Download PDFInfo
- Publication number
- CN101375388B CN101375388B CN2007800026512A CN200780002651A CN101375388B CN 101375388 B CN101375388 B CN 101375388B CN 2007800026512 A CN2007800026512 A CN 2007800026512A CN 200780002651 A CN200780002651 A CN 200780002651A CN 101375388 B CN101375388 B CN 101375388B
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- CN
- China
- Prior art keywords
- dielectric liner
- dielectric
- metal wire
- path
- lip
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/7682—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing the dielectric comprising air gaps
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
- H01L21/76885—By forming conductive members before deposition of protective insulating material, e.g. pillars, studs
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
- H01L23/5222—Capacitive arrangements or effects of, or between wiring layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
- H01L23/532—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body characterised by the materials
- H01L23/53204—Conductive materials
- H01L23/53209—Conductive materials based on metals, e.g. alloys, metal silicides
- H01L23/53228—Conductive materials based on metals, e.g. alloys, metal silicides the principal metal being copper
- H01L23/53238—Additional layers associated with copper layers, e.g. adhesion, barrier, cladding layers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Abstract
Description
Claims (13)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP06290125.1 | 2006-01-18 | ||
EP06290125 | 2006-01-18 | ||
PCT/IB2007/000162 WO2007083237A1 (en) | 2006-01-18 | 2007-01-11 | Integration of self-aligned trenches in-between metal lines |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101375388A CN101375388A (zh) | 2009-02-25 |
CN101375388B true CN101375388B (zh) | 2011-08-03 |
Family
ID=38002148
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2007800026512A Expired - Fee Related CN101375388B (zh) | 2006-01-18 | 2007-01-11 | 金属线之间的自对准沟槽的集成 |
Country Status (5)
Country | Link |
---|---|
US (1) | US8470685B2 (zh) |
EP (1) | EP1974376A1 (zh) |
JP (1) | JP2009524233A (zh) |
CN (1) | CN101375388B (zh) |
WO (1) | WO2007083237A1 (zh) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20100001409A1 (en) * | 2006-11-09 | 2010-01-07 | Nxp, B.V. | Semiconductor device and method of manufacturing thereof |
JP5149603B2 (ja) * | 2007-11-29 | 2013-02-20 | 大日本スクリーン製造株式会社 | 半導体装置の製造方法および半導体装置 |
DE102008026134A1 (de) * | 2008-05-30 | 2009-12-17 | Advanced Micro Devices, Inc., Sunnyvale | Mikrostrukturbauelement mit einer Metallisierungsstruktur mit selbstjustierten Luftspalten zwischen dichtliegenden Metallleitungen |
KR102003881B1 (ko) * | 2013-02-13 | 2019-10-17 | 삼성전자주식회사 | 반도체 소자 및 그 제조 방법 |
US9142450B2 (en) | 2013-03-08 | 2015-09-22 | Taiwan Semiconductor Manufacturing Company, Ltd. | Interconnect structure and method of forming the same |
US9508561B2 (en) * | 2014-03-11 | 2016-11-29 | Applied Materials, Inc. | Methods for forming interconnection structures in an integrated cluster system for semicondcutor applications |
US9455178B2 (en) | 2014-03-14 | 2016-09-27 | Taiwan Semiconductor Manufacturing Company, Ltd. | Method of semiconductor integrated circuit fabrication |
JP2017520109A (ja) * | 2014-06-16 | 2017-07-20 | インテル・コーポレーション | 集積回路デバイスの金属間の選択的な拡散障壁 |
US9269668B2 (en) * | 2014-07-17 | 2016-02-23 | Taiwan Semiconductor Manufacturing Company, Ltd. | Interconnect having air gaps and polymer wrapped conductive lines |
US9324650B2 (en) | 2014-08-15 | 2016-04-26 | International Business Machines Corporation | Interconnect structures with fully aligned vias |
US9837355B2 (en) | 2016-03-22 | 2017-12-05 | International Business Machines Corporation | Method for maximizing air gap in back end of the line interconnect through via landing modification |
US9607893B1 (en) | 2016-07-06 | 2017-03-28 | Globalfoundries Inc. | Method of forming self-aligned metal lines and vias |
US10438843B1 (en) * | 2018-08-31 | 2019-10-08 | United Microelectronics Corp. | Semiconductor device and method for fabricating the same |
CN112233978B (zh) * | 2020-12-09 | 2021-04-27 | 晶芯成(北京)科技有限公司 | 一种半导体结构的制造方法 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6035530A (en) * | 1999-03-19 | 2000-03-14 | United Semiconductor Corp. | Method of manufacturing interconnect |
US6413852B1 (en) * | 2000-08-31 | 2002-07-02 | International Business Machines Corporation | Method of forming multilevel interconnect structure containing air gaps including utilizing both sacrificial and placeholder material |
US20030022483A1 (en) * | 2001-07-27 | 2003-01-30 | Mehul Shroff | Dielectric between metal structures and method therefor |
CN1518092A (zh) * | 2003-01-17 | 2004-08-04 | 株式会社东芝 | 半导体器件及其制造方法 |
CN1638089A (zh) * | 2003-08-04 | 2005-07-13 | 国际商业机器公司 | 用于低k介电材料的包括回蚀的镶嵌互连结构 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6303464B1 (en) * | 1996-12-30 | 2001-10-16 | Intel Corporation | Method and structure for reducing interconnect system capacitance through enclosed voids in a dielectric layer |
US6261950B1 (en) * | 1999-10-18 | 2001-07-17 | Infineon Technologies Ag | Self-aligned metal caps for interlevel metal connections |
US6607967B1 (en) * | 2000-11-15 | 2003-08-19 | Lsi Logic Corporation | Process for forming planarized isolation trench in integrated circuit structure on semiconductor substrate |
US6872633B2 (en) * | 2002-05-31 | 2005-03-29 | Chartered Semiconductor Manufacturing Ltd. | Deposition and sputter etch approach to extend the gap fill capability of HDP CVD process to ≦0.10 microns |
US6677190B1 (en) * | 2002-08-29 | 2004-01-13 | Texas Instruments Incorporated | Self-aligned body contact in a semiconductor device |
US7138329B2 (en) * | 2002-11-15 | 2006-11-21 | United Microelectronics Corporation | Air gap for tungsten/aluminum plug applications |
TW580751B (en) * | 2003-01-30 | 2004-03-21 | Mosel Vitelic Inc | Method of forming bottom oxide in the trench |
CN100437970C (zh) * | 2003-03-07 | 2008-11-26 | 琥珀波系统公司 | 一种结构及用于形成半导体结构的方法 |
US20040248405A1 (en) * | 2003-06-02 | 2004-12-09 | Akira Fukunaga | Method of and apparatus for manufacturing semiconductor device |
US7396732B2 (en) * | 2004-12-17 | 2008-07-08 | Interuniversitair Microelektronica Centrum Vzw (Imec) | Formation of deep trench airgaps and related applications |
DE102008026134A1 (de) * | 2008-05-30 | 2009-12-17 | Advanced Micro Devices, Inc., Sunnyvale | Mikrostrukturbauelement mit einer Metallisierungsstruktur mit selbstjustierten Luftspalten zwischen dichtliegenden Metallleitungen |
US7998832B2 (en) * | 2008-08-27 | 2011-08-16 | Advanced Micro Devices, Inc. | Semiconductor device with isolation trench liner, and related fabrication methods |
US8647920B2 (en) * | 2010-07-16 | 2014-02-11 | Imec Vzw | Method for forming 3D-interconnect structures with airgaps |
-
2007
- 2007-01-11 WO PCT/IB2007/000162 patent/WO2007083237A1/en active Application Filing
- 2007-01-11 US US12/161,456 patent/US8470685B2/en active Active
- 2007-01-11 JP JP2008550869A patent/JP2009524233A/ja active Pending
- 2007-01-11 EP EP07700511A patent/EP1974376A1/en not_active Withdrawn
- 2007-01-11 CN CN2007800026512A patent/CN101375388B/zh not_active Expired - Fee Related
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6035530A (en) * | 1999-03-19 | 2000-03-14 | United Semiconductor Corp. | Method of manufacturing interconnect |
US6413852B1 (en) * | 2000-08-31 | 2002-07-02 | International Business Machines Corporation | Method of forming multilevel interconnect structure containing air gaps including utilizing both sacrificial and placeholder material |
US20030022483A1 (en) * | 2001-07-27 | 2003-01-30 | Mehul Shroff | Dielectric between metal structures and method therefor |
CN1518092A (zh) * | 2003-01-17 | 2004-08-04 | 株式会社东芝 | 半导体器件及其制造方法 |
CN1638089A (zh) * | 2003-08-04 | 2005-07-13 | 国际商业机器公司 | 用于低k介电材料的包括回蚀的镶嵌互连结构 |
Also Published As
Publication number | Publication date |
---|---|
WO2007083237A8 (en) | 2007-12-27 |
JP2009524233A (ja) | 2009-06-25 |
US20100090346A1 (en) | 2010-04-15 |
EP1974376A1 (en) | 2008-10-01 |
US8470685B2 (en) | 2013-06-25 |
WO2007083237A1 (en) | 2007-07-26 |
CN101375388A (zh) | 2009-02-25 |
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PB01 | Publication | ||
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ASS | Succession or assignment of patent right |
Owner name: NXP CO., LTD. Free format text: FORMER OWNER: KONINKLIJKE PHILIPS ELECTRONICS N.V. Effective date: 20091106 |
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C41 | Transfer of patent application or patent right or utility model | ||
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Effective date of registration: 20091106 Address after: Holland Ian Deho Finn Applicant after: Koninkl Philips Electronics NV Address before: Holland Ian Deho Finn Applicant before: Koninklijke Philips Electronics N.V. |
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Granted publication date: 20110803 Termination date: 20140111 |