CN101930940B - 一种半导体浅沟槽隔离方法 - Google Patents
一种半导体浅沟槽隔离方法 Download PDFInfo
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- CN101930940B CN101930940B CN200910031686.XA CN200910031686A CN101930940B CN 101930940 B CN101930940 B CN 101930940B CN 200910031686 A CN200910031686 A CN 200910031686A CN 101930940 B CN101930940 B CN 101930940B
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CN101930940A CN101930940A (zh) | 2010-12-29 |
CN101930940B true CN101930940B (zh) | 2014-01-01 |
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CN104347470B (zh) * | 2013-07-29 | 2017-04-05 | 中芯国际集成电路制造(上海)有限公司 | 半导体器件的制备方法 |
CN109524345A (zh) * | 2018-10-19 | 2019-03-26 | 武汉新芯集成电路制造有限公司 | 浅沟槽隔离结构及其制造方法和半导体器件 |
CN110879344A (zh) * | 2019-11-13 | 2020-03-13 | 上海华力集成电路制造有限公司 | 共享接触孔及其刻蚀缺陷检测方法 |
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CN101009266A (zh) * | 2006-01-27 | 2007-08-01 | 台湾积体电路制造股份有限公司 | 半导体结构及其形成方法 |
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CN101009266A (zh) * | 2006-01-27 | 2007-08-01 | 台湾积体电路制造股份有限公司 | 半导体结构及其形成方法 |
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JP特开平11-16998AA 1999.01.22 |
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Effective date of registration: 20120312 Address after: 214028 Wuxi provincial high tech Industrial Development Zone, Hanjiang Road, No. 5, Jiangsu, China Applicant after: Wuxi CSMC Semiconductor Co., Ltd. Address before: 214061 No. 5 Hanjiang Road, national hi tech Industrial Development Zone, Wuxi, Jiangsu, China Applicant before: Wuxi CSMC Semiconductor Co., Ltd. Co-applicant before: Wuxi Huarun Shanghua Technology Co., Ltd. |
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Address after: 214028 Xinzhou Road, Wuxi national hi tech Industrial Development Zone, Jiangsu, China, No. 8 Patentee after: Wuxi Huarun Shanghua Technology Co., Ltd. Address before: 214028 Wuxi provincial high tech Industrial Development Zone, Hanjiang Road, No. 5, Jiangsu, China Patentee before: Wuxi CSMC Semiconductor Co., Ltd. |