CN101746136B - 喷墨记录头、记录元件基板及制造该记录头和基板的方法 - Google Patents

喷墨记录头、记录元件基板及制造该记录头和基板的方法 Download PDF

Info

Publication number
CN101746136B
CN101746136B CN2009102527649A CN200910252764A CN101746136B CN 101746136 B CN101746136 B CN 101746136B CN 2009102527649 A CN2009102527649 A CN 2009102527649A CN 200910252764 A CN200910252764 A CN 200910252764A CN 101746136 B CN101746136 B CN 101746136B
Authority
CN
China
Prior art keywords
recording element
element substrate
ink
face
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN2009102527649A
Other languages
English (en)
Chinese (zh)
Other versions
CN101746136A (zh
Inventor
宫崎浩孝
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Publication of CN101746136A publication Critical patent/CN101746136A/zh
Application granted granted Critical
Publication of CN101746136B publication Critical patent/CN101746136B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1635—Manufacturing processes dividing the wafer into individual chips
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/162—Manufacturing of the nozzle plates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B41J2/1634—Manufacturing processes machining laser machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/20—Modules
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49401—Fluid pattern dispersing device making, e.g., ink jet

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
CN2009102527649A 2008-12-17 2009-12-16 喷墨记录头、记录元件基板及制造该记录头和基板的方法 Expired - Fee Related CN101746136B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2008-320928 2008-12-17
JP2008320928 2008-12-17

Related Child Applications (1)

Application Number Title Priority Date Filing Date
CN201310001140.6A Division CN103009813B (zh) 2008-12-17 2009-12-16 喷墨记录头、记录元件基板及制造该记录头和基板的方法

Publications (2)

Publication Number Publication Date
CN101746136A CN101746136A (zh) 2010-06-23
CN101746136B true CN101746136B (zh) 2013-02-13

Family

ID=42240000

Family Applications (2)

Application Number Title Priority Date Filing Date
CN2009102527649A Expired - Fee Related CN101746136B (zh) 2008-12-17 2009-12-16 喷墨记录头、记录元件基板及制造该记录头和基板的方法
CN201310001140.6A Expired - Fee Related CN103009813B (zh) 2008-12-17 2009-12-16 喷墨记录头、记录元件基板及制造该记录头和基板的方法

Family Applications After (1)

Application Number Title Priority Date Filing Date
CN201310001140.6A Expired - Fee Related CN103009813B (zh) 2008-12-17 2009-12-16 喷墨记录头、记录元件基板及制造该记录头和基板的方法

Country Status (3)

Country Link
US (4) US9782970B2 (enExample)
JP (2) JP5404331B2 (enExample)
CN (2) CN101746136B (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5440411B2 (ja) * 2010-06-21 2014-03-12 コニカミノルタ株式会社 ラインヘッドモジュールおよびインクジェット記録装置
JP5516122B2 (ja) * 2010-06-22 2014-06-11 コニカミノルタ株式会社 ラインヘッドおよびインクジェット記録装置
JP6223006B2 (ja) 2013-06-12 2017-11-01 キヤノン株式会社 液体吐出ヘッドチップ及びその製造方法
JP6128991B2 (ja) 2013-06-28 2017-05-17 キヤノン株式会社 液体吐出ヘッドの製造方法
JP6463034B2 (ja) 2013-09-24 2019-01-30 キヤノン株式会社 液体吐出ヘッド
WO2016030247A1 (en) * 2014-08-26 2016-03-03 Oce-Technologies B.V. Multi-chip print head
JP6806457B2 (ja) * 2016-04-05 2021-01-06 キヤノン株式会社 液体吐出ヘッドおよび液体吐出ヘッドの製造方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1254648A (zh) * 1998-11-23 2000-05-31 研能科技股份有限公司 喷孔片的制造方法
CN1628982A (zh) * 2003-12-15 2005-06-22 佳能株式会社 梁、具有梁的喷墨记录头及其制造方法
CN1692020A (zh) * 2002-12-10 2005-11-02 松下电器产业株式会社 喷墨头的制造方法及喷墨式记录装置

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63288620A (ja) * 1987-05-22 1988-11-25 Kobe Steel Ltd アルミニウムの電解複合超鏡面加工方法
US4829324A (en) * 1987-12-23 1989-05-09 Xerox Corporation Large array thermal ink jet printhead
DE68929489T2 (de) 1988-10-31 2004-08-19 Canon K.K. Tintenstrahlkopf und sein Herstellungsverfahren, Aufflussöffnungsplatte für diesen Kopf und sein Herstellungsverfahren, und Tintenstrahlgerät damit versehen
US4851371A (en) 1988-12-05 1989-07-25 Xerox Corporation Fabricating process for large array semiconductive devices
US4975143A (en) * 1989-11-22 1990-12-04 Xerox Corporation Keyway alignment substrates
JP3268937B2 (ja) 1994-04-14 2002-03-25 キヤノン株式会社 インクジェット記録ヘッド用基板及びそれを用いたヘッド
US5888333A (en) 1994-10-31 1999-03-30 Canon Kabushiki Kaisha Ink jet head production method, ink jet head, and ink jet recording apparatus
JP3198221B2 (ja) 1994-10-31 2001-08-13 キヤノン株式会社 インクジェットヘッドの製造方法、インクジェットヘッド、およびインクジェットヘッド記録装置
JPH10157149A (ja) * 1996-12-05 1998-06-16 Canon Inc 液体噴射記録ヘッドの製造方法
JP2001096753A (ja) * 1999-10-01 2001-04-10 Seiko Epson Corp インクジェットヘッドの製造方法
JP2001301170A (ja) * 2000-04-25 2001-10-30 Seiko Epson Corp インクジェット式記録ヘッド及びその製造方法
US6642127B2 (en) * 2001-10-19 2003-11-04 Applied Materials, Inc. Method for dicing a semiconductor wafer
US6812150B2 (en) * 2002-12-26 2004-11-02 Micron Technology, Inc. Methods for making semiconductor device structures with capacitor containers and contact apertures having increased aspect ratios
JP4277705B2 (ja) * 2004-02-12 2009-06-10 セイコーエプソン株式会社 インクジェットヘッドの製造方法及びインクジェットヘッド並びにインクジェット記録装置
JP2006231645A (ja) * 2005-02-24 2006-09-07 Ricoh Co Ltd 液滴吐出ヘッド、液体カートリッジ、液滴吐出装置及び液滴吐出ヘッドの製造方法
JP2006321173A (ja) * 2005-05-20 2006-11-30 Fuji Xerox Co Ltd 液滴吐出ヘッドおよび製造方法
JP2006347072A (ja) 2005-06-17 2006-12-28 Canon Inc 液体吐出ヘッドの製造方法、液体吐出ヘッド、および液体吐出記録装置
JP5082285B2 (ja) * 2006-04-25 2012-11-28 セイコーエプソン株式会社 配線構造、デバイス、デバイスの製造方法、液滴吐出ヘッド、液滴吐出ヘッドの製造方法、及び液滴吐出装置
US8152278B2 (en) * 2006-12-14 2012-04-10 Canon Kabushiki Kaisha Liquid jet head chip and manufacturing method therefor
KR101257841B1 (ko) * 2007-01-05 2013-05-07 삼성디스플레이 주식회사 압전 방식 잉크젯 헤드와 그 제조 방법
JP2008179039A (ja) * 2007-01-24 2008-08-07 Canon Inc 液体吐出ヘッド及び液体吐出ヘッドの製造方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1254648A (zh) * 1998-11-23 2000-05-31 研能科技股份有限公司 喷孔片的制造方法
CN1692020A (zh) * 2002-12-10 2005-11-02 松下电器产业株式会社 喷墨头的制造方法及喷墨式记录装置
CN1628982A (zh) * 2003-12-15 2005-06-22 佳能株式会社 梁、具有梁的喷墨记录头及其制造方法

Also Published As

Publication number Publication date
US20100149283A1 (en) 2010-06-17
US9782970B2 (en) 2017-10-10
US10029466B2 (en) 2018-07-24
US20120325772A1 (en) 2012-12-27
US20140227808A1 (en) 2014-08-14
US8789928B2 (en) 2014-07-29
CN103009813A (zh) 2013-04-03
JP5404331B2 (ja) 2014-01-29
CN101746136A (zh) 2010-06-23
JP5404883B2 (ja) 2014-02-05
CN103009813B (zh) 2015-04-22
US20160152029A1 (en) 2016-06-02
JP2010162874A (ja) 2010-07-29
US9283761B2 (en) 2016-03-15
JP2012254646A (ja) 2012-12-27

Similar Documents

Publication Publication Date Title
CN101746136B (zh) 喷墨记录头、记录元件基板及制造该记录头和基板的方法
JP4823714B2 (ja) 圧電方式のインクジェットプリントヘッド及びその製造方法
CA2047804C (en) Thermal ink jet printhead with pre-diced nozzle face and method of fabrication therefor
JPH022009A (ja) 大型アレー・サーマル・インクジェット印字ヘッド
KR20040060816A (ko) 잉크 젯 기록 헤드, 잉크 젯 기록 헤드의 제조 방법 및잉크 젯 기록 헤드 제조용 기판
JP3659303B2 (ja) 液体噴射記録装置の製造方法
JPH1058685A (ja) シリコン内に表面配列されて形成されたチャネルを有するインクジェットプリントヘッド
EP1681169B1 (en) Piezoelectric inkjet printhead and method of manufacturing the same
US7047642B2 (en) Process for producing ink jet recording head
JP4548716B2 (ja) 液体噴射記録ヘッドとその製造方法
JP5428291B2 (ja) マルチチップインクジェットヘッド
JP2730481B2 (ja) インクジェット記録ヘッドの製造方法
JP2000094700A (ja) インクジェット記録ヘッドの製造方法、およびインクジェット記録ヘッド
JP4667008B2 (ja) インクジェット記録ヘッドの製造方法
JPH07186387A (ja) サーマルインクジェット印字ヘッド
JPH05338168A (ja) インクジェット記録ヘッド
JP2008087371A (ja) 液体吐出ヘッドの製造方法および液体吐出ヘッド
JP4261904B2 (ja) インクジェット記録ヘッド用基板の製造方法、およびインクジェット記録ヘッドの製造方法
JP2024058748A (ja) 液体吐出ヘッドの製造方法及び液体吐出ヘッド
JP2002029057A (ja) インクジェットプリントヘッド
JP2001310463A (ja) インクジェットヘッド及びその製造方法
JP2002273884A (ja) 液体吐出ヘッドおよびその製造方法
JPH08216410A (ja) インクジェット記録ヘッド

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20130213

CF01 Termination of patent right due to non-payment of annual fee