CN101477969A - 薄膜晶体管基板的制造方法和剥除溶液 - Google Patents
薄膜晶体管基板的制造方法和剥除溶液 Download PDFInfo
- Publication number
- CN101477969A CN101477969A CNA2009100029992A CN200910002999A CN101477969A CN 101477969 A CN101477969 A CN 101477969A CN A2009100029992 A CNA2009100029992 A CN A2009100029992A CN 200910002999 A CN200910002999 A CN 200910002999A CN 101477969 A CN101477969 A CN 101477969A
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- CN
- China
- Prior art keywords
- stripping composition
- weight ratio
- exemplary embodiment
- conductive layer
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
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- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Mathematical Physics (AREA)
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Thin Film Transistor (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Liquid Crystal (AREA)
Abstract
Description
金属 | 实例 | 3分钟(ppb) | 10分钟(ppb) | 30分钟(ppb) |
铟 | 实例3 | 125.2 | 206.8 | 358.2 |
锌 | 实例3 | 11.9 | 16.4 | 20.7 |
10分钟(ml) | 20分钟(ml) | 30分钟(ml) | 40分钟(ml) | |
对比例 | 10 | 20 | 30 | 40.5 |
实例4 | 7 | 10.5 | 14 | 15 |
Claims (6)
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR20040068791 | 2004-08-30 | ||
KR68791/04 | 2004-08-30 | ||
KR1020050044153A KR101129433B1 (ko) | 2004-08-30 | 2005-05-25 | 박막 트랜지스터 기판의 제조 방법 및 스트립핑 조성물 |
KR44153/05 | 2005-05-25 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB2005100996244A Division CN100533710C (zh) | 2004-08-30 | 2005-08-30 | 薄膜晶体管基板的制造方法和剥除溶液 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101477969A true CN101477969A (zh) | 2009-07-08 |
CN101477969B CN101477969B (zh) | 2010-12-22 |
Family
ID=36139612
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB2005100996244A Active CN100533710C (zh) | 2004-08-30 | 2005-08-30 | 薄膜晶体管基板的制造方法和剥除溶液 |
CN2009100029992A Active CN101477969B (zh) | 2004-08-30 | 2005-08-30 | 薄膜晶体管基板的制造方法和剥除溶液 |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB2005100996244A Active CN100533710C (zh) | 2004-08-30 | 2005-08-30 | 薄膜晶体管基板的制造方法和剥除溶液 |
Country Status (3)
Country | Link |
---|---|
KR (1) | KR101129433B1 (zh) |
CN (2) | CN100533710C (zh) |
TW (1) | TWI430400B (zh) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2007148538A1 (ja) * | 2006-06-21 | 2007-12-27 | Idemitsu Kosan Co., Ltd. | ストリッピング組成物、tft基板の製造方法及びストリッピング組成物のリサイクル方法 |
KR101300183B1 (ko) | 2006-11-20 | 2013-08-26 | 삼성디스플레이 주식회사 | 박막 트랜지스터 기판 및 이의 제조 방법 |
KR102009545B1 (ko) | 2015-03-05 | 2019-10-21 | 동우 화인켐 주식회사 | 레지스트 박리액 조성물 |
KR102269328B1 (ko) * | 2015-03-12 | 2021-06-25 | 동우 화인켐 주식회사 | 식각액 조성물 및 이를 이용한 금속 패턴의 형성 방법 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6326130B1 (en) * | 1993-10-07 | 2001-12-04 | Mallinckrodt Baker, Inc. | Photoresist strippers containing reducing agents to reduce metal corrosion |
KR100249387B1 (ko) * | 1997-12-02 | 2000-03-15 | 김영환 | 반도체 제조용 건식각장치의 이물제거방법 |
JP2000284506A (ja) * | 1999-03-31 | 2000-10-13 | Sharp Corp | フォトレジスト剥離剤組成物および剥離方法 |
DE60238244D1 (de) * | 2001-03-27 | 2010-12-23 | Advanced Tech Materials | Wässriges reinigungsmittel mit kupferspezifischem korrosionsschutzmittel zur abreinigung anorganischer reste von halbleitersubstraten |
KR20040009100A (ko) * | 2002-07-22 | 2004-01-31 | 삼성전자주식회사 | 포토레지스트 스트리퍼의 재생방법 |
US8236485B2 (en) * | 2002-12-20 | 2012-08-07 | Advanced Technology Materials, Inc. | Photoresist removal |
-
2005
- 2005-05-25 KR KR1020050044153A patent/KR101129433B1/ko active IP Right Grant
- 2005-08-30 CN CNB2005100996244A patent/CN100533710C/zh active Active
- 2005-08-30 TW TW094129706A patent/TWI430400B/zh active
- 2005-08-30 CN CN2009100029992A patent/CN101477969B/zh active Active
Also Published As
Publication number | Publication date |
---|---|
CN1744300A (zh) | 2006-03-08 |
TWI430400B (zh) | 2014-03-11 |
CN101477969B (zh) | 2010-12-22 |
KR20060048092A (ko) | 2006-05-18 |
KR101129433B1 (ko) | 2012-03-26 |
TW200620555A (en) | 2006-06-16 |
CN100533710C (zh) | 2009-08-26 |
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Date | Code | Title | Description |
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C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: SAMSUNG MONITOR CO., LTD. Free format text: FORMER OWNER: SAMSUNG ELECTRONICS CO., LTD. Effective date: 20121029 |
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C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20121029 Address after: Gyeonggi Do, South Korea Patentee after: SAMSUNG DISPLAY Co.,Ltd. Address before: Gyeonggi Do, South Korea Patentee before: Samsung Electronics Co.,Ltd. |
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TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20220830 Address after: 9-2, Guangdong Province, Shenzhen Guangming Tang Ming Road Patentee after: TCL Huaxing Photoelectric Technology Co.,Ltd. Address before: Gyeonggi Do, South Korea Patentee before: SAMSUNG DISPLAY Co.,Ltd. |