CN101393251B - 探测装置和探测方法 - Google Patents

探测装置和探测方法 Download PDF

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Publication number
CN101393251B
CN101393251B CN2008100988561A CN200810098856A CN101393251B CN 101393251 B CN101393251 B CN 101393251B CN 2008100988561 A CN2008100988561 A CN 2008100988561A CN 200810098856 A CN200810098856 A CN 200810098856A CN 101393251 B CN101393251 B CN 101393251B
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China
Prior art keywords
detecting card
mounting table
chip
substrate
card
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CN2008100988561A
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English (en)
Chinese (zh)
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CN101393251A (zh
Inventor
河野功
花轮一纪
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Tokyo Electron Ltd
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Tokyo Electron Ltd
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Publication of CN101393251A publication Critical patent/CN101393251A/zh
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/04—Housings; Supporting members; Arrangements of terminals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G01R31/2601—Apparatus or methods therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Tests Of Electronic Circuits (AREA)
CN2008100988561A 2007-09-21 2008-05-19 探测装置和探测方法 Active CN101393251B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2007-245915 2007-09-21
JP2007245915A JP2009076776A (ja) 2007-09-21 2007-09-21 プローブ装置及びプローブ方法
JP2007245915 2007-09-21

Publications (2)

Publication Number Publication Date
CN101393251A CN101393251A (zh) 2009-03-25
CN101393251B true CN101393251B (zh) 2011-10-26

Family

ID=40493641

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2008100988561A Active CN101393251B (zh) 2007-09-21 2008-05-19 探测装置和探测方法

Country Status (4)

Country Link
JP (1) JP2009076776A (enExample)
KR (1) KR101019878B1 (enExample)
CN (1) CN101393251B (enExample)
TW (1) TWI427295B (enExample)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101968518B (zh) * 2009-07-27 2012-08-08 京元电子股份有限公司 具同心圆探针座的半导体测试设备
JP6289962B2 (ja) * 2013-07-11 2018-03-07 東京エレクトロン株式会社 プローブ装置
CN107976576A (zh) * 2016-10-24 2018-05-01 精工爱普生株式会社 电子元器件传送装置以及电子元器件检查装置
CN108885238A (zh) * 2017-01-19 2018-11-23 深圳市汇顶科技股份有限公司 一种用于矩阵排列芯片的测试装置
US11125814B2 (en) * 2017-02-22 2021-09-21 Sintokogio, Ltd. Test system
KR101897638B1 (ko) * 2017-08-21 2018-09-13 (주)씨온테크 반도체 소자의 전기적 특성 자동 측정용 고정밀 테스트 장치
TWI655444B (zh) * 2017-12-20 2019-04-01 亞亞科技股份有限公司 IC inspection machine with temporary fixing effect
US10698025B2 (en) * 2018-07-20 2020-06-30 Formfactor Beaverton, Inc. Probe systems and methods that utilize a flow-regulating structure for improved collection of an optical image of a device under test
JP2020145323A (ja) * 2019-03-06 2020-09-10 東京エレクトロン株式会社 基板保持装置および基板吸着方法
CN117501137A (zh) * 2021-06-23 2024-02-02 三菱电机株式会社 检查装置
CN113725131B (zh) * 2021-11-02 2022-02-08 西安奕斯伟材料科技有限公司 晶圆预处理装置及晶圆缺陷检测方法
CN114966147B (zh) * 2022-05-27 2023-12-22 江苏艾科半导体有限公司 一种芯片测试探针台保护罩
KR102761296B1 (ko) * 2023-11-24 2025-02-03 주식회사 비이링크 고전압-고전류용 전력반도체용 프로브 카드

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6251280U (enExample) * 1985-09-19 1987-03-30
WO1996029607A1 (en) * 1995-03-18 1996-09-26 Tokyo Electron Limited Method and apparatus for inspecting substrate
JPH0982766A (ja) * 1995-09-18 1997-03-28 Sony Corp プロービング測定装置
JP3842468B2 (ja) * 1998-12-08 2006-11-08 株式会社日本マイクロニクス プローブの清掃方法及び装置
JP2002340974A (ja) * 2001-05-17 2002-11-27 Matsushita Electric Ind Co Ltd 半導体素子の電気特性測定装置、及び半導体素子の電気特性測定方法
JP4791023B2 (ja) * 2004-11-08 2011-10-12 インターナショナル・ビジネス・マシーンズ・コーポレーション Ｔｆｔの検査装置および検査方法

Non-Patent Citations (5)

* Cited by examiner, † Cited by third party
Title
JP昭62-51280U 1987.03.30
JP特开2000-294472A 2000.10.20
JP特开2003-100821A 2003.04.04
JP特开2005-195547A 2005.07.21
JP特开2005-195548A 2005.07.21

Also Published As

Publication number Publication date
KR101019878B1 (ko) 2011-03-04
CN101393251A (zh) 2009-03-25
TW200914835A (en) 2009-04-01
TWI427295B (zh) 2014-02-21
KR20090031196A (ko) 2009-03-25
JP2009076776A (ja) 2009-04-09

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