CN101386228B - 通孔形成方法、喷墨头和硅衬底 - Google Patents

通孔形成方法、喷墨头和硅衬底 Download PDF

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Publication number
CN101386228B
CN101386228B CN2008101491166A CN200810149116A CN101386228B CN 101386228 B CN101386228 B CN 101386228B CN 2008101491166 A CN2008101491166 A CN 2008101491166A CN 200810149116 A CN200810149116 A CN 200810149116A CN 101386228 B CN101386228 B CN 101386228B
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CN
China
Prior art keywords
silicon substrate
extrinsic region
impurity region
region
impurity concentration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN2008101491166A
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English (en)
Chinese (zh)
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CN101386228A (zh
Inventor
佐佐木圭一
早川幸宏
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Canon Inc
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Canon Inc
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Publication date
Application filed by Canon Inc filed Critical Canon Inc
Publication of CN101386228A publication Critical patent/CN101386228A/zh
Application granted granted Critical
Publication of CN101386228B publication Critical patent/CN101386228B/zh
Expired - Fee Related legal-status Critical Current
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00—Etching of wafers, substrates or parts of devices
    • H10P50/69—Etching of wafers, substrates or parts of devices using masks for semiconductor materials
    • H10P50/691—Etching of wafers, substrates or parts of devices using masks for semiconductor materials for Group V materials or Group III-V materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/13—Heads having an integrated circuit
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49401—Fluid pattern dispersing device making, e.g., ink jet

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Weting (AREA)
CN2008101491166A 2007-09-13 2008-09-12 通孔形成方法、喷墨头和硅衬底 Expired - Fee Related CN101386228B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2007238387A JP5046819B2 (ja) 2007-09-13 2007-09-13 スルーホールの形成方法およびインクジェットヘッド
JP2007238387 2007-09-13
JP2007-238387 2007-09-13

Publications (2)

Publication Number Publication Date
CN101386228A CN101386228A (zh) 2009-03-18
CN101386228B true CN101386228B (zh) 2010-12-22

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN2008101491166A Expired - Fee Related CN101386228B (zh) 2007-09-13 2008-09-12 通孔形成方法、喷墨头和硅衬底

Country Status (3)

Country Link
US (2) US8409452B2 (https=)
JP (1) JP5046819B2 (https=)
CN (1) CN101386228B (https=)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5046819B2 (ja) * 2007-09-13 2012-10-10 キヤノン株式会社 スルーホールの形成方法およびインクジェットヘッド
EP2355138B1 (en) * 2010-01-28 2016-08-24 Canon Kabushiki Kaisha Liquid composition, method of producing silicon substrate, and method of producing liquid discharge head substrate
JP6216142B2 (ja) 2012-05-28 2017-10-18 キヤノン株式会社 半導体装置の製造方法
CN104249559B (zh) * 2013-06-26 2016-08-31 珠海赛纳打印科技股份有限公司 液体喷射装置及其制造方法
CN109188858B (zh) * 2018-09-10 2020-05-26 复旦大学 一种高精密硅基通孔掩膜版分体图形结构
WO2020256694A1 (en) 2019-06-18 2020-12-24 Hewlett-Packard Development Company, L.P. Fluid feed hole corrosion detection

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1583409A (zh) * 2003-02-13 2005-02-23 佳能株式会社 基板的加工方法及其喷墨记录喷头用基板的制造方法

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3240159B2 (ja) 1991-01-08 2001-12-17 株式会社東芝 パターン形成方法および半導体素子の製造方法
US5236547A (en) 1990-09-25 1993-08-17 Kabushiki Kaisha Toshiba Method of forming a pattern in semiconductor device manufacturing process
JPH0612963A (ja) 1992-06-26 1994-01-21 Shimadzu Corp 静電型マイクロリレーの製造方法
KR100311880B1 (ko) * 1996-11-11 2001-12-20 미다라이 후지오 관통구멍의제작방법,관통구멍을갖는실리콘기판,이기판을이용한디바이스,잉크제트헤드의제조방법및잉크제트헤드
JPH10260523A (ja) 1997-03-18 1998-09-29 Nikon Corp シリコンステンシルマスクの製造方法
EP0895861B1 (en) * 1997-08-05 2003-11-26 Canon Kabushiki Kaisha A liquid discharge head, a substrate for use of such head and a method of manufacture therefor
DE60045067D1 (de) 1999-08-04 2010-11-18 Seiko Epson Corp Tintenstrahlaufzeichnungskopf, verfahren zur herstellung und vorrichtung zum tintenstrahlaufzeichnen
DE60005111T2 (de) 1999-11-15 2004-03-25 Seiko Epson Corp. Tintenstrahldruckkopf und Tintenstrahlaufzeichnungsvorrichtung
JP3494219B2 (ja) * 1999-11-15 2004-02-09 セイコーエプソン株式会社 インクジェット式記録ヘッド
TW533592B (en) * 2001-02-16 2003-05-21 Canon Kk Semiconductor device, method of manufacturing the same and liquid jet apparatus
JP2002337347A (ja) * 2001-05-15 2002-11-27 Canon Inc 液体吐出ヘッドおよびその製造方法
JP2003017498A (ja) * 2001-07-02 2003-01-17 Mitsubishi Electric Corp 半導体装置及びその製造方法
JP2003133581A (ja) * 2001-10-24 2003-05-09 Ricoh Co Ltd 近接場光プローブ及びその製造方法
JP4217434B2 (ja) 2002-07-04 2009-02-04 キヤノン株式会社 スルーホールの形成方法及びこれを用いたインクジェットヘッド
JP4837902B2 (ja) * 2004-06-24 2011-12-14 富士通セミコンダクター株式会社 半導体装置
JP5046819B2 (ja) * 2007-09-13 2012-10-10 キヤノン株式会社 スルーホールの形成方法およびインクジェットヘッド

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1583409A (zh) * 2003-02-13 2005-02-23 佳能株式会社 基板的加工方法及其喷墨记录喷头用基板的制造方法

Also Published As

Publication number Publication date
US8409452B2 (en) 2013-04-02
CN101386228A (zh) 2009-03-18
US20130168828A1 (en) 2013-07-04
JP5046819B2 (ja) 2012-10-10
US8771528B2 (en) 2014-07-08
JP2009066933A (ja) 2009-04-02
US20090073228A1 (en) 2009-03-19

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