CN101276772A - 半导体基板用存储装置 - Google Patents
半导体基板用存储装置 Download PDFInfo
- Publication number
- CN101276772A CN101276772A CNA2008100827413A CN200810082741A CN101276772A CN 101276772 A CN101276772 A CN 101276772A CN A2008100827413 A CNA2008100827413 A CN A2008100827413A CN 200810082741 A CN200810082741 A CN 200810082741A CN 101276772 A CN101276772 A CN 101276772A
- Authority
- CN
- China
- Prior art keywords
- air
- space
- flow
- side plate
- frame substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67769—Storage means
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Ventilation (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Warehouses Or Storage Devices (AREA)
Abstract
Description
Claims (8)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007-053754 | 2007-03-05 | ||
JP2007053754A JP4899939B2 (ja) | 2007-03-05 | 2007-03-05 | クリーンルーム用ストッカ |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101276772A true CN101276772A (zh) | 2008-10-01 |
CN101276772B CN101276772B (zh) | 2012-07-04 |
Family
ID=39838380
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2008100827413A Expired - Fee Related CN101276772B (zh) | 2007-03-05 | 2008-03-05 | 半导体基板用存储装置 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP4899939B2 (zh) |
KR (1) | KR20080081855A (zh) |
CN (1) | CN101276772B (zh) |
TW (1) | TW200902414A (zh) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102024682A (zh) * | 2010-09-17 | 2011-04-20 | 沈阳芯源微电子设备有限公司 | 带有可升降挡板的多层腔体装置 |
CN101665183B (zh) * | 2009-09-04 | 2012-04-25 | 友达光电股份有限公司 | 仓储系统 |
CN103985650A (zh) * | 2014-06-03 | 2014-08-13 | 杭州大立微电子有限公司 | 封装模具及封装方法 |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4884486B2 (ja) * | 2009-02-03 | 2012-02-29 | 東京エレクトロン株式会社 | 基板バッファユニット |
JP6631447B2 (ja) * | 2016-09-09 | 2020-01-15 | 株式会社ダイフク | 物品収納設備 |
CN110249419B (zh) * | 2017-02-07 | 2023-04-18 | 村田机械株式会社 | 储存库 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2607406B1 (fr) * | 1986-11-28 | 1989-01-27 | Commissariat Energie Atomique | Procede de traitement d'un objet dans une atmosphere de haute proprete et conteneur pour la mise en oeuvre de ce procede |
JPH06255710A (ja) * | 1993-03-08 | 1994-09-13 | Nippon Muki Co Ltd | クリーン装置付き収納設備 |
JPH07133004A (ja) * | 1993-06-11 | 1995-05-23 | Nikon Corp | 基板保管装置 |
JP4442299B2 (ja) * | 2004-04-16 | 2010-03-31 | 株式会社Ihi | 物品保管設備 |
JP2006021913A (ja) * | 2004-07-09 | 2006-01-26 | Tohoku Univ | クリーンストッカー |
JP2006347734A (ja) * | 2005-06-17 | 2006-12-28 | Rorze Corp | 貯蔵装置 |
-
2007
- 2007-03-05 JP JP2007053754A patent/JP4899939B2/ja not_active Expired - Fee Related
-
2008
- 2008-03-05 CN CN2008100827413A patent/CN101276772B/zh not_active Expired - Fee Related
- 2008-03-05 TW TW097107697A patent/TW200902414A/zh unknown
- 2008-03-05 KR KR1020080020481A patent/KR20080081855A/ko not_active Application Discontinuation
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101665183B (zh) * | 2009-09-04 | 2012-04-25 | 友达光电股份有限公司 | 仓储系统 |
CN102024682A (zh) * | 2010-09-17 | 2011-04-20 | 沈阳芯源微电子设备有限公司 | 带有可升降挡板的多层腔体装置 |
CN103985650A (zh) * | 2014-06-03 | 2014-08-13 | 杭州大立微电子有限公司 | 封装模具及封装方法 |
CN103985650B (zh) * | 2014-06-03 | 2017-01-11 | 杭州大立微电子有限公司 | 封装模具及封装方法 |
Also Published As
Publication number | Publication date |
---|---|
JP2008218687A (ja) | 2008-09-18 |
KR20080081855A (ko) | 2008-09-10 |
JP4899939B2 (ja) | 2012-03-21 |
CN101276772B (zh) | 2012-07-04 |
TW200902414A (en) | 2009-01-16 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
ASS | Succession or assignment of patent right |
Owner name: MURATA MACHINE CO., LTD. Free format text: FORMER OWNER: JAPAN YASHIDI SCIENCE AND TECHNOLOGY CO., LTD. Effective date: 20091211 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20091211 Address after: Kyoto City Applicant after: Murata Machinery Co., Ltd. Address before: Japan three heavy Applicant before: Asyst Technologies Japan Inc. |
|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: MURATA MACHINERY CO., LTD. Free format text: FORMER OWNER: ASYST TECHNOLOGIES Effective date: 20130516 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20130516 Address after: Kyoto Japan Patentee after: Murata Machinery Co., Ltd. Address before: Kyoto City Patentee before: Asyst Technologies |
|
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120704 Termination date: 20150305 |
|
EXPY | Termination of patent right or utility model |