CN101276140B - 灰阶掩模的缺陷修正方法和制造方法、灰阶掩模及图案转印方法 - Google Patents
灰阶掩模的缺陷修正方法和制造方法、灰阶掩模及图案转印方法 Download PDFInfo
- Publication number
- CN101276140B CN101276140B CN2008100865843A CN200810086584A CN101276140B CN 101276140 B CN101276140 B CN 101276140B CN 2008100865843 A CN2008100865843 A CN 2008100865843A CN 200810086584 A CN200810086584 A CN 200810086584A CN 101276140 B CN101276140 B CN 101276140B
- Authority
- CN
- China
- Prior art keywords
- film
- semi
- gray
- tone mask
- defect
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
- G03F1/72—Repair or correction of mask defects
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/36—Masks having proximity correction features; Preparation thereof, e.g. optical proximity correction [OPC] design processes
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007095881A JP5102912B2 (ja) | 2007-03-31 | 2007-03-31 | グレートーンマスクの欠陥修正方法、グレートーンマスクの製造方法、及びパターン転写方法 |
JP2007-095881 | 2007-03-31 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101276140A CN101276140A (zh) | 2008-10-01 |
CN101276140B true CN101276140B (zh) | 2012-02-22 |
Family
ID=39980419
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2008100865843A Expired - Fee Related CN101276140B (zh) | 2007-03-31 | 2008-03-20 | 灰阶掩模的缺陷修正方法和制造方法、灰阶掩模及图案转印方法 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP5102912B2 (ko) |
KR (1) | KR101444463B1 (ko) |
CN (1) | CN101276140B (ko) |
TW (1) | TWI378318B (ko) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5336226B2 (ja) * | 2008-02-26 | 2013-11-06 | Hoya株式会社 | 多階調フォトマスクの製造方法 |
CN101943854B (zh) * | 2009-07-03 | 2012-07-04 | 深圳清溢光电股份有限公司 | 半灰阶掩模板半曝光区的设计方法及其制造方法 |
JP2011081282A (ja) * | 2009-10-09 | 2011-04-21 | Hoya Corp | フォトマスク用欠陥修正方法、フォトマスク用欠陥修正装置、フォトマスク用欠陥修正ヘッド、及びフォトマスク用欠陥検査装置、並びにフォトマスクの製造方法 |
KR101032695B1 (ko) | 2010-04-26 | 2011-06-10 | 주식회사 에스앤에스텍 | 그레이톤 포토마스크의 결함 수정 방법, 그레이톤 포토마스크 블랭크, 그레이톤 포토마스크, 및 그들의 제조 방법 |
CN104746041B (zh) * | 2015-03-04 | 2018-02-13 | 深圳清溢光电股份有限公司 | 激光气相沉积方式修补白缺陷的方法 |
JP6235643B2 (ja) | 2016-03-25 | 2017-11-22 | Hoya株式会社 | パターン修正方法、フォトマスクの製造方法、フォトマスク、及び修正膜形成装置 |
JP6557638B2 (ja) | 2016-07-06 | 2019-08-07 | 株式会社エスケーエレクトロニクス | ハーフトーンマスクおよびハーフトーンマスクブランクス |
KR20180066354A (ko) * | 2016-12-08 | 2018-06-19 | 주식회사 피케이엘 | 하프톤 마스크의 반투과부 결함 수정 방법 및 그 결함 수정 하프톤 마스크 |
TWI659262B (zh) * | 2017-08-07 | 2019-05-11 | 日商Hoya股份有限公司 | 光罩之修正方法、光罩之製造方法、光罩及顯示裝置之製造方法 |
US11086222B2 (en) | 2018-11-23 | 2021-08-10 | Nanya Technology Corporation | Method of manufacturing semiconductor structure |
JP6741893B1 (ja) * | 2020-03-04 | 2020-08-19 | 株式会社エスケーエレクトロニクス | ハーフトーンマスクの欠陥修正方法、ハーフトーンマスクの製造方法及びハーフトーンマスク |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1519653A (zh) * | 2003-01-31 | 2004-08-11 | 株式会社瑞萨科技 | 光刻掩模、光刻掩模的制造方法以及光刻掩模的制造装置 |
CN1534366A (zh) * | 2003-04-01 | 2004-10-06 | Hoya株式会社 | 灰色调掩模的缺陷校正方法 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3630935B2 (ja) * | 1997-08-18 | 2005-03-23 | Hoya株式会社 | ハーフトーン型位相シフトマスクの欠陥修正方法 |
JPH11109605A (ja) * | 1997-10-03 | 1999-04-23 | Toshiba Corp | 露光マスクの修正方法 |
JP3556591B2 (ja) * | 2000-09-29 | 2004-08-18 | Hoya株式会社 | グレートーンマスクにおけるグレートーン部の欠陥修正方法 |
JP4559921B2 (ja) * | 2005-06-20 | 2010-10-13 | エスアイアイ・ナノテクノロジー株式会社 | グレートーンのパターン膜欠陥修正方法 |
KR100936716B1 (ko) * | 2005-09-23 | 2010-01-13 | 엘지이노텍 주식회사 | 하프톤 마스크의 반투과부 결함 수정 방법 및 이를 이용한리페어된 하프톤 마스크 |
JP2007151850A (ja) * | 2005-12-06 | 2007-06-21 | Taito Corp | 端末ゲーム装置 |
JP4446395B2 (ja) * | 2006-02-02 | 2010-04-07 | Hoya株式会社 | グレートーンマスクの欠陥修正方法、及びグレートーンマスク |
JP5036349B2 (ja) * | 2007-02-28 | 2012-09-26 | Hoya株式会社 | グレートーンマスクの欠陥修正方法及びグレートーンマスクの製造方法 |
-
2007
- 2007-03-31 JP JP2007095881A patent/JP5102912B2/ja active Active
-
2008
- 2008-03-20 CN CN2008100865843A patent/CN101276140B/zh not_active Expired - Fee Related
- 2008-03-28 TW TW097111158A patent/TWI378318B/zh not_active IP Right Cessation
- 2008-03-28 KR KR1020080029079A patent/KR101444463B1/ko active IP Right Grant
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1519653A (zh) * | 2003-01-31 | 2004-08-11 | 株式会社瑞萨科技 | 光刻掩模、光刻掩模的制造方法以及光刻掩模的制造装置 |
CN1534366A (zh) * | 2003-04-01 | 2004-10-06 | Hoya株式会社 | 灰色调掩模的缺陷校正方法 |
Non-Patent Citations (3)
Title |
---|
JP特开平5-142758A 1993.06.11 |
JP特开平6-347994A 1994.12.22 |
JP特开平7-191450A 1995.07.28 |
Also Published As
Publication number | Publication date |
---|---|
JP2008256759A (ja) | 2008-10-23 |
CN101276140A (zh) | 2008-10-01 |
TWI378318B (en) | 2012-12-01 |
KR20080089269A (ko) | 2008-10-06 |
JP5102912B2 (ja) | 2012-12-19 |
KR101444463B1 (ko) | 2014-09-24 |
TW200848919A (en) | 2008-12-16 |
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C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C17 | Cessation of patent right | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120222 Termination date: 20130320 |