CN101273245B - 用于检查基板的表面的测量装置和测量系统 - Google Patents

用于检查基板的表面的测量装置和测量系统 Download PDF

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Publication number
CN101273245B
CN101273245B CN2006800354527A CN200680035452A CN101273245B CN 101273245 B CN101273245 B CN 101273245B CN 2006800354527 A CN2006800354527 A CN 2006800354527A CN 200680035452 A CN200680035452 A CN 200680035452A CN 101273245 B CN101273245 B CN 101273245B
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CN
China
Prior art keywords
measuring head
sensor
measurement mechanism
substrate
pneumatic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN2006800354527A
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English (en)
Chinese (zh)
Other versions
CN101273245A (zh
Inventor
弗朗茨·德罗布纳
特奥多罗·龙鲍尔
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Siemens AG
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Siemens AG
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Publication date
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Publication of CN101273245A publication Critical patent/CN101273245A/zh
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Publication of CN101273245B publication Critical patent/CN101273245B/zh
Expired - Fee Related legal-status Critical Current
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B13/00—Measuring arrangements characterised by the use of fluids
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/30—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring roughness or irregularity of surfaces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B13/00—Measuring arrangements characterised by the use of fluids
    • G01B13/16—Measuring arrangements characterised by the use of fluids for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B13/00—Measuring arrangements characterised by the use of fluids
    • G01B13/22—Measuring arrangements characterised by the use of fluids for measuring roughness or irregularity of surfaces

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
CN2006800354527A 2005-09-27 2006-09-19 用于检查基板的表面的测量装置和测量系统 Expired - Fee Related CN101273245B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102005046154.9 2005-09-27
DE102005046154A DE102005046154B4 (de) 2005-09-27 2005-09-27 Messvorrichtung und Messsystem zum Inspizieren einer Oberfläche eines Substrates
PCT/EP2006/066505 WO2007036461A1 (de) 2005-09-27 2006-09-19 Messvorrichtung und messsystem zum inspizieren einer oberfläche eines substrates

Publications (2)

Publication Number Publication Date
CN101273245A CN101273245A (zh) 2008-09-24
CN101273245B true CN101273245B (zh) 2010-09-01

Family

ID=37546888

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2006800354527A Expired - Fee Related CN101273245B (zh) 2005-09-27 2006-09-19 用于检查基板的表面的测量装置和测量系统

Country Status (5)

Country Link
JP (1) JP4940242B2 (ko)
KR (1) KR101338028B1 (ko)
CN (1) CN101273245B (ko)
DE (1) DE102005046154B4 (ko)
WO (1) WO2007036461A1 (ko)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006054088A1 (de) * 2006-11-16 2008-05-21 Siemens Ag Messvorrichtung und Messverfahren zum Inspizieren einer Oberfläche eines Substrates
DE102012002884A1 (de) * 2012-02-14 2013-08-14 Giesecke & Devrient Gmbh Verfahren und Vorrichtung zum kontaktlosen Prüfen eines flächigen Sicherheitsdokuments
CN106170688B (zh) * 2014-04-03 2019-05-17 株式会社日立高新技术 分析装置

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN85104875A (zh) * 1985-06-26 1986-12-31 株式会社三豊制作所 坐标测量仪
US4854156A (en) * 1989-01-03 1989-08-08 Systems Research Laboratories, Inc. Pneumatic surface-following control system
CN2127490Y (zh) * 1992-06-26 1993-02-24 刘纪 气动位置测量探头
CN2191410Y (zh) * 1994-03-05 1995-03-08 赵玉山 一种气动量仪的测量头
US5616853A (en) * 1995-03-29 1997-04-01 Kyocera Corporation Measuring machine for measuring object

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Publication number Priority date Publication date Assignee Title
JPS5229280A (en) * 1975-08-30 1977-03-04 Shimadzu Corp Flaw detecting machine for seam pipes
JPS5926055A (ja) * 1982-08-02 1984-02-10 Mitsubishi Electric Corp 探傷用検出ヘツド
JPS616764U (ja) * 1984-06-18 1986-01-16 三菱重工業株式会社 空気サ−ボ式ならい装置
JPS616764A (ja) * 1984-06-20 1986-01-13 Tokico Ltd 端末装置
DE3612914A1 (de) * 1986-04-17 1987-10-22 Heidelberger Druckmasch Ag Vorrichtung zum messen der dicke von papier oder dergleichen
DD260032B5 (de) * 1987-04-22 1994-06-09 Kba Planeta Ag Densitometer
US4824248A (en) * 1987-12-21 1989-04-25 Environmental Research Institute Of Michigan Stabilized sensor device
JPH0314409A (ja) * 1989-05-31 1991-01-23 Nippon Steel Corp 外周紙巻取りロール
JPH0642169Y2 (ja) * 1989-06-27 1994-11-02 横河電機株式会社 平滑光沢度計の位置固定機構
JP2903554B2 (ja) * 1989-08-31 1999-06-07 日本電気株式会社 マルチビーム光磁気ヘッド装置
JPH0388153U (ko) * 1989-12-26 1991-09-09
JPH04189452A (ja) * 1990-11-20 1992-07-07 Fanuc Ltd デジタイジング制御装置
JPH0552512A (ja) * 1991-08-27 1993-03-02 Ntn Corp 干渉計
JPH05307023A (ja) * 1992-04-30 1993-11-19 Japan Energy Corp 検査装置
DE4343810C1 (de) * 1993-12-22 1995-04-20 Roland Man Druckmasch Fotoelektrischer Meßkopf
JPH08327561A (ja) * 1995-06-05 1996-12-13 Nippon Sheet Glass Co Ltd 連続シート状物体の欠点検査装置
JP2001296278A (ja) * 2000-04-13 2001-10-26 Nkk Corp 金属体検査装置
SE519686C2 (sv) * 2001-01-23 2003-04-01 Daprox Ab Metod och mätanordning innefattande övervakning av ett givarhuvuds snedställning
JP3575008B2 (ja) * 2001-07-31 2004-10-06 大成建設株式会社 コンクリートの状態測定装置
JP4009595B2 (ja) * 2003-01-20 2007-11-14 株式会社日立国際電気 パターン欠陥検査装置およびパターン欠陥検査方法
US20050088664A1 (en) * 2003-10-27 2005-04-28 Lars Stiblert Method for writing a pattern on a surface intended for use in exposure equipment and for measuring the physical properties of the surface
JP2006242860A (ja) * 2005-03-04 2006-09-14 Oht Inc 検査装置および検査方法

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN85104875A (zh) * 1985-06-26 1986-12-31 株式会社三豊制作所 坐标测量仪
US4854156A (en) * 1989-01-03 1989-08-08 Systems Research Laboratories, Inc. Pneumatic surface-following control system
CN2127490Y (zh) * 1992-06-26 1993-02-24 刘纪 气动位置测量探头
CN2191410Y (zh) * 1994-03-05 1995-03-08 赵玉山 一种气动量仪的测量头
US5616853A (en) * 1995-03-29 1997-04-01 Kyocera Corporation Measuring machine for measuring object

Also Published As

Publication number Publication date
DE102005046154A1 (de) 2007-03-29
JP4940242B2 (ja) 2012-05-30
KR101338028B1 (ko) 2013-12-09
WO2007036461A1 (de) 2007-04-05
KR20080066690A (ko) 2008-07-16
DE102005046154B4 (de) 2008-07-03
JP2009510419A (ja) 2009-03-12
CN101273245A (zh) 2008-09-24

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