JP4940242B2 - 基板の表面を検査するための測定システム - Google Patents

基板の表面を検査するための測定システム Download PDF

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Publication number
JP4940242B2
JP4940242B2 JP2008532726A JP2008532726A JP4940242B2 JP 4940242 B2 JP4940242 B2 JP 4940242B2 JP 2008532726 A JP2008532726 A JP 2008532726A JP 2008532726 A JP2008532726 A JP 2008532726A JP 4940242 B2 JP4940242 B2 JP 4940242B2
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JP
Japan
Prior art keywords
sensor
measuring
measurement
measuring head
substrate
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Expired - Fee Related
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JP2008532726A
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English (en)
Japanese (ja)
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JP2009510419A (ja
Inventor
ドロープナー フランツ
ロームバウアー テオドロ
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Siemens AG
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Siemens AG
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/30—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring roughness or irregularity of surfaces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B13/00—Measuring arrangements characterised by the use of fluids
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B13/00—Measuring arrangements characterised by the use of fluids
    • G01B13/16—Measuring arrangements characterised by the use of fluids for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B13/00—Measuring arrangements characterised by the use of fluids
    • G01B13/22—Measuring arrangements characterised by the use of fluids for measuring roughness or irregularity of surfaces

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP2008532726A 2005-09-27 2006-09-19 基板の表面を検査するための測定システム Expired - Fee Related JP4940242B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102005046154.9 2005-09-27
DE102005046154A DE102005046154B4 (de) 2005-09-27 2005-09-27 Messvorrichtung und Messsystem zum Inspizieren einer Oberfläche eines Substrates
PCT/EP2006/066505 WO2007036461A1 (de) 2005-09-27 2006-09-19 Messvorrichtung und messsystem zum inspizieren einer oberfläche eines substrates

Publications (2)

Publication Number Publication Date
JP2009510419A JP2009510419A (ja) 2009-03-12
JP4940242B2 true JP4940242B2 (ja) 2012-05-30

Family

ID=37546888

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008532726A Expired - Fee Related JP4940242B2 (ja) 2005-09-27 2006-09-19 基板の表面を検査するための測定システム

Country Status (5)

Country Link
JP (1) JP4940242B2 (ko)
KR (1) KR101338028B1 (ko)
CN (1) CN101273245B (ko)
DE (1) DE102005046154B4 (ko)
WO (1) WO2007036461A1 (ko)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006054088A1 (de) * 2006-11-16 2008-05-21 Siemens Ag Messvorrichtung und Messverfahren zum Inspizieren einer Oberfläche eines Substrates
DE102012002884A1 (de) * 2012-02-14 2013-08-14 Giesecke & Devrient Gmbh Verfahren und Vorrichtung zum kontaktlosen Prüfen eines flächigen Sicherheitsdokuments
WO2015151738A1 (ja) * 2014-04-03 2015-10-08 株式会社日立ハイテクノロジーズ 分析装置
DE102022134544B3 (de) * 2022-12-22 2023-11-02 Sick Ag Justage-Vorrichtung und Justage-Verfahren
CN118225155B (zh) * 2024-05-27 2024-07-26 成都凯磁科技有限公司 一种传感器调整辅助装置及传感器调试方法

Citations (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5229280A (en) * 1975-08-30 1977-03-04 Shimadzu Corp Flaw detecting machine for seam pipes
JPS5926055A (ja) * 1982-08-02 1984-02-10 Mitsubishi Electric Corp 探傷用検出ヘツド
JPS616764A (ja) * 1984-06-20 1986-01-13 Tokico Ltd 端末装置
JPH0314409A (ja) * 1989-05-31 1991-01-23 Nippon Steel Corp 外周紙巻取りロール
JPH0388153A (ja) * 1989-08-31 1991-04-12 Nec Corp マルチビーム光磁気ヘッド装置
JPH0552512A (ja) * 1991-08-27 1993-03-02 Ntn Corp 干渉計
JPH05307023A (ja) * 1992-04-30 1993-11-19 Japan Energy Corp 検査装置
JPH07208938A (ja) * 1993-12-22 1995-08-11 Man Roland Druckmas Ag 光電測定ヘッド
JPH08327561A (ja) * 1995-06-05 1996-12-13 Nippon Sheet Glass Co Ltd 連続シート状物体の欠点検査装置
JP2001296278A (ja) * 2000-04-13 2001-10-26 Nkk Corp 金属体検査装置
JP2003043020A (ja) * 2001-07-31 2003-02-13 Taisei Corp コンクリートの状態測定装置
JP2004245829A (ja) * 2003-01-20 2004-09-02 Hitachi Kokusai Electric Inc パターン欠陥検査装置およびパターン欠陥検査方法
JP2006242860A (ja) * 2005-03-04 2006-09-14 Oht Inc 検査装置および検査方法

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS616764U (ja) * 1984-06-18 1986-01-16 三菱重工業株式会社 空気サ−ボ式ならい装置
CN85104875B (zh) * 1985-06-26 1988-08-10 株式会社三豐制作所 坐标测量仪
DE3612914A1 (de) * 1986-04-17 1987-10-22 Heidelberger Druckmasch Ag Vorrichtung zum messen der dicke von papier oder dergleichen
DD260032B5 (de) * 1987-04-22 1994-06-09 Kba Planeta Ag Densitometer
US4824248A (en) * 1987-12-21 1989-04-25 Environmental Research Institute Of Michigan Stabilized sensor device
US4854156A (en) * 1989-01-03 1989-08-08 Systems Research Laboratories, Inc. Pneumatic surface-following control system
JPH0642169Y2 (ja) * 1989-06-27 1994-11-02 横河電機株式会社 平滑光沢度計の位置固定機構
JPH0388153U (ko) * 1989-12-26 1991-09-09
JPH04189452A (ja) * 1990-11-20 1992-07-07 Fanuc Ltd デジタイジング制御装置
CN2127490Y (zh) * 1992-06-26 1993-02-24 刘纪 气动位置测量探头
CN2191410Y (zh) * 1994-03-05 1995-03-08 赵玉山 一种气动量仪的测量头
US5616853A (en) * 1995-03-29 1997-04-01 Kyocera Corporation Measuring machine for measuring object
SE519686C2 (sv) * 2001-01-23 2003-04-01 Daprox Ab Metod och mätanordning innefattande övervakning av ett givarhuvuds snedställning
US20050088664A1 (en) * 2003-10-27 2005-04-28 Lars Stiblert Method for writing a pattern on a surface intended for use in exposure equipment and for measuring the physical properties of the surface

Patent Citations (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5229280A (en) * 1975-08-30 1977-03-04 Shimadzu Corp Flaw detecting machine for seam pipes
JPS5926055A (ja) * 1982-08-02 1984-02-10 Mitsubishi Electric Corp 探傷用検出ヘツド
JPS616764A (ja) * 1984-06-20 1986-01-13 Tokico Ltd 端末装置
JPH0314409A (ja) * 1989-05-31 1991-01-23 Nippon Steel Corp 外周紙巻取りロール
JPH0388153A (ja) * 1989-08-31 1991-04-12 Nec Corp マルチビーム光磁気ヘッド装置
JPH0552512A (ja) * 1991-08-27 1993-03-02 Ntn Corp 干渉計
JPH05307023A (ja) * 1992-04-30 1993-11-19 Japan Energy Corp 検査装置
JPH07208938A (ja) * 1993-12-22 1995-08-11 Man Roland Druckmas Ag 光電測定ヘッド
JPH08327561A (ja) * 1995-06-05 1996-12-13 Nippon Sheet Glass Co Ltd 連続シート状物体の欠点検査装置
JP2001296278A (ja) * 2000-04-13 2001-10-26 Nkk Corp 金属体検査装置
JP2003043020A (ja) * 2001-07-31 2003-02-13 Taisei Corp コンクリートの状態測定装置
JP2004245829A (ja) * 2003-01-20 2004-09-02 Hitachi Kokusai Electric Inc パターン欠陥検査装置およびパターン欠陥検査方法
JP2006242860A (ja) * 2005-03-04 2006-09-14 Oht Inc 検査装置および検査方法

Also Published As

Publication number Publication date
KR101338028B1 (ko) 2013-12-09
JP2009510419A (ja) 2009-03-12
KR20080066690A (ko) 2008-07-16
CN101273245B (zh) 2010-09-01
DE102005046154B4 (de) 2008-07-03
DE102005046154A1 (de) 2007-03-29
CN101273245A (zh) 2008-09-24
WO2007036461A1 (de) 2007-04-05

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