CN101075628B - 半导体器件 - Google Patents

半导体器件 Download PDF

Info

Publication number
CN101075628B
CN101075628B CN200710084807.8A CN200710084807A CN101075628B CN 101075628 B CN101075628 B CN 101075628B CN 200710084807 A CN200710084807 A CN 200710084807A CN 101075628 B CN101075628 B CN 101075628B
Authority
CN
China
Prior art keywords
mentioned
layer
current
bit line
free layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN200710084807.8A
Other languages
English (en)
Chinese (zh)
Other versions
CN101075628A (zh
Inventor
河原尊之
竹村理一郎
伊藤显知
高桥宏昌
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=38821767&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=CN101075628(B) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Publication of CN101075628A publication Critical patent/CN101075628A/zh
Application granted granted Critical
Publication of CN101075628B publication Critical patent/CN101075628B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C11/00Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/02Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
    • G11C11/14Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using thin-film elements
    • G11C11/15Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using thin-film elements using multiple magnetic layers
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C11/00Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/02Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
    • G11C11/16Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect
    • G11C11/165Auxiliary circuits
    • G11C11/1653Address circuits or decoders
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C11/00Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/02Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
    • G11C11/16Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect
    • G11C11/165Auxiliary circuits
    • G11C11/1653Address circuits or decoders
    • G11C11/1657Word-line or row circuits
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C11/00Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/02Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
    • G11C11/16Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect
    • G11C11/165Auxiliary circuits
    • G11C11/1659Cell access
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C11/00Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/02Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
    • G11C11/16Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect
    • G11C11/165Auxiliary circuits
    • G11C11/1673Reading or sensing circuits or methods
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C11/00Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/02Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
    • G11C11/16Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect
    • G11C11/165Auxiliary circuits
    • G11C11/1675Writing or programming circuits or methods
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C11/00Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/02Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
    • G11C11/16Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect
    • G11C11/165Auxiliary circuits
    • G11C11/1693Timing circuits or methods
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10BELECTRONIC MEMORY DEVICES
    • H10B61/00Magnetic memory devices, e.g. magnetoresistive RAM [MRAM] devices
    • H10B61/20Magnetic memory devices, e.g. magnetoresistive RAM [MRAM] devices comprising components having three or more electrodes, e.g. transistors
    • H10B61/22Magnetic memory devices, e.g. magnetoresistive RAM [MRAM] devices comprising components having three or more electrodes, e.g. transistors of the field-effect transistor [FET] type
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N50/00Galvanomagnetic devices
    • H10N50/10Magnetoresistive devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Mram Or Spin Memory Techniques (AREA)
  • Hall/Mr Elements (AREA)
CN200710084807.8A 2006-05-18 2007-02-27 半导体器件 Expired - Fee Related CN101075628B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP138429/2006 2006-05-18
JP2006138429A JP4935183B2 (ja) 2006-05-18 2006-05-18 半導体装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
CN2008101838307A Division CN101425328B (zh) 2006-05-18 2007-02-27 半导体器件

Publications (2)

Publication Number Publication Date
CN101075628A CN101075628A (zh) 2007-11-21
CN101075628B true CN101075628B (zh) 2014-01-08

Family

ID=38821767

Family Applications (2)

Application Number Title Priority Date Filing Date
CN200710084807.8A Expired - Fee Related CN101075628B (zh) 2006-05-18 2007-02-27 半导体器件
CN2008101838307A Expired - Fee Related CN101425328B (zh) 2006-05-18 2007-02-27 半导体器件

Family Applications After (1)

Application Number Title Priority Date Filing Date
CN2008101838307A Expired - Fee Related CN101425328B (zh) 2006-05-18 2007-02-27 半导体器件

Country Status (5)

Country Link
US (2) US7596014B2 (enExample)
JP (1) JP4935183B2 (enExample)
KR (1) KR101263048B1 (enExample)
CN (2) CN101075628B (enExample)
TW (1) TWI433147B (enExample)

Families Citing this family (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7646627B2 (en) * 2006-05-18 2010-01-12 Renesas Technology Corp. Magnetic random access memory having improved read disturb suppression and thermal disturbance resistance
JP4250644B2 (ja) 2006-08-21 2009-04-08 株式会社東芝 磁気記憶素子およびこの磁気記憶素子を備えた磁気メモリならびに磁気メモリの駆動方法
JP5096886B2 (ja) * 2007-11-20 2012-12-12 シャープ株式会社 不揮発性半導体記憶装置及びその駆動方法
JP5224803B2 (ja) 2007-12-26 2013-07-03 株式会社日立製作所 磁気メモリ及び磁気メモリの書き込み方法
JP2009211733A (ja) * 2008-02-29 2009-09-17 Toshiba Corp 磁気記憶装置
JP2009230798A (ja) * 2008-03-21 2009-10-08 Toshiba Corp 磁気記憶装置
TWI451410B (zh) * 2008-04-18 2014-09-01 Sony Corp Recording method of magnetic memory element
KR101493868B1 (ko) * 2008-07-10 2015-02-17 삼성전자주식회사 자기 메모리 소자의 구동 방법
JP4738462B2 (ja) 2008-09-25 2011-08-03 株式会社東芝 磁気ランダムアクセスメモリ
US7859891B2 (en) * 2008-09-30 2010-12-28 Seagate Technology Llc Static source plane in stram
US7876603B2 (en) * 2008-09-30 2011-01-25 Micron Technology, Inc. Spin current generator for STT-MRAM or other spintronics applications
JP4970407B2 (ja) * 2008-11-10 2012-07-04 株式会社東芝 磁気記憶素子およびこの磁気記憶素子を備えた磁気メモリならびに磁気メモリの駆動方法
US8027206B2 (en) * 2009-01-30 2011-09-27 Qualcomm Incorporated Bit line voltage control in spin transfer torque magnetoresistive random access memory
JP4649519B2 (ja) 2009-03-13 2011-03-09 株式会社東芝 磁気ディスク装置及び磁気ヘッド駆動制御方法
US7957183B2 (en) * 2009-05-04 2011-06-07 Magic Technologies, Inc. Single bit line SMT MRAM array architecture and the programming method
US8427864B2 (en) * 2009-06-03 2013-04-23 Hitachi, Ltd. Semiconductor storage device
JP2011034637A (ja) * 2009-08-03 2011-02-17 Toshiba Corp 不揮発性半導体記憶装置
US8385106B2 (en) * 2009-09-11 2013-02-26 Grandis, Inc. Method and system for providing a hierarchical data path for spin transfer torque random access memory
JP4818426B2 (ja) 2009-11-27 2011-11-16 株式会社東芝 ヘッド駆動制御装置、磁気ディスク装置及びヘッド駆動制御方法
JP5363644B2 (ja) * 2010-02-16 2013-12-11 株式会社日立製作所 半導体装置
US8411497B2 (en) * 2010-05-05 2013-04-02 Grandis, Inc. Method and system for providing a magnetic field aligned spin transfer torque random access memory
US8437181B2 (en) * 2010-06-29 2013-05-07 Magic Technologies, Inc. Shared bit line SMT MRAM array with shunting transistors between the bit lines
KR20120010052A (ko) * 2010-07-23 2012-02-02 삼성전자주식회사 이퀄라이징 기능을 갖는 저항성 메모리 및 이를 포함하는 3차원 반도체 장치
US8929132B2 (en) * 2011-11-17 2015-01-06 Everspin Technologies, Inc. Write driver circuit and method for writing to a spin-torque MRAM
WO2013171947A1 (ja) * 2012-05-16 2013-11-21 ソニー株式会社 記憶装置、記憶素子
JP5916524B2 (ja) * 2012-06-07 2016-05-11 ルネサスエレクトロニクス株式会社 半導体装置
JP6137180B2 (ja) * 2012-06-26 2017-05-31 日本電気株式会社 プログラミング回路、半導体装置及びプログラミング方法
JP6143936B2 (ja) * 2013-03-15 2017-06-07 インテル・コーポレーション 集積コンデンサベースの電力分散
US10068628B2 (en) 2013-06-28 2018-09-04 Intel Corporation Apparatus for low power write and read operations for resistive memory
KR20170090293A (ko) 2016-01-28 2017-08-07 삼성전자주식회사 분리 소스라인 구조를 갖는 메모리 장치
US10109331B2 (en) 2016-03-01 2018-10-23 Toshiba Memory Corporation Magnetic storage device with a wiring having a ferromagnetic layer
JP6625942B2 (ja) * 2016-07-29 2019-12-25 株式会社東芝 半導体記憶装置
TWI785299B (zh) 2016-09-09 2022-12-01 日商鎧俠股份有限公司 記憶裝置

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002299584A (ja) * 2001-04-03 2002-10-11 Mitsubishi Electric Corp 磁気ランダムアクセスメモリ装置および半導体装置
JP3970571B2 (ja) * 2001-10-10 2007-09-05 独立行政法人科学技術振興機構 磁気記憶素子の書き込み回路
JP4219134B2 (ja) * 2002-09-03 2009-02-04 株式会社ルネサステクノロジ 薄膜磁性体記憶装置
JP2005116923A (ja) 2003-10-10 2005-04-28 Hitachi Ltd スピントルクを用いた不揮発性磁気メモリセルおよびこれを用いた磁気ランダムアクセスメモリ
US7224601B2 (en) * 2005-08-25 2007-05-29 Grandis Inc. Oscillating-field assisted spin torque switching of a magnetic tunnel junction memory element
JP2007081280A (ja) * 2005-09-16 2007-03-29 Fujitsu Ltd 磁気抵抗効果素子及び磁気メモリ装置
JP4999359B2 (ja) * 2005-10-13 2012-08-15 ルネサスエレクトロニクス株式会社 不揮発性記憶装置
US7286395B2 (en) * 2005-10-27 2007-10-23 Grandis, Inc. Current driven switched magnetic storage cells having improved read and write margins and magnetic memories using such cells
JP5193419B2 (ja) * 2005-10-28 2013-05-08 株式会社東芝 スピン注入磁気ランダムアクセスメモリとその書き込み方法
US7430135B2 (en) * 2005-12-23 2008-09-30 Grandis Inc. Current-switched spin-transfer magnetic devices with reduced spin-transfer switching current density

Also Published As

Publication number Publication date
CN101425328B (zh) 2011-11-30
CN101425328A (zh) 2009-05-06
TWI433147B (zh) 2014-04-01
JP4935183B2 (ja) 2012-05-23
JP2007310949A (ja) 2007-11-29
US20070285975A1 (en) 2007-12-13
CN101075628A (zh) 2007-11-21
US7596014B2 (en) 2009-09-29
TW200807414A (en) 2008-02-01
US7778068B2 (en) 2010-08-17
KR101263048B1 (ko) 2013-05-14
KR20070111958A (ko) 2007-11-22
US20090310399A1 (en) 2009-12-17

Similar Documents

Publication Publication Date Title
CN101075628B (zh) 半导体器件
US6894916B2 (en) Memory array employing single three-terminal non-volatile storage elements
CN102171764B (zh) 半导体器件
US7791931B2 (en) Current driven memory cells having enhanced current and enhanced current symmetry
US6970378B2 (en) Thin-film magnetic memory device executing data writing with data write magnetic fields in two directions
KR101291925B1 (ko) 반도체 장치
US7839676B2 (en) Magnetic memory device
JP5221222B2 (ja) 半導体記憶装置
JP2004103104A (ja) 薄膜磁性体記憶装置
US9754664B2 (en) Semiconductor memory
US8077508B1 (en) Dynamic multistate memory write driver
US8638597B2 (en) Bit line charge accumulation sensing for resistive changing memory
JP6139623B2 (ja) 不揮発性半導体メモリ
JP5500289B2 (ja) 半導体装置
JP5293795B2 (ja) 半導体装置

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20140108

Termination date: 20170227

CF01 Termination of patent right due to non-payment of annual fee