CN101069041B - 在工艺污染物减量过程中用以降低颗粒沉积的反应器设计 - Google Patents

在工艺污染物减量过程中用以降低颗粒沉积的反应器设计 Download PDF

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Publication number
CN101069041B
CN101069041B CN2005800393936A CN200580039393A CN101069041B CN 101069041 B CN101069041 B CN 101069041B CN 2005800393936 A CN2005800393936 A CN 2005800393936A CN 200580039393 A CN200580039393 A CN 200580039393A CN 101069041 B CN101069041 B CN 101069041B
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China
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thermal
gas
wall
reaction chamber
thermal reaction
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Expired - Fee Related
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CN2005800393936A
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English (en)
Chinese (zh)
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CN101069041A (zh
Inventor
浩文·罗德尼·赵
丹尼尔·O·克拉克
肖恩·W·克劳福德
杰伊·J·荣格
伦纳德·B·托德
罗伯特·韦尔穆伦
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Applied Materials Inc
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Applied Materials Inc
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
    • F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23M—CASINGS, LININGS, WALLS OR DOORS SPECIALLY ADAPTED FOR COMBUSTION CHAMBERS, e.g. FIREBRIDGES; DEVICES FOR DEFLECTING AIR, FLAMES OR COMBUSTION PRODUCTS IN COMBUSTION CHAMBERS; SAFETY ARRANGEMENTS SPECIALLY ADAPTED FOR COMBUSTION APPARATUS; DETAILS OF COMBUSTION CHAMBERS, NOT OTHERWISE PROVIDED FOR
    • F23M5/00—Casings; Linings; Walls
    • F23M5/08—Cooling thereof; Tube walls
    • F23M5/085—Cooling thereof; Tube walls using air or other gas as the cooling medium
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
    • F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
    • F23G7/061—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating
    • F23G7/065—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating using gaseous or liquid fuel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23J—REMOVAL OR TREATMENT OF COMBUSTION PRODUCTS OR COMBUSTION RESIDUES; FLUES 
    • F23J9/00—Preventing premature solidification of molten combustion residues
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23M—CASINGS, LININGS, WALLS OR DOORS SPECIALLY ADAPTED FOR COMBUSTION CHAMBERS, e.g. FIREBRIDGES; DEVICES FOR DEFLECTING AIR, FLAMES OR COMBUSTION PRODUCTS IN COMBUSTION CHAMBERS; SAFETY ARRANGEMENTS SPECIALLY ADAPTED FOR COMBUSTION APPARATUS; DETAILS OF COMBUSTION CHAMBERS, NOT OTHERWISE PROVIDED FOR
    • F23M5/00—Casings; Linings; Walls
    • F23M5/08—Cooling thereof; Tube walls
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23D—BURNERS
    • F23D2900/00—Special features of, or arrangements for burners using fluid fuels or solid fuels suspended in a carrier gas
    • F23D2900/00016—Preventing or reducing deposit build-up on burner parts, e.g. from carbon
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23M—CASINGS, LININGS, WALLS OR DOORS SPECIALLY ADAPTED FOR COMBUSTION CHAMBERS, e.g. FIREBRIDGES; DEVICES FOR DEFLECTING AIR, FLAMES OR COMBUSTION PRODUCTS IN COMBUSTION CHAMBERS; SAFETY ARRANGEMENTS SPECIALLY ADAPTED FOR COMBUSTION APPARATUS; DETAILS OF COMBUSTION CHAMBERS, NOT OTHERWISE PROVIDED FOR
    • F23M2900/00—Special features of, or arrangements for combustion chambers
    • F23M2900/05002—Means for accommodate thermal expansion of the wall liner
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23M—CASINGS, LININGS, WALLS OR DOORS SPECIALLY ADAPTED FOR COMBUSTION CHAMBERS, e.g. FIREBRIDGES; DEVICES FOR DEFLECTING AIR, FLAMES OR COMBUSTION PRODUCTS IN COMBUSTION CHAMBERS; SAFETY ARRANGEMENTS SPECIALLY ADAPTED FOR COMBUSTION APPARATUS; DETAILS OF COMBUSTION CHAMBERS, NOT OTHERWISE PROVIDED FOR
    • F23M2900/00—Special features of, or arrangements for combustion chambers
    • F23M2900/05004—Special materials for walls or lining

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Incineration Of Waste (AREA)
  • Devices And Processes Conducted In The Presence Of Fluids And Solid Particles (AREA)
  • Treating Waste Gases (AREA)
CN2005800393936A 2004-11-12 2005-11-12 在工艺污染物减量过程中用以降低颗粒沉积的反应器设计 Expired - Fee Related CN101069041B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US10/987,921 2004-11-12
US10/987,921 US7736599B2 (en) 2004-11-12 2004-11-12 Reactor design to reduce particle deposition during process abatement
PCT/US2005/040960 WO2006053231A2 (en) 2004-11-12 2005-11-12 Reactor design to reduce particle deposition during process abatement

Publications (2)

Publication Number Publication Date
CN101069041A CN101069041A (zh) 2007-11-07
CN101069041B true CN101069041B (zh) 2012-07-18

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CN2005800393936A Expired - Fee Related CN101069041B (zh) 2004-11-12 2005-11-12 在工艺污染物减量过程中用以降低颗粒沉积的反应器设计

Country Status (8)

Country Link
US (2) US7736599B2 (https=)
EP (1) EP1828680B1 (https=)
JP (1) JP2008519959A (https=)
KR (1) KR20070086017A (https=)
CN (1) CN101069041B (https=)
IL (1) IL183122A0 (https=)
TW (2) TW201023244A (https=)
WO (1) WO2006053231A2 (https=)

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US20060104879A1 (en) 2006-05-18
WO2006053231A2 (en) 2006-05-18
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KR20070086017A (ko) 2007-08-27
EP1828680B1 (en) 2012-02-01
US7985379B2 (en) 2011-07-26
US7736599B2 (en) 2010-06-15
TW201023244A (en) 2010-06-16
EP1828680A2 (en) 2007-09-05
TWI323003B (en) 2010-04-01
WO2006053231A3 (en) 2006-11-23
JP2008519959A (ja) 2008-06-12
IL183122A0 (en) 2007-09-20
TW200623226A (en) 2006-07-01

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