CN101068031B - 半导体器件 - Google Patents
半导体器件 Download PDFInfo
- Publication number
- CN101068031B CN101068031B CN2007100923187A CN200710092318A CN101068031B CN 101068031 B CN101068031 B CN 101068031B CN 2007100923187 A CN2007100923187 A CN 2007100923187A CN 200710092318 A CN200710092318 A CN 200710092318A CN 101068031 B CN101068031 B CN 101068031B
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- China
- Prior art keywords
- oxide film
- diffusion
- diffusion layer
- nmos
- zone
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 33
- 238000009792 diffusion process Methods 0.000 claims abstract description 101
- 239000000758 substrate Substances 0.000 claims abstract description 49
- 239000012535 impurity Substances 0.000 claims description 38
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 31
- 229910052710 silicon Inorganic materials 0.000 claims description 31
- 239000010703 silicon Substances 0.000 claims description 31
- 238000000034 method Methods 0.000 claims description 24
- 210000003323 beak Anatomy 0.000 claims description 20
- 230000004888 barrier function Effects 0.000 claims description 16
- 230000015572 biosynthetic process Effects 0.000 claims description 15
- 238000002955 isolation Methods 0.000 claims description 10
- 230000003071 parasitic effect Effects 0.000 abstract description 24
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract description 2
- 229910052814 silicon oxide Inorganic materials 0.000 abstract description 2
- 241000293849 Cordylanthus Species 0.000 abstract 3
- 230000003647 oxidation Effects 0.000 description 20
- 238000007254 oxidation reaction Methods 0.000 description 20
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 15
- 229910052581 Si3N4 Inorganic materials 0.000 description 9
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 9
- 239000003870 refractory metal Substances 0.000 description 8
- 229910021332 silicide Inorganic materials 0.000 description 8
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 8
- 210000000746 body region Anatomy 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 6
- 150000002500 ions Chemical class 0.000 description 6
- 229920002120 photoresistant polymer Polymers 0.000 description 5
- 229920005591 polysilicon Polymers 0.000 description 5
- 230000009471 action Effects 0.000 description 4
- 238000009413 insulation Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- XRZCZVQJHOCRCR-UHFFFAOYSA-N [Si].[Pt] Chemical compound [Si].[Pt] XRZCZVQJHOCRCR-UHFFFAOYSA-N 0.000 description 2
- YXTPWUNVHCYOSP-UHFFFAOYSA-N bis($l^{2}-silanylidene)molybdenum Chemical compound [Si]=[Mo]=[Si] YXTPWUNVHCYOSP-UHFFFAOYSA-N 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 239000002019 doping agent Substances 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 229910021344 molybdenum silicide Inorganic materials 0.000 description 2
- 238000001020 plasma etching Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 229910021341 titanium silicide Inorganic materials 0.000 description 2
- WQJQOUPTWCFRMM-UHFFFAOYSA-N tungsten disilicide Chemical compound [Si]#[W]#[Si] WQJQOUPTWCFRMM-UHFFFAOYSA-N 0.000 description 2
- 229910021342 tungsten silicide Inorganic materials 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/78606—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device
- H01L29/78612—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device for preventing the kink- or the snapback effect, e.g. discharging the minority carriers of the channel region for preventing bipolar effect
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/84—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being other than a semiconductor body, e.g. being an insulating body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1203—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body the substrate comprising an insulating body on a semiconductor body, e.g. SOI
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/78606—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device
- H01L29/78609—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device for preventing leakage current
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Thin Film Transistor (AREA)
- Element Separation (AREA)
- Electrodes Of Semiconductors (AREA)
- Local Oxidation Of Silicon (AREA)
Abstract
Description
Claims (3)
Applications Claiming Priority (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006041908 | 2006-02-20 | ||
JP2006041908 | 2006-02-20 | ||
JP2006-041908 | 2006-02-20 | ||
JP2007032907 | 2007-02-14 | ||
JP2007-032907 | 2007-02-14 | ||
JP2007032907A JP5360735B2 (ja) | 2006-02-20 | 2007-02-14 | 半導体装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101068031A CN101068031A (zh) | 2007-11-07 |
CN101068031B true CN101068031B (zh) | 2010-09-08 |
Family
ID=38595055
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2007100923187A Expired - Fee Related CN101068031B (zh) | 2006-02-20 | 2007-02-17 | 半导体器件 |
Country Status (5)
Country | Link |
---|---|
US (1) | US7566934B2 (zh) |
JP (1) | JP5360735B2 (zh) |
KR (1) | KR101326393B1 (zh) |
CN (1) | CN101068031B (zh) |
TW (1) | TWI481028B (zh) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2150981B1 (en) * | 2007-05-29 | 2018-05-09 | X-FAB Semiconductor Foundries AG | Mos transistor with a p-field implant overlying each end of a gate thereof |
JP2011108673A (ja) * | 2008-03-12 | 2011-06-02 | Sharp Corp | 半導体装置、その製造方法及び表示装置 |
US8921217B2 (en) * | 2011-12-20 | 2014-12-30 | Altera Corporation | Methods of forming gate structures for reduced leakage |
KR102449211B1 (ko) | 2016-01-05 | 2022-09-30 | 삼성전자주식회사 | 전계 효과 트랜지스터를 포함하는 반도체 소자 |
US9899376B2 (en) * | 2016-03-04 | 2018-02-20 | Texas Instruments Incorporated | MOSFET transistors with robust subthreshold operations |
US20200152661A1 (en) * | 2018-11-08 | 2020-05-14 | Nxp Usa, Inc. | Standard cell having mixed flip-well and conventional well transistors |
CN112054062B (zh) * | 2020-08-31 | 2024-04-30 | 中国科学院微电子研究所 | 一种soi mosfet器件及其制备方法 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5034788A (en) * | 1987-10-09 | 1991-07-23 | Marconi Electronic Devices Limited | Semiconductor device with reduced side wall parasitic device action |
US5128733A (en) * | 1991-05-17 | 1992-07-07 | United Technologies Corporation | Silicon mesa transistor structure |
US5841171A (en) * | 1996-05-08 | 1998-11-24 | Mitsubishi Denki Kabushiki Kaisha | SOI Semiconductor devices |
CN1409400A (zh) * | 2001-09-07 | 2003-04-09 | 精工电子有限公司 | 互补金属氧化物半导体器件 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0722625A (ja) * | 1993-07-06 | 1995-01-24 | Nippondenso Co Ltd | 半導体装置 |
JPH08162524A (ja) * | 1994-11-30 | 1996-06-21 | Fujitsu Ltd | 半導体装置及びその製造方法 |
JP3302187B2 (ja) * | 1994-08-18 | 2002-07-15 | キヤノン株式会社 | 薄膜トランジスタ、これを用いた半導体装置、液晶表示装置 |
JP3485718B2 (ja) * | 1996-03-28 | 2004-01-13 | 旭化成マイクロシステム株式会社 | Soi構造の電界効果型トランジスタの製造方法 |
WO1997048136A1 (fr) * | 1996-06-14 | 1997-12-18 | Mitsubishi Denki Kabushiki Kaisha | Composant a semi-conducteurs ayant une structure silicium sur isolant et procede de fabrication de ce composant |
JP3478497B2 (ja) * | 2000-12-08 | 2003-12-15 | シャープ株式会社 | 半導体装置の製造方法 |
US6855988B2 (en) * | 2002-07-08 | 2005-02-15 | Viciciv Technology | Semiconductor switching devices |
US7112501B2 (en) * | 2003-10-20 | 2006-09-26 | Oki Electric Industry Co., Ltd. | Method of fabrication a silicon-on-insulator device with a channel stop |
JP5428121B2 (ja) * | 2005-09-30 | 2014-02-26 | セイコーエプソン株式会社 | 半導体装置の製造方法 |
JP2007123519A (ja) * | 2005-10-27 | 2007-05-17 | Seiko Epson Corp | 半導体装置の製造方法及び半導体装置 |
-
2007
- 2007-02-14 JP JP2007032907A patent/JP5360735B2/ja not_active Expired - Fee Related
- 2007-02-16 TW TW096105959A patent/TWI481028B/zh not_active IP Right Cessation
- 2007-02-16 US US11/707,709 patent/US7566934B2/en not_active Expired - Fee Related
- 2007-02-17 CN CN2007100923187A patent/CN101068031B/zh not_active Expired - Fee Related
- 2007-02-20 KR KR1020070017023A patent/KR101326393B1/ko active IP Right Grant
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5034788A (en) * | 1987-10-09 | 1991-07-23 | Marconi Electronic Devices Limited | Semiconductor device with reduced side wall parasitic device action |
US5128733A (en) * | 1991-05-17 | 1992-07-07 | United Technologies Corporation | Silicon mesa transistor structure |
US5841171A (en) * | 1996-05-08 | 1998-11-24 | Mitsubishi Denki Kabushiki Kaisha | SOI Semiconductor devices |
CN1409400A (zh) * | 2001-09-07 | 2003-04-09 | 精工电子有限公司 | 互补金属氧化物半导体器件 |
Also Published As
Publication number | Publication date |
---|---|
TW200746426A (en) | 2007-12-16 |
JP2007251146A (ja) | 2007-09-27 |
TWI481028B (zh) | 2015-04-11 |
KR101326393B1 (ko) | 2013-11-11 |
US20080012077A1 (en) | 2008-01-17 |
CN101068031A (zh) | 2007-11-07 |
US7566934B2 (en) | 2009-07-28 |
KR20070083207A (ko) | 2007-08-23 |
JP5360735B2 (ja) | 2013-12-04 |
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Legal Events
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C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20160317 Address after: Chiba County, Japan Patentee after: SEIKO INSTR INC Address before: Chiba, Chiba, Japan Patentee before: Seiko Instruments Inc. |
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CP01 | Change in the name or title of a patent holder | ||
CP01 | Change in the name or title of a patent holder |
Address after: Chiba County, Japan Patentee after: EPPs Lingke Co. Ltd. Address before: Chiba County, Japan Patentee before: SEIKO INSTR INC |
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CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20100908 Termination date: 20210217 |