CN101035682A - 打印头喷嘴形成 - Google Patents

打印头喷嘴形成 Download PDF

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Publication number
CN101035682A
CN101035682A CNA2005800337654A CN200580033765A CN101035682A CN 101035682 A CN101035682 A CN 101035682A CN A2005800337654 A CNA2005800337654 A CN A2005800337654A CN 200580033765 A CN200580033765 A CN 200580033765A CN 101035682 A CN101035682 A CN 101035682A
Authority
CN
China
Prior art keywords
layer
nozzle
recess
silicon
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CNA2005800337654A
Other languages
English (en)
Chinese (zh)
Inventor
陈振方
安德烈亚斯·拜布尔
保罗·A·霍伊辛顿
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujifilm Dimatix Inc
Original Assignee
Fujifilm Dimatix Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujifilm Dimatix Inc filed Critical Fujifilm Dimatix Inc
Priority to CN201510556516.9A priority Critical patent/CN105109207A/zh
Priority to CN201110436821.6A priority patent/CN102582262B/zh
Publication of CN101035682A publication Critical patent/CN101035682A/zh
Pending legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/162—Manufacturing of the nozzle plates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
CNA2005800337654A 2004-08-05 2005-08-04 打印头喷嘴形成 Pending CN101035682A (zh)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CN201510556516.9A CN105109207A (zh) 2004-08-05 2005-08-04 打印头喷嘴形成
CN201110436821.6A CN102582262B (zh) 2004-08-05 2005-08-04 打印头喷嘴形成

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/913,571 US7347532B2 (en) 2004-08-05 2004-08-05 Print head nozzle formation
US10/913,571 2004-08-05

Related Child Applications (2)

Application Number Title Priority Date Filing Date
CN201110436821.6A Division CN102582262B (zh) 2004-08-05 2005-08-04 打印头喷嘴形成
CN201510556516.9A Division CN105109207A (zh) 2004-08-05 2005-08-04 打印头喷嘴形成

Publications (1)

Publication Number Publication Date
CN101035682A true CN101035682A (zh) 2007-09-12

Family

ID=35159850

Family Applications (3)

Application Number Title Priority Date Filing Date
CNA2005800337654A Pending CN101035682A (zh) 2004-08-05 2005-08-04 打印头喷嘴形成
CN201110436821.6A Expired - Lifetime CN102582262B (zh) 2004-08-05 2005-08-04 打印头喷嘴形成
CN201510556516.9A Pending CN105109207A (zh) 2004-08-05 2005-08-04 打印头喷嘴形成

Family Applications After (2)

Application Number Title Priority Date Filing Date
CN201110436821.6A Expired - Lifetime CN102582262B (zh) 2004-08-05 2005-08-04 打印头喷嘴形成
CN201510556516.9A Pending CN105109207A (zh) 2004-08-05 2005-08-04 打印头喷嘴形成

Country Status (7)

Country Link
US (2) US7347532B2 (https=)
EP (1) EP1786628B1 (https=)
JP (2) JP4874246B2 (https=)
KR (1) KR101273436B1 (https=)
CN (3) CN101035682A (https=)
HK (1) HK1218278A1 (https=)
WO (1) WO2006017808A2 (https=)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103302987B (zh) * 2012-03-14 2015-10-28 富士胶片株式会社 制造喷嘴板的方法
CN106553453A (zh) * 2016-12-06 2017-04-05 苏州工业园区纳米产业技术研究院有限公司 热气泡式喷墨打印头及其制作方法
CN111572198A (zh) * 2019-02-18 2020-08-25 罗姆股份有限公司 喷嘴基片、喷墨打印头和喷嘴基片的制造方法
CN114179522A (zh) * 2017-02-23 2022-03-15 富士胶卷迪马蒂克斯股份有限公司 减少漏斗喷嘴的尺寸变化
CN114368222A (zh) * 2022-01-21 2022-04-19 武汉敏捷微电子有限公司 一种微流体器件及其制作方法

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US7799273B2 (en) 2004-05-06 2010-09-21 Smp Logic Systems Llc Manufacturing execution system for validation, quality and risk assessment and monitoring of pharmaceutical manufacturing processes
US7444197B2 (en) 2004-05-06 2008-10-28 Smp Logic Systems Llc Methods, systems, and software program for validation and monitoring of pharmaceutical manufacturing processes
US7347532B2 (en) * 2004-08-05 2008-03-25 Fujifilm Dimatix, Inc. Print head nozzle formation
TWI379771B (en) * 2005-07-01 2012-12-21 Fujifilm Dimatix Inc Non-wetting coating on a fluid ejector
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CN101541544B (zh) * 2006-12-01 2012-06-20 富士胶卷迪马蒂克斯股份有限公司 在流体喷射器上的非润湿涂层
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JP5725664B2 (ja) * 2012-03-14 2015-05-27 富士フイルム株式会社 ノズルプレートの製造方法
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WO2020066333A1 (ja) * 2018-09-27 2020-04-02 富士フイルム株式会社 インクタンク、インクジェット記録装置、及びインクジェット記録方法
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Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103302987B (zh) * 2012-03-14 2015-10-28 富士胶片株式会社 制造喷嘴板的方法
CN106553453A (zh) * 2016-12-06 2017-04-05 苏州工业园区纳米产业技术研究院有限公司 热气泡式喷墨打印头及其制作方法
CN114179522A (zh) * 2017-02-23 2022-03-15 富士胶卷迪马蒂克斯股份有限公司 减少漏斗喷嘴的尺寸变化
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CN114179522B (zh) * 2017-02-23 2023-10-17 富士胶卷迪马蒂克斯股份有限公司 制造喷嘴的方法
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