MX394948B - Método de fabricación de un cabezal de impresión de chorro de tinta. - Google Patents

Método de fabricación de un cabezal de impresión de chorro de tinta.

Info

Publication number
MX394948B
MX394948B MX2017012205A MX2017012205A MX394948B MX 394948 B MX394948 B MX 394948B MX 2017012205 A MX2017012205 A MX 2017012205A MX 2017012205 A MX2017012205 A MX 2017012205A MX 394948 B MX394948 B MX 394948B
Authority
MX
Mexico
Prior art keywords
silicon
ink
providing
wafer
layer
Prior art date
Application number
MX2017012205A
Other languages
English (en)
Other versions
MX2017012205A (es
Inventor
Anna Merialdo
Lucia Giovanola
Paolo Schina
Silvia Baldi
Original Assignee
Sicpa Holding Sa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sicpa Holding Sa filed Critical Sicpa Holding Sa
Publication of MX2017012205A publication Critical patent/MX2017012205A/es
Publication of MX394948B publication Critical patent/MX394948B/es

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/162—Manufacturing of the nozzle plates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/1433—Structure of nozzle plates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)

Abstract

La presente solicitud se refiere a un método de fabricación de un cabezal de impresión por chorro de tinta que comprende: proporcionar un sustrato de silicio (10) que incluye elementos de expulsión activos (11); proporcionar una capa de estructura hidráulica (20) para definir circuitos hidráulicos configurados para permitir un flujo guiado de tinta; proporcionar una placa de orificio de silicio (30) que tiene una pluralidad de boquillas (31) para la expulsión de la tinta; ensamblar el sustrato de silicio (10) con la capa de estructura hidráulica (20) y la placa de orificio de silicio (30); caracterizados porque la placa de orificio de silicio (30) comprende: proporcionar una oblea de silicio (40) que tiene una extensión plana delimitada por una primera superficie (41) y una segunda superficie (42) en lados opuestos de la oblea de silicio (40); realizar un paso de adelgazamiento en la segunda superficie (42) para eliminar de la segunda superficie (42) una porción central (43) que tiene una altura preestablecida (H), formándose la oblea de silicio (40), después del paso de adelgazamiento, por una porción base (44) que tiene una extensión plana y una porción periférica (45) que se extiende desde la porción base (44), transversalmente con respecto a la extensión plana de la porción base (44); y formar en la oblea de silicio (40) una pluralidad de orificios pasantes, definiendo cada uno una respectiva boquilla (31) para la expulsión de la tinta. El procedimiento de acuerdo con la presente invención se caracteriza porque la oblea de silicio (40) es una oblea de silicio sobre aislante, en la que la oblea de silicio sobre aislante comprende una capa de dispositivo de silicio (38) adyacente a la primera superficie (41), una capa de asa de silicio (37) adyacente a la segunda superficie (42) y una capa aislante (39) entre ellas.
MX2017012205A 2015-03-24 2016-03-10 Método de fabricación de un cabezal de impresión de chorro de tinta. MX394948B (es)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP15160524 2015-03-24
PCT/EP2016/055126 WO2016150715A1 (en) 2015-03-24 2016-03-10 Method of manufacturing an ink-jet printhead

Publications (2)

Publication Number Publication Date
MX2017012205A MX2017012205A (es) 2018-01-23
MX394948B true MX394948B (es) 2025-03-24

Family

ID=52814818

Family Applications (1)

Application Number Title Priority Date Filing Date
MX2017012205A MX394948B (es) 2015-03-24 2016-03-10 Método de fabricación de un cabezal de impresión de chorro de tinta.

Country Status (8)

Country Link
US (1) US10940690B2 (es)
EP (1) EP3274176B1 (es)
JP (1) JP6862630B2 (es)
CN (1) CN107405922B (es)
CA (1) CA2978137C (es)
MX (1) MX394948B (es)
MY (1) MY185998A (es)
WO (1) WO2016150715A1 (es)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110475670A (zh) * 2017-03-31 2019-11-19 柯尼卡美能达株式会社 喷墨记录装置
US10737359B2 (en) * 2018-04-09 2020-08-11 Lam Research Corporation Manufacture of an orifice plate for use in gas calibration

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6214192B1 (en) * 1998-12-10 2001-04-10 Eastman Kodak Company Fabricating ink jet nozzle plate
US6362512B1 (en) * 1998-12-23 2002-03-26 Xerox Corporation Microelectromechanical structures defined from silicon on insulator wafers
TW553837B (en) * 2002-09-23 2003-09-21 Nanodynamics Inc Piezoelectric inkjet head and formation method of vibration layer thereof
US7347532B2 (en) * 2004-08-05 2008-03-25 Fujifilm Dimatix, Inc. Print head nozzle formation
US7382002B2 (en) * 2004-12-09 2008-06-03 Litton Systems, Inc. Photo-detector and related instruments
KR100687570B1 (ko) * 2005-07-19 2007-02-27 삼성전기주식회사 잉크젯 헤드용 노즐 및 그 제조방법
KR101153562B1 (ko) * 2006-01-26 2012-06-11 삼성전기주식회사 압전 방식의 잉크젯 프린트헤드 및 그 제조방법
US8197029B2 (en) * 2008-12-30 2012-06-12 Fujifilm Corporation Forming nozzles
JP2010214894A (ja) * 2009-03-18 2010-09-30 Toshiba Tec Corp インクジェットヘッドおよびノズルプレート
US8562110B2 (en) * 2009-12-28 2013-10-22 Xerox Corporation Ink jet print head front face having a textured superoleophobic surface and methods for making the same
US8646875B2 (en) * 2010-03-31 2014-02-11 Xerox Corporation Independent adjustment of drop mass and velocity using stepped nozzles
WO2011154770A1 (en) 2010-06-07 2011-12-15 Telecom Italia S.P.A. Method of manufacturing an ink-jet printhead
KR102353349B1 (ko) * 2015-03-31 2022-01-19 삼성디스플레이 주식회사 마스크 제조 방법 및 이를 이용하여 제조된 증착용 마스크
US10068181B1 (en) * 2015-04-27 2018-09-04 Rigetti & Co, Inc. Microwave integrated quantum circuits with cap wafer and methods for making the same

Also Published As

Publication number Publication date
US20180236767A1 (en) 2018-08-23
US10940690B2 (en) 2021-03-09
JP2018513030A (ja) 2018-05-24
JP6862630B2 (ja) 2021-04-21
EP3274176A1 (en) 2018-01-31
CN107405922A (zh) 2017-11-28
CA2978137C (en) 2023-08-01
MY185998A (en) 2021-06-14
CA2978137A1 (en) 2016-09-29
WO2016150715A1 (en) 2016-09-29
EP3274176B1 (en) 2019-09-04
CN107405922B (zh) 2020-06-30
MX2017012205A (es) 2018-01-23

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