CN101034712B - 图像拾取装置和图像拾取系统 - Google Patents
图像拾取装置和图像拾取系统 Download PDFInfo
- Publication number
- CN101034712B CN101034712B CN2007100856958A CN200710085695A CN101034712B CN 101034712 B CN101034712 B CN 101034712B CN 2007100856958 A CN2007100856958 A CN 2007100856958A CN 200710085695 A CN200710085695 A CN 200710085695A CN 101034712 B CN101034712 B CN 101034712B
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- China
- Prior art keywords
- film
- passivation layer
- image pickup
- refractive index
- insulating layer
- Prior art date
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/011—Manufacture or treatment of image sensors covered by group H10F39/12
- H10F39/026—Wafer-level processing
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/80—Constructional details of image sensors
- H10F39/805—Coatings
- H10F39/8053—Colour filters
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/80—Constructional details of image sensors
- H10F39/806—Optical elements or arrangements associated with the image sensors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/10—Integrated devices
- H10F39/12—Image sensors
- H10F39/18—Complementary metal-oxide-semiconductor [CMOS] image sensors; Photodiode array image sensors
- H10F39/182—Colour image sensors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/80—Constructional details of image sensors
- H10F39/803—Pixels having integrated switching, control, storage or amplification elements
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/80—Constructional details of image sensors
- H10F39/805—Coatings
- H10F39/8057—Optical shielding
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/80—Constructional details of image sensors
- H10F39/806—Optical elements or arrangements associated with the image sensors
- H10F39/8063—Microlenses
Landscapes
- Solid State Image Pick-Up Elements (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006059589 | 2006-03-06 | ||
| JP2006059589A JP2007242697A (ja) | 2006-03-06 | 2006-03-06 | 撮像装置および撮像システム |
| JP2006-059589 | 2006-03-06 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010105207791A Division CN101976674B (zh) | 2006-03-06 | 2007-03-06 | 图像拾取装置和图像拾取系统 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101034712A CN101034712A (zh) | 2007-09-12 |
| CN101034712B true CN101034712B (zh) | 2010-12-08 |
Family
ID=38470752
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2007100856958A Expired - Fee Related CN101034712B (zh) | 2006-03-06 | 2007-03-06 | 图像拾取装置和图像拾取系统 |
| CN2010105207791A Active CN101976674B (zh) | 2006-03-06 | 2007-03-06 | 图像拾取装置和图像拾取系统 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010105207791A Active CN101976674B (zh) | 2006-03-06 | 2007-03-06 | 图像拾取装置和图像拾取系统 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US20070205439A1 (enExample) |
| JP (1) | JP2007242697A (enExample) |
| CN (2) | CN101034712B (enExample) |
Families Citing this family (39)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4459064B2 (ja) * | 2005-01-14 | 2010-04-28 | キヤノン株式会社 | 固体撮像装置、その制御方法及びカメラ |
| JP4416668B2 (ja) * | 2005-01-14 | 2010-02-17 | キヤノン株式会社 | 固体撮像装置、その制御方法及びカメラ |
| JP4459099B2 (ja) * | 2005-03-18 | 2010-04-28 | キヤノン株式会社 | 固体撮像装置及びカメラ |
| JP4677258B2 (ja) | 2005-03-18 | 2011-04-27 | キヤノン株式会社 | 固体撮像装置及びカメラ |
| JP4469781B2 (ja) * | 2005-07-20 | 2010-05-26 | パナソニック株式会社 | 固体撮像装置及びその製造方法 |
| JP4315457B2 (ja) * | 2006-08-31 | 2009-08-19 | キヤノン株式会社 | 光電変換装置及び撮像システム |
| EP1930950B1 (en) * | 2006-12-08 | 2012-11-07 | Sony Corporation | Solid-state image pickup device, method for manufacturing solid-state image pickup device, and camera |
| JP4110192B1 (ja) * | 2007-02-23 | 2008-07-02 | キヤノン株式会社 | 光電変換装置及び光電変換装置を用いた撮像システム |
| JP5159120B2 (ja) * | 2007-02-23 | 2013-03-06 | キヤノン株式会社 | 光電変換装置およびその製造方法 |
| JP2009141631A (ja) * | 2007-12-05 | 2009-06-25 | Canon Inc | 光電変換装置及び撮像装置 |
| JP5268389B2 (ja) | 2008-02-28 | 2013-08-21 | キヤノン株式会社 | 固体撮像装置、その駆動方法及び撮像システム |
| JP5178266B2 (ja) * | 2008-03-19 | 2013-04-10 | キヤノン株式会社 | 固体撮像装置 |
| JP5094498B2 (ja) * | 2008-03-27 | 2012-12-12 | キヤノン株式会社 | 固体撮像装置及び撮像システム |
| US20090302409A1 (en) * | 2008-06-04 | 2009-12-10 | Omnivision Technologies, Inc. | Image sensor with multiple thickness anti-relfective coating layers |
| JP5274166B2 (ja) * | 2008-09-10 | 2013-08-28 | キヤノン株式会社 | 光電変換装置及び撮像システム |
| KR20100080150A (ko) * | 2008-12-31 | 2010-07-08 | 주식회사 동부하이텍 | 이미지 센서 및 그 제조방법 |
| JP2010161236A (ja) | 2009-01-08 | 2010-07-22 | Canon Inc | 光電変換装置の製造方法 |
| JP2010177391A (ja) * | 2009-01-29 | 2010-08-12 | Sony Corp | 固体撮像装置、電子機器、固体撮像装置の製造方法 |
| JP2010205843A (ja) * | 2009-03-02 | 2010-09-16 | Sharp Corp | 固体撮像素子およびその製造方法、電子情報機器 |
| TWI425643B (zh) * | 2009-03-31 | 2014-02-01 | Sony Corp | 固態攝像裝置及其製造方法、攝像裝置和抗反射結構之製造方法 |
| JP5446387B2 (ja) * | 2009-03-31 | 2014-03-19 | ソニー株式会社 | 反射防止構造体の製造方法および固体撮像装置の製造方法 |
| JP5558916B2 (ja) * | 2009-06-26 | 2014-07-23 | キヤノン株式会社 | 光電変換装置の製造方法 |
| JP5563257B2 (ja) * | 2009-08-28 | 2014-07-30 | キヤノン株式会社 | 光電変換装置、撮像システム、及び光電変換装置の製造方法 |
| JP2011100900A (ja) * | 2009-11-06 | 2011-05-19 | Sony Corp | 固体撮像装置及びその製造方法と設計方法並びに電子機器 |
| JP5704811B2 (ja) * | 2009-12-11 | 2015-04-22 | キヤノン株式会社 | 固体撮像装置の製造方法 |
| JP2011129723A (ja) * | 2009-12-17 | 2011-06-30 | Sharp Corp | 固体撮像素子の製造方法 |
| CN102130137A (zh) * | 2010-01-18 | 2011-07-20 | 英属开曼群岛商恒景科技股份有限公司 | 图像传感器 |
| JP5864990B2 (ja) | 2011-10-03 | 2016-02-17 | キヤノン株式会社 | 固体撮像装置およびカメラ |
| JP6412328B2 (ja) | 2014-04-01 | 2018-10-24 | キヤノン株式会社 | 固体撮像装置およびカメラ |
| CN105268110B (zh) * | 2014-06-19 | 2018-03-13 | 昆山科技大学 | 黄疸光疗装置 |
| JP6109125B2 (ja) | 2014-08-20 | 2017-04-05 | キヤノン株式会社 | 半導体装置、固体撮像装置、および撮像システム |
| US9979916B2 (en) | 2014-11-21 | 2018-05-22 | Canon Kabushiki Kaisha | Imaging apparatus and imaging system |
| JP7023109B2 (ja) * | 2015-06-05 | 2022-02-21 | ソニーグループ株式会社 | 固体撮像装置 |
| JP2017045786A (ja) * | 2015-08-25 | 2017-03-02 | ルネサスエレクトロニクス株式会社 | 撮像装置およびその製造方法 |
| JP6738200B2 (ja) | 2016-05-26 | 2020-08-12 | キヤノン株式会社 | 撮像装置 |
| US10319765B2 (en) | 2016-07-01 | 2019-06-11 | Canon Kabushiki Kaisha | Imaging device having an effective pixel region, an optical black region and a dummy region each with pixels including a photoelectric converter |
| JP6650898B2 (ja) * | 2017-02-28 | 2020-02-19 | キヤノン株式会社 | 光電変換装置、電子機器および輸送機器 |
| US12324254B2 (en) * | 2021-03-04 | 2025-06-03 | Taiwan Semiconductor Manufacturing Company Limited | Back side illuminated image sensor device with select dielectric layers on the backside and methods of forming the same |
| US20230411540A1 (en) * | 2022-06-16 | 2023-12-21 | Taiwan Semiconductor Manufacturing Company Limited | Semiconductor device and method of making |
Family Cites Families (46)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06292206A (ja) * | 1993-04-05 | 1994-10-18 | Sony Corp | 固体撮像素子式カラーカメラ |
| US5899743A (en) * | 1995-03-13 | 1999-05-04 | Komatsu Electronic Metals Co., Ltd. | Method for fabricating semiconductor wafers |
| JP3680512B2 (ja) * | 1997-01-09 | 2005-08-10 | ソニー株式会社 | 固体撮像素子 |
| JPH1174499A (ja) * | 1997-07-04 | 1999-03-16 | Toshiba Corp | 固体撮像装置及びその製造方法並びにその固体撮像装置を用いたシステム |
| JP3620237B2 (ja) * | 1997-09-29 | 2005-02-16 | ソニー株式会社 | 固体撮像素子 |
| TW421962B (en) * | 1997-09-29 | 2001-02-11 | Canon Kk | Image sensing device using mos type image sensing elements |
| JPH11261046A (ja) * | 1998-03-12 | 1999-09-24 | Canon Inc | 固体撮像装置 |
| JP3571909B2 (ja) * | 1998-03-19 | 2004-09-29 | キヤノン株式会社 | 固体撮像装置及びその製造方法 |
| KR20000048110A (ko) * | 1998-12-15 | 2000-07-25 | 카네코 히사시 | 고체촬상장치 및 그 제조방법 |
| JP4604296B2 (ja) * | 1999-02-09 | 2011-01-05 | ソニー株式会社 | 固体撮像装置及びその製造方法 |
| JP3452828B2 (ja) * | 1999-03-01 | 2003-10-06 | 松下電器産業株式会社 | 固体撮像装置およびその製造方法 |
| US6221687B1 (en) * | 1999-12-23 | 2001-04-24 | Tower Semiconductor Ltd. | Color image sensor with embedded microlens array |
| KR100390822B1 (ko) * | 1999-12-28 | 2003-07-10 | 주식회사 하이닉스반도체 | 이미지센서에서의 암전류 감소 방법 |
| JP3824469B2 (ja) * | 2000-04-03 | 2006-09-20 | シャープ株式会社 | 固体撮像装置、及びその製造方法 |
| JP2002083949A (ja) * | 2000-09-07 | 2002-03-22 | Nec Corp | Cmosイメージセンサ及びその製造方法 |
| JP2002223393A (ja) * | 2000-11-27 | 2002-08-09 | Sanyo Electric Co Ltd | 電荷転送素子 |
| JP2002209226A (ja) * | 2000-12-28 | 2002-07-26 | Canon Inc | 撮像装置 |
| JP5181317B2 (ja) * | 2001-08-31 | 2013-04-10 | Nltテクノロジー株式会社 | 反射型液晶表示装置およびその製造方法 |
| US7429764B2 (en) * | 2002-02-27 | 2008-09-30 | Canon Kabushiki Kaisha | Signal processing device and image pickup apparatus using the same |
| JP3728260B2 (ja) * | 2002-02-27 | 2005-12-21 | キヤノン株式会社 | 光電変換装置及び撮像装置 |
| JP2003264309A (ja) * | 2002-03-08 | 2003-09-19 | Toshiba Corp | 光半導体装置および光半導体装置の製造方法 |
| JP2004079608A (ja) * | 2002-08-12 | 2004-03-11 | Sanyo Electric Co Ltd | 固体撮像装置および固体撮像装置の製造方法 |
| US6861686B2 (en) * | 2003-01-16 | 2005-03-01 | Samsung Electronics Co., Ltd. | Structure of a CMOS image sensor and method for fabricating the same |
| JP4514188B2 (ja) * | 2003-11-10 | 2010-07-28 | キヤノン株式会社 | 光電変換装置及び撮像装置 |
| US20050110050A1 (en) * | 2003-11-20 | 2005-05-26 | Tom Walschap | Planarization of an image detector device for improved spectral response |
| JP4508619B2 (ja) * | 2003-12-03 | 2010-07-21 | キヤノン株式会社 | 固体撮像装置の製造方法 |
| JP3793202B2 (ja) * | 2004-02-02 | 2006-07-05 | キヤノン株式会社 | 固体撮像装置 |
| JP3890333B2 (ja) * | 2004-02-06 | 2007-03-07 | キヤノン株式会社 | 固体撮像装置 |
| JP4067054B2 (ja) * | 2004-02-13 | 2008-03-26 | キヤノン株式会社 | 固体撮像装置および撮像システム |
| KR100688497B1 (ko) * | 2004-06-28 | 2007-03-02 | 삼성전자주식회사 | 이미지 센서 및 그 제조방법 |
| JP2006013522A (ja) * | 2004-06-28 | 2006-01-12 | Samsung Electronics Co Ltd | イメージセンサー及びその製造方法 |
| US7294818B2 (en) * | 2004-08-24 | 2007-11-13 | Canon Kabushiki Kaisha | Solid state image pickup device and image pickup system comprising it |
| JP5089017B2 (ja) * | 2004-09-01 | 2012-12-05 | キヤノン株式会社 | 固体撮像装置及び固体撮像システム |
| JP4971586B2 (ja) * | 2004-09-01 | 2012-07-11 | キヤノン株式会社 | 固体撮像装置 |
| JP4916101B2 (ja) * | 2004-09-01 | 2012-04-11 | キヤノン株式会社 | 光電変換装置、固体撮像装置及び固体撮像システム |
| JP4646577B2 (ja) * | 2004-09-01 | 2011-03-09 | キヤノン株式会社 | 光電変換装置、その製造方法及び撮像システム |
| JP2006073736A (ja) * | 2004-09-01 | 2006-03-16 | Canon Inc | 光電変換装置、固体撮像装置及び固体撮像システム |
| JP2006197392A (ja) * | 2005-01-14 | 2006-07-27 | Canon Inc | 固体撮像装置、カメラ、及び固体撮像装置の駆動方法 |
| JP4459064B2 (ja) * | 2005-01-14 | 2010-04-28 | キヤノン株式会社 | 固体撮像装置、その制御方法及びカメラ |
| JP4416668B2 (ja) * | 2005-01-14 | 2010-02-17 | キヤノン株式会社 | 固体撮像装置、その制御方法及びカメラ |
| JP4677258B2 (ja) * | 2005-03-18 | 2011-04-27 | キヤノン株式会社 | 固体撮像装置及びカメラ |
| JP4794877B2 (ja) * | 2005-03-18 | 2011-10-19 | キヤノン株式会社 | 固体撮像装置及びカメラ |
| JP4459099B2 (ja) * | 2005-03-18 | 2010-04-28 | キヤノン株式会社 | 固体撮像装置及びカメラ |
| JP4459098B2 (ja) * | 2005-03-18 | 2010-04-28 | キヤノン株式会社 | 固体撮像装置及びカメラ |
| JP2006261597A (ja) * | 2005-03-18 | 2006-09-28 | Canon Inc | 固体撮像装置、その製造方法及びカメラ |
| US20070045642A1 (en) * | 2005-08-25 | 2007-03-01 | Micron Technology, Inc. | Solid-state imager and formation method using anti-reflective film for optical crosstalk reduction |
-
2006
- 2006-03-06 JP JP2006059589A patent/JP2007242697A/ja active Pending
-
2007
- 2007-03-01 US US11/680,742 patent/US20070205439A1/en not_active Abandoned
- 2007-03-06 CN CN2007100856958A patent/CN101034712B/zh not_active Expired - Fee Related
- 2007-03-06 CN CN2010105207791A patent/CN101976674B/zh active Active
Non-Patent Citations (1)
| Title |
|---|
| JP平11-103037A 1999.04.13 |
Also Published As
| Publication number | Publication date |
|---|---|
| CN101976674B (zh) | 2012-08-22 |
| CN101034712A (zh) | 2007-09-12 |
| US20070205439A1 (en) | 2007-09-06 |
| JP2007242697A (ja) | 2007-09-20 |
| CN101976674A (zh) | 2011-02-16 |
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