CN100354727C - 腐蚀增强层 - Google Patents

腐蚀增强层 Download PDF

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Publication number
CN100354727C
CN100354727C CNB008075468A CN00807546A CN100354727C CN 100354727 C CN100354727 C CN 100354727C CN B008075468 A CNB008075468 A CN B008075468A CN 00807546 A CN00807546 A CN 00807546A CN 100354727 C CN100354727 C CN 100354727C
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CN
China
Prior art keywords
layer
metal oxide
refractive index
conductive layer
corrodible
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CNB008075468A
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English (en)
Chinese (zh)
Other versions
CN1350658A (zh
Inventor
P·V·纳加拉卡
J·T·理查德
L·S·希思
C·A·基乌里
R·森
J·拉姆
D·W·麦卡锡
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
3M Innovative Properties Co
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3M Innovative Properties Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 3M Innovative Properties Co filed Critical 3M Innovative Properties Co
Publication of CN1350658A publication Critical patent/CN1350658A/zh
Application granted granted Critical
Publication of CN100354727C publication Critical patent/CN100354727C/zh
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1343—Electrodes
    • G02F1/13439—Electrodes characterised by their electrical, optical, physical properties; materials therefor; method of making
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1345—Conductors connecting electrodes to cell terminals
    • G02F1/13458—Terminal pads
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/0042—Photosensitive materials with inorganic or organometallic light-sensitive compounds not otherwise provided for, e.g. inorganic resists
    • G03F7/0044—Photosensitive materials with inorganic or organometallic light-sensitive compounds not otherwise provided for, e.g. inorganic resists involving an interaction between the metallic and non-metallic component, e.g. photodope systems
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2002—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image
    • G03F7/2014—Contact or film exposure of light sensitive plates such as lithographic plates or circuit boards, e.g. in a vacuum frame
    • G03F7/2016—Contact mask being integral part of the photosensitive element and subject to destructive removal during post-exposure processing
    • G03F7/202—Masking pattern being obtained by thermal means, e.g. laser ablation
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/36—Imagewise removal not covered by groups G03F7/30 - G03F7/34, e.g. using gas streams, using plasma
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41M—PRINTING, DUPLICATING, MARKING, OR COPYING PROCESSES; COLOUR PRINTING
    • B41M5/00—Duplicating or marking methods; Sheet materials for use therein
    • B41M5/24—Ablative recording, e.g. by burning marks; Spark recording
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/31678—Of metal
    • Y10T428/31692—Next to addition polymer from unsaturated monomers

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Mathematical Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Architecture (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Liquid Crystal (AREA)
  • Electrochromic Elements, Electrophoresis, Or Variable Reflection Or Absorption Elements (AREA)
  • Laminated Bodies (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
CNB008075468A 1999-05-14 2000-05-12 腐蚀增强层 Expired - Fee Related CN100354727C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US13431899P 1999-05-14 1999-05-14
US60/134,318 1999-05-14

Publications (2)

Publication Number Publication Date
CN1350658A CN1350658A (zh) 2002-05-22
CN100354727C true CN100354727C (zh) 2007-12-12

Family

ID=22462810

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB008075468A Expired - Fee Related CN100354727C (zh) 1999-05-14 2000-05-12 腐蚀增强层

Country Status (7)

Country Link
US (2) US6485839B1 (enExample)
EP (1) EP1183570A1 (enExample)
JP (1) JP2002544568A (enExample)
KR (1) KR100755810B1 (enExample)
CN (1) CN100354727C (enExample)
AU (1) AU4712400A (enExample)
WO (1) WO2000070405A1 (enExample)

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US6828067B2 (en) * 2001-04-13 2004-12-07 Precision Coatings, Inc. Ablatable direct write imaging medium
US20060138104A1 (en) * 2001-05-25 2006-06-29 Devore Paul W Fuel cell and liquid container sealant removal system
KR100503603B1 (ko) 2003-03-11 2005-07-26 엘지전자 주식회사 플라즈마 디스플레이 패널의 구동방법
KR100509763B1 (ko) * 2003-03-11 2005-08-25 엘지전자 주식회사 플라즈마 디스플레이 패널의 전면필터
US20040188150A1 (en) * 2003-03-25 2004-09-30 3M Innovative Properties Company High transparency touch screen
JP2005011793A (ja) * 2003-05-29 2005-01-13 Sony Corp 積層構造の製造方法および積層構造、表示素子ならびに表示装置
US20050067740A1 (en) * 2003-09-29 2005-03-31 Frederick Haubensak Wafer defect reduction by short pulse laser ablation
US8264466B2 (en) * 2006-03-31 2012-09-11 3M Innovative Properties Company Touch screen having reduced visibility transparent conductor pattern
KR101172112B1 (ko) * 2008-11-14 2012-08-10 엘지이노텍 주식회사 터치 스크린 및 그 제조방법
KR101172113B1 (ko) * 2008-11-14 2012-08-10 엘지이노텍 주식회사 터치스크린 및 그 제조방법
EP2480342B1 (en) * 2009-09-22 2021-02-24 First Solar, Inc System and method for tracking and removing coating from an edge of a substrate
CN102648446B (zh) * 2009-10-23 2016-01-20 万佳雷射有限公司 电容式触摸屏
TWI474377B (zh) * 2010-03-25 2015-02-21 永恆科技有限公司 A method of patterning a substrate and a method of manufacturing a capacitive touch panel
CN102236484B (zh) * 2010-04-30 2015-03-11 永恒科技有限公司 图案化衬底的方法及制造电容式触控面板的方法
US8482713B2 (en) 2011-02-04 2013-07-09 Apple Inc. Laser processing of display components for electronic devices
US9425571B2 (en) * 2012-01-06 2016-08-23 Johnson & Johnson Vision Care, Inc. Methods and apparatus to form electrical interconnects on ophthalmic devices
US8988636B2 (en) 2012-09-20 2015-03-24 Apple Inc. Methods for trimming polarizers in displays
US9703139B2 (en) 2012-09-20 2017-07-11 Apple Inc. Methods for trimming polarizers in displays
US9753317B2 (en) 2012-12-21 2017-09-05 Apple Inc. Methods for trimming polarizers in displays using edge protection structures
JP2018093180A (ja) * 2016-11-03 2018-06-14 アイメック・ヴェーゼットウェーＩｍｅｃ Ｖｚｗ アモルファス半導体層をパターン化する方法

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US5354633A (en) * 1993-09-22 1994-10-11 Presstek, Inc. Laser imageable photomask constructions
US5528402A (en) * 1994-02-07 1996-06-18 Parker; William P. Addressable electrohologram employing electro-optic layer and patterned conductor between two electrodes
JPH10100303A (ja) * 1996-06-07 1998-04-21 Nippon Sheet Glass Co Ltd 透明導電膜付き基板およびそれを用いた表示素子
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Also Published As

Publication number Publication date
US20020195435A1 (en) 2002-12-26
WO2000070405A9 (en) 2004-10-14
KR100755810B1 (ko) 2007-09-07
JP2002544568A (ja) 2002-12-24
EP1183570A1 (en) 2002-03-06
WO2000070405A1 (en) 2000-11-23
US6485839B1 (en) 2002-11-26
KR20020026163A (ko) 2002-04-06
CN1350658A (zh) 2002-05-22
US6689544B2 (en) 2004-02-10
AU4712400A (en) 2000-12-05

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