CH621891A5 - - Google Patents
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- Publication number
- CH621891A5 CH621891A5 CH725377A CH725377A CH621891A5 CH 621891 A5 CH621891 A5 CH 621891A5 CH 725377 A CH725377 A CH 725377A CH 725377 A CH725377 A CH 725377A CH 621891 A5 CH621891 A5 CH 621891A5
- Authority
- CH
- Switzerland
- Prior art keywords
- region
- gate electrode
- transistor
- conductivity type
- semiconductor
- Prior art date
Links
- 239000004065 semiconductor Substances 0.000 claims description 45
- 230000005669 field effect Effects 0.000 claims description 17
- 239000000758 substrate Substances 0.000 claims description 17
- 239000000463 material Substances 0.000 claims description 9
- 238000004519 manufacturing process Methods 0.000 claims description 7
- 229910052782 aluminium Inorganic materials 0.000 claims description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 4
- 239000002019 doping agent Substances 0.000 claims description 4
- 239000004020 conductor Substances 0.000 claims description 3
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 3
- 239000010410 layer Substances 0.000 description 62
- 238000009792 diffusion process Methods 0.000 description 11
- 238000005468 ion implantation Methods 0.000 description 9
- 229910052710 silicon Inorganic materials 0.000 description 9
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 7
- 230000000873 masking effect Effects 0.000 description 7
- 239000010703 silicon Substances 0.000 description 7
- 230000003647 oxidation Effects 0.000 description 6
- 238000007254 oxidation reaction Methods 0.000 description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 229910052814 silicon oxide Inorganic materials 0.000 description 5
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 4
- 229910052581 Si3N4 Inorganic materials 0.000 description 4
- 230000001419 dependent effect Effects 0.000 description 4
- 230000002349 favourable effect Effects 0.000 description 4
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 229920002120 photoresistant polymer Polymers 0.000 description 3
- 229910052796 boron Inorganic materials 0.000 description 2
- 239000006227 byproduct Substances 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000407 epitaxy Methods 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000009421 internal insulation Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 230000000171 quenching effect Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 230000010076 replication Effects 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
- H10D30/64—Double-diffused metal-oxide semiconductor [DMOS] FETs
- H10D30/65—Lateral DMOS [LDMOS] FETs
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03D—DEMODULATION OR TRANSFERENCE OF MODULATION FROM ONE CARRIER TO ANOTHER
- H03D7/00—Transference of modulation from one carrier to another, e.g. frequency-changing
- H03D7/12—Transference of modulation from one carrier to another, e.g. frequency-changing by means of semiconductor devices having more than two electrodes
- H03D7/125—Transference of modulation from one carrier to another, e.g. frequency-changing by means of semiconductor devices having more than two electrodes with field effect transistors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
- H10D30/64—Double-diffused metal-oxide semiconductor [DMOS] FETs
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D44/00—Charge transfer devices
- H10D44/40—Charge-coupled devices [CCD]
- H10D44/45—Charge-coupled devices [CCD] having field effect produced by insulated gate electrodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D64/00—Electrodes of devices having potential barriers
- H10D64/60—Electrodes characterised by their materials
- H10D64/605—Source, drain, or gate electrodes for FETs comprising highly resistive materials
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
- Junction Field-Effect Transistors (AREA)
- Networks Using Active Elements (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL7606483A NL7606483A (nl) | 1976-06-16 | 1976-06-16 | Inrichting voor het mengen van signalen. |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CH621891A5 true CH621891A5 (is") | 1981-02-27 |
Family
ID=19826375
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CH725377A CH621891A5 (is") | 1976-06-16 | 1977-06-13 |
Country Status (12)
| Country | Link |
|---|---|
| US (1) | US4143387A (is") |
| JP (1) | JPS52154379A (is") |
| AU (1) | AU510665B2 (is") |
| BE (1) | BE855685A (is") |
| CA (1) | CA1107404A (is") |
| CH (1) | CH621891A5 (is") |
| DE (1) | DE2725115A1 (is") |
| FR (1) | FR2355378A1 (is") |
| GB (1) | GB1580847A (is") |
| IT (1) | IT1083818B (is") |
| NL (1) | NL7606483A (is") |
| SE (1) | SE7706828L (is") |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4399417A (en) * | 1980-06-06 | 1983-08-16 | Bell Telephone Laboratories, Incorporated | Integrated CRC filter circuit |
| US4300150A (en) * | 1980-06-16 | 1981-11-10 | North American Philips Corporation | Lateral double-diffused MOS transistor device |
| JPS5955071A (ja) * | 1982-09-24 | 1984-03-29 | Hitachi Micro Comput Eng Ltd | 不揮発性半導体装置 |
| US4789882A (en) * | 1983-03-21 | 1988-12-06 | International Rectifier Corporation | High power MOSFET with direct connection from connection pads to underlying silicon |
| US4847517A (en) * | 1988-02-16 | 1989-07-11 | Ltv Aerospace & Defense Co. | Microwave tube modulator |
| FI953433A7 (fi) * | 1995-07-14 | 1997-01-15 | Nokia Mobile Phones Ltd | Kaksiulotteista hilarakennetta käyttävä kanavatransistori ja sen käyttäminen signaalin prosessointiin |
| US6051856A (en) * | 1997-09-30 | 2000-04-18 | Samsung Electronics Co., Ltd. | Voltage-controlled resistor utilizing bootstrap gate FET |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL236158A (is") * | 1958-02-17 | |||
| GB1153428A (en) * | 1965-06-18 | 1969-05-29 | Philips Nv | Improvements in Semiconductor Devices. |
| FR1572934A (is") * | 1967-10-09 | 1969-06-27 | ||
| US3714522A (en) * | 1968-11-14 | 1973-01-30 | Kogyo Gijutsuin Agency Of Ind | Semiconductor device having surface electric-field effect |
| JPS4831516B1 (is") * | 1969-10-17 | 1973-09-29 | ||
| JPS4936515B1 (is") * | 1970-06-10 | 1974-10-01 | ||
| US3700976A (en) * | 1970-11-02 | 1972-10-24 | Hughes Aircraft Co | Insulated gate field effect transistor adapted for microwave applications |
| US3728695A (en) * | 1971-10-06 | 1973-04-17 | Intel Corp | Random-access floating gate mos memory array |
| US3999210A (en) * | 1972-08-28 | 1976-12-21 | Sony Corporation | FET having a linear impedance characteristic over a wide range of frequency |
| JPS563675B2 (is") * | 1973-08-11 | 1981-01-26 | ||
| US4001860A (en) * | 1973-11-12 | 1977-01-04 | Signetics Corporation | Double diffused metal oxide semiconductor structure with isolated source and drain and method |
| JPS584851B2 (ja) * | 1975-10-27 | 1983-01-28 | ソニー株式会社 | シユウハスウヘンカンキ |
-
1976
- 1976-06-16 NL NL7606483A patent/NL7606483A/xx not_active Application Discontinuation
-
1977
- 1977-06-03 DE DE19772725115 patent/DE2725115A1/de not_active Withdrawn
- 1977-06-07 CA CA280,003A patent/CA1107404A/en not_active Expired
- 1977-06-08 US US05/804,576 patent/US4143387A/en not_active Expired - Lifetime
- 1977-06-13 GB GB24519/77A patent/GB1580847A/en not_active Expired
- 1977-06-13 SE SE7706828A patent/SE7706828L/xx unknown
- 1977-06-13 CH CH725377A patent/CH621891A5/de not_active IP Right Cessation
- 1977-06-13 IT IT24617/77A patent/IT1083818B/it active
- 1977-06-14 AU AU26077/77A patent/AU510665B2/en not_active Expired
- 1977-06-14 BE BE178445A patent/BE855685A/xx unknown
- 1977-06-15 FR FR7718344A patent/FR2355378A1/fr not_active Withdrawn
- 1977-06-16 JP JP7057677A patent/JPS52154379A/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| GB1580847A (en) | 1980-12-03 |
| DE2725115A1 (de) | 1977-12-29 |
| FR2355378A1 (fr) | 1978-01-13 |
| CA1107404A (en) | 1981-08-18 |
| IT1083818B (it) | 1985-05-25 |
| NL7606483A (nl) | 1977-12-20 |
| BE855685A (fr) | 1977-12-14 |
| AU2607777A (en) | 1978-12-21 |
| JPS52154379A (en) | 1977-12-22 |
| SE7706828L (sv) | 1977-12-17 |
| AU510665B2 (en) | 1980-07-10 |
| US4143387A (en) | 1979-03-06 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PL | Patent ceased | ||
| PL | Patent ceased |