CA2921212C - Laser processing method and laser processing apparatus - Google Patents
Laser processing method and laser processing apparatus Download PDFInfo
- Publication number
- CA2921212C CA2921212C CA2921212A CA2921212A CA2921212C CA 2921212 C CA2921212 C CA 2921212C CA 2921212 A CA2921212 A CA 2921212A CA 2921212 A CA2921212 A CA 2921212A CA 2921212 C CA2921212 C CA 2921212C
- Authority
- CA
- Canada
- Prior art keywords
- laser
- short
- laser processing
- metal layer
- pulse
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000012545 processing Methods 0.000 title claims abstract description 439
- 238000003672 processing method Methods 0.000 title claims abstract description 29
- 229910052751 metal Inorganic materials 0.000 claims abstract description 144
- 239000002184 metal Substances 0.000 claims abstract description 144
- 238000000034 method Methods 0.000 claims abstract description 22
- 230000008569 process Effects 0.000 claims abstract description 15
- 230000007246 mechanism Effects 0.000 claims description 170
- 239000000835 fiber Substances 0.000 claims description 168
- 230000003287 optical effect Effects 0.000 claims description 63
- 230000005855 radiation Effects 0.000 claims description 45
- 239000000463 material Substances 0.000 claims description 11
- 239000003779 heat-resistant material Substances 0.000 claims description 4
- 230000001678 irradiating effect Effects 0.000 abstract description 7
- 239000010410 layer Substances 0.000 description 273
- 239000007789 gas Substances 0.000 description 17
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 9
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 8
- 238000002679 ablation Methods 0.000 description 7
- 239000012720 thermal barrier coating Substances 0.000 description 7
- 229910000831 Steel Inorganic materials 0.000 description 6
- 230000005540 biological transmission Effects 0.000 description 6
- 238000001816 cooling Methods 0.000 description 6
- 239000010959 steel Substances 0.000 description 6
- 238000003754 machining Methods 0.000 description 5
- 230000002093 peripheral effect Effects 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 4
- QDOXWKRWXJOMAK-UHFFFAOYSA-N dichromium trioxide Chemical compound O=[Cr]O[Cr]=O QDOXWKRWXJOMAK-UHFFFAOYSA-N 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 238000007751 thermal spraying Methods 0.000 description 4
- 230000008859 change Effects 0.000 description 3
- 238000010030 laminating Methods 0.000 description 3
- 239000013307 optical fiber Substances 0.000 description 3
- 238000007254 oxidation reaction Methods 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 229910000684 Cobalt-chrome Inorganic materials 0.000 description 2
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 2
- 239000012790 adhesive layer Substances 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- UFGZSIPAQKLCGR-UHFFFAOYSA-N chromium carbide Chemical compound [Cr]#C[Cr]C#[Cr] UFGZSIPAQKLCGR-UHFFFAOYSA-N 0.000 description 2
- 239000010952 cobalt-chrome Substances 0.000 description 2
- 229910001873 dinitrogen Inorganic materials 0.000 description 2
- 229910001882 dioxygen Inorganic materials 0.000 description 2
- 230000010355 oscillation Effects 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 230000035515 penetration Effects 0.000 description 2
- 238000004904 shortening Methods 0.000 description 2
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 2
- 229910003470 tongbaite Inorganic materials 0.000 description 2
- UONOETXJSWQNOL-UHFFFAOYSA-N tungsten carbide Chemical compound [W+]#[C-] UONOETXJSWQNOL-UHFFFAOYSA-N 0.000 description 2
- 229910052691 Erbium Inorganic materials 0.000 description 1
- 229910052779 Neodymium Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 229910052769 Ytterbium Inorganic materials 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- UYAHIZSMUZPPFV-UHFFFAOYSA-N erbium Chemical compound [Er] UYAHIZSMUZPPFV-UHFFFAOYSA-N 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000012768 molten material Substances 0.000 description 1
- QEFYFXOXNSNQGX-UHFFFAOYSA-N neodymium atom Chemical compound [Nd] QEFYFXOXNSNQGX-UHFFFAOYSA-N 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 229910052761 rare earth metal Inorganic materials 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
- NAWDYIZEMPQZHO-UHFFFAOYSA-N ytterbium Chemical compound [Yb] NAWDYIZEMPQZHO-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
- B23K26/0622—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/0604—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams
- B23K26/0613—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams having a common axis
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/352—Working by laser beam, e.g. welding, cutting or boring for surface treatment
- B23K26/356—Working by laser beam, e.g. welding, cutting or boring for surface treatment by shock processing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
- B23K26/382—Removing material by boring or cutting by boring
- B23K26/388—Trepanning, i.e. boring by moving the beam spot about an axis
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
- B23K26/382—Removing material by boring or cutting by boring
- B23K26/389—Removing material by boring or cutting by boring of fluid openings, e.g. nozzles, jets
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/40—Removing material taking account of the properties of the material involved
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2101/00—Articles made by soldering, welding or cutting
- B23K2101/001—Turbines
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/16—Composite materials, e.g. fibre reinforced
- B23K2103/166—Multilayered materials
- B23K2103/172—Multilayered materials wherein at least one of the layers is non-metallic
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Laser Beam Processing (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014039643A JP5908009B2 (ja) | 2013-08-20 | 2014-02-28 | レーザ加工方法及びレーザ加工装置 |
| JP2014-039643 | 2014-02-28 | ||
| PCT/JP2015/052072 WO2015129362A1 (ja) | 2014-02-28 | 2015-01-26 | レーザ加工方法及びレーザ加工装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CA2921212A1 CA2921212A1 (en) | 2015-09-03 |
| CA2921212C true CA2921212C (en) | 2020-08-18 |
Family
ID=54010731
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA2921212A Active CA2921212C (en) | 2014-02-28 | 2015-01-26 | Laser processing method and laser processing apparatus |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US10792759B2 (enExample) |
| EP (1) | EP3025820B1 (enExample) |
| JP (1) | JP5908009B2 (enExample) |
| KR (1) | KR101902084B1 (enExample) |
| CN (1) | CN105473273B (enExample) |
| CA (1) | CA2921212C (enExample) |
| WO (1) | WO2015129362A1 (enExample) |
Families Citing this family (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106475681B (zh) * | 2015-08-31 | 2019-03-15 | 株式会社理光 | 光加工装置和光加工物的生产方法 |
| JP6804224B2 (ja) * | 2016-06-22 | 2020-12-23 | 三菱重工業株式会社 | レーザ加工装置およびレーザ加工方法 |
| JP6721439B2 (ja) * | 2016-07-11 | 2020-07-15 | 株式会社ディスコ | レーザー加工装置 |
| CN107824990A (zh) * | 2017-12-19 | 2018-03-23 | 单杰 | 一种模切板的多功能激光冲孔机构及其使用方法 |
| CN108406120A (zh) * | 2018-02-08 | 2018-08-17 | 武汉华工激光工程有限责任公司 | 对喷漆碳纤维外壳进行镭雕通孔的方法及设备 |
| CN108526719A (zh) * | 2018-04-25 | 2018-09-14 | 王天牧 | 一种复合材料的切割设备及切割方法 |
| KR102075731B1 (ko) * | 2018-09-27 | 2020-02-10 | 한국기계연구원 | 레이저 제염 시스템 |
| KR102188554B1 (ko) * | 2019-01-22 | 2020-12-09 | 주식회사 디이엔티 | 금속 3d 프린터의 레이저 헤드 광축 거리조절장치 |
| JP7297568B2 (ja) * | 2019-07-08 | 2023-06-26 | 三菱重工業株式会社 | レーザ加工方法 |
| CH716546A1 (fr) * | 2019-08-29 | 2021-03-15 | Haute Ecole Arc | Dispositif d'usinage laser et procédé de trépanation optique. |
| DE102019125103A1 (de) * | 2019-09-18 | 2021-03-18 | Bystronic Laser Ag | Bearbeitungsvorrichtung zur Laserbearbeitung eines Werkstücks, Verfahren zur Laserbearbeitung eines Werkstücks |
| CN110744205B (zh) * | 2019-10-22 | 2022-06-14 | 大族激光科技产业集团股份有限公司 | 一种钛基多层复合材料激光深度标记方法 |
| CN111098034A (zh) * | 2019-12-16 | 2020-05-05 | 大族激光科技产业集团股份有限公司 | 一种多层材料产品标记装置及方法 |
| CN112296536A (zh) * | 2020-06-22 | 2021-02-02 | 深圳市木森科技有限公司 | 一种基于二氧化碳激光和光纤激光的铝基板切割方法、铝基板切割装置及其控制方法 |
| CN112064012B (zh) * | 2020-09-07 | 2022-06-21 | 江苏联宸激光科技有限公司 | 一种应用于工件修复的激光熔覆装置 |
| CN112872629B (zh) * | 2021-01-18 | 2022-07-01 | 星控激光科技(上海)有限公司 | 一种基于超快激光脉冲序列的四光楔旋切钻孔方法及系统 |
| KR102351494B1 (ko) * | 2021-08-12 | 2022-01-17 | (주)멀티일렉텍 | 유리 측면 가공 장치 |
| JP7252306B1 (ja) * | 2021-12-21 | 2023-04-04 | 住友金属鉱山株式会社 | 金属ロールの製造方法 |
| US20240391027A1 (en) * | 2023-05-24 | 2024-11-28 | General Electric Company | Method and apparatus for ablating holes in an article |
| US20240391028A1 (en) * | 2023-05-24 | 2024-11-28 | General Electric Company | Method and apparatus for ablating holes in an article |
Family Cites Families (31)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05329674A (ja) | 1992-05-28 | 1993-12-14 | Kawasaki Heavy Ind Ltd | 光軸調整方法およびそれに用いる光軸調整装置 |
| JP2828871B2 (ja) | 1993-06-29 | 1998-11-25 | 住友重機械工業株式会社 | トレパニングヘッド |
| GB9617093D0 (en) | 1996-08-14 | 1996-09-25 | Rolls Royce Plc | A method of drilling a hole in a workpiece |
| JP2003517931A (ja) | 1999-11-29 | 2003-06-03 | シーメンス アクチエンゲゼルシヤフト | サブストレートを加工する装置および当該装置を用いてサブストレートを加工する方法 |
| US6573474B1 (en) | 2000-10-18 | 2003-06-03 | Chromalloy Gas Turbine Corporation | Process for drilling holes through a thermal barrier coating |
| US6420677B1 (en) * | 2000-12-20 | 2002-07-16 | Chromalloy Gas Turbine Corporation | Laser machining cooling holes in gas turbine components |
| GB2383769B (en) * | 2001-10-06 | 2004-10-13 | Rolls Royce Plc | Method of laser drilling a hole |
| GB2395157B (en) * | 2002-11-15 | 2005-09-07 | Rolls Royce Plc | Laser driliing shaped holes |
| US6847004B2 (en) | 2003-01-10 | 2005-01-25 | General Electric Company | Process of removing a ceramic coating deposit in a surface hole of a component |
| US7816625B2 (en) | 2003-10-06 | 2010-10-19 | Siemens Aktiengesellschaft | Method for the production of a hole and device |
| DE102004034721A1 (de) | 2004-07-17 | 2006-02-16 | Alstom Technology Ltd | Verfahren zum Ausbilden einer Bohrung |
| EP1810774A1 (de) | 2006-01-24 | 2007-07-25 | Siemens Aktiengesellschaft | Verfahren zur Herstellung eines Loches |
| DE102004050047A1 (de) | 2004-10-14 | 2006-04-27 | Robert Bosch Gmbh | Verfahren und Vorrichtung zur Erzeugung von Bohrungen mittels Laser |
| CN1796038A (zh) | 2004-12-20 | 2006-07-05 | 日立比亚机械股份有限公司 | 激光束加工设备 |
| EP1767743A1 (de) | 2005-09-26 | 2007-03-28 | Siemens Aktiengesellschaft | Verfahren zum Herstellen eines zu beschichtenden Gasturbinen-Bauteils mit freigelegten Öffnungen, Vorrichtung zur Durchführung des Verfahrens und beschichtbare Turbinenschaufel mit Filmkühlöffnungen |
| EP1772210A3 (en) | 2005-09-30 | 2008-05-28 | General Electric Company | Methods for making ceramic casting cores and cores |
| KR100707860B1 (ko) | 2005-12-21 | 2007-04-17 | 주식회사 이오테크닉스 | 레이저 빔을 이용한 비아홀 형성방법 |
| EP1844892A1 (de) * | 2006-04-13 | 2007-10-17 | ALSTOM Technology Ltd | Verfahren zur Laserentfernung von Beschichtenmaterialen in Kühlenlöchern eines Turbinenbauteiles |
| JP2008055478A (ja) * | 2006-08-31 | 2008-03-13 | Honda Motor Co Ltd | 仕上げ加工方法 |
| US20100078418A1 (en) | 2008-09-26 | 2010-04-01 | Electro Scientific Industries, Inc. | Method of laser micro-machining stainless steel with high cosmetic quality |
| JP2011110598A (ja) | 2009-11-30 | 2011-06-09 | Panasonic Corp | レーザ加工方法およびレーザ加工装置 |
| US20120102959A1 (en) * | 2010-10-29 | 2012-05-03 | John Howard Starkweather | Substrate with shaped cooling holes and methods of manufacture |
| US9696035B2 (en) * | 2010-10-29 | 2017-07-04 | General Electric Company | Method of forming a cooling hole by laser drilling |
| US9089933B2 (en) * | 2010-12-20 | 2015-07-28 | Pratt & Whitney Canada Corp. | Method for making and repairing effusion cooling holes in cumbustor liner |
| JP2012148299A (ja) | 2011-01-18 | 2012-08-09 | Towa Corp | レーザ加工装置 |
| US20130020291A1 (en) * | 2011-07-19 | 2013-01-24 | Pratt & Whitney Canada Corp. | Laser drilling methods of shallow-angled holes |
| US8624151B2 (en) * | 2011-07-19 | 2014-01-07 | Pratt & Whitney Canada Corp. | Laser drilling methods of shallow-angled holes |
| US9931712B2 (en) * | 2012-01-11 | 2018-04-03 | Pim Snow Leopard Inc. | Laser drilling and trepanning device |
| KR101367481B1 (ko) | 2012-02-28 | 2014-02-27 | (주)엔에스 | 필름절단장치 및 필름절단방법 |
| JP5189684B1 (ja) | 2012-03-07 | 2013-04-24 | 三菱重工業株式会社 | 加工装置、加工ユニット及び加工方法 |
| JP5496375B2 (ja) | 2013-01-23 | 2014-05-21 | 三菱重工業株式会社 | 加工装置、加工ユニット及び加工方法 |
-
2014
- 2014-02-28 JP JP2014039643A patent/JP5908009B2/ja active Active
-
2015
- 2015-01-26 CA CA2921212A patent/CA2921212C/en active Active
- 2015-01-26 CN CN201580001583.2A patent/CN105473273B/zh active Active
- 2015-01-26 KR KR1020167003704A patent/KR101902084B1/ko active Active
- 2015-01-26 WO PCT/JP2015/052072 patent/WO2015129362A1/ja not_active Ceased
- 2015-01-26 US US14/911,663 patent/US10792759B2/en active Active
- 2015-01-26 EP EP15755690.3A patent/EP3025820B1/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| US10792759B2 (en) | 2020-10-06 |
| KR101902084B1 (ko) | 2018-09-27 |
| CN105473273A (zh) | 2016-04-06 |
| EP3025820B1 (en) | 2020-08-19 |
| KR20160029857A (ko) | 2016-03-15 |
| CA2921212A1 (en) | 2015-09-03 |
| JP5908009B2 (ja) | 2016-04-26 |
| JP2015061731A (ja) | 2015-04-02 |
| EP3025820A1 (en) | 2016-06-01 |
| WO2015129362A1 (ja) | 2015-09-03 |
| CN105473273B (zh) | 2020-04-10 |
| US20160193693A1 (en) | 2016-07-07 |
| EP3025820A4 (en) | 2017-01-25 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CA2921212C (en) | Laser processing method and laser processing apparatus | |
| US11117221B2 (en) | Laser machining device and laser machining method | |
| JP5364856B1 (ja) | 加工装置、加工方法 | |
| JP6071641B2 (ja) | 加工装置、加工方法 | |
| AU2017204564B2 (en) | A method of laser processing of a metallic material with high dynamic control of the movement axes of the laser beam along a predetermined processing path, as well as a machine and a computer program for the implementation of said method | |
| JP5627760B1 (ja) | レーザ加工装置及びレーザ加工方法 | |
| JP6071640B2 (ja) | 加工装置、加工方法 | |
| AU2017204565B2 (en) | A method of laser processing of a metallic material with optical axis position control of the laser relative to an assist gas flow, and a machine and computer program for the implementation of said method | |
| WO2012073931A1 (ja) | レーザ加工装置 | |
| JP2013176800A (ja) | 加工装置及び加工方法 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EEER | Examination request |
Effective date: 20160211 |