CA2002187A1 - Sonde, methode d'excitation connexe et dispositif de balayage pour detection de courant tunnel, comprenant ladite sonde - Google Patents

Sonde, methode d'excitation connexe et dispositif de balayage pour detection de courant tunnel, comprenant ladite sonde

Info

Publication number
CA2002187A1
CA2002187A1 CA2002187A CA2002187A CA2002187A1 CA 2002187 A1 CA2002187 A1 CA 2002187A1 CA 2002187 A CA2002187 A CA 2002187A CA 2002187 A CA2002187 A CA 2002187A CA 2002187 A1 CA2002187 A1 CA 2002187A1
Authority
CA
Canada
Prior art keywords
probe unit
electrode
driving method
scanning device
tunnel current
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CA2002187A
Other languages
English (en)
Other versions
CA2002187C (fr
Inventor
Hiroyasu Nose
Osamu Takamatsu
Toshihiko Miyazaki
Toshimitsu Kawase
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Publication of CA2002187A1 publication Critical patent/CA2002187A1/fr
Application granted granted Critical
Publication of CA2002187C publication Critical patent/CA2002187C/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/10—STM [Scanning Tunnelling Microscopy] or apparatus therefor, e.g. STM probes
    • G01Q60/16—Probes, their manufacture, or their related instrumentation, e.g. holders
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q20/00—Monitoring the movement or position of the probe
    • G01Q20/04—Self-detecting probes, i.e. wherein the probe itself generates a signal representative of its position, e.g. piezoelectric gauge
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/02—Probe holders
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B9/00—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor
    • G11B9/12—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor
    • G11B9/14—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor using microscopic probe means, i.e. recording or reproducing by means directly associated with the tip of a microscopic electrical probe as used in Scanning Tunneling Microscopy [STM] or Atomic Force Microscopy [AFM] for inducing physical or electrical perturbations in a recording medium; Record carriers or media specially adapted for such transducing of information
    • G11B9/1418—Disposition or mounting of heads or record carriers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/873—Tip holder

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Analytical Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
CA002002187A 1988-11-09 1989-11-03 Sonde, methode d'excitation connexe et dispositif de balayage pour detection de courant tunnel, comprenant ladite sonde Expired - Fee Related CA2002187C (fr)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP28278388 1988-11-09
JP63-282783 1988-11-09
JP1273041A JP2547869B2 (ja) 1988-11-09 1989-10-19 プローブユニット，該プローブの駆動方法及び該プローブユニットを備えた走査型トンネル電流検知装置
JP1-273041 1989-10-19

Publications (2)

Publication Number Publication Date
CA2002187A1 true CA2002187A1 (fr) 1990-05-09
CA2002187C CA2002187C (fr) 1993-09-21

Family

ID=26550493

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002002187A Expired - Fee Related CA2002187C (fr) 1988-11-09 1989-11-03 Sonde, methode d'excitation connexe et dispositif de balayage pour detection de courant tunnel, comprenant ladite sonde

Country Status (6)

Country Link
US (1) US4998016A (fr)
EP (1) EP0368579B1 (fr)
JP (1) JP2547869B2 (fr)
AT (1) ATE107028T1 (fr)
CA (1) CA2002187C (fr)
DE (1) DE68915940T2 (fr)

Families Citing this family (50)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2756254B2 (ja) * 1988-03-25 1998-05-25 キヤノン株式会社 記録装置及び再生装置
US5210714A (en) * 1988-10-14 1993-05-11 International Business Machines Corporation Distance-controlled tunneling transducer and direct access storage unit employing the transducer
US5241527A (en) * 1989-03-16 1993-08-31 Canon Kabushiki Kaisha Recording and reproducing apparatus and method using a recording layer having a positioning region
JP2686645B2 (ja) * 1989-05-08 1997-12-08 キヤノン株式会社 走査型トンネル電流検出装置
JPH02295050A (ja) * 1989-05-09 1990-12-05 Olympus Optical Co Ltd μ―ＳＴＭを用いた回路パターン作製装置および回路パターン作製方法
DE68903951T2 (de) * 1989-08-16 1993-07-08 Ibm Verfahren fuer die herstellung mikromechanischer messfuehler fuer afm/stm-profilometrie und mikromechanischer messfuehlerkopf.
EP0416882B1 (fr) * 1989-09-07 1997-03-05 Canon Kabushiki Kaisha Stockage, accès et traitement d'information
USRE36603E (en) * 1989-10-13 2000-03-07 International Business Machines Corp. Distance-controlled tunneling transducer and direct access storage unit employing the transducer
JPH03140805A (ja) * 1989-10-26 1991-06-14 Hikari Gijutsu Kenkyu Kaihatsu Kk 広域走査トンネル顕微鏡
US5132533A (en) * 1989-12-08 1992-07-21 Canon Kabushiki Kaisha Method for forming probe and apparatus therefor
EP0437275B1 (fr) * 1990-01-11 1997-08-27 Canon Kabushiki Kaisha Microsonde, méthode pour sa réalisation et appareil d'entrée et de sortie de données l'utilisant
JPH041949A (ja) * 1990-04-18 1992-01-07 Canon Inc 情報入力及び／または取出し装置
JP2891510B2 (ja) * 1990-05-09 1999-05-17 日本電子株式会社 圧電素子駆動体
JP2501945B2 (ja) * 1990-08-28 1996-05-29 三菱電機株式会社 原子間力顕微鏡のカンチレバ―及びその製造方法
JP2961452B2 (ja) * 1990-09-05 1999-10-12 キヤノン株式会社 情報処理装置
JP2741629B2 (ja) * 1990-10-09 1998-04-22 キヤノン株式会社 カンチレバー型プローブ、それを用いた走査型トンネル顕微鏡及び情報処理装置
JP2744346B2 (ja) * 1990-10-19 1998-04-28 キヤノン株式会社 情報記録ユニットと情報記録及び／又は再生装置と情報記録及び／又は再生方法と情報記録媒体
JP2802828B2 (ja) * 1990-10-19 1998-09-24 キヤノン株式会社 情報記録担体及びこれを使用する情報処理装置
DE4035075A1 (de) * 1990-11-05 1992-05-07 Jenoptik Jena Gmbh Anordnung zum messen linearer abmessungen auf einer strukturierten oberflaeche eines messobjektes
ATE155237T1 (de) * 1990-11-20 1997-07-15 Canon Kk Neigungswinkelbestimmungsverfahren sowie informationsbestimmungsschreibvorrichtung dafür
EP0492915B1 (fr) * 1990-12-17 1996-09-04 Canon Kabushiki Kaisha Capteur du type cantilever et dispositif utilisant ce capteur
US5237529A (en) * 1991-02-01 1993-08-17 Richard Spitzer Microstructure array and activation system therefor
CA2060674C (fr) * 1991-02-08 1996-10-01 Masahiro Tagawa Mecanisme d'entrainement et appareil d'enregistrement ou de reproduction utilisant ce mecanisme
JP3010318B2 (ja) * 1991-02-26 2000-02-21 キヤノン株式会社 微小プローブ、その製造方法、該プローブを用いた表面観察装置及び情報処理装置
JP3000491B2 (ja) * 1991-04-10 2000-01-17 キヤノン株式会社 カンチレバーユニット及びこれを用いた情報処理装置、原子間力顕微鏡、磁力顕微鏡
JP2884447B2 (ja) * 1991-04-22 1999-04-19 キヤノン株式会社 カンチレバー型プローブ、及びこれを用いた走査型トンネル顕微鏡、情報処理装置
US5166520A (en) * 1991-05-13 1992-11-24 The Regents Of The University Of California Universal, microfabricated probe for scanning probe microscopes
JP2923813B2 (ja) * 1991-06-11 1999-07-26 キヤノン株式会社 カンチレバー型変位素子、及びこれを用いた走査型トンネル顕微鏡、情報処理装置
US5172002A (en) * 1991-08-22 1992-12-15 Wyko Corporation Optical position sensor for scanning probe microscopes
EP0530427B1 (fr) * 1991-09-05 1995-11-08 International Business Machines Corporation Unité à plusieurs pointes pour un microscope de balayage à effet tunnel, méthode de sa fabrication et son application dans une unité de stockage à accès direct
JP3184619B2 (ja) * 1991-09-24 2001-07-09 キヤノン株式会社 平行平面保持機構及びそれを用いたメモリ装置及びｓｔｍ装置
US5360974A (en) * 1992-10-20 1994-11-01 International Business Machines Corp. Dual quad flexure scanner
JP2895694B2 (ja) * 1992-12-08 1999-05-24 シャープ株式会社 情報記録・再生用スライダー、情報記録・再生用スライダーの製造方法および情報記録・再生装置
JPH06241777A (ja) * 1993-02-16 1994-09-02 Mitsubishi Electric Corp 原子間力顕微鏡用カンチレバー、その製造方法、このカンチレバーを用いた原子間力顕微鏡及びこのカンチレバーを用いた試料表面密着性評価方法
US6445106B1 (en) * 2000-02-18 2002-09-03 Intel Corporation Micro-electromechanical structure resonator, method of making, and method of using
US20040125733A1 (en) * 2002-12-31 2004-07-01 Industrial Technology Research Institute Data storage device utilizing carbon nanotubes and method for operating
US20070153668A1 (en) * 2002-12-31 2007-07-05 Industrial Technology Research Institute Data storage device utilizing carbon nanotubes and method for operating
US20050128927A1 (en) * 2003-12-15 2005-06-16 Hewlett-Packard Development Co., L.P. Electrostatic actuator for contact probe storage device
US7423954B2 (en) * 2003-12-17 2008-09-09 Hewlett-Packard Development Company, L.P. Contact probe storage sensor pod
US7436753B2 (en) 2003-12-17 2008-10-14 Mejia Robert G Contact probe storage FET sensor
US7212487B2 (en) * 2004-01-07 2007-05-01 Hewlett-Packard Development Company, L.P. Data readout arrangement
JP4226522B2 (ja) * 2004-06-30 2009-02-18 株式会社日立製作所 記録再生装置
FR2880980B1 (fr) * 2005-01-17 2007-03-16 Commissariat Energie Atomique Dispositif d'enregistrement de donnees comportant des micro-pointes dont l'ensemble des extremites libres forme une surface convexe et procede de fabrication
US7212488B2 (en) 2005-03-21 2007-05-01 Hewlett-Packard Development Company, L.P. Method and device enabling capacitive probe-based data storage readout
JP5230133B2 (ja) * 2006-08-22 2013-07-10 セイコーインスツル株式会社 圧電アクチュエータを用いた駆動装置及びこれを搭載した電子機器
JP4817465B2 (ja) * 2006-10-05 2011-11-16 パイオニア株式会社 記録再生装置
US20080151597A1 (en) * 2006-12-20 2008-06-26 Seagate Technology Llc Wear-resistant multilayer probe
JP2009069006A (ja) * 2007-09-13 2009-04-02 Fujifilm Corp カンチレバー型センサ、それを用いる物質検知システム及び物質検査方法
CN101769711B (zh) * 2010-01-26 2012-09-05 重庆理工大学 一种基于隧道效应的接触式纳米位移传感器
CN112198412B (zh) * 2019-06-21 2023-02-28 成都辰显光电有限公司 一种测试结构及测试结构的制备方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3572030D1 (en) * 1985-03-07 1989-09-07 Ibm Scanning tunneling microscope
JPS63238503A (ja) * 1987-03-27 1988-10-04 Jeol Ltd 走査トンネル顕微鏡におけるチツプ走査装置
ATE157190T1 (de) * 1987-07-31 1997-09-15 Canon Kk Aufzeichnungsgerät und wiedergabegerät
US4906840A (en) * 1988-01-27 1990-03-06 The Board Of Trustees Of Leland Stanford Jr., University Integrated scanning tunneling microscope

Also Published As

Publication number Publication date
ATE107028T1 (de) 1994-06-15
EP0368579A2 (fr) 1990-05-16
CA2002187C (fr) 1993-09-21
DE68915940T2 (de) 1994-11-17
JPH02243908A (ja) 1990-09-28
EP0368579A3 (fr) 1991-03-27
JP2547869B2 (ja) 1996-10-23
EP0368579B1 (fr) 1994-06-08
DE68915940D1 (de) 1994-07-14
US4998016A (en) 1991-03-05

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