CA1300346C - Superpurifier for nitrogen and process for purifying same - Google Patents

Superpurifier for nitrogen and process for purifying same

Info

Publication number
CA1300346C
CA1300346C CA000512229A CA512229A CA1300346C CA 1300346 C CA1300346 C CA 1300346C CA 000512229 A CA000512229 A CA 000512229A CA 512229 A CA512229 A CA 512229A CA 1300346 C CA1300346 C CA 1300346C
Authority
CA
Canada
Prior art keywords
gas
getter
superpurifier
alloy
nitrogen gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CA000512229A
Other languages
English (en)
French (fr)
Inventor
Marco Succi
Kiyoshi Nagai
Claudio Boffito
Fabrizio Doni
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SAES Getters SpA
Taiyo Sanso Co Ltd
Original Assignee
SAES Getters SpA
Taiyo Sanso Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SAES Getters SpA, Taiyo Sanso Co Ltd filed Critical SAES Getters SpA
Application granted granted Critical
Publication of CA1300346C publication Critical patent/CA1300346C/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/04—Purification or separation of nitrogen
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/04—Purification or separation of nitrogen
    • C01B21/0405—Purification or separation processes
    • C01B21/0494—Combined chemical and physical processing
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/04—Purification or separation of nitrogen
    • C01B21/0405—Purification or separation processes
    • C01B21/0433—Physical processing only
    • C01B21/045—Physical processing only by adsorption in solids
    • C01B21/0483—Physical processing only by adsorption in solids in getters
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2210/00—Purification or separation of specific gases
    • C01B2210/0001—Separation or purification processing
    • C01B2210/0003—Chemical processing
    • C01B2210/0004—Chemical processing by oxidation
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2210/00—Purification or separation of specific gases
    • C01B2210/0001—Separation or purification processing
    • C01B2210/0009—Physical processing
    • C01B2210/0014—Physical processing by adsorption in solids
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2210/00—Purification or separation of specific gases
    • C01B2210/0001—Separation or purification processing
    • C01B2210/0009—Physical processing
    • C01B2210/0014—Physical processing by adsorption in solids
    • C01B2210/0023—Physical processing by adsorption in solids in getters
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2210/00—Purification or separation of specific gases
    • C01B2210/0042—Making ultrapure specific gas

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Analytical Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Separation Of Gases By Adsorption (AREA)
  • Gas Separation By Absorption (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
  • Treating Waste Gases (AREA)
CA000512229A 1985-06-28 1986-06-23 Superpurifier for nitrogen and process for purifying same Expired - Fee Related CA1300346C (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP60-140628 1985-06-28
JP60140628A JPS623006A (ja) 1985-06-28 1985-06-28 窒素の超精製装置、並びに精製方法

Publications (1)

Publication Number Publication Date
CA1300346C true CA1300346C (en) 1992-05-12

Family

ID=15273115

Family Applications (1)

Application Number Title Priority Date Filing Date
CA000512229A Expired - Fee Related CA1300346C (en) 1985-06-28 1986-06-23 Superpurifier for nitrogen and process for purifying same

Country Status (10)

Country Link
JP (1) JPS623006A (nl)
KR (1) KR930006690B1 (nl)
BE (1) BE904998A (nl)
CA (1) CA1300346C (nl)
DE (1) DE3621013C2 (nl)
FR (1) FR2584062B1 (nl)
GB (1) GB2177080B (nl)
IT (1) IT1204420B (nl)
NL (1) NL192104C (nl)
SE (1) SE463149B (nl)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1227219B (it) * 1988-09-26 1991-03-27 Getters Spa Apparecchiatura e metodo relativo per asportare impurezze gassose da gas inerti ed assicurare livelli estremamente bassi di idrogeno
DE3835825C1 (nl) * 1988-10-21 1990-03-08 Kernforschungsanlage Juelich Gmbh, 5170 Juelich, De
FR2642678A1 (fr) * 1989-02-07 1990-08-10 Air Liquide Procede d'elaboration d'une atmosphere gazeuse en contact avec un metal a haute temperature
DE3926015A1 (de) * 1989-08-05 1991-02-07 Messer Griesheim Gmbh Verfahren zur feinreinigung von gasen
IT1237944B (it) * 1990-01-05 1993-06-19 Getters Spa Metodo per determinare la fine della vita utile di un purificatore di gas inerte e relativa apparecchiatura
IT1246358B (it) * 1990-07-12 1994-11-17 Getters Spa Processo per eliminare impurita' da un gas idruro
IT1244006B (it) * 1990-11-02 1994-06-28 Getters Spa Procedimento di purificazione dell'ammoniaca.
IT1270875B (it) * 1993-04-29 1997-05-13 Getters Spa Procedimento di purificazione dell'idrogeno e purificatore relativo
US5238469A (en) * 1992-04-02 1993-08-24 Saes Pure Gas, Inc. Method and apparatus for removing residual hydrogen from a purified gas
US6436352B1 (en) 1993-04-29 2002-08-20 Saes Getter, S.P.A. Hydrogen purification
JPH1157371A (ja) * 1997-08-11 1999-03-02 Taiyo Toyo Sanso Co Ltd 超清浄空気の製造方法
WO1999019050A1 (en) 1997-10-15 1999-04-22 Saes Pure Gas, Inc. Gas purification system with safety device and method for purifying gases
US6068685A (en) * 1997-10-15 2000-05-30 Saes Pure Gas, Inc. Semiconductor manufacturing system with getter safety device
US6299670B1 (en) * 1999-06-10 2001-10-09 Saes Pure Gas, Inc. Integrated heated getter purifier system
KR100356611B1 (ko) * 2000-08-10 2002-10-18 주식회사 아토 질소 정제 방법 및 정제 장치
ITMI20010930A1 (it) 2001-05-07 2002-11-07 Getters Spa Metodo per la misura della concentrazione di idrogeno e metano in azoto mediante spetroscopia di mobilita' ionica
ITMI20011193A1 (it) 2001-06-06 2002-12-06 Getters Spa Metodo per la misura mediante spettroscopia di mobilita' ionica dellaconcentrazione di acqua in argon, idrogeno, azoto e elio
JP4918255B2 (ja) * 2005-12-22 2012-04-18 ウチヤ・サーモスタット株式会社 窒素ガス発生装置
CN110759323A (zh) * 2018-07-27 2020-02-07 隆基绿能科技股份有限公司 一种气体纯化反应器及气体纯化方法
CN112978692B (zh) * 2021-03-04 2022-08-05 北京高麦克仪器科技有限公司 780氦气纯化器
JP7210803B1 (ja) * 2022-10-04 2023-01-23 レール・リキード－ソシエテ・アノニム・プール・レテュード・エ・レクスプロワタシオン・デ・プロセデ・ジョルジュ・クロード ガス精製装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3535074A (en) * 1965-10-29 1970-10-20 Hitachi Ltd Method and apparatus for purifying crude inert gases
BE792561A (en) * 1972-12-11 1973-03-30 Getters Spa Gas purifier - esp for rare gases and hydrogen with regeneration system for absorber cartridges
IT1115156B (it) * 1979-04-06 1986-02-03 Getters Spa Leghe zr-fe per l'assorbimento di idrogeno a basse temperature
DE3137569A1 (de) * 1981-09-22 1983-04-21 Leybold-Heraeus GmbH, 5000 Köln Verfahren und vorrichtung zur herstellung von hochreinem stickstoff
JPS6020323A (ja) * 1983-07-15 1985-02-01 Toshiba Corp デイスク装置

Also Published As

Publication number Publication date
SE8602870D0 (sv) 1986-06-27
SE8602870L (sv) 1986-12-29
GB8615619D0 (en) 1986-07-30
KR870000237A (ko) 1987-02-17
BE904998A (fr) 1986-10-16
IT1204420B (it) 1989-03-01
NL192104B (nl) 1996-10-01
JPS623006A (ja) 1987-01-09
GB2177080B (en) 1989-08-31
FR2584062B1 (fr) 1990-12-21
SE463149B (sv) 1990-10-15
DE3621013C2 (de) 1996-02-15
NL192104C (nl) 1997-02-04
DE3621013A1 (de) 1987-01-08
KR930006690B1 (ko) 1993-07-22
JPH0456763B2 (nl) 1992-09-09
GB2177080A (en) 1987-01-14
NL8601692A (nl) 1987-01-16
IT8620963A0 (it) 1986-06-27
FR2584062A1 (fr) 1987-01-02

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