CA1038268A - Growing single crystals in a crucible - Google Patents
Growing single crystals in a crucibleInfo
- Publication number
- CA1038268A CA1038268A CA216,766A CA216766A CA1038268A CA 1038268 A CA1038268 A CA 1038268A CA 216766 A CA216766 A CA 216766A CA 1038268 A CA1038268 A CA 1038268A
- Authority
- CA
- Canada
- Prior art keywords
- crucible
- temperature
- process according
- heat exchanger
- melting point
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
- F28D7/00—Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall
- F28D7/10—Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall the conduits being arranged one within the other, e.g. concentrically
- F28D7/12—Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall the conduits being arranged one within the other, e.g. concentrically the surrounding tube being closed at one end, e.g. return type
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B11/00—Single-crystal growth by normal freezing or freezing under temperature gradient, e.g. Bridgman-Stockbarger method
- C30B11/003—Heating or cooling of the melt or the crystallised material
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B17/00—Single-crystal growth onto a seed which remains in the melt during growth, e.g. Nacken-Kyropoulos method
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B27/00—Single-crystal growth under a protective fluid
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/16—Oxides
- C30B29/20—Aluminium oxides
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
- F28D21/00—Heat-exchange apparatus not covered by any of the groups F28D1/00 - F28D20/00
- F28D2021/0019—Other heat exchangers for particular applications; Heat exchange systems not otherwise provided for
- F28D2021/0056—Other heat exchangers for particular applications; Heat exchange systems not otherwise provided for for ovens or furnaces
- F28D2021/0057—Other heat exchangers for particular applications; Heat exchange systems not otherwise provided for for ovens or furnaces for melting materials
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Oxygen, Ozone, And Oxides In General (AREA)
- Manufacture And Refinement Of Metals (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US429142A US3898051A (en) | 1973-12-28 | 1973-12-28 | Crystal growing |
Publications (1)
Publication Number | Publication Date |
---|---|
CA1038268A true CA1038268A (en) | 1978-09-12 |
Family
ID=23701973
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CA216,766A Expired CA1038268A (en) | 1973-12-28 | 1974-12-24 | Growing single crystals in a crucible |
Country Status (7)
Country | Link |
---|---|
US (1) | US3898051A (ja) |
JP (1) | JPS5854115B2 (ja) |
CA (1) | CA1038268A (ja) |
CH (1) | CH595881A5 (ja) |
DE (1) | DE2461553C2 (ja) |
FR (1) | FR2255950B1 (ja) |
GB (1) | GB1463180A (ja) |
Families Citing this family (80)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4096025A (en) * | 1974-02-21 | 1978-06-20 | The United States Of America As Represented By The Secretary Of The Army | Method of orienting seed crystals in a melt, and product obtained thereby |
US4049384A (en) * | 1975-04-14 | 1977-09-20 | Arthur D. Little, Inc. | Cold crucible system |
US4186046A (en) * | 1976-09-29 | 1980-01-29 | The United States Of America As Represented By The Secretary Of The Army | Growing doped single crystal ceramic materials |
US4218418A (en) * | 1978-06-22 | 1980-08-19 | Crystal Systems, Inc. | Processes of casting an ingot and making a silica container |
US4251206A (en) * | 1979-05-14 | 1981-02-17 | Rca Corporation | Apparatus for and method of supporting a crucible for EFG growth of sapphire |
US4264406A (en) * | 1979-06-11 | 1981-04-28 | The United States Of America As Represented By The Secretary Of The Army | Method for growing crystals |
FR2512846A1 (fr) * | 1981-09-16 | 1983-03-18 | Labo Electronique Physique | Procede pour la croissance cristalline de materiau, et cristaux ainsi obtenus |
JPS6041033B2 (ja) * | 1982-06-24 | 1985-09-13 | 財団法人 半導体研究振興会 | 結晶成長装置 |
US4540550A (en) * | 1982-10-29 | 1985-09-10 | Westinghouse Electric Corp. | Apparatus for growing crystals |
DE3323896A1 (de) * | 1983-07-02 | 1985-01-17 | Leybold-Heraeus GmbH, 5000 Köln | Verfahren und vorrichtung zum gerichteten erstarren von schmelzen |
US4892707A (en) * | 1983-07-25 | 1990-01-09 | American Cyanamid Company | Apparatus for the calorimetry of chemical processes |
US4963499A (en) * | 1983-07-25 | 1990-10-16 | American Cyanamid Company | Method for the calorimetry of chemical processes |
FR2553232B1 (fr) * | 1983-10-05 | 1985-12-27 | Comp Generale Electricite | Procede et dispositif pour elaborer un lingot d'un materiau semi-conducteur polycristallin |
JPS6163593A (ja) * | 1984-09-05 | 1986-04-01 | Toshiba Corp | 化合物半導体単結晶の製造装置 |
DE3644746A1 (de) * | 1986-12-30 | 1988-07-14 | Hagen Hans Dr Ing | Verfahren und vorrichtung zum zuechten von kristallen |
FR2614404B1 (fr) * | 1987-04-23 | 1989-06-09 | Snecma | Four de coulee de pieces a structure orientee, a ecran thermique deplacable |
US4840699A (en) * | 1987-06-12 | 1989-06-20 | Ghemini Technologies | Gallium arsenide crystal growth |
US5116456A (en) * | 1988-04-18 | 1992-05-26 | Solon Technologies, Inc. | Apparatus and method for growth of large single crystals in plate/slab form |
WO1990003952A1 (en) * | 1988-10-07 | 1990-04-19 | Crystal Systems, Inc. | Method of growing silicon ingots using a rotating melt |
US4946544A (en) * | 1989-02-27 | 1990-08-07 | At&T Bell Laboratories | Crystal growth method |
US5047113A (en) * | 1989-08-23 | 1991-09-10 | Aleksandar Ostrogorsky | Method for directional solidification of single crystals |
US5064497A (en) * | 1990-03-09 | 1991-11-12 | At&T Bell Laboratories | Crystal growth method and apparatus |
DE69233617D1 (de) * | 1991-08-22 | 2006-05-24 | Raytheon Co | Verfahren zum Entfernen einer B2O3-Einkapselungsmasse von einer Struktur |
US5410567A (en) * | 1992-03-05 | 1995-04-25 | Corning Incorporated | Optical fiber draw furnace |
US5830268A (en) * | 1995-06-07 | 1998-11-03 | Thermometrics, Inc. | Methods of growing nickel-manganese oxide single crystals |
US6099164A (en) * | 1995-06-07 | 2000-08-08 | Thermometrics, Inc. | Sensors incorporating nickel-manganese oxide single crystals |
US5653954A (en) * | 1995-06-07 | 1997-08-05 | Thermometrics, Inc. | Nickel-manganese oxide single crystals |
JP3242292B2 (ja) * | 1995-06-15 | 2001-12-25 | シャープ株式会社 | 多結晶半導体の製造方法および製造装置 |
JP3388664B2 (ja) * | 1995-12-28 | 2003-03-24 | シャープ株式会社 | 多結晶半導体の製造方法および製造装置 |
JP3520957B2 (ja) * | 1997-06-23 | 2004-04-19 | シャープ株式会社 | 多結晶半導体インゴットの製造方法および装置 |
JP3523986B2 (ja) * | 1997-07-02 | 2004-04-26 | シャープ株式会社 | 多結晶半導体の製造方法および製造装置 |
DE29715846U1 (de) * | 1997-09-04 | 1997-12-11 | ALD Vacuum Technologies GmbH, 63526 Erlensee | Vorrichtung zum gerichteten Erstarren von Schmelzen |
US6839362B2 (en) * | 2001-05-22 | 2005-01-04 | Saint-Gobain Ceramics & Plastics, Inc. | Cobalt-doped saturable absorber Q-switches and laser systems |
KR20020096097A (ko) * | 2001-06-16 | 2002-12-31 | 주식회사 실트론 | 실리콘 잉곳 성장 장치 |
US8021483B2 (en) | 2002-02-20 | 2011-09-20 | Hemlock Semiconductor Corporation | Flowable chips and methods for the preparation and use of same, and apparatus for use in the methods |
JP4658453B2 (ja) * | 2002-11-14 | 2011-03-23 | ヘムロック・セミコンダクター・コーポレーション | 流動性チップ、それを製造する方法及び使用する方法並びにその方法の実施に用いる装置 |
JP4151474B2 (ja) * | 2003-05-13 | 2008-09-17 | 信越半導体株式会社 | 単結晶の製造方法及び単結晶 |
US7326477B2 (en) * | 2003-09-23 | 2008-02-05 | Saint-Gobain Ceramics & Plastics, Inc. | Spinel boules, wafers, and methods for fabricating same |
US20050061230A1 (en) * | 2003-09-23 | 2005-03-24 | Saint-Gobain Ceramics & Plastics, Inc. | Spinel articles and methods for forming same |
US7045223B2 (en) * | 2003-09-23 | 2006-05-16 | Saint-Gobain Ceramics & Plastics, Inc. | Spinel articles and methods for forming same |
KR20070019970A (ko) * | 2004-01-29 | 2007-02-16 | 쿄세라 코포레이션 | 주형 및 그 형성방법, 및 그 주형을 이용한 다결정 실리콘기판의 제조방법 |
IL162518A0 (en) * | 2004-06-14 | 2005-11-20 | Rafael Armament Dev Authority | Dome |
DE602005027597D1 (de) * | 2004-11-16 | 2011-06-01 | Nippon Telegraph & Telephone | Vorrichtung zur herstellung von kristall |
US7919815B1 (en) | 2005-02-24 | 2011-04-05 | Saint-Gobain Ceramics & Plastics, Inc. | Spinel wafers and methods of preparation |
US7344596B2 (en) * | 2005-08-25 | 2008-03-18 | Crystal Systems, Inc. | System and method for crystal growing |
US7572334B2 (en) * | 2006-01-03 | 2009-08-11 | Applied Materials, Inc. | Apparatus for fabricating large-surface area polycrystalline silicon sheets for solar cell application |
BRPI0706659A2 (pt) * | 2006-01-20 | 2011-04-05 | Bp Corp North America Inc | métodos de fabricação de silìcio moldado e de célula solar, células solares, corpos e wafers de silìcio multicristalinos ordenados geometricamente continuos |
FR2918675B1 (fr) * | 2007-07-10 | 2009-08-28 | Commissariat Energie Atomique | Dispositif de fabrication d'un bloc de materiau cristallin avec modulation de la conductivite thermique. |
JP2011528308A (ja) * | 2007-07-20 | 2011-11-17 | ビーピー・コーポレーション・ノース・アメリカ・インコーポレーテッド | シード結晶からキャストシリコンを製造するための方法及び装置 |
JP2010534189A (ja) * | 2007-07-20 | 2010-11-04 | ビーピー・コーポレーション・ノース・アメリカ・インコーポレーテッド | シード結晶からキャストシリコンを製造するための方法及び装置 |
WO2009015167A1 (en) | 2007-07-25 | 2009-01-29 | Bp Corporation North America Inc. | Methods for manufacturing monocrystalline or near-monocrystalline cast materials |
US8591649B2 (en) | 2007-07-25 | 2013-11-26 | Advanced Metallurgical Group Idealcast Solar Corp. | Methods for manufacturing geometric multi-crystalline cast materials |
DE102007038851A1 (de) * | 2007-08-16 | 2009-02-19 | Schott Ag | Verfahren zur Herstellung von monokristallinen Metall- oder Halbmetallkörpern |
TW201012978A (en) * | 2008-08-27 | 2010-04-01 | Bp Corp North America Inc | Apparatus and method of use for a casting system with independent melting and solidification |
TW201012988A (en) * | 2008-08-27 | 2010-04-01 | Bp Corp North America Inc | Gas recirculation heat exchanger for casting silicon |
US20110179992A1 (en) * | 2008-10-24 | 2011-07-28 | Schwerdtfeger Jr Carl Richard | Crystal growth methods and systems |
US20100101387A1 (en) * | 2008-10-24 | 2010-04-29 | Kedar Prasad Gupta | Crystal growing system and method thereof |
US8329133B2 (en) * | 2008-11-03 | 2012-12-11 | Gt Crystal Systems, Llc | Method and apparatus for refining metallurgical grade silicon to produce solar grade silicon |
TWI519685B (zh) * | 2009-07-22 | 2016-02-01 | 國立大學法人信州大學 | 藍寶石單結晶之製造方法以及藍寶石單結晶之製造裝置 |
KR20120083333A (ko) * | 2009-09-02 | 2012-07-25 | 지티 크리스탈 시스템스, 엘엘씨 | 조절된 압력하에 헬륨을 사용하는 고온 처리 방법 |
KR101136143B1 (ko) | 2009-09-05 | 2012-04-17 | 주식회사 크리스텍 | 사파이어 단결정 성장방법과 그 장치 |
US8647433B2 (en) * | 2009-12-13 | 2014-02-11 | Axt, Inc. | Germanium ingots/wafers having low micro-pit density (MPD) as well as systems and methods for manufacturing same |
DE102010014724B4 (de) | 2010-04-01 | 2012-12-06 | Deutsche Solar Gmbh | Vorrichtung und Verfahren zur Herstellung von Silizium-Blöcken |
DE102011006076B4 (de) | 2010-04-01 | 2016-07-28 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Vorrichtung und Verfahren zur Herstellung von Silizium-Blöcken |
US20110315808A1 (en) | 2010-06-23 | 2011-12-29 | Zelinski Brian J | Solid solution-based nanocomposite optical ceramic materials |
US8445822B2 (en) | 2010-06-23 | 2013-05-21 | Raytheon Company | One-piece Nano/Nano class Nanocomposite Optical Ceramic (NNOC) extended dome having seamless non-complementary geometries for electro-optic sensors |
DE112011103958T5 (de) * | 2010-11-29 | 2013-08-29 | Ulvac, Inc. | Vorrichtungen zum Raffinieren von Silizium und Verfahren zum Raffinieren von Silizium |
US9709699B2 (en) | 2012-02-03 | 2017-07-18 | Raytheon Company | Nano-nano-composite optical ceramic lenses |
US9012823B2 (en) | 2012-07-31 | 2015-04-21 | Raytheon Company | Vehicle having a nanocomposite optical ceramic dome |
WO2014156986A1 (ja) * | 2013-03-25 | 2014-10-02 | 国立大学法人九州大学 | シリコン単結晶生成装置、シリコン単結晶生成方法 |
CN103205799A (zh) * | 2013-04-23 | 2013-07-17 | 广东赛翡蓝宝石科技有限公司 | 一种生长c向白宝石单晶体的方法 |
US9682495B2 (en) * | 2013-09-30 | 2017-06-20 | Gtat Corporation | Method and apparatus for processing sapphire |
WO2015047828A1 (en) | 2013-09-30 | 2015-04-02 | Gt Crystal Systems, Llc | A technique for controlling temperature uniformity in crystal growth apparatus |
US9845548B2 (en) * | 2013-09-30 | 2017-12-19 | Gtat Corporation | Advanced crucible support and thermal distribution management |
CN104195640A (zh) * | 2014-08-28 | 2014-12-10 | 杭州铸泰科技有限公司 | 一种用于蓝宝石单晶生长的热场系统 |
CN104250852B (zh) * | 2014-09-17 | 2016-09-14 | 哈尔滨化兴软控科技有限公司 | 蓝宝石晶体生长装置及生长方法 |
CN108700378B (zh) * | 2016-02-26 | 2019-11-15 | 联合材料公司 | 钼坩锅 |
CN206562482U (zh) * | 2017-01-13 | 2017-10-17 | 许昌天戈硅业科技有限公司 | 一种蓝宝石长晶炉的分级闭环控制冷却设备 |
DE102020120715A1 (de) | 2020-08-05 | 2022-02-10 | Forschungsverbund Berlin E.V. | Verfahren und Vorrichtung zum Züchten eines Seltenerd-Sesquioxid-Kristalls |
CN114737253B (zh) * | 2022-06-10 | 2022-11-04 | 太原彩源新材料科技有限公司 | 生长大尺寸蓝宝石单晶板材的单晶炉热场结构及方法 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3335084A (en) * | 1964-03-16 | 1967-08-08 | Gen Electric | Method for producing homogeneous crystals of mixed semiconductive materials |
BE684801A (ja) * | 1965-08-05 | 1967-01-03 | ||
US3464812A (en) * | 1966-03-29 | 1969-09-02 | Massachusetts Inst Technology | Process for making solids and products thereof |
DE1936443C3 (de) * | 1969-07-17 | 1975-03-06 | Siemens Ag, 1000 Berlin Und 8000 Muenchen | Vorrichtung zum Aufwachsen homogen dotierter, planparalleler epitaktischer ScNchten aus halbleitenden Verbindungen durch Schmelzepitaxie |
US3653432A (en) * | 1970-09-01 | 1972-04-04 | Us Army | Apparatus and method for unidirectionally solidifying high temperature material |
-
1973
- 1973-12-28 US US429142A patent/US3898051A/en not_active Expired - Lifetime
-
1974
- 1974-08-29 FR FR7429576A patent/FR2255950B1/fr not_active Expired
- 1974-09-17 JP JP49107081A patent/JPS5854115B2/ja not_active Expired
- 1974-12-20 CH CH1713874A patent/CH595881A5/xx not_active IP Right Cessation
- 1974-12-23 GB GB5541674A patent/GB1463180A/en not_active Expired
- 1974-12-24 CA CA216,766A patent/CA1038268A/en not_active Expired
- 1974-12-27 DE DE2461553A patent/DE2461553C2/de not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS5097587A (ja) | 1975-08-02 |
DE2461553A1 (de) | 1975-07-10 |
CH595881A5 (ja) | 1978-02-28 |
GB1463180A (en) | 1977-02-02 |
FR2255950A1 (ja) | 1975-07-25 |
JPS5854115B2 (ja) | 1983-12-02 |
DE2461553C2 (de) | 1986-04-24 |
FR2255950B1 (ja) | 1980-12-26 |
US3898051A (en) | 1975-08-05 |
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