BR0116951A - Evaporador de arco - Google Patents

Evaporador de arco

Info

Publication number
BR0116951A
BR0116951A BR0116951-3A BR0116951A BR0116951A BR 0116951 A BR0116951 A BR 0116951A BR 0116951 A BR0116951 A BR 0116951A BR 0116951 A BR0116951 A BR 0116951A
Authority
BR
Brazil
Prior art keywords
target
magnetic
evaporator
cathode
constituted
Prior art date
Application number
BR0116951-3A
Other languages
English (en)
Other versions
BR0116951B1 (pt
Inventor
Josu Larrinaga Goikoetxea
Original Assignee
Fundacion Tekniker
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fundacion Tekniker filed Critical Fundacion Tekniker
Publication of BR0116951A publication Critical patent/BR0116951A/pt
Publication of BR0116951B1 publication Critical patent/BR0116951B1/pt

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32055—Arc discharge
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes
    • H01J37/32614—Consumable cathodes for arc discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/3266—Magnetic control means

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Coating By Spraying Or Casting (AREA)

Abstract

"EVAPORADOR DE ARCO". O evaporador de arco incorpora um anodo (1) e um catodo ou alvo (2), do qual é obtido o material evaporado que será aplicado à peça (10) a ser revestida dentro de uma câmara de vácuo e em que com um guia magnético há o empenho para a ação do arco elétrico no alvo ser deslocada sobre a superfície toda do mesmo de maneira homogênea, o guia magnético mencionado anteriormente é constituído por meio de dois sistemas magéticos independentes, um primeiro sistema magnético constituído por um grupo de ímãs permanentes (3), localizado na periferia do catodo ou alvo (2), em uma disposição notadamente co-planar ao mesmo, de modo que a magnetização do mesmo seja perpendicular à superfície do alvo (2), e um segundo sistema magnético constituído de um eletroímã (4, 5), localizado na parte posterior do alvo (2), alojado no corpo eletricamente isolante (6) do evaporador e a uma certa distância do alvo (2), com pelo menos um de seus pólos magnéticos paralelo à superfície do alvo (2), de modo que a ação combinada dos dois sistemas magnéticos determine o uso ou consumo uniforme do alvo (2) e ao mesmo tempo proporcione elevada confiabilidade ao evaporador.
BRPI0116951-3A 2001-03-27 2001-03-27 evaporador de arco com guia magnÉtico poderoso para alvos tendo uma grande Área de superfÍcie. BR0116951B1 (pt)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/ES2001/000119 WO2002077318A1 (es) 2001-03-27 2001-03-27 Evaporador de arco con guía magnética intensa para blancos de superficie amplia

Publications (2)

Publication Number Publication Date
BR0116951A true BR0116951A (pt) 2004-03-09
BR0116951B1 BR0116951B1 (pt) 2011-06-14

Family

ID=8244313

Family Applications (1)

Application Number Title Priority Date Filing Date
BRPI0116951-3A BR0116951B1 (pt) 2001-03-27 2001-03-27 evaporador de arco com guia magnÉtico poderoso para alvos tendo uma grande Área de superfÍcie.

Country Status (9)

Country Link
US (2) US20040112736A1 (pt)
EP (1) EP1382711B1 (pt)
JP (1) JP2004523658A (pt)
CN (1) CN100355933C (pt)
AT (1) ATE277204T1 (pt)
BR (1) BR0116951B1 (pt)
DE (1) DE60105856T2 (pt)
ES (1) ES2228830T3 (pt)
WO (1) WO2002077318A1 (pt)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
MXPA05006762A (es) * 2002-12-19 2005-09-08 Unaxis Balzers Aktiengesellsch Fuente de arco al vacio que comprende un dispositivo para generar un campo magnetico.
EP1939925A1 (en) * 2005-08-02 2008-07-02 Fundacion Tekniker Cathodic arc evaporation device and method of igniting said arc
EP1970464B1 (en) 2005-12-16 2010-03-03 Fundacion Tekniker Cathode evaporation machine
HUE028868T2 (en) 2007-04-17 2017-01-30 Oerlikon Surface Solutions Ag Pfäffikon Vacuum Evaporator Source with Arched Vacuum Evaporator and Arched Vacuum Evaporator Source
JP4314318B2 (ja) * 2007-10-31 2009-08-12 キヤノンアネルバ株式会社 マグネトロンユニット、マグネトロンスパッタリング装置及び電子デバイスの製造方法
EP2159821B1 (de) * 2008-09-02 2020-01-15 Oerlikon Surface Solutions AG, Pfäffikon Beschichtungsvorrichtung zum Beschichten eines Substrats, sowie ein Verfahren zum Beschichten eines Substrats
WO2010072850A1 (es) 2008-12-26 2010-07-01 Fundacion Tekniker Evaporador de arco y método para operar el evaporador
JP5839422B2 (ja) * 2009-04-28 2016-01-06 株式会社神戸製鋼所 成膜速度が速いアーク式蒸発源及びこのアーク式蒸発源を用いた皮膜の製造方法
JP5649308B2 (ja) 2009-04-28 2015-01-07 株式会社神戸製鋼所 成膜速度が速いアーク式蒸発源及びこのアーク式蒸発源を用いた皮膜の製造方法
JP5318052B2 (ja) * 2010-06-23 2013-10-16 株式会社神戸製鋼所 成膜速度が速いアーク式蒸発源、このアーク式蒸発源を用いた皮膜の製造方法及び成膜装置
JP5081320B2 (ja) * 2011-02-23 2012-11-28 株式会社神戸製鋼所 アーク式蒸発源
CN103392026B (zh) 2011-02-23 2016-04-06 株式会社神户制钢所 电弧式蒸发源
JP5081315B2 (ja) * 2011-02-23 2012-11-28 株式会社神戸製鋼所 アーク式蒸発源
UA101678C2 (uk) * 2011-04-08 2013-04-25 Национальный Научный Центр "Харьковский Физико-Технический Институт" Вакуумно-дуговий випарник для генерування катодної плазми
JP5081327B1 (ja) * 2011-04-25 2012-11-28 株式会社神戸製鋼所 アーク式蒸発源
US9153422B2 (en) 2011-08-02 2015-10-06 Envaerospace, Inc. Arc PVD plasma source and method of deposition of nanoimplanted coatings
CN102534513B (zh) * 2011-12-19 2014-04-16 东莞市汇成真空科技有限公司 一种组合磁场的矩形平面阴极电弧蒸发源
JP5946337B2 (ja) * 2012-06-20 2016-07-06 株式会社神戸製鋼所 アーク式蒸発源
CN103526166B (zh) * 2013-10-25 2015-12-02 中国航空工业集团公司北京航空制造工程研究所 矩形平面阴极弧源和阴极靶材烧蚀装置
JP6403269B2 (ja) * 2014-07-30 2018-10-10 株式会社神戸製鋼所 アーク蒸発源
WO2018149894A1 (de) * 2017-02-14 2018-08-23 Oerlikon Surface Solutions Ag, Pfäffikon Lichtbogenkathodenverdampfung mit vorbestimmtem kathodenmaterialabtrag
MX2020004821A (es) * 2017-10-03 2020-08-13 Oerlikon Surface Solutions Ag Pfaeffikon Fuente de arco con campo magnetico confinado.
US20220307125A1 (en) * 2019-07-03 2022-09-29 Oerlikon Surface Solutions Ag, Pfäffikon Cathodic arc source
CN111139438B (zh) * 2019-12-25 2022-01-21 兰州空间技术物理研究所 一种磁路可控式真空阴极电弧离子源

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4673477A (en) * 1984-03-02 1987-06-16 Regents Of The University Of Minnesota Controlled vacuum arc material deposition, method and apparatus
JPS62207863A (ja) * 1986-03-06 1987-09-12 Matsushita Electric Ind Co Ltd 高速スパツタリング装置
EP0306491B1 (en) * 1986-04-04 1994-03-09 The Regents Of The University Of Minnesota Arc coating of refractory metal compounds
JP2537210B2 (ja) * 1986-09-18 1996-09-25 株式会社東芝 高密度プラズマの発生装置
DE3700633C2 (de) * 1987-01-12 1997-02-20 Reinar Dr Gruen Verfahren und Vorrichtung zum schonenden Beschichten elektrisch leitender Gegenstände mittels Plasma
DE4017111C2 (de) * 1990-05-28 1998-01-29 Hauzer Holding Lichtbogen-Magnetron-Vorrichtung
US5298136A (en) * 1987-08-18 1994-03-29 Regents Of The University Of Minnesota Steered arc coating with thick targets
JPH02166278A (ja) * 1988-12-21 1990-06-26 Amorufuasu Denshi Device Kenkyusho:Kk マグネトロンスパッタ装置
DE4301516C2 (de) * 1993-01-21 2003-02-13 Applied Films Gmbh & Co Kg Targetkühlung mit Wanne
JPH0888176A (ja) * 1994-09-16 1996-04-02 Toshiba Corp スパッタリング装置
GB9722649D0 (en) * 1997-10-24 1997-12-24 Univ Nanyang Cathode ARC source for metallic and dielectric coatings
US6440282B1 (en) * 1999-07-06 2002-08-27 Applied Materials, Inc. Sputtering reactor and method of using an unbalanced magnetron

Also Published As

Publication number Publication date
US20040112736A1 (en) 2004-06-17
BR0116951B1 (pt) 2011-06-14
US7828946B2 (en) 2010-11-09
DE60105856D1 (de) 2004-10-28
US20060237309A1 (en) 2006-10-26
EP1382711B1 (en) 2004-09-22
CN100355933C (zh) 2007-12-19
DE60105856T2 (de) 2005-10-20
JP2004523658A (ja) 2004-08-05
ES2228830T3 (es) 2005-04-16
ATE277204T1 (de) 2004-10-15
EP1382711A1 (en) 2004-01-21
CN1494603A (zh) 2004-05-05
WO2002077318A1 (es) 2002-10-03

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Legal Events

Date Code Title Description
B06A Patent application procedure suspended [chapter 6.1 patent gazette]
B09A Decision: intention to grant [chapter 9.1 patent gazette]
B16A Patent or certificate of addition of invention granted [chapter 16.1 patent gazette]

Free format text: PRAZO DE VALIDADE: 10 (DEZ) ANOS CONTADOS A PARTIR DE 14/06/2011, OBSERVADAS AS CONDICOES LEGAIS.

B21F Lapse acc. art. 78, item iv - on non-payment of the annual fees in time

Free format text: REFERENTE AS 12A, 13A E 14A ANUIDADES.

B24J Lapse because of non-payment of annual fees (definitively: art 78 iv lpi, resolution 113/2013 art. 12)

Free format text: EM VIRTUDE DA EXTINCAO PUBLICADA NA RPI 2343 DE 01-12-2015 E CONSIDERANDO AUSENCIA DE MANIFESTACAO DENTRO DOS PRAZOS LEGAIS, INFORMO QUE CABE SER MANTIDA A EXTINCAO DA PATENTE E SEUS CERTIFICADOS, CONFORME O DISPOSTO NO ARTIGO 12, DA RESOLUCAO 113/2013.