DE60135875D1 - Gerät zur Verdampfung von Werkstoffen zur Beschichtung von Gegenständen - Google Patents

Gerät zur Verdampfung von Werkstoffen zur Beschichtung von Gegenständen

Info

Publication number
DE60135875D1
DE60135875D1 DE60135875T DE60135875T DE60135875D1 DE 60135875 D1 DE60135875 D1 DE 60135875D1 DE 60135875 T DE60135875 T DE 60135875T DE 60135875 T DE60135875 T DE 60135875T DE 60135875 D1 DE60135875 D1 DE 60135875D1
Authority
DE
Germany
Prior art keywords
evaporating materials
coating objects
coating
cathode
source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60135875T
Other languages
English (en)
Inventor
Pavel Holubar
Mojmir Jilek
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shm S R O
Original Assignee
Shm S R O
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shm S R O filed Critical Shm S R O
Application granted granted Critical
Publication of DE60135875D1 publication Critical patent/DE60135875D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/36—Gas-filled discharge tubes for cleaning surfaces while plating with ions of materials introduced into the discharge, e.g. introduced by evaporation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32055—Arc discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/3266—Magnetic control means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3402—Gas-filled discharge tubes operating with cathodic sputtering using supplementary magnetic fields
    • H01J37/3405—Magnetron sputtering

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
DE60135875T 2000-12-18 2001-12-14 Gerät zur Verdampfung von Werkstoffen zur Beschichtung von Gegenständen Expired - Lifetime DE60135875D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CZ20004747A CZ296094B6 (cs) 2000-12-18 2000-12-18 Zarízení pro odparování materiálu k povlakování predmetu
PCT/CZ2001/000075 WO2002050864A1 (en) 2000-12-18 2001-12-14 Apparatus for evaporation of materials for coating of objects

Publications (1)

Publication Number Publication Date
DE60135875D1 true DE60135875D1 (de) 2008-10-30

Family

ID=5472850

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60135875T Expired - Lifetime DE60135875D1 (de) 2000-12-18 2001-12-14 Gerät zur Verdampfung von Werkstoffen zur Beschichtung von Gegenständen

Country Status (13)

Country Link
US (1) US20040069233A1 (de)
EP (1) EP1356496B1 (de)
KR (1) KR20020087056A (de)
CN (1) CN1404620A (de)
AT (1) ATE408890T1 (de)
AU (2) AU2002220482A1 (de)
CZ (1) CZ296094B6 (de)
DE (1) DE60135875D1 (de)
DK (1) DK1356496T3 (de)
ES (1) ES2311497T3 (de)
PT (1) PT1356496E (de)
SI (1) SI1356496T1 (de)
WO (2) WO2002050864A1 (de)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1524329A1 (de) * 2003-10-17 2005-04-20 Platit AG Modulare Vorrichtung zur Beschichtung von Oberflächen
SG118232A1 (en) * 2004-02-27 2006-06-27 Superiorcoat Private Ltd Cathodic arc coating apparatus
US7704611B2 (en) 2004-04-19 2010-04-27 Pivot A.S. Hard, wear-resistant aluminum nitride based coating
DE102004019060B4 (de) * 2004-04-20 2009-01-08 Peter Lazarov Vorrichtung zum Einbringen einer Lichtbogenquelle in eine Beschichtungsanlage für große Substrate oder Bänder
KR100701267B1 (ko) * 2005-11-18 2007-03-29 한국생산기술연구원 저전류 구동형 펄스 아크 발생장치
US7879203B2 (en) * 2006-12-11 2011-02-01 General Electric Company Method and apparatus for cathodic arc ion plasma deposition
EP2159821B1 (de) * 2008-09-02 2020-01-15 Oerlikon Surface Solutions AG, Pfäffikon Beschichtungsvorrichtung zum Beschichten eines Substrats, sowie ein Verfahren zum Beschichten eines Substrats
EP2163661B1 (de) 2008-09-05 2012-08-01 LMT Fette Werkzeugtechnik GmbH & Co. KG Wälzfräswerkzeug mit einer Beschichtung und Verfahren zur Neubeschichtung eines Wälzfräswerkzeuges
CZ305038B6 (cs) 2009-07-28 2015-04-08 Shm, S. R. O. Způsob vytváření ochranných a funkčních vrstev metodou PVD z katody se sníženou povrchovou elektrickou vodivostí
CZ304905B6 (cs) 2009-11-23 2015-01-14 Shm, S.R.O. Způsob vytváření PVD vrstev s pomocí rotační cylindrické katody a zařízení k provádění tohoto způsobu
EP2428994A1 (de) * 2010-09-10 2012-03-14 Applied Materials, Inc. Verfahren und System zur Abscheidung eines Dünnschichttransistors
US20120193226A1 (en) * 2011-02-02 2012-08-02 Beers Russell A Physical vapor deposition system
EP2521159A1 (de) 2011-05-06 2012-11-07 Pivot a.s. Glimmentladungsvorrichtung und Verfahren mit seitlich rotierenden Lichtbogenkathoden
CH705029A1 (de) 2011-05-27 2012-11-30 Bloesch W Ag Beschichtetes Holzbearbeitungswerkzeug.
CZ201660A3 (cs) 2016-02-05 2017-03-22 Platit A.S. Způsob nanášení otěruvzdorné DLC vrstvy
CN108374154B (zh) * 2018-02-26 2023-06-13 温州职业技术学院 带有复合磁场的类金刚石涂层制备装置及其应用

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DD123952A1 (de) * 1975-12-22 1977-01-26
AT376460B (de) * 1982-09-17 1984-11-26 Kljuchko Gennady V Plasmalichtbogeneinrichtung zum auftragen von ueberzuegen
WO1985003954A1 (en) * 1984-03-02 1985-09-12 Regents Of The University Of Minnesota Controlled vacuum arc material deposition, method and apparatus
DE3881256D1 (de) * 1987-03-06 1993-07-01 Balzers Hochvakuum Verfahren und vorrichtungen zum vakuumbeschichten mittels einer elektrischen bogenentladung.
NL8700620A (nl) * 1987-03-16 1988-10-17 Hauzer Holding Kathode boogverdampingsinrichting alsmede werkwijze voor het bedrijven daarvan.
JPH0772338B2 (ja) * 1990-12-25 1995-08-02 株式会社神戸製鋼所 真空アーク蒸着装置
JPH10509773A (ja) * 1995-04-25 1998-09-22 ザ ビーオーシー グループ インコーポレイテッド 基板上に誘電体層を形成するためのスパッタリング装置及び方法
EP1347491B1 (de) * 1997-08-30 2007-03-07 United Technologies Corporation Vorrichtung zur Bogenführung in einem kathodischen Bogen-Beschichtungsgerät
SE511139C2 (sv) * 1997-11-20 1999-08-09 Hana Barankova Plasmabearbetningsapparat med vridbara magneter

Also Published As

Publication number Publication date
CZ20004747A3 (cs) 2002-08-14
ATE408890T1 (de) 2008-10-15
EP1356496B1 (de) 2008-09-17
AU2002226377A1 (en) 2002-07-01
DK1356496T3 (da) 2009-02-02
CN1404620A (zh) 2003-03-19
ES2311497T3 (es) 2009-02-16
AU2002220482A1 (en) 2002-07-01
SI1356496T1 (sl) 2009-02-28
KR20020087056A (ko) 2002-11-21
WO2002050865A1 (en) 2002-06-27
PT1356496E (pt) 2008-12-03
US20040069233A1 (en) 2004-04-15
CZ296094B6 (cs) 2006-01-11
WO2002050864A1 (en) 2002-06-27
EP1356496A1 (de) 2003-10-29

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Legal Events

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