AU2002220482A1 - Apparatus for evaporation of materials for coating of objects - Google Patents

Apparatus for evaporation of materials for coating of objects

Info

Publication number
AU2002220482A1
AU2002220482A1 AU2002220482A AU2048202A AU2002220482A1 AU 2002220482 A1 AU2002220482 A1 AU 2002220482A1 AU 2002220482 A AU2002220482 A AU 2002220482A AU 2048202 A AU2048202 A AU 2048202A AU 2002220482 A1 AU2002220482 A1 AU 2002220482A1
Authority
AU
Australia
Prior art keywords
coating
evaporation
objects
materials
cathode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002220482A
Inventor
Pavel Holubar
Mojmir Jilek
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shm Sro
Original Assignee
S R O SHM
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by S R O SHM filed Critical S R O SHM
Publication of AU2002220482A1 publication Critical patent/AU2002220482A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/36—Gas-filled discharge tubes for cleaning surfaces while plating with ions of materials introduced into the discharge, e.g. introduced by evaporation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32055—Arc discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/3266—Magnetic control means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3402—Gas-filled discharge tubes operating with cathodic sputtering using supplementary magnetic fields
    • H01J37/3405—Magnetron sputtering

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)

Abstract

Apparatus for evaporation of materials for coating of objects by a physical method (PVD) using low voltage electric arc, such apparatus being equipped with a source (4a, 4b, 4) of magnetic field and an anode (3) and a cathode (2a, 2b, 2) of electric arc. At least one cathode (2a, 2b, 2) and at least one source (4a, 4b, 4) of magnetic field can pivot in the coating chamber (1).
AU2002220482A 2000-12-18 2001-12-14 Apparatus for evaporation of materials for coating of objects Abandoned AU2002220482A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
CZ2000-4747 2000-12-18
CZ20004747A CZ296094B6 (en) 2000-12-18 2000-12-18 Apparatus for evaporation of materials for coating of objects
PCT/CZ2001/000075 WO2002050864A1 (en) 2000-12-18 2001-12-14 Apparatus for evaporation of materials for coating of objects

Publications (1)

Publication Number Publication Date
AU2002220482A1 true AU2002220482A1 (en) 2002-07-01

Family

ID=5472850

Family Applications (2)

Application Number Title Priority Date Filing Date
AU2002220482A Abandoned AU2002220482A1 (en) 2000-12-18 2001-12-14 Apparatus for evaporation of materials for coating of objects
AU2002226377A Abandoned AU2002226377A1 (en) 2000-12-18 2001-12-18 Apparatus for evaporation of materials for coating of objects

Family Applications After (1)

Application Number Title Priority Date Filing Date
AU2002226377A Abandoned AU2002226377A1 (en) 2000-12-18 2001-12-18 Apparatus for evaporation of materials for coating of objects

Country Status (13)

Country Link
US (1) US20040069233A1 (en)
EP (1) EP1356496B1 (en)
KR (1) KR20020087056A (en)
CN (1) CN1404620A (en)
AT (1) ATE408890T1 (en)
AU (2) AU2002220482A1 (en)
CZ (1) CZ296094B6 (en)
DE (1) DE60135875D1 (en)
DK (1) DK1356496T3 (en)
ES (1) ES2311497T3 (en)
PT (1) PT1356496E (en)
SI (1) SI1356496T1 (en)
WO (2) WO2002050864A1 (en)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1524329A1 (en) * 2003-10-17 2005-04-20 Platit AG Modular device for surface coating
SG118232A1 (en) * 2004-02-27 2006-06-27 Superiorcoat Private Ltd Cathodic arc coating apparatus
EP1749118B1 (en) 2004-04-19 2014-04-09 Pivot a.s. A hard, wear-resistant aluminum nitride based coating
DE102004019060B4 (en) * 2004-04-20 2009-01-08 Peter Lazarov Device for introducing an arc source into a coating system for large substrates or strips
KR100701267B1 (en) * 2005-11-18 2007-03-29 한국생산기술연구원 Apparatus for pulse arc by low an electric current
US7879203B2 (en) * 2006-12-11 2011-02-01 General Electric Company Method and apparatus for cathodic arc ion plasma deposition
EP2159821B1 (en) * 2008-09-02 2020-01-15 Oerlikon Surface Solutions AG, Pfäffikon Coating device for coating a substrate and method for same
ES2388899T3 (en) 2008-09-05 2012-10-19 Lmt Fette Werkzeugtechnik Gmbh & Co. Kg Milling tool by generation with a coating and procedure for the new coating of a milling tool by generation
CZ305038B6 (en) 2009-07-28 2015-04-08 Shm, S. R. O. Process of making protective and functional layers using PVD method from a cathode with reduced surface electric conductance
CZ304905B6 (en) 2009-11-23 2015-01-14 Shm, S.R.O. Method of depositing PVD layers, using cylindrical rotating cathode and apparatus for making the same
EP2428994A1 (en) * 2010-09-10 2012-03-14 Applied Materials, Inc. Method and system for depositing a thin-film transistor
US20120193226A1 (en) * 2011-02-02 2012-08-02 Beers Russell A Physical vapor deposition system
EP2521159A1 (en) 2011-05-06 2012-11-07 Pivot a.s. Glow discharge apparatus and method with lateral rotating arc cathodes
CH705029A1 (en) 2011-05-27 2012-11-30 Bloesch W Ag Faced woodworking tools.
CZ201660A3 (en) 2016-02-05 2017-03-22 Platit A.S. A method of applying a wear-resistant DLC layer
CN108374154B (en) * 2018-02-26 2023-06-13 温州职业技术学院 Diamond-like carbon coating preparation device with composite magnetic field and application thereof

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DD123952A1 (en) * 1975-12-22 1977-01-26
AT376460B (en) * 1982-09-17 1984-11-26 Kljuchko Gennady V PLASMA ARC DEVICE FOR APPLYING COVERS
EP0174977A4 (en) * 1984-03-02 1987-02-12 Univ Minnesota Controlled vacuum arc material deposition, method and apparatus.
EP0285745B1 (en) * 1987-03-06 1993-05-26 Balzers Aktiengesellschaft Process and apparatus for vacuum coating by means of an electric arc discharge
NL8700620A (en) * 1987-03-16 1988-10-17 Hauzer Holding CATHODE ARC VAPORIZATION DEVICE AND METHOD FOR ITS OPERATION.
JPH0772338B2 (en) * 1990-12-25 1995-08-02 株式会社神戸製鋼所 Vacuum arc deposition equipment
ES2202439T3 (en) * 1995-04-25 2004-04-01 Von Ardenne Anlagentechnik Gmbh SPRAY SYSTEM THAT USES A ROTARY CYLINDER MAGNETRON ELECTRICALLY POWERED USING ALTERNATE CURRENT.
EP1347491B1 (en) * 1997-08-30 2007-03-07 United Technologies Corporation Apparatus for driving the arc in a cathodic arc coater
SE511139C2 (en) * 1997-11-20 1999-08-09 Hana Barankova Plasma processing apparatus with rotatable magnets

Also Published As

Publication number Publication date
CZ20004747A3 (en) 2002-08-14
US20040069233A1 (en) 2004-04-15
DK1356496T3 (en) 2009-02-02
DE60135875D1 (en) 2008-10-30
CN1404620A (en) 2003-03-19
ES2311497T3 (en) 2009-02-16
SI1356496T1 (en) 2009-02-28
AU2002226377A1 (en) 2002-07-01
KR20020087056A (en) 2002-11-21
PT1356496E (en) 2008-12-03
WO2002050865A1 (en) 2002-06-27
CZ296094B6 (en) 2006-01-11
EP1356496B1 (en) 2008-09-17
WO2002050864A1 (en) 2002-06-27
EP1356496A1 (en) 2003-10-29
ATE408890T1 (en) 2008-10-15

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