ATE408890T1 - Gerät zur verdampfung von werkstoffen zur beschichtung von gegenständen - Google Patents

Gerät zur verdampfung von werkstoffen zur beschichtung von gegenständen

Info

Publication number
ATE408890T1
ATE408890T1 AT01271645T AT01271645T ATE408890T1 AT E408890 T1 ATE408890 T1 AT E408890T1 AT 01271645 T AT01271645 T AT 01271645T AT 01271645 T AT01271645 T AT 01271645T AT E408890 T1 ATE408890 T1 AT E408890T1
Authority
AT
Austria
Prior art keywords
evaporation
materials
coating objects
coating
cathode
Prior art date
Application number
AT01271645T
Other languages
English (en)
Inventor
Pavel Holubar
Mojmir Jilek
Original Assignee
Shm S R O
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shm S R O filed Critical Shm S R O
Application granted granted Critical
Publication of ATE408890T1 publication Critical patent/ATE408890T1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/36—Gas-filled discharge tubes for cleaning surfaces while plating with ions of materials introduced into the discharge, e.g. introduced by evaporation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32055—Arc discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/3266—Magnetic control means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3402—Gas-filled discharge tubes operating with cathodic sputtering using supplementary magnetic fields
    • H01J37/3405—Magnetron sputtering

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
AT01271645T 2000-12-18 2001-12-14 Gerät zur verdampfung von werkstoffen zur beschichtung von gegenständen ATE408890T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CZ20004747A CZ296094B6 (cs) 2000-12-18 2000-12-18 Zarízení pro odparování materiálu k povlakování predmetu

Publications (1)

Publication Number Publication Date
ATE408890T1 true ATE408890T1 (de) 2008-10-15

Family

ID=5472850

Family Applications (1)

Application Number Title Priority Date Filing Date
AT01271645T ATE408890T1 (de) 2000-12-18 2001-12-14 Gerät zur verdampfung von werkstoffen zur beschichtung von gegenständen

Country Status (13)

Country Link
US (1) US20040069233A1 (de)
EP (1) EP1356496B1 (de)
KR (1) KR20020087056A (de)
CN (1) CN1404620A (de)
AT (1) ATE408890T1 (de)
AU (2) AU2002220482A1 (de)
CZ (1) CZ296094B6 (de)
DE (1) DE60135875D1 (de)
DK (1) DK1356496T3 (de)
ES (1) ES2311497T3 (de)
PT (1) PT1356496E (de)
SI (1) SI1356496T1 (de)
WO (2) WO2002050864A1 (de)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1524329A1 (de) * 2003-10-17 2005-04-20 Platit AG Modulare Vorrichtung zur Beschichtung von Oberflächen
SG118232A1 (en) * 2004-02-27 2006-06-27 Superiorcoat Private Ltd Cathodic arc coating apparatus
US7704611B2 (en) 2004-04-19 2010-04-27 Pivot A.S. Hard, wear-resistant aluminum nitride based coating
DE102004019060B4 (de) * 2004-04-20 2009-01-08 Peter Lazarov Vorrichtung zum Einbringen einer Lichtbogenquelle in eine Beschichtungsanlage für große Substrate oder Bänder
KR100701267B1 (ko) * 2005-11-18 2007-03-29 한국생산기술연구원 저전류 구동형 펄스 아크 발생장치
US7879203B2 (en) * 2006-12-11 2011-02-01 General Electric Company Method and apparatus for cathodic arc ion plasma deposition
EP2159821B1 (de) * 2008-09-02 2020-01-15 Oerlikon Surface Solutions AG, Pfäffikon Beschichtungsvorrichtung zum Beschichten eines Substrats, sowie ein Verfahren zum Beschichten eines Substrats
EP2163661B1 (de) 2008-09-05 2012-08-01 LMT Fette Werkzeugtechnik GmbH & Co. KG Wälzfräswerkzeug mit einer Beschichtung und Verfahren zur Neubeschichtung eines Wälzfräswerkzeuges
CZ305038B6 (cs) 2009-07-28 2015-04-08 Shm, S. R. O. Způsob vytváření ochranných a funkčních vrstev metodou PVD z katody se sníženou povrchovou elektrickou vodivostí
CZ304905B6 (cs) 2009-11-23 2015-01-14 Shm, S.R.O. Způsob vytváření PVD vrstev s pomocí rotační cylindrické katody a zařízení k provádění tohoto způsobu
EP2428994A1 (de) * 2010-09-10 2012-03-14 Applied Materials, Inc. Verfahren und System zur Abscheidung eines Dünnschichttransistors
US20120193226A1 (en) * 2011-02-02 2012-08-02 Beers Russell A Physical vapor deposition system
EP2521159A1 (de) 2011-05-06 2012-11-07 Pivot a.s. Glimmentladungsvorrichtung und Verfahren mit seitlich rotierenden Lichtbogenkathoden
CH705029A1 (de) 2011-05-27 2012-11-30 Bloesch W Ag Beschichtetes Holzbearbeitungswerkzeug.
CZ201660A3 (cs) 2016-02-05 2017-03-22 Platit A.S. Způsob nanášení otěruvzdorné DLC vrstvy
CN108374154B (zh) * 2018-02-26 2023-06-13 温州职业技术学院 带有复合磁场的类金刚石涂层制备装置及其应用

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DD123952A1 (de) * 1975-12-22 1977-01-26
AT376460B (de) * 1982-09-17 1984-11-26 Kljuchko Gennady V Plasmalichtbogeneinrichtung zum auftragen von ueberzuegen
WO1985003954A1 (en) * 1984-03-02 1985-09-12 Regents Of The University Of Minnesota Controlled vacuum arc material deposition, method and apparatus
DE3881256D1 (de) * 1987-03-06 1993-07-01 Balzers Hochvakuum Verfahren und vorrichtungen zum vakuumbeschichten mittels einer elektrischen bogenentladung.
NL8700620A (nl) * 1987-03-16 1988-10-17 Hauzer Holding Kathode boogverdampingsinrichting alsmede werkwijze voor het bedrijven daarvan.
JPH0772338B2 (ja) * 1990-12-25 1995-08-02 株式会社神戸製鋼所 真空アーク蒸着装置
JPH10509773A (ja) * 1995-04-25 1998-09-22 ザ ビーオーシー グループ インコーポレイテッド 基板上に誘電体層を形成するためのスパッタリング装置及び方法
EP1347491B1 (de) * 1997-08-30 2007-03-07 United Technologies Corporation Vorrichtung zur Bogenführung in einem kathodischen Bogen-Beschichtungsgerät
SE511139C2 (sv) * 1997-11-20 1999-08-09 Hana Barankova Plasmabearbetningsapparat med vridbara magneter

Also Published As

Publication number Publication date
CZ20004747A3 (cs) 2002-08-14
EP1356496B1 (de) 2008-09-17
AU2002226377A1 (en) 2002-07-01
DK1356496T3 (da) 2009-02-02
CN1404620A (zh) 2003-03-19
ES2311497T3 (es) 2009-02-16
DE60135875D1 (de) 2008-10-30
AU2002220482A1 (en) 2002-07-01
SI1356496T1 (sl) 2009-02-28
KR20020087056A (ko) 2002-11-21
WO2002050865A1 (en) 2002-06-27
PT1356496E (pt) 2008-12-03
US20040069233A1 (en) 2004-04-15
CZ296094B6 (cs) 2006-01-11
WO2002050864A1 (en) 2002-06-27
EP1356496A1 (de) 2003-10-29

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