BG102467A - Electrostatic ionic source - Google Patents

Electrostatic ionic source

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Publication number
BG102467A
BG102467A BG102467A BG10246798A BG102467A BG 102467 A BG102467 A BG 102467A BG 102467 A BG102467 A BG 102467A BG 10246798 A BG10246798 A BG 10246798A BG 102467 A BG102467 A BG 102467A
Authority
BG
Bulgaria
Prior art keywords
ionic
source
delaying
focusing
acceleration
Prior art date
Application number
BG102467A
Other languages
Bulgarian (bg)
Other versions
BG62986B1 (en
Inventor
Динко Зурлев
Original Assignee
Динко Зурлев
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Динко Зурлев filed Critical Динко Зурлев
Priority to BG102467A priority Critical patent/BG62986B1/en
Publication of BG102467A publication Critical patent/BG102467A/en
Publication of BG62986B1 publication Critical patent/BG62986B1/en

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  • Electron Sources, Ion Sources (AREA)

Abstract

The ionic source is used in ionic technologies.It produces anionic beam of positive ions of all metals and semiconductors insolid aggregate state with sufficient density and magnitude of theionic current for technological applications. 100% ionization ofthe working substance is produced with minumum energy costs, fullcontrol of the consumption of the ionic beam and facility for itsfixation into a small-diameter spot. The ionic source has anexceptionally long operational time and high reliablility. Itconsists of an ionic emitter with field evaporation (1) suppliedwith a focusing (3), acceleration (5) and delaying (6) electrode,system of neutralization (9) of the ionic beam, source ofpreheating voltage (10) for the ionic emitter with fieldevaporation (1), DC supply source (8) and DC sources of focusing(4), acceleration (2) and delaying (7) voltage.3 claims, 5 figures
BG102467A 1998-05-20 1998-05-20 Electrostatic ionic source BG62986B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
BG102467A BG62986B1 (en) 1998-05-20 1998-05-20 Electrostatic ionic source

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
BG102467A BG62986B1 (en) 1998-05-20 1998-05-20 Electrostatic ionic source

Publications (2)

Publication Number Publication Date
BG102467A true BG102467A (en) 1999-11-30
BG62986B1 BG62986B1 (en) 2000-12-29

Family

ID=3927452

Family Applications (1)

Application Number Title Priority Date Filing Date
BG102467A BG62986B1 (en) 1998-05-20 1998-05-20 Electrostatic ionic source

Country Status (1)

Country Link
BG (1) BG62986B1 (en)

Also Published As

Publication number Publication date
BG62986B1 (en) 2000-12-29

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