BG102467A - Electrostatic ionic source - Google Patents
Electrostatic ionic sourceInfo
- Publication number
- BG102467A BG102467A BG102467A BG10246798A BG102467A BG 102467 A BG102467 A BG 102467A BG 102467 A BG102467 A BG 102467A BG 10246798 A BG10246798 A BG 10246798A BG 102467 A BG102467 A BG 102467A
- Authority
- BG
- Bulgaria
- Prior art keywords
- ionic
- source
- delaying
- focusing
- acceleration
- Prior art date
Links
Landscapes
- Electron Sources, Ion Sources (AREA)
Abstract
The ionic source is used in ionic technologies.It produces anionic beam of positive ions of all metals and semiconductors insolid aggregate state with sufficient density and magnitude of theionic current for technological applications. 100% ionization ofthe working substance is produced with minumum energy costs, fullcontrol of the consumption of the ionic beam and facility for itsfixation into a small-diameter spot. The ionic source has anexceptionally long operational time and high reliablility. Itconsists of an ionic emitter with field evaporation (1) suppliedwith a focusing (3), acceleration (5) and delaying (6) electrode,system of neutralization (9) of the ionic beam, source ofpreheating voltage (10) for the ionic emitter with fieldevaporation (1), DC supply source (8) and DC sources of focusing(4), acceleration (2) and delaying (7) voltage.3 claims, 5 figures
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
BG102467A BG62986B1 (en) | 1998-05-20 | 1998-05-20 | Electrostatic ionic source |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
BG102467A BG62986B1 (en) | 1998-05-20 | 1998-05-20 | Electrostatic ionic source |
Publications (2)
Publication Number | Publication Date |
---|---|
BG102467A true BG102467A (en) | 1999-11-30 |
BG62986B1 BG62986B1 (en) | 2000-12-29 |
Family
ID=3927452
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
BG102467A BG62986B1 (en) | 1998-05-20 | 1998-05-20 | Electrostatic ionic source |
Country Status (1)
Country | Link |
---|---|
BG (1) | BG62986B1 (en) |
-
1998
- 1998-05-20 BG BG102467A patent/BG62986B1/en unknown
Also Published As
Publication number | Publication date |
---|---|
BG62986B1 (en) | 2000-12-29 |
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