BE816495A - Bobine de chauffage par induction pour une fusion par zones sans creuset de barreaux semi-conducteurs - Google Patents

Bobine de chauffage par induction pour une fusion par zones sans creuset de barreaux semi-conducteurs

Info

Publication number
BE816495A
BE816495A BE145560A BE145560A BE816495A BE 816495 A BE816495 A BE 816495A BE 145560 A BE145560 A BE 145560A BE 145560 A BE145560 A BE 145560A BE 816495 A BE816495 A BE 816495A
Authority
BE
Belgium
Prior art keywords
crucible
induction heating
heating coil
zone melting
semiconductor bars
Prior art date
Application number
BE145560A
Other languages
English (en)
French (fr)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of BE816495A publication Critical patent/BE816495A/xx

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B6/00—Heating by electric, magnetic or electromagnetic fields
    • H05B6/02—Induction heating
    • H05B6/36—Coil arrangements
    • H05B6/362—Coil arrangements with flat coil conductors
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
    • C30B13/16—Heating of the molten zone
    • C30B13/20—Heating of the molten zone by induction, e.g. hot wire technique

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Induction Heating (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Crucibles And Fluidized-Bed Furnaces (AREA)
BE145560A 1973-06-18 1974-06-18 Bobine de chauffage par induction pour une fusion par zones sans creuset de barreaux semi-conducteurs BE816495A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2331004A DE2331004C3 (de) 1973-06-18 1973-06-18 Induktionsheizspule zum tiegelfreien Zonenschmelzen

Publications (1)

Publication Number Publication Date
BE816495A true BE816495A (fr) 1974-10-16

Family

ID=5884356

Family Applications (1)

Application Number Title Priority Date Filing Date
BE145560A BE816495A (fr) 1973-06-18 1974-06-18 Bobine de chauffage par induction pour une fusion par zones sans creuset de barreaux semi-conducteurs

Country Status (5)

Country Link
US (1) US3898413A (ja)
JP (2) JPS5037346A (ja)
BE (1) BE816495A (ja)
DE (1) DE2331004C3 (ja)
IT (1) IT1014933B (ja)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2357688C2 (de) * 1973-11-19 1982-11-18 Siemens AG, 1000 Berlin und 8000 München Induktionsheizspule zum tiegelfreien Zonenschmelzen
US4184135A (en) * 1978-04-10 1980-01-15 Monsanto Company Breakapart single turn RF induction apparatus
DE3229461A1 (de) * 1982-08-06 1984-02-09 Siemens AG, 1000 Berlin und 8000 München Vorrichtung zum tiegelfreien zonenschmelzen eines, insbesondere aus silicium bestehenden halbleiterstabes
DE4142245A1 (de) * 1991-12-17 1993-06-24 Tro Transformatoren Und Schalt Isolierung fuer induktoren von induktiven erhitzungsanlagen und verfahren zu ihrer herstellung
JP3127981B2 (ja) * 1995-01-31 2001-01-29 信越半導体株式会社 高周波誘導加熱装置
US5778681A (en) * 1997-04-15 1998-07-14 Varian Associates, Inc. Cooling device for cooling heatable gas chromatography analyte sample injector
JP4581977B2 (ja) * 2005-11-24 2010-11-17 信越半導体株式会社 シリコン単結晶の製造方法
EP1968355B1 (de) 2007-03-08 2013-02-27 HÜTTINGER Elektronik GmbH + Co. KG Induktionsspule und Vorrichtung zum induktiven Erwärmen von Werkstücken
JP2009158598A (ja) * 2007-12-25 2009-07-16 Panasonic Electric Works Co Ltd 平面コイル及びこれを用いた非接触電力伝送機器
US20110073591A1 (en) * 2008-07-17 2011-03-31 Seiichi Sawatsubashi Guide Chip Structure for High-Frequency Induction Heating Coil
JP5505362B2 (ja) * 2011-04-21 2014-05-28 信越半導体株式会社 複巻誘導加熱コイル及びこれを有する単結晶製造装置並びにこれを用いた単結晶製造方法
JP5505365B2 (ja) * 2011-04-28 2014-05-28 信越半導体株式会社 誘導加熱コイルにおける放電防止用絶縁部材及びこれを用いた単結晶製造装置並びに単結晶製造方法
JP7120464B2 (ja) 2019-07-05 2022-08-17 株式会社Sumco 誘導加熱コイル及びこれを用いた単結晶製造装置

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2459971A (en) * 1945-08-30 1949-01-25 Induction Heating Corp Inductor for high-frequency induction heating apparatus
DE1134967B (de) * 1954-03-02 1962-08-23 Siemens Ag Verfahren zum Ziehen eines stabfoermigen kristallinen Halbleiterkoerpers
US3017485A (en) * 1957-11-19 1962-01-16 Asea Ab Means for electric vacuum furnaces
DE1205167C2 (de) * 1964-06-15 1973-05-03 Halbleiterwerk Frankfurt Oder Spulenkoerper zum induktiven Erhitzen eines elektrisch leitenden Koerpers im magnetischen Hochfrequenzfeld beim Zonenschmelzen
DE1615429C3 (de) * 1967-12-23 1974-08-22 Siemens Ag, 1000 Berlin Und 8000 Muenchen Induktionsheizspule zum tiegelfreien Zonenschmelzen von Stäben aus Halbleitermaterial
DE1802524B1 (de) * 1968-10-11 1970-06-04 Siemens Ag Vorrichtung zum tiegelfreien Zonenschmelzen eines kristallinen Stabes,insbesondere Halbleiterstabes
US3697716A (en) * 1971-11-19 1972-10-10 Gen Electric Induction cooking power converter with improved coil position
DE2158274A1 (de) * 1971-11-24 1973-05-30 Siemens Ag Induktionsheizspule zum tiegelfreien zonenschmelzen von staeben aus halbleitermaterial
DE2217407A1 (de) * 1972-04-11 1973-11-29 Siemens Ag Induktionsheizspule zum tiegelfreien zonenschmelzen

Also Published As

Publication number Publication date
JPS5755339Y2 (ja) 1982-11-30
JPS5037346A (ja) 1975-04-08
DE2331004C3 (de) 1982-02-04
US3898413A (en) 1975-08-05
JPS5571170U (ja) 1980-05-16
DE2331004A1 (de) 1975-01-09
DE2331004B2 (de) 1981-05-21
IT1014933B (it) 1977-04-30

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