IT1014933B - Bobina di riscaldamento a induzio ne per la fusione a zone senza cro giuolo di bacchette semiconduttrici - Google Patents
Bobina di riscaldamento a induzio ne per la fusione a zone senza cro giuolo di bacchette semiconduttriciInfo
- Publication number
- IT1014933B IT1014933B IT23824/74A IT2382474A IT1014933B IT 1014933 B IT1014933 B IT 1014933B IT 23824/74 A IT23824/74 A IT 23824/74A IT 2382474 A IT2382474 A IT 2382474A IT 1014933 B IT1014933 B IT 1014933B
- Authority
- IT
- Italy
- Prior art keywords
- crojuno
- semiconductive
- zones
- melting
- rods
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B6/00—Heating by electric, magnetic or electromagnetic fields
- H05B6/02—Induction heating
- H05B6/36—Coil arrangements
- H05B6/362—Coil arrangements with flat coil conductors
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
- C30B13/16—Heating of the molten zone
- C30B13/20—Heating of the molten zone by induction, e.g. hot wire technique
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- General Induction Heating (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Crucibles And Fluidized-Bed Furnaces (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE2331004A DE2331004C3 (de) | 1973-06-18 | 1973-06-18 | Induktionsheizspule zum tiegelfreien Zonenschmelzen |
Publications (1)
Publication Number | Publication Date |
---|---|
IT1014933B true IT1014933B (it) | 1977-04-30 |
Family
ID=5884356
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IT23824/74A IT1014933B (it) | 1973-06-18 | 1974-06-11 | Bobina di riscaldamento a induzio ne per la fusione a zone senza cro giuolo di bacchette semiconduttrici |
Country Status (5)
Country | Link |
---|---|
US (1) | US3898413A (ja) |
JP (2) | JPS5037346A (ja) |
BE (1) | BE816495A (ja) |
DE (1) | DE2331004C3 (ja) |
IT (1) | IT1014933B (ja) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2357688C2 (de) * | 1973-11-19 | 1982-11-18 | Siemens AG, 1000 Berlin und 8000 München | Induktionsheizspule zum tiegelfreien Zonenschmelzen |
US4184135A (en) * | 1978-04-10 | 1980-01-15 | Monsanto Company | Breakapart single turn RF induction apparatus |
DE3229461A1 (de) * | 1982-08-06 | 1984-02-09 | Siemens AG, 1000 Berlin und 8000 München | Vorrichtung zum tiegelfreien zonenschmelzen eines, insbesondere aus silicium bestehenden halbleiterstabes |
DE4142245A1 (de) * | 1991-12-17 | 1993-06-24 | Tro Transformatoren Und Schalt | Isolierung fuer induktoren von induktiven erhitzungsanlagen und verfahren zu ihrer herstellung |
JP3127981B2 (ja) * | 1995-01-31 | 2001-01-29 | 信越半導体株式会社 | 高周波誘導加熱装置 |
US5778681A (en) * | 1997-04-15 | 1998-07-14 | Varian Associates, Inc. | Cooling device for cooling heatable gas chromatography analyte sample injector |
JP4581977B2 (ja) * | 2005-11-24 | 2010-11-17 | 信越半導体株式会社 | シリコン単結晶の製造方法 |
EP1968355B1 (de) | 2007-03-08 | 2013-02-27 | HÜTTINGER Elektronik GmbH + Co. KG | Induktionsspule und Vorrichtung zum induktiven Erwärmen von Werkstücken |
JP2009158598A (ja) * | 2007-12-25 | 2009-07-16 | Panasonic Electric Works Co Ltd | 平面コイル及びこれを用いた非接触電力伝送機器 |
DE112008003888B4 (de) * | 2008-07-17 | 2014-11-20 | Denki Kogyo Co. Ltd. | Anordnung von Führungselementen für eine Hochfrequenzinduktionsspule |
JP5505362B2 (ja) * | 2011-04-21 | 2014-05-28 | 信越半導体株式会社 | 複巻誘導加熱コイル及びこれを有する単結晶製造装置並びにこれを用いた単結晶製造方法 |
JP5505365B2 (ja) * | 2011-04-28 | 2014-05-28 | 信越半導体株式会社 | 誘導加熱コイルにおける放電防止用絶縁部材及びこれを用いた単結晶製造装置並びに単結晶製造方法 |
JP7120464B2 (ja) | 2019-07-05 | 2022-08-17 | 株式会社Sumco | 誘導加熱コイル及びこれを用いた単結晶製造装置 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2459971A (en) * | 1945-08-30 | 1949-01-25 | Induction Heating Corp | Inductor for high-frequency induction heating apparatus |
DE1044768B (de) * | 1954-03-02 | 1958-11-27 | Siemens Ag | Verfahren und Vorrichtung zum Ziehen eines stabfoermigen kristallinen Koerpers, vorzugsweise Halbleiterkoerpers |
US3017485A (en) * | 1957-11-19 | 1962-01-16 | Asea Ab | Means for electric vacuum furnaces |
DE1205167C2 (de) * | 1964-06-15 | 1973-05-03 | Halbleiterwerk Frankfurt Oder | Spulenkoerper zum induktiven Erhitzen eines elektrisch leitenden Koerpers im magnetischen Hochfrequenzfeld beim Zonenschmelzen |
DE1615429C3 (de) * | 1967-12-23 | 1974-08-22 | Siemens Ag, 1000 Berlin Und 8000 Muenchen | Induktionsheizspule zum tiegelfreien Zonenschmelzen von Stäben aus Halbleitermaterial |
DE1802524B1 (de) * | 1968-10-11 | 1970-06-04 | Siemens Ag | Vorrichtung zum tiegelfreien Zonenschmelzen eines kristallinen Stabes,insbesondere Halbleiterstabes |
US3697716A (en) * | 1971-11-19 | 1972-10-10 | Gen Electric | Induction cooking power converter with improved coil position |
DE2158274A1 (de) * | 1971-11-24 | 1973-05-30 | Siemens Ag | Induktionsheizspule zum tiegelfreien zonenschmelzen von staeben aus halbleitermaterial |
DE2217407A1 (de) * | 1972-04-11 | 1973-11-29 | Siemens Ag | Induktionsheizspule zum tiegelfreien zonenschmelzen |
-
1973
- 1973-06-18 DE DE2331004A patent/DE2331004C3/de not_active Expired
-
1974
- 1974-04-12 US US460538A patent/US3898413A/en not_active Expired - Lifetime
- 1974-06-11 IT IT23824/74A patent/IT1014933B/it active
- 1974-06-13 JP JP49067624A patent/JPS5037346A/ja active Pending
- 1974-06-18 BE BE145560A patent/BE816495A/xx unknown
-
1979
- 1979-11-20 JP JP1979161054U patent/JPS5755339Y2/ja not_active Expired
Also Published As
Publication number | Publication date |
---|---|
DE2331004A1 (de) | 1975-01-09 |
DE2331004C3 (de) | 1982-02-04 |
US3898413A (en) | 1975-08-05 |
JPS5571170U (ja) | 1980-05-16 |
JPS5755339Y2 (ja) | 1982-11-30 |
BE816495A (fr) | 1974-10-16 |
DE2331004B2 (de) | 1981-05-21 |
JPS5037346A (ja) | 1975-04-08 |
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